JPS63266403A - Solid-state image pickup device and its production - Google Patents
Solid-state image pickup device and its productionInfo
- Publication number
- JPS63266403A JPS63266403A JP62102412A JP10241287A JPS63266403A JP S63266403 A JPS63266403 A JP S63266403A JP 62102412 A JP62102412 A JP 62102412A JP 10241287 A JP10241287 A JP 10241287A JP S63266403 A JPS63266403 A JP S63266403A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- solid
- magenta
- filter layer
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000010410 layer Substances 0.000 claims abstract description 85
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 238000003384 imaging method Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 8
- 239000011229 interlayer Substances 0.000 claims description 7
- 238000004043 dyeing Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 abstract description 8
- 230000005855 radiation Effects 0.000 abstract description 7
- 239000011347 resin Substances 0.000 abstract description 7
- 229920005989 resin Polymers 0.000 abstract description 7
- 229920003229 poly(methyl methacrylate) Polymers 0.000 abstract description 6
- 239000004926 polymethyl methacrylate Substances 0.000 abstract description 6
- 102000009027 Albumins Human genes 0.000 abstract description 5
- 108010088751 Albumins Proteins 0.000 abstract description 5
- 108010010803 Gelatin Proteins 0.000 abstract description 5
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 abstract description 5
- 239000005018 casein Substances 0.000 abstract description 5
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 abstract description 5
- 235000021240 caseins Nutrition 0.000 abstract description 5
- 229920000159 gelatin Polymers 0.000 abstract description 5
- 239000008273 gelatin Substances 0.000 abstract description 5
- 235000019322 gelatine Nutrition 0.000 abstract description 5
- 235000011852 gelatine desserts Nutrition 0.000 abstract description 5
- 108010076119 Caseins Proteins 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000002156 mixing Methods 0.000 abstract description 2
- 101000922002 Conus purpurascens Conotoxin p5a Proteins 0.000 abstract 1
- 101000924311 Homo sapiens Desmoglein-3 Proteins 0.000 abstract 1
- 101001133631 Lysinibacillus sphaericus Penicillin acylase Proteins 0.000 abstract 1
- 239000011247 coating layer Substances 0.000 abstract 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- 244000020998 Acacia farnesiana Species 0.000 description 3
- 235000010643 Leucaena leucocephala Nutrition 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- PMJNEQWWZRSFCE-UHFFFAOYSA-N 3-ethoxy-3-oxo-2-(thiophen-2-ylmethyl)propanoic acid Chemical compound CCOC(=O)C(C(O)=O)CC1=CC=CS1 PMJNEQWWZRSFCE-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は固体撮像装置およびその製造方法に関し、時に
カラーフィルタ層を積層したモノリシックの固体撮像装
置およびその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a solid-state imaging device and a manufacturing method thereof, and more particularly to a monolithic solid-state imaging device in which color filter layers are laminated and a manufacturing method thereof.
従来のカシ−フィルタ層を核層したモノリンツクの固体
撮像装置およびその製造方法としては、例えば、第３ニ
に示されている文献がある。Regarding a conventional monolink solid-state imaging device having a core layer of a Cassie filter layer and a method for manufacturing the same, there is, for example, the document shown in No. 3 (D).
第３図ｔａｇ． （ｂ）及び（Ｃ）はそれぞれ従来の固
体＃Ｌ像装置の一例を説明する平面図、Ａ−Ａ’ｉ及び
Ｂ−Ｂ’崖の模式的町四図である。この例は、第３図Ｆ
ａ）に示すよう罠、下の行（第１行目）がシアン画素部
Ｃ．マゼンタ画素部Ｍ，、 ７１ン画素部Ｃ及びグリー
ンＩＩＩ＋１素部Ｇという順序にくり返し配列され、上
の行（第２行目）はイエロー画素部Ｙ。Figure 3 tag. (b) and (C) are a plan view and a schematic diagram of A-A'i and B-B' cliffs, respectively, illustrating an example of a conventional solid-state #L image device. This example is shown in Figure 3F.
