JPS6327480U - - Google Patents
Info
- Publication number
- JPS6327480U JPS6327480U JP11846886U JP11846886U JPS6327480U JP S6327480 U JPS6327480 U JP S6327480U JP 11846886 U JP11846886 U JP 11846886U JP 11846886 U JP11846886 U JP 11846886U JP S6327480 U JPS6327480 U JP S6327480U
- Authority
- JP
- Japan
- Prior art keywords
- dopant
- room
- main chamber
- dopant addition
- crystal pulling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002019 doping agent Substances 0.000 claims description 17
- 230000008018 melting Effects 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 238000005303 weighing Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 6
- 230000037431 insertion Effects 0.000 claims 2
- 238000003780 insertion Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 230000035699 permeability Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11846886U JPH0332530Y2 (OSRAM) | 1986-08-01 | 1986-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11846886U JPH0332530Y2 (OSRAM) | 1986-08-01 | 1986-08-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6327480U true JPS6327480U (OSRAM) | 1988-02-23 |
| JPH0332530Y2 JPH0332530Y2 (OSRAM) | 1991-07-10 |
Family
ID=31004948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11846886U Expired JPH0332530Y2 (OSRAM) | 1986-08-01 | 1986-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0332530Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022147089A1 (en) * | 2020-12-30 | 2022-07-07 | Globalwafers Co., Ltd. | Additive feed systems, ingot puller apparatus and methods for forming a single crystal silicon ingot with use of such additive feed systems |
-
1986
- 1986-08-01 JP JP11846886U patent/JPH0332530Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022147089A1 (en) * | 2020-12-30 | 2022-07-07 | Globalwafers Co., Ltd. | Additive feed systems, ingot puller apparatus and methods for forming a single crystal silicon ingot with use of such additive feed systems |
| US11499245B2 (en) | 2020-12-30 | 2022-11-15 | Globalwafers Co., Ltd. | Additive feed systems, ingot puller apparatus and methods for forming a single crystal silicon ingot with use of such additive feed systems |
| JP2024501859A (ja) * | 2020-12-30 | 2024-01-16 | グローバルウェーハズ カンパニー リミテッド | 添加剤供給システム、インゴット引上げ装置、及び添加剤供給システムを使用して単結晶シリコンインゴットを形成する方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0332530Y2 (OSRAM) | 1991-07-10 |
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