JPS6327470U - - Google Patents

Info

Publication number
JPS6327470U
JPS6327470U JP12057986U JP12057986U JPS6327470U JP S6327470 U JPS6327470 U JP S6327470U JP 12057986 U JP12057986 U JP 12057986U JP 12057986 U JP12057986 U JP 12057986U JP S6327470 U JPS6327470 U JP S6327470U
Authority
JP
Japan
Prior art keywords
cvd apparatus
plasma cvd
diameter
plasma
reaction gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12057986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441178Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12057986U priority Critical patent/JPH0441178Y2/ja
Publication of JPS6327470U publication Critical patent/JPS6327470U/ja
Application granted granted Critical
Publication of JPH0441178Y2 publication Critical patent/JPH0441178Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP12057986U 1986-08-06 1986-08-06 Expired JPH0441178Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12057986U JPH0441178Y2 (enrdf_load_stackoverflow) 1986-08-06 1986-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12057986U JPH0441178Y2 (enrdf_load_stackoverflow) 1986-08-06 1986-08-06

Publications (2)

Publication Number Publication Date
JPS6327470U true JPS6327470U (enrdf_load_stackoverflow) 1988-02-23
JPH0441178Y2 JPH0441178Y2 (enrdf_load_stackoverflow) 1992-09-28

Family

ID=31009024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12057986U Expired JPH0441178Y2 (enrdf_load_stackoverflow) 1986-08-06 1986-08-06

Country Status (1)

Country Link
JP (1) JPH0441178Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04129314A (ja) * 1990-09-20 1992-04-30 Murata Mfg Co Ltd ディスクリミネータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04129314A (ja) * 1990-09-20 1992-04-30 Murata Mfg Co Ltd ディスクリミネータ

Also Published As

Publication number Publication date
JPH0441178Y2 (enrdf_load_stackoverflow) 1992-09-28

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