As shown in a), the bottom row (first row) is the cyan pixel portion C. The magenta pixel section M, 71 pixel section C and the green III+1 pixel section G are arranged repeatedly in this order, and the upper row (second row) is the yellow pixel section Y.
グリーン画素部Ｇ，イエロー画素部Ｙ及びマゼンタ画素
部Ｍ２という順序にくり返し配列され、さらにこの第１
及び第２行が列方向にくり返し配置されている。The green pixel section G, the yellow pixel section Y, and the magenta pixel section M2 are arranged repeatedly in this order.
and the second row are arranged repeatedly in the column direction.
この例の第１行目の構造では、第３図（ｂ） Ｋ示すよ
うに、表面に受光部１ａとＣＣＤ部１− ｂとを備えた
半導体基板１上に表面の平担化層２ａを設け、平坦化Ｎ
１Ｚａ上のシアン及びグリーン画素部Ｃ及びＧの位置に
シアンフィルタ層３ｂ’を設け、この上を中間層２ｂで
覆った後にグリーン画素部Ｇの位置にイエローフィルタ
層３ｃ’を設け、更に中間層２Ｃを介してマゼンタ画素
部Ｍｌの位置にマゼンタフィルタｒｆｉ３ａ’を設けて
いる。In the structure in the first row of this example, as shown in FIG. 3(b)K, a flattening layer 2a is formed on the semiconductor substrate 1, which has a light receiving section 1a and a CCD section 1-b on its surface. Setting, flattening N
A cyan filter layer 3b' is provided at the positions of the cyan and green pixel parts C and G on 1Za, and after this is covered with an intermediate layer 2b, a yellow filter layer 3c' is provided at the position of the green pixel part G. A magenta filter rfi3a' is provided at the position of the magenta pixel portion Ml via 2C.
父、この実施例の第２行目の構造では、第３図ｔｃ）に
示すように、半導体基板１上の平坦化層２ａ上のグリー
ン画素部Ｇの位置にシアンフィルタ層３ｂ’を設け、こ
の上に中間層２ｂを介し℃イエロー及びグリーン画素部
Ｙ及びＧの位置にイエローフィルタ層３ ｃ／を設け、
更に中間層２Ｃを介してマゼンタ画素部Ｍ２の位置廻マ
ゼンタフィルタ層３ａ’を設けている。In the structure of the second row of this embodiment, as shown in FIG. A yellow filter layer 3c/ is provided on this at the positions of the yellow and green pixel portions Y and G via the intermediate layer 2b,
Further, a positional magenta filter layer 3a' of the magenta pixel portion M2 is provided via the intermediate layer 2C.
従って、第１行目のマゼンダ画素部Ｍ１のマゼンタフィ
ルタ層３ ａ ／は、これに隣接するシアン画素Ｃのシ
アンフィルタ層３ ｂ’ Ｋよる段差が中間層２ｂ及び
２Ｃによって比較的平坦疋なった部分に形成されている
ので、所定の厚さに形成されているが、しかし第２行目
のマゼンタ＋ｊｌｕＸ部へ１２のマゼンタフィルタ層３
８′は、これに隣接するイエロー画素Ｙのイエローフィ
ルタ層３ Ｃ’ Ｋより層の厚さがＰ；ｉｒ９’＋によ
り不均一に形成されることになる。Therefore, in the magenta filter layer 3a/ of the magenta pixel portion M1 in the first row, the step caused by the cyan filter layer 3b'K of the adjacent cyan pixel C is made relatively flat by the intermediate layers 2b and 2C. However, 12 magenta filter layers 3 are formed in the magenta+jluX part of the second row.
8' is formed non-uniformly because the layer thickness P;ir9'+ is greater than that of the yellow filter layer 3C'K of the yellow pixel Y adjacent thereto.
