JPS6326762Y2 - - Google Patents
Info
- Publication number
- JPS6326762Y2 JPS6326762Y2 JP1981023407U JP2340781U JPS6326762Y2 JP S6326762 Y2 JPS6326762 Y2 JP S6326762Y2 JP 1981023407 U JP1981023407 U JP 1981023407U JP 2340781 U JP2340781 U JP 2340781U JP S6326762 Y2 JPS6326762 Y2 JP S6326762Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electrode
- receiving member
- heating
- sample receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 12
- 238000010292 electrical insulation Methods 0.000 claims description 4
- 239000003507 refrigerant Substances 0.000 claims description 4
- 238000005211 surface analysis Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Control Of Resistance Heating (AREA)
Description
【考案の詳細な説明】
この考案はオージエ、SIMS、ESCA等表面分
析装置に用いられる試料加熱冷却ホルダーに関す
るものである。[Detailed description of the invention] This invention relates to a sample heating and cooling holder used in surface analysis instruments such as Augier, SIMS, and ESCA.
従来、例えば銅等の熱伝導性のよい材料から成
る中空体の周囲に加熱用のコイルを巻き、また中
空体の先端に試料取付部材を設け、この試料取付
部材に押え部材を介してボルト等の緊締具で試料
を固定し、試料取付部材を低温伝達導体を介して
適当な冷媒源に連結した熱伝導方式による試料加
熱冷却ホルダーは公知である。 Conventionally, a heating coil was wound around a hollow body made of a material with good thermal conductivity such as copper, and a sample mounting member was provided at the tip of the hollow body, and bolts, etc. were attached to this sample mounting member via a holding member. A sample heating/cooling holder using a heat conduction method is known, in which the sample is fixed with a fastener, and the sample mounting member is connected to a suitable coolant source via a low-temperature transfer conductor.
しかしこの方式では試料の加熱および冷却が間
接的であるため熱伝導が悪く、また加熱、冷却時
に試料が膨張、収縮するため、冷却時に試料が試
料取付部材から脱落する恐れがある。 However, in this method, the heating and cooling of the sample is indirect, resulting in poor thermal conductivity, and the sample expands and contracts during heating and cooling, so there is a risk that the sample may fall off from the sample mounting member during cooling.
そこで、分析すべき試料をスポツト溶接により
試料取付部材に溶着し、この試料取付部材に電極
を設けて直接通電加熱でるようにしたものが従来
提案された。しかしながら、この方式は、試料の
セツト方法が非常に難しくなる欠点がある。 Therefore, it has been proposed in the past that the sample to be analyzed is welded to a sample mounting member by spot welding, and electrodes are provided on the sample mounting member so that it can be directly heated with electricity. However, this method has the disadvantage that the method of setting the sample is extremely difficult.
また、従来の方式ではビーム電流を一定にして
エツチング速度を一定するために必要な試料電流
の測定が不可能であつた。 Furthermore, with the conventional method, it has been impossible to measure the sample current necessary to keep the beam current constant and the etching rate constant.
この考案の目的は、上述のような従来方式のも
つ欠点および問題点を解消した改良型の試料加熱
冷却ホルダーを提供することにある。 The object of this invention is to provide an improved sample heating and cooling holder that eliminates the drawbacks and problems of the conventional method as described above.
この目的のためこの考案によれば、内部に冷媒
を供給できるようにした中空本体の一端に高電気
絶縁性でしかも熱伝導性のよい電極・試料受け部
材を設け、この電極・試料受け部材上に高弾性か
つ恒弾性で電極を形成する押圧部材を介して分析
すべき試料を押圧保持し、上記各押圧部材をリー
ド線を介して加熱用電源に接続して成る試料加熱
冷却ホルダーが提供される。 For this purpose, according to this invention, an electrode/sample receiving member having high electrical insulation and good thermal conductivity is provided at one end of the hollow body into which a refrigerant can be supplied, and the electrode/sample receiving member is A sample heating and cooling holder is provided, which presses and holds a sample to be analyzed through pressing members that form electrodes with high elasticity and constant elasticity, and connects each of the pressing members to a heating power source via lead wires. Ru.
この考案において電極・試料受け部材は好まし
くはAl2O3の高密度セラミツクやBN、TiNのセ
ラミツク等の高電気絶縁性でしかも熱伝導性のよ
い材料から成り、また押圧部材は好ましくは例え
ばC0基合金から成り、低温（−196℃程度）から
高温（1200℃程度）まで高弾性を保持することの
できる耐熱性材料から成る。 In this invention, the electrode/sample receiving member is preferably made of a material with high electrical insulation and good thermal conductivity, such as high-density ceramic of Al 2 O 3 , BN or TiN ceramic, and the pressing member is preferably made of, for example, C It is made of a zero- based alloy and is a heat-resistant material that can maintain high elasticity from low temperatures (about -196℃) to high temperatures (about 1200℃).
