JPS632766U - - Google Patents

Info

Publication number
JPS632766U
JPS632766U JP9259386U JP9259386U JPS632766U JP S632766 U JPS632766 U JP S632766U JP 9259386 U JP9259386 U JP 9259386U JP 9259386 U JP9259386 U JP 9259386U JP S632766 U JPS632766 U JP S632766U
Authority
JP
Japan
Prior art keywords
cassette
mechanism section
display mechanism
substrate processing
autoloader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9259386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9259386U priority Critical patent/JPS632766U/ja
Publication of JPS632766U publication Critical patent/JPS632766U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9259386U 1986-06-18 1986-06-18 Pending JPS632766U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9259386U JPS632766U (enExample) 1986-06-18 1986-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9259386U JPS632766U (enExample) 1986-06-18 1986-06-18

Publications (1)

Publication Number Publication Date
JPS632766U true JPS632766U (enExample) 1988-01-09

Family

ID=30954430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9259386U Pending JPS632766U (enExample) 1986-06-18 1986-06-18

Country Status (1)

Country Link
JP (1) JPS632766U (enExample)

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