JPS6327469U - - Google Patents

Info

Publication number

JPS6327469U

JPS6327469U JP11881486U JP11881486U JPS6327469U JP S6327469 U JPS6327469 U JP S6327469U JP 11881486 U JP11881486 U JP 11881486U JP 11881486 U JP11881486 U JP 11881486U JP S6327469 U JPS6327469 U JP S6327469U

Authority

JP

Japan

Prior art keywords

sintered body

silicon wafer

integrated circuit

utility

aluminum oxide

Prior art date

1986-08-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
• 229910052710 silicon Inorganic materials 0.000 claims description 2
• 239000010703 silicon Substances 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 1
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
• 239000002994 raw material Substances 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 description 2
• 239000010453 quartz Substances 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 229910002804 graphite Inorganic materials 0.000 description 1
• 239000010439 graphite Substances 0.000 description 1
• 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 238000005268 plasma chemical vapour deposition Methods 0.000 description 1