JPS63275134A - Basket for wafer - Google Patents

Abstract

PURPOSE:To make it possible to change the gap of wafers to be ratained, by providing regulation members arranged on the respective neighboring retainers in the manner in which the gap of the respective retainers is charged by transferring a relative moving type retainer, and the retainers abut with each other. CONSTITUTION:When the gap between wafers 90 to be ratained is made small, each operating plate 30 is moved downward with respect to a frame member 10, to separate each operating rod 40 from a retaining rod 20. Then regulation members 62, 63 of each retaining plate 61 in an axial direction moving type retainer 60 are respectively inserted into a long hole 71a and a round hole 71d of each retaining plate 71 in a neighboring relative moving type retainer 70, and in the inside, each of the vertical planes 62a and each of the vertical planes 63a of the neighboring regulation members 62 and 63 abut. On the other hand, as to each of the regulation members 72 and 73 of each retaining plate 71 in the relative moving type retainer 70, each of the vertical planes 72a and each of the vertical planes 73a of regulation members 72 and 73 abut in the inside. Therefor, each of the opposing surfaces of the neighboring retaining plates 61 and 71 are in a state of close contact.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a wafer basket that holds a large number of silicon wafers or the like used in the manufacture of semiconductors at predetermined intervals.

(Prior Art) Wafers of silicon or the like used in semiconductor manufacturing are subjected to acid treatment, cleaning treatment, etc. during the semiconductor manufacturing process. In processes such as acid treatment and cleaning treatment, a large number of wafers must be processed at the same time.

A wafer basket is used that holds a large number of wafers at predetermined intervals.

Conventionally, wafer baskets have been used in which grooves for holding wafers are arranged at predetermined intervals, and the wafers are fitted into each groove.

In such a wafer slotting machine, the gap between adjacent grooves is fixed, so the gap between the wafers cannot be changed, and the gap is always constant. In each processing step, the gap between each wafer must be set to the most suitable state for that processing step, but in conventional wafer baskets, each wafer is held with a constant gap of one. At each processing step, each wafer must be transferred to a holder capable of holding the wafer in optimal conditions for that processing step.

(Problems to be Solved by the Invention) The present invention solves the above-mentioned conventional problems, and its purpose is to provide a wafer basket that can change the gap between the wafers held therein.

(Means for Solving the Problems) The present invention is a wafer basket that holds a large number of wafers used in semiconductor manufacturing with a predetermined gap between them. The wafer basket is held with a predetermined gap, and includes a support rod fixed to a frame member, an operation rod disposed so as to be able to approach and separate from the support rod, and as the operation rod moves, the A plurality of axially movable holders arranged to move only in the axial direction of the support rod and each holding a wafer also move together with the operating rod as the operating rod moves; a plurality of relatively movable holders each holding a wafer, each of which is disposed between adjacent axially movable holders to move in the axial direction of the operating rod; By moving the relative movement type holders, adjacent holders can come into contact with each other to change the gap between them.

The above-mentioned object is achieved by having a regulating member disposed on each adjacent holder, respectively.

(Example) The present invention will be described below with reference to Examples.

As shown in FIGS. 1 to 3, the wafer basket of the present invention includes a frame member 10 whose upper and lower surfaces are open.
has. A pair of support rods 20 and 20 are installed between the upper parts of the side plates 11 and 11 located at each longitudinal end of the frame member 10 with a predetermined gap in one width direction. An end of each support rod 20 is fixed to each side plate 11, respectively.

A handle 12 and 12 are provided on the outer surface of each side plate 11, respectively.
is installed.

Inside the frame member 10, a pair of operation plates 30 and 30 are arranged along each side plate 11. As shown in FIG. 4, each operation plate 30 has a pair of long holes 31 and 31 through which each support loft 20 is inserted so that it can move vertically relative to each support lot 20. Also, a pair of left and right push springs 80, 80, which will be described later. . . passes through the elongated hole 32.32. ... is also formed.

A pair of operation rods 40 and 40 are installed between the lower portions of each operation plate 30. Each operating rod 40.

