JPS6326545A - Optical device for characteristic inspection of photosemiconductor element - Google Patents

Abstract

PURPOSE:To eliminate the need to adjust the optical axis to a laser diode and to improve the efficiency of inspecting operation and the accuracy of measurement by combining and uniting a large-diameter handle fiber, a long-focus lens, and a short-focus lens. CONSTITUTION:The laser diode 1 as an object of inspection is fitted nearby the incidence port 2a of the large-diameter handle fiber 2 and light is emitted by an external power source, made incident on the incidence part 2a, and projected from a projection port 2b on the other end surface. A collimator lens 3 with long focus (f1) is provided behind the handle fiber 2 to make the incident light parallel. The spherical lens 4 with extremely short focus (f2) is provided behind the lens 3 and the incident light is made incident on a small-diameter photodetector 5 through this lens and converted here into an electric signal, which is sent to a characteristic inspecting device. Those handle fiber 2, lens 3, lens 4, and photodetector 5 are coupled in one body while their optical axes are aligned with one another.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical device for inspecting the characteristics of optical semiconductor devices, and more particularly to an optical device for inspecting the characteristics of a semiconductor laser diode.

[Conventional technology]

A conventional optical device for inspecting oscillation light output characteristics of a semiconductor laser diode has a configuration shown in FIG. That is, in order to efficiently make the oscillation light output from the laser diode 1, which is the test sample, enter the fiber 6 for guiding it to the characteristic testing device, the fiber 4 is held on a three-axis stage 7, and its X axis (X) is The respective optical axes are adjusted by adjusting the positions of the Y axis (Y) and the Z axis (Z).

In such a conventional characteristic inspection optical device, it is necessary to efficiently input the oscillated light output from the laser diode 1 into the fiber 6 by adjusting the optical axis of each axis of the three-axis stage 7. Therefore, a large amount of time is spent on the adjustment work, resulting in low work efficiency.Furthermore, there are also variations in the mounting position of the laser diode 1 itself, resulting in a decrease in measurement accuracy.

[Problem that the invention seeks to solve]

The problem to be solved by the present invention, in other words, the object of the present invention is to eliminate the drawbacks of the above-mentioned conventional laser diode characteristic inspection optical device, and to use a large-diameter handle fiber, a long focal length lens, and a short focal length lens. By combining and integrating the laser diodes, there is no need to adjust the optical axis with the laser diode, which improves the efficiency of inspection work. Sufficient light intensity can be obtained even with variations in the order of magnitude of laser diodes, and high measurement accuracy can be achieved. An object of the present invention is to provide an optical device for inspecting the characteristics of a laser diode obtained.

[Means for solving problems]

The optical device for inspecting characteristics of optical semiconductor devices of the present invention includes a large-diameter handle fiber, a long-focus collimator lens provided behind the handle fiber and having an aperture angle equal to or greater than the aperture angle of the handle fiber, and A short-focus ball lens is provided behind the collimator lens, and the handle fiber, the collimator lens, and the ball lens are fixed and coupled together with their optical axes aligned with each other.

〔Example〕

Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a block diagram showing a first embodiment of the present invention.

In FIG. 1, a large-diameter bundle phi 2 has a laser diode 1, which is an object to be examined, attached near its entrance 2a, and causes the laser diode 1 to emit light using an external power source. This light emission output is the input port 2a of the bundle fiber 2
The light enters the beam and exits from the exit port 2b on the other end face. A long focal length ('fl) collimator lens 3 having an aperture angle equal to or greater than the bundle fiber 2 is provided behind the bundle fiber 2, and the collimator lens 3 converts the incident light into parallel light. A ball lens with an extremely short focal path M (f2) (fl>>f2) is provided behind the collimator lens 3, and the light is focused by the ball lens 4 and enters a small diameter light receiver 5. Here, it is converted into an electrical signal and sent to a characteristic testing device. The handle fiber 2, the collimator lens 3, the ball lens 4, and the light receiver 5 are coupled as one body with their optical axes aligned.

Additionally, each component uses low-loss optical components.

FIG. 2 is a block diagram showing a second embodiment of the present invention. Basically, the same optical system as in the embodiment shown in Fig. 1 is used, and instead of directing the light emitted from the ball lens into the light receiver, it is made into a fiber 6 with a small core diameter, and the characteristics are inspected via this fiber 6. The device is configured to input the information to the device. Its operation and effects are the same as the embodiment shown in FIