JPS6327106Y2 - - Google Patents
Info
- Publication number
- JPS6327106Y2 JPS6327106Y2 JP1983197258U JP19725883U JPS6327106Y2 JP S6327106 Y2 JPS6327106 Y2 JP S6327106Y2 JP 1983197258 U JP1983197258 U JP 1983197258U JP 19725883 U JP19725883 U JP 19725883U JP S6327106 Y2 JPS6327106 Y2 JP S6327106Y2
- Authority
- JP
- Japan
- Prior art keywords
- oil
- gas
- case
- pump
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005461 lubrication Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 20
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Description
【考案の詳細な説明】
本考案は半導体製造装置等に使用するに適した
油回転ポンプに関する。[Detailed Description of the Invention] The present invention relates to an oil rotary pump suitable for use in semiconductor manufacturing equipment and the like.
近時半導体の成膜プロセスに於ては腐蝕性に富
むガスが多く使用されるので該プロセスの真空排
気を行なう油回転ポンプの構成部材が腐蝕して寿
命が短くなる欠点がある。一般に油回転ポンプは
その本体をケース内の油中に浸漬けし、その油を
該本体内に少しずつ導入して該本体内の回転子の
潤滑と気密を保ち乍ら排気するが、腐蝕性ガスの
排気の際に該ガスが凝縮して油中に混入し、ポン
プの構成部品を腐蝕させてしまう。従来、こうし
た欠点の防止のためにポンプにガスバラスト弁を
設けることが提案されたが、腐蝕性ガスの油中へ
の溶解は充分に防止出来ずポンプの腐蝕は解決出
来ない。 In recent years, highly corrosive gases have been used in large quantities in semiconductor film forming processes, which has the disadvantage of corroding the components of oil rotary pumps that perform vacuum evacuation in the process, resulting in shortened service life. Generally speaking, the main body of an oil rotary pump is immersed in oil inside a case, and the oil is introduced little by little into the main body to keep the rotor inside the main body lubricated and airtight while exhausting the pump, but corrosive gas During pumping, the gas condenses and mixes into the oil, corroding the pump components. Conventionally, it has been proposed to provide the pump with a gas ballast valve to prevent these drawbacks, but the dissolution of the corrosive gas into the oil cannot be sufficiently prevented, and the corrosion of the pump cannot be solved.
本考案は主として腐蝕性ガスを含む気体の排気
に適した油回転ポンプを提供することを目的とし
たもので、油回転ポンプ本体１をケース２内の油
中に浸漬けし、その油３を該本体１に少しずつ導
入して該本体１内の回転子４の潤滑と気密を保ち
乍ら排気する式のものに於て、該ケース２にN2
ガスの導入ポート５を設け、該ポート５に油３内
に設けたバブル発生ノズル６を接続して成る。 The purpose of the present invention is to provide an oil rotary pump suitable for exhausting gases containing corrosive gases. In the case 2, N2 is introduced little by little into the main body 1 and exhausted while maintaining the lubrication and airtightness of the rotor 4 in the main body 1.
A gas introduction port 5 is provided, and a bubble generating nozzle 6 provided in the oil 3 is connected to the port 5.
該回転子４は該本体１内に偏心して設けられ、
電動機７により回転されると羽根８で仕切られた
室９の容積が変化し、真空室１９内のガスを吸気
口１０から排気弁１１を介してケース２内へと排
気して該真空室１９を真空化する。該ケース２の
油３の上方の空間１２には排気ミストストツパ１
３を取付けた排気管１４が設けられ、ケース２内
の油中へと排気されたガスを排出する。１５はポ
ートプレート１６に設けたストツプ弁でその開弁
中は例えば1.2〜1.5Kgｆ／cm2に制御されたN2ガス
をバブル発生ノズル６へと通路１７及び導入ポー
ト５を介して供給し、該ノズル６から気泡状に油
３内へ噴出する。１８は上方の空間１２にN2ガ
スを吹き込むように通路１７から分岐して形成し
た噴気口である。 The rotor 4 is eccentrically provided within the main body 1,
When rotated by the electric motor 7, the volume of the chamber 9 partitioned by the blades 8 changes, and the gas in the vacuum chamber 19 is exhausted from the intake port 10 through the exhaust valve 11 into the case 2. evacuate. An exhaust mist stopper 1 is provided in the space 12 above the oil 3 of the case 2.
An exhaust pipe 14 is provided with a pipe 3 attached thereto to discharge the gas exhausted into the oil inside the case 2. 15 is a stop valve provided on the port plate 16, and when the stop valve is open, N 2 gas controlled at, for example, 1.2 to 1.5 Kgf/cm 2 is supplied to the bubble generation nozzle 6 via the passage 17 and the introduction port 5; The oil is ejected from the nozzle 6 into the oil 3 in the form of bubbles. Reference numeral 18 denotes a fumarole branched from the passage 17 so as to blow N 2 gas into the upper space 12 .