Each end portion is fixedly provided below each elongated hole 31 formed in the operation plate 30, and is therefore parallel to each support rod 20 at its lower position.

Each operation plate 30 is movable in the vertical direction with respect to the frame member 10 because its respective elongated holes 31 are respectively engaged with support rods 20 fixedly installed within the frame member 10. . Then, each operation plate 30 is moved upward relative to the frame member 10, so that each operation plate 30 is moved upward relative to the frame member 10.
Each operating rod 40 installed between 0 and 0 moves in parallel to approach the upper support rod 20, and conversely, the operating plate 30 is moved downward relative to the frame member 10, so that each operating rod 40 The support rod 20 is translated away from the support rod 20 .

A plurality of axially movable holders 60 for holding one disk of wafers 90 are located on each side of the frame member 10 in the width direction, and are arranged in pairs on the upper and lower sides of the support rods 20 and the operation rods 40, respectively. 60. ...and a relative displacement type holder? 0.70. ... are engaged with each other alternately. Each axially movable retainer 60 has one, for example, a pair of retainer plates 61 and 61. Each holding plate 61L.

The upper and lower parts are respectively engaged with the supporting rod 20 and the operating rod 40, which form an upper and lower pair, so as to be slidable in the axial direction. As shown in FIGS. 3 and 5, each holding plate 61 in each axially movable holder 60 has a through hole 61a in the upper part, through which the support rod 20 is slidably inserted only in the axial direction. and a long hole 6 at the bottom through which the operating rod 40 is inserted.
1b. The long hole 61b extends in the vertical direction,
The operating rod 40 can move in the vertical direction within the elongated hole 61'b. Therefore, even if the operating rod 40 is moved closer to the support rod 20, the operating rod 40 is
1b, and there is no fear that the holding plate 61 will move in the vertical direction.

Below the through hole 61a in the upper part of each holding plate 61.

The round holes 61C and 6 are connected so that they are in communication with each other.
1d are arranged in parallel in the vertical direction. In addition, each holding plate 61
A round hole 61e communicating with the elongated hole 61b is opened above the elongated hole 61b in the lower part of the hole.

A regulating member 62 is fitted into the upper round hole 61C of the vertically paired round holes 61c and 61d.
Further, a regulating member 63 having a similar shape is fitted into a round hole 61e provided at the lower part of the holding plate 61. Each regulating member 62 is, for example, a cylindrical member fixed by protruding from each side of the holding plate 61 by an equal length. The upper part of each end face of the regulating member 62 is a substantially vertical vertical surface 62a, and the lower part is a tapered surface 62b that slopes downward toward the holding plate 61. The other regulating member 63 also
The upper part of each end face is a vertical face 63a, and the lower part is a similar tapered face 63.
b.

Engagement grooves 61f are formed on opposing side surfaces of each of the pair of holding plates 61 from the upper surface to a mid-lower position, and one disc-shaped wafer is formed in the opposing engagements a61f and 61f. Each side of 90 is retained.

Each relative movement type holder 70 similarly has a pair of holding plates 71 and 71, and each holding plate 71 has its upper and lower portions engaged with the upper and lower pairs of support rods 20 and operating rods 40, respectively. ing. And each holding plate 71 has a third
As shown in FIG. 7 and FIG.
It has a long hole 71a through which the operating rod 40 is inserted, and a through hole 71b through which the operating rod 40 is inserted slidably only in the axial direction. The long hole 71a extends in the vertical direction, and the support rod 2
0 can move in the vertical direction within the elongated hole 71a. Therefore, the operating rod 40.

When operated to approach the support rod 20, the support rod 20 moves within each elongated hole 71a, so each holding plate 71
is moved in the vertical direction together with the operating rod 40.

Below the elongated hole 71a in the upper part of each holding plate 71 of the relative movement type holder 70, there is a round hole 71 communicating with the elongated hole 71a.
c has been established. Further, above the through hole 71b in the lower part of the holding plate 7e, round holes 71d and 71e are provided vertically in parallel so as to communicate with each other.