上述した従来の固体撮像装置では、モノリンツクに形成
したカシ−フィルタ、ｑの形成Ｈａ序が下からイエロー
フィルり層、／アンフィルタへ吻及びマゼンタフィルタ
層の順となっているので、シアンフィルタ層に挾まれた
マゼンタ画素部のマゼンタフィルタ層の増厚とイエロー
フィルタ層に挾まれたマゼンタ画素部のマゼンタフィル
タ層の増厚とが異なシ光の透過率が違ってくるためそれ
ぞれのフィルタ層を通して受光部に入射した元による出
力信号に差が生じて感度がはらつくという欠点がある。In the conventional solid-state imaging device described above, the formation order of the Cassie filter and q is from the bottom to the yellow filter layer, then to the unfilter, and then the magenta filter layer. The increase in the thickness of the magenta filter layer in the magenta pixel area sandwiched by the yellow filter layer is different from the increase in the thickness of the magenta filter layer in the magenta pixel area sandwiched by the yellow filter layer. The drawback is that the output signal varies depending on the source incident on the light receiving section, resulting in fluctuations in sensitivity.
本発明の固体ｍ像装置は、固体撮像素子を表面に形成し
た半導体基板の上に層間膜を介して積層した所定のパタ
ーンの複数のカシ−フィルタ層を備えた固体系は装置に
おいて、前記複数のカラーフィルタ層の最下層がマゼン
タフィルタ層からなるＯ
本発明の固体撮像装置の製造方法は、固体撮像素子を表
面に形成した半導体基板の上に層間膜を介して積層した
ｆｆｒ定のパターンの複数のカニ）−フィルタ層を備え
た固体ｒｆ＆像装置の製造方法において、マゼンタフィ
ルタ層を最下層として前記層間膜を介して積層した前記
複数のカラーフィルタ層を順次形成する工程を含んで成
る。The solid-state m-image device of the present invention is a solid-state m-image device comprising a plurality of Cassie filter layers in a predetermined pattern laminated on a semiconductor substrate on which a solid-state image sensor is formed via an interlayer film. The lowermost layer of the color filter layer is a magenta filter layer. The method for manufacturing a solid-state imaging device according to the present invention includes a method for manufacturing a solid-state imaging device in which a pattern with a constant ffr is laminated via an interlayer film on a semiconductor substrate on which a solid-state imaging element is formed. A method for manufacturing a solid-state RF & imaging device having a plurality of crab-filter layers, comprising the step of sequentially forming the plurality of color filter layers laminated with the interlayer film interposed therebetween, with a magenta filter layer as the bottom layer.
次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明の固体撮像装置の一実施例の模式的断面
図である。FIG. 1 is a schematic cross-sectional view of an embodiment of the solid-state imaging device of the present invention.
この夾Ｍ回では、表面に少くとも受光部１ａとＣＣＤ部
１ｂとを備えた半導体基板１上にポリメチルメタクリレ
ート（ＰＭＭＡ）やポリグリンジルメタクリレート（Ｐ
ＧＭＡ）、ポリメチルイソグロペニルケトン（ＰＭＩＰ
Ｋ） 等の放射線感光樹脂からなる表面の平坦化層２ａ
を設け、平坦化＠２ａ上のマゼンダ画素部の位置にゼラ
チン、カゼイン。In these M times, polymethyl methacrylate (PMMA) or polygrindyl methacrylate (P
GMA), polymethyl isogropenyl ketone (PMIP)
K) A surface flattening layer 2a made of a radiation-sensitive resin such as
gelatin and casein were placed at the magenta pixel area on flattened @2a.