このように構成したこの考案の試料加熱冷却ホ
ルダーにおいては、試料は耐熱性の弾性押圧部材
で押圧保持しているので試料の加熱、冷却による
膨張、収縮が起つても試料受け部材との間に隙間
を生じることはなく、試料の脱落を防ぐことがで
き、また試料を引き出しまたは押し込み式にセツ
トすることができるので、試料を非常に容易に装
着することができる。 In the sample heating and cooling holder of this invention constructed in this way, the sample is held under pressure by the heat-resistant elastic pressing member, so even if the sample expands or contracts due to heating or cooling, there is no gap between the sample and the sample receiving member. Since no gaps are created, the sample can be prevented from falling out, and the sample can be set by pulling it out or pushing it in, making it very easy to mount the sample.
またこの考案においては試料を弾性押圧部材で
熱伝導性のよい電極・試料受け部材に押圧保持し
ているので、冷却時の熱伝導が良く、冷却効果の
増大を計ることができる。 In addition, in this invention, since the sample is pressed and held by an elastic pressing member against the electrode/sample receiving member having good thermal conductivity, heat conduction during cooling is good and the cooling effect can be increased.
以下、この考案を図示実施例について説明す
る。 This invention will be described below with reference to illustrated embodiments.
第１、２図にはこの考案による好ましい実施例
を概略的に示し、１は液体窒素のような冷媒タン
クを構成している中空本体で、冷媒の入口管１ａ
および出口管１ｂを備えている。この中空本体１
の一端には高電気絶縁性でしかも熱伝導性のよい
Al2O3の高密度セラミツク製の電極・試料受け部
材２が取付けられている。３は分析すべき試料
で、この試料３は、高弾性かつ恒弾性で電極を形
成する耐熱性の二つのC0基合金から成る押圧部
材４を電極・試料受け部材のフランジ５で電極・
試料受け部材２に対して保持することによつて二
つの押圧部材４と電極・試料受け部材２との間に
挿置される。従つて試料３は第２図に矢印Ｂで示
す方向にスライドさせて容易に着脱することがで
きる。またフランジ５には図示したように各押圧
部材４に電気的に接続された端子６が設けられ、
これらの端子６は被絶縁リード線７を介して図示
してない加熱用電源に接続される。図示実施例で
は電極・試料受け部材２は単一体に構成されてい
るが、必要ならば押圧部材４を装着したフランジ
５の部分を別個に構成し、部材２の本体部分にね
じ係止するようにすることもできる。また中空本
体１の形状は角柱状でも円筒状でも多角形筒状で
もよい。 1 and 2 schematically show a preferred embodiment of this invention, in which 1 is a hollow body constituting a refrigerant tank such as liquid nitrogen, and a refrigerant inlet pipe 1a.
and an outlet pipe 1b. This hollow body 1
One end has high electrical insulation and good thermal conductivity.
An electrode/sample receiving member 2 made of Al 2 O 3 high-density ceramic is attached. 3 is a sample to be analyzed, in which a pressing member 4 made of two heat-resistant C 0- based alloys forming an electrode with high elasticity and constant elasticity is pressed between the electrode and the flange 5 of the electrode/sample receiving member.
By holding it against the sample receiving member 2, it is inserted between the two pressing members 4 and the electrode/sample receiving member 2. Therefore, the sample 3 can be easily attached and detached by sliding it in the direction shown by arrow B in FIG. Further, the flange 5 is provided with a terminal 6 electrically connected to each pressing member 4 as shown in the figure.
These terminals 6 are connected to a heating power source (not shown) via insulated lead wires 7. In the illustrated embodiment, the electrode/sample receiving member 2 is constructed as a single unit, but if necessary, the flange 5 portion to which the pressing member 4 is attached may be constructed separately and screwed onto the main body portion of the member 2. It can also be done. Further, the shape of the hollow body 1 may be prismatic, cylindrical, or polygonal.
第３図にはこの考案のホルダーに使用される電
気制御回路を示し、８は交流電源、９は変圧器、
１０は変圧器９の二次側のタツプに接続された試
料電流測定用の電流計であり、図示の通り配線さ
れている。 Figure 3 shows the electrical control circuit used in the holder of this invention, where 8 is an AC power supply, 9 is a transformer,
Reference numeral 10 denotes an ammeter for measuring sample current connected to a tap on the secondary side of the transformer 9, and is wired as shown in the figure.
