JPS6327246U - - Google Patents

Info

Publication number
JPS6327246U
JPS6327246U JP11843086U JP11843086U JPS6327246U JP S6327246 U JPS6327246 U JP S6327246U JP 11843086 U JP11843086 U JP 11843086U JP 11843086 U JP11843086 U JP 11843086U JP S6327246 U JPS6327246 U JP S6327246U
Authority
JP
Japan
Prior art keywords
workpiece
conduit hole
chuck
main shaft
compressed air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11843086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11843086U priority Critical patent/JPS6327246U/ja
Publication of JPS6327246U publication Critical patent/JPS6327246U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Sensing Apparatuses (AREA)
JP11843086U 1986-07-31 1986-07-31 Pending JPS6327246U (US06633600-20031014-M00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11843086U JPS6327246U (US06633600-20031014-M00021.png) 1986-07-31 1986-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11843086U JPS6327246U (US06633600-20031014-M00021.png) 1986-07-31 1986-07-31

Publications (1)

Publication Number Publication Date
JPS6327246U true JPS6327246U (US06633600-20031014-M00021.png) 1988-02-23

Family

ID=31004873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11843086U Pending JPS6327246U (US06633600-20031014-M00021.png) 1986-07-31 1986-07-31

Country Status (1)

Country Link
JP (1) JPS6327246U (US06633600-20031014-M00021.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037239U (ja) * 1983-08-19 1985-03-14 ロ−ム株式会社 半導体ウエハ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037239U (ja) * 1983-08-19 1985-03-14 ロ−ム株式会社 半導体ウエハ

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