アルブミン及びポリビニルアルコールに重クロム酸アン
モニウム（ＡＴ）Ｃ）を混合したものを染色母材とする
マゼンタフィルタ層３ａを設け、平坦１ヒ／＃２ａと同
僚の材料からなる中間Ｎ２ｂで堕った後にマゼンタフィ
ルタ１９１１３ ａと同様の染色母材を用いた／アノフ
ィルタノー３１）をシアン及びグリーン画素部の位置に
設け、中間／ｆｉ２ｂと同様の材料の中間層２Ｃで覆っ
た後イエロー及びグリーン画素部の位置に他のフィルタ
層と同様の染色母材を使ったイエローフィルタ層３Ｃを
設げ、更に中間層と同様の材料を使ったト、グコート層
２ｄで覆っている。A magenta filter layer 3a is provided using a mixture of albumin and polyvinyl alcohol with ammonium dichromate (AT) C) as the dyeing matrix, and after filtering with flat 1/#2a and intermediate N2b made of the material of colleagues. Magenta filter 19113a using the same dyeing base material /anofilter no 31) is provided at the positions of the cyan and green pixel parts, and after covering with the intermediate layer 2C of the same material as intermediate /fi2b, the yellow and green pixel parts A yellow filter layer 3C using the same dyed matrix material as the other filter layers is provided at the position, and is further covered with a gray coat layer 2d using the same material as the intermediate layer.
第２図（ａ）、 （ｂ）は本発明の同体撮像装置の製造
方法の一実施例を説明するための模式的断面図である０
この実施例では、先ず、第２図（ａ）に示すように、表
面に受光部１ａ及びＣＣＤ部１ｂを形成した半害体基板
１上にポリメチルメタクリレート（ＰＭＭＡ）やポリグ
リンジルメタクリレート（ＰＧＭＡ）、ポリメチルイソ
グロペニルケトン（ＰＭＩＰＫ）等の放射線感光樹脂か
らなる表面の平坦化層２ａを塗布することによ多形成し
、ゼラチン、カゼイン、アルブミン及びポリビニルアル
コールに重クロム酸アンモニウムＡＤＣを混合してなる
染色母材を塗布し、これを露光・現像して所定のパター
ンにした後、例えば下記に示すようなマゼンタ染色液中
に浸してマゼンダ画素部の位置にヌゼンタフィルタ層３
ａを形成する。FIGS. 2(a) and 2(b) are schematic cross-sectional views for explaining an embodiment of the method for manufacturing the same-body imaging device of the present invention. In this embodiment, first, FIG. As shown, polymethyl methacrylate (PMMA), polygrindyl methacrylate (PGMA), polymethyl isogropenyl ketone (PMIPK), etc. A surface flattening layer 2a made of a radiation-sensitive resin is applied to form a layer, and a dyeing base material made of a mixture of gelatin, casein, albumin, and polyvinyl alcohol with ammonium dichromate ADC is applied, and this is exposed.・After developing into a predetermined pattern, for example, soak it in a magenta dye solution as shown below and apply a Nugenta filter layer 3 at the position of the magenta pixel area.
form a.
次に、第２図（ｂ）に示すように、平坦化層２ａと同様
のＰＭＭＡ−？ＰＧＭＡ、ＰＭＩＰＫ等の放射線感光樹
脂からなる中間層２ｂを塗布することによ多形成し、さ
らに、その上にゼラチン、カゼイン、アルブミン及びポ
リビニルアルコール等Ｋｌクロム酸アンモニウムを混合
してなる染色母材を塗布し、これを露光、視像して所定
のパターンｔｃシタ＝、下記に示す７アン染色液中に浸
して７アン及びグリーン画素部の位置にシアンフィルタ
層３ｂを形成する。Next, as shown in FIG. 2(b), PMMA-? A multilayer layer 2b is formed by applying an intermediate layer 2b made of a radiation-sensitive resin such as PGMA or PMIPK, and then a dyeing base material made of a mixture of gelatin, casein, albumin, and Kl ammonium chromate such as polyvinyl alcohol is further applied thereto. The cyan filter layer 3b is formed at the positions of the 7mm and green pixel portions by applying the coating, exposing and visualizing it to a predetermined pattern, and immersing it in the 7mm dyeing solution shown below.
ｊ？ｌｌｃ、ポリメチルメタクリレート（ＰｋｌＭＡ
）やポリグリンジルメタクリレート（ＰＧＭＡ）、ポリ
メチルイソグロベニルクトン（ＰＭＩＰＫ ）等の放射
線感光樹脂からなる中間層２ｃを塗布することにより形
成し、さらＫその上にゼラチンやカゼイン、アルブミン
及びポリビニルアルコール等に重クロム酸アンモニウム
を混合してなる染色母材を塗布し、これを露光、現像し
て所定のパターンにした後下記に示すイエロー染色液中
で染色しイエロー及びグリーン画素部の位置にイエロー
フィルタ層３Ｃを形成し、更に、
ＰＭＭＡ−？ＰＧＭＡ、ＰＭＩＰＫ等の放射線感光樹脂
層からなるドッグコート層２ｄを塗布することにより形
成し、ポンディングパッド部やスクライプ綾部等の遠紫
外線の照射及び現像欣申でのｆＡ像工程を柱で、スクラ
イプ婦やポンディングパッド部の放射線感光樹脂層から
なる平坦化層２ａ、中間層２ｂ及び２Ｃ並びにドッグコ
ート層２ｄを除去すれば、第１図に示す固体撮像装置が
できる。j? llc, polymethyl methacrylate (PklMA
), polygrindyl methacrylate (PGMA), polymethyl isoglobenyl lactone (PMIPK), etc. is formed by applying an intermediate layer 2c consisting of a radiation-sensitive resin, and then gelatin, casein, albumin, and polyvinyl alcohol are further applied on top of the intermediate layer 2c. A dyeing base material made by mixing ammonium dichromate is applied to the surface, exposed and developed to form a predetermined pattern, and then dyed in the yellow dyeing solution shown below to add yellow to the yellow and green pixel areas. A filter layer 3C is formed, and PMMA-? It is formed by applying a dog coat layer 2d made of a radiation-sensitive resin layer such as PGMA, PMIPK, etc., and the fA image process in the irradiation of far ultraviolet rays and development of the bonding pad part and the scrip twill part is the pillar, and the scrip is applied. By removing the flattening layer 2a, the intermediate layers 2b and 2C, and the dog coat layer 2d, which are made of a radiation-sensitive resin layer at the front and padding pad portions, the solid-state imaging device shown in FIG. 1 can be obtained.
以上説明したように本発明では、５２間層を介して設け
られた複数のカラーフィルタ層の最下層をマゼンタフィ
ルタ層とすることによシ、隣接フィルタ層の眩差の影響
を受け！Ｓ ％、％％マゼンタフィルタ層の層厚を均一
にして、出力信号の場所により生じ３差を防止して感度
のばらつきのない特性の艮好な固体撮像装置を実現でき
るという効果がある。As explained above, in the present invention, by using the magenta filter layer as the lowest layer of the plurality of color filter layers provided with 52 interlayers in between, it is possible to avoid the effects of glare between adjacent filter layers! S%, %% By making the layer thickness of the magenta filter layer uniform, it is possible to prevent three-dimensional differences that occur depending on the location of the output signal, thereby realizing a solid-state imaging device with excellent characteristics without variations in sensitivity.
第１図は本発明の固体撮像装置の一実施例の模式的断面
図、第２図ｆａｎ、 ｌｂ）は本発明の固体撮像装置の
製造方法の一夾農列を説明するための模式的断面図、第
３図（ａ）、 ｌｂ）及びｔｃ）はそれぞれ従来の固体
撮像装置の一例を説明する平面図、Ａ−Ａ’ｉ及びＢ−
８’線の模式的断面図である。
１・・・・・・半導体基板、１ａ・・・・・・受光部、
１ｂ・・・・・・ＣＣＤ部、２ａ・・・・・・平坦化層
、２ｂ、２ｃ・・・・・・中間層、２ｄ・・・・・・ド
ッグコート層、３ａ、３ａ’。
３ａ′・・・・・・マゼンタフィルタ層、３ｂ、３ｂ’
・・・・・・シアンフィルタ層、３Ｃ，３ｃ／ ・・・
・・・イエローフィルタ層、Ｃ・・・・・・シアン画素
部、Ｇ・・・・・・グリーン画素部、Ｍｌ、Ｍ、・・・
・・・マゼンダ画素部、Ｙ・・・・・・イエローＩｌ！
ｊＩ素部。
２丁ミド
代理人 弁理士 内 原 晋（′・・Ｗ、、”１
．：”＋。
牛Ｉ図
（α）
ｌ呼５２９ 代理人弁理士FIG. 1 is a schematic cross-sectional view of an embodiment of the solid-state imaging device of the present invention, and FIG. 3(a), lb) and tc) are plan views illustrating an example of a conventional solid-state imaging device, A-A'i and B-, respectively.