第１図はこの考案による試料加熱冷却ホルダー
の一実施例を概略的に示す縦断面図、第２図はの
要部を第１図の矢印Ａ−Ａに沿つた縦断面図、第
３図は第１、２図のホルダーに用いられる電気制
御回路を示す図である。
図中、１：中空本体、２：電極・試料受け部
材、３：試料、４：押圧部材、５：フランジ。
Fig. 1 is a longitudinal cross-sectional view schematically showing an embodiment of the sample heating and cooling holder according to this invention, Fig. 2 is a longitudinal cross-sectional view of the main part of the holder taken along the arrow A-A in Fig. 1, and Fig. 3 2 is a diagram showing an electric control circuit used in the holder shown in FIGS. 1 and 2. FIG. In the figure, 1: hollow body, 2: electrode/sample receiving member, 3: sample, 4: pressing member, 5: flange.
Claims (1)
の一端に高電気絶縁性でしかも熱伝導性のよい電
極・試料受け部材を取付け、この電極・試料受け
部材上に高弾性かつ恒弾性で電極を成す押圧部材
を介して分析すべき試料を押圧保持し、上記各押
圧部材をリード線を介して加熱用電源に接続して
成る表面分析装置用試料加熱冷却ホルダー。 An electrode/sample receiving member with high electrical insulation and good thermal conductivity is attached to one end of the hollow body that allows refrigerant to be supplied inside, and an electrode with high elasticity and constant elasticity is mounted on this electrode/sample receiving member. A sample heating/cooling holder for a surface analysis apparatus, which presses and holds a sample to be analyzed through pressing members, and connects each of the pressing members to a heating power source via lead wires.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981023407U JPS6326762Y2 (en) | 1981-02-23 | 1981-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981023407U JPS6326762Y2 (en) | 1981-02-23 | 1981-02-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57138043U JPS57138043U (en) | 1982-08-28 |
| JPS6326762Y2 true JPS6326762Y2 (en) | 1988-07-20 |
Family
ID=29821161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981023407U Expired JPS6326762Y2 (en) | 1981-02-23 | 1981-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6326762Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4812554U (en) * | 1971-06-23 | 1973-02-12 | ||
| JPS5065406A (en) * | 1973-10-13 | 1975-06-03 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51131741U (en) * | 1975-04-16 | 1976-10-23 | ||
| JPS5732433Y2 (en) * | 1978-09-18 | 1982-07-16 |
-
1981
- 1981-02-23 JP JP1981023407U patent/JPS6326762Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4812554U (en) * | 1971-06-23 | 1973-02-12 | ||
| JPS5065406A (en) * | 1973-10-13 | 1975-06-03 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57138043U (en) | 1982-08-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100433249C (en) | Substrate processing device | |
| US5406053A (en) | Heating probe having a heated tip forming a thermocouple | |
| ES485398A1 (en) | Liquid-cooled support for the head of an electrode. | |
| ES8702639A1 (en) | Flexible brazing wand. | |
| US4822979A (en) | Temperature controlled soldering iron with a unitary electrically heated soldering tip and thermocouple | |
| JPS6326762Y2 (en) | ||
| ATE45263T1 (en) | CONVERSION ELECTRODE FOR AN ELECTRIC DIRECT CURRENT FURNACE. | |
| CA1099475A (en) | Installation for manufacturing a metal wire by continuous casting | |
| US2798932A (en) | Solder pot | |
| JPH10185781A (en) | Sample holder for electron microscope, and its manufacturing method | |
| JPS5963651A (en) | Ionizing device for material | |
| JPH11281497A (en) | Fitting method for sheath thermocouple for measuring temperature of metal body inside | |
| JP3617294B2 (en) | Mounting method of a sheathed thermocouple for measuring the temperature of a metal body | |
| JPH06300719A (en) | Method and apparatus for measuring thermoelectric conversion characteristic | |
| JPH04274885A (en) | Spot welding device | |
| CN108934086A (en) | A kind of oil immersion-type distribution transformer winding end conducting rod heating device | |
| US2696546A (en) | Process and apparatus for soldering | |
| JPH0353403Y2 (en) | ||
| JPH0235432B2 (en) | ||
| JP3260478B2 (en) | Moisture detector of snowfall detector | |
| JPS586592B2 (en) | How to make a soldering iron | |
| JPS599008Y2 (en) | Mounting structure of energized heating type evaporation source | |
| SU38234A1 (en) | Device for the supply of current to the electrical heating resistance | |
| JPS634959Y2 (en) | ||
| JPS6336598Y2 (en) |