その作動を説明するに、回転子４が回転される
と吸気口１０から排気弁１１へとガスが排出され
吸気口１０に接続された真空室１９内は真空化さ
れるが、該ガスが腐蝕性に富むガスである場合凝
縮して油３に溶解するとポンプの構成部品が腐蝕
する不都合を生じ易い。かかる場合N2ガスを導
入ポート５からバブル発生ノズル６を介して油３
内に気泡状に噴出させれば油３が撹拌されて油中
に吸蔵された腐蝕性の未反応ガスや反応生成物が
蒸発し、その際ポンプ自体の発生熱も作用してそ
の蒸発が促進され排気管１４から排出される。 To explain its operation, when the rotor 4 is rotated, gas is discharged from the intake port 10 to the exhaust valve 11, and the inside of the vacuum chamber 19 connected to the intake port 10 is evacuated. In the case of a gas with high properties, if it condenses and dissolves in the oil 3, it tends to corrode the components of the pump. In such a case, N2 gas is introduced from the oil 3 through the bubble generating nozzle 6 from the port 5.
If bubbles are ejected into the pump, the oil 3 will be stirred and corrosive unreacted gases and reaction products occluded in the oil will evaporate, and at this time, the heat generated by the pump itself will also act to accelerate the evaporation. and is discharged from the exhaust pipe 14.
さらにこの場合噴気口１８からもN2ガスを上
方の空間１２に吹き込めば蒸発したガスを再凝縮
することなく排気管１４から排出できる。 Furthermore, in this case, if N 2 gas is blown into the upper space 12 from the blowhole 18, the evaporated gas can be discharged from the exhaust pipe 14 without being recondensed.
このように本考案によるときは、ケース２の油
３内にN2ガスの導入ポート５と接続したバブル
発生ノズル６を設けたので油３を気泡により撹拌
して腐蝕性ガスを排除出来、ポンプ構成部品の腐
蝕を防止し得、油３は気泡で強制的に流動される
ので油温も低下し、高真空に到達した場合に発生
し勝ちなオイルパンチ音もノズルの微小な気泡に
より解消され静粛な運転を行なえる等の効果があ
る。 In this way, according to the present invention, the bubble generating nozzle 6 connected to the N 2 gas introduction port 5 is provided in the oil 3 of the case 2, so that the oil 3 can be agitated with bubbles to eliminate corrosive gas, and the pump Corrosion of the components can be prevented, and the oil temperature is lowered as the oil 3 is forced to flow with air bubbles, and the oil punching noise that tends to occur when a high vacuum is reached is also eliminated by the minute air bubbles in the nozzle. This has the effect of allowing quiet operation.
第１図は本考案の実施例の一部截断側面図、第
２図は第１図の−線截断面図である。
１……油回転ポンプ本体、２……ケース、３…
…油、４……回転子、５……導入ポート、６……
バブル発生ノズル。
FIG. 1 is a partially cutaway side view of an embodiment of the present invention, and FIG. 2 is a cutaway sectional view taken along the line -- in FIG. 1... Oil rotary pump body, 2... Case, 3...
...Oil, 4...Rotor, 5...Introduction port, 6...
Bubble generating nozzle.
Claims (1)
けし、その油３を該本体１に少しずつ導入して該
本体１内の回転子４の潤滑と気密を保ち乍ら排気
する式のものに於て、該ケース２にN2ガスの導
入ポート５を設け、該ポート５に油３内に設けた
バブル発生ノズル６を接続して成る油回転ポン
プ。 An oil rotary pump body 1 is immersed in oil in a case 2, and the oil 3 is introduced little by little into the body 1 to exhaust the rotor 4 inside the body 1 while maintaining lubrication and airtightness. In this oil rotary pump, an N 2 gas introduction port 5 is provided in the case 2, and a bubble generating nozzle 6 provided in the oil 3 is connected to the port 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19725883U JPS60105884U (en) | 1983-12-23 | 1983-12-23 | oil rotary pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19725883U JPS60105884U (en) | 1983-12-23 | 1983-12-23 | oil rotary pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60105884U JPS60105884U (en) | 1985-07-19 |
| JPS6327106Y2 true JPS6327106Y2 (en) | 1988-07-22 |
Family
ID=30755439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19725883U Granted JPS60105884U (en) | 1983-12-23 | 1983-12-23 | oil rotary pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60105884U (en) |
-
1983
- 1983-12-23 JP JP19725883U patent/JPS60105884U/en active Granted
Non-Patent Citations (1)
| Title |
|---|
| REMOVAL OF VOLATILE MATERIALS FROM FOREPUMP OIL=1980 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60105884U (en) | 1985-07-19 |
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