FIG. 8 is a schematic cross-sectional view taken along line 8'. 1... Semiconductor substrate, 1a... Light receiving section,
1b... CCD section, 2a... Flattening layer, 2b, 2c... Intermediate layer, 2d... Dog coat layer, 3a, 3a'. 3a'...Magenta filter layer, 3b, 3b'
...Cyan filter layer, 3C, 3c/ ...
...Yellow filter layer, C...Cyan pixel section, G...Green pixel section, Ml, M,...
...Magenta pixel part, Y...Yellow Il!
jI elementary section. 2 Cho Mido Patent Attorney Susumu Uchihara ('...W,,”1
．． :”+. Cow I diagram (α) l call 529 agent patent attorney
Claims (2)
層間膜を介して積層した所定のパターンの複数のカラー
フィルタ層を備えた固体撮像装置において、前記複数の
カラーフィルタ層の最下層がマゼンタフィルタ層からな
ることを特徴とする固体撮像装置。(1) In a solid-state imaging device comprising a plurality of color filter layers in a predetermined pattern laminated via an interlayer film on a semiconductor substrate on which a solid-state imaging device is formed, the bottom layer of the plurality of color filter layers is A solid-state imaging device comprising a magenta filter layer.
層間膜を介して積層した所定のパターンの複数のカラー
フィルタ層を備えた固体撮像装置の製造方法において、
マゼンタフィルタ層を最下層として前記層間膜を介して
積層した前記複数のカラーフィルタ層を順次形成する工
程を含むことを特徴とする固体撮像装置の製造方法。(2) A method for manufacturing a solid-state imaging device comprising a plurality of color filter layers in a predetermined pattern laminated via an interlayer film on a semiconductor substrate on which a solid-state imaging device is formed,
A method for manufacturing a solid-state imaging device, comprising the step of sequentially forming the plurality of color filter layers stacked with the interlayer film interposed therebetween, with a magenta filter layer as the bottom layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10241287A JPH0734042B2 (en) | 1987-04-24 | 1987-04-24 | Solid-state imaging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10241287A JPH0734042B2 (en) | 1987-04-24 | 1987-04-24 | Solid-state imaging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63266403A true JPS63266403A (en) | 1988-11-02 |
| JPH0734042B2 JPH0734042B2 (en) | 1995-04-12 |
Family
ID=14326727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10241287A Expired - Lifetime JPH0734042B2 (en) | 1987-04-24 | 1987-04-24 | Solid-state imaging device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734042B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525025A (en) * | 1978-08-09 | 1980-02-22 | Akai Electric Co Ltd | Color filter for single tube color image pickup tube and production thereof |
| JPS61286804A (en) * | 1985-06-14 | 1986-12-17 | Nec Corp | Solid stage image sensing element |
-
1987
- 1987-04-24 JP JP10241287A patent/JPH0734042B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525025A (en) * | 1978-08-09 | 1980-02-22 | Akai Electric Co Ltd | Color filter for single tube color image pickup tube and production thereof |
| JPS61286804A (en) * | 1985-06-14 | 1986-12-17 | Nec Corp | Solid stage image sensing element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734042B2 (en) | 1995-04-12 |
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