A regulating member 72 is fitted into a round hole 71c that communicates with the elongated hole 71a. The regulating member 72 has a shape that is vertically reversed from that of the regulating member 62 disposed on the retaining plate 61 of the axially movable holder 60,
Each end face has a vertical surface 72a at the bottom and a tapered surface 72b at the top. Also, a pair of round holes 71 at the bottom of each holding plate 70
A regulating member 73 having a similar shape is also fitted into the round hole 71e below 'd and 71e.

Each end face has a vertical surface 73a at the bottom and a tapered surface 73b at the top.

Engagement grooves 61f of the retaining plates 61 in the axially movable retainer 60 are provided on opposing sides of each of the pair of retaining plates 71.
Engagement grooves 71f similar to the above are formed, and each side of the disc-shaped wafer 90 is held in the opposing engagement grooves 71f and 71f.

In this way, each of the holding plates 61 in the axially moving type holder 60 and each of the holding plates 71 in the relatively moving type holder 70 is alternately engaged with one of the support rods 20 and the operating rod 40 below it. are combined.

Then, when the operating rod 40 is separated from the support rod 20, the regulating member 62 above each retaining plate 61 in the axially movable holder 60 is moved away from the adjacent relative movable holder 70.
The relatively movable holders 7 are opposed to each other so as to be able to engage with the lower part of the elongated hole 71a formed in the upper part of each holding plate 71.
The regulating member 72 above the holding plate 71 at 0 is opposed so as to be able to engage with the round hole 61d below the regulating member 62 of the holding plate 61 in the axially movable holder 60.

Similarly, the lower regulating member 63 in the axially movable holder 60 is opposed to the upper round hole 71e of the lower regulating member 73 in the adjacent relatively movable holder 70, and The regulating member 73 below the holding plate 71 in the movable holder 70 is connected to the adjacent axially movable holder 70.
They face each other so as to be able to engage with the upper part of the elongated hole 61b of the holding plate 6I at 0.

In this way, the axially movable holders 60 and the relatively movable holders 70 are arranged in parallel in a predetermined quantity alternately, and each side plate 11 in the longitudinal direction of the frame member 10 is
The axially movable holders 60 are arranged to face each other. And one side plate 11.

Between the side plate 11 and each retaining plate 61 of the axially movable retainer 60 facing the side plate 11, each retainer 61 is connected to the other side plate 1.
A pair of upper and lower pressing springs 80 and 80 that presses toward 1
are installed on each side of the left and right sides. Each push spring 80
are each elongated hole 32 formed in the operation plate 30 (see FIG. 4).
They are fixed to the inner surface of the side plate 11 by penetrating through them respectively.

In the wafer basket of the present invention having such a configuration, in order to reduce the gap between the wafers 90 to be held, each operation plate 30 is moved downward relative to the frame member IO, and each operation rod 40 is connected to the support rod. Separate from 20.

As a result, together with the biasing force of the push spring 80, the regulating members 62 and 63 of each locking plate 6I in the axially movable holder 60, as shown in FIG. Each holding plate 71 in the holding fixture 70 is fitted into the long hole 71a and round hole 71d, and inside the holding plate 71, the vertical surfaces 62a of the adjacent regulating members 62 and 63 and 63
A is brought into contact with each other. On the other hand, each regulating member 72 and 73 of each holding plate 71 in the relative movement type holder 70
are fitted into the round holes 61d and elongated holes 61b of each holding plate 61 in each adjacent axially movable holder 60, and inside the vertical surfaces 72a of the adjacent regulating members 72 and 73 and 73a come into contact with each other. As a result, the opposing surfaces of the adjacent holding plates 61 and 710 are in close contact with each other. In this state, the disc-shaped wafer 90 is inserted into the engagement groove 61f of each pair of holding plates 61 and the engagement groove 7I of each pair of holding plate 71 and held.

On the other hand, if it is necessary to increase the gap between adjacent wafers 90, each operation plate 30 is

It is moved upward relative to the frame member 10. As a result, each operating rod 40 moves in parallel to approach the support member 20. At this time, each locking plate 61 of the axially movable holder 60 does not move upward because each operating rod 40 only moves upward within the elongated hole 61b, and the relative movable holder 70 does not move upward. Only each locking plate 71 is.

It moves upward together with the operating rod 40. Then, by moving each locking plate 71 of the relative displacement mold 70 upward,
The tapered surfaces 72b and 73b of the regulating members 72 and 73 correspond to the tapered surfaces 62b and 73b of the regulating members 62 and 63 on each locking plate 61 of the adjacent axially movable holder 60.
b and 63b, each adjacent holding plate 71
and 61 move in the axial direction against the biasing force of each push spring 80 to separate from each other. and.

Regulation member 62 on the upper part of each adjacent holding plate 61 and 71
and 72 have their respective vertical surfaces 62a and 72a in close contact with each other, and the lower regulating members 63 and 73 have their respective vertical surfaces 62a and 72a in close contact with each other. the result,
Vertical surfaces 62a and 72a of regulating members 62 and 72 protruding from opposing surfaces of holding plates 61 and 71, respectively
and the vertical surfaces 63a and 7 of the regulating members 63 and 73.
3a are in contact with each other, and each holding plate 61 and 7
1 are separated by a predetermined length. Therefore.

The wafers 90 held by the holders 60 and 70 have a predetermined gap between adjacent wafers 90 .

This kind of wafer basket is made by molding all the parts with fluororesin or by lining it with fluororesin.

It has significantly improved chemical resistance and is suitable for use in various processing steps for semiconductor manufacturing wafers.

In addition, in the above embodiment, each of the regulating members 62, 63 and 7
2. Form one vertical surface on one end face of 73.

A state in which adjacent regulating members do not come into contact with the vertical surface, and a state in which the vertical surfaces of the regulating members come into contact with each other.

Although the gap between adjacent holding plates is switched in two stages, the present invention is not limited to such an embodiment, and the present invention is not limited to this embodiment, and the present invention is not limited to this embodiment. For example, if the regulating member to be attached to the plate has a shape with two vertical surfaces as shown in FIG.
on each vertical plane.

The gap between adjacent retaining plates can be adjusted in three stages: a state in which the vertical surfaces of regulating members disposed on adjacent retaining plates are in contact with each other, and a state in which the vertical surfaces of each regulating member are not in contact with each other. .

(Effects of the Invention) The wafer basket of the present invention allows the gap between the plurality of wafers held in this manner to be easily changed.

4. Figure 1 is a vertical cross-sectional view of the wafer basket of the present invention, Figure 2 is a plan view thereof, Figure 3 is a cross-sectional view thereof, and Figure 4 is the If of Figure 1. - A cross-sectional view along the IV line.

FIG. 5 is a perspective view for explaining the holding plate, and FIG. 6 is a longitudinal cross-sectional view of the wafer basket with the holding plate tightly attached.
FIG. 7 is an explanatory diagram of another example of the regulating member.

10... Frame member, 20... Support rod, 30
... Operation plate, 40 ... Operation rod, 60 ... Axial direction movable holder.

61... Holding plate, 62.63... Regulating member, 70
...relative movement type holder, 71...retention plate, 72.
73...Regulation member.

that's all

Claims (1)

[Claims] 1. A wafer basket that holds a large number of wafers used in the manufacture of semiconductors at a predetermined interval, and includes a support rod fixed to a frame member, and a support rod connected to the support rod. an operating rod that is arranged to be removable; and a plurality of axially movable holders that are arranged to move only in the axial direction of the support rod as the operating rod moves, each holding a wafer. and each is disposed between adjacent axially movable holders to move together with the operating rod as the operating rod moves, and also to move in the axial direction of the operating rod. , a plurality of relatively movable holders each holding a wafer; and a plurality of relatively movable holders each holding a wafer; A wafer basket comprising: a regulating member disposed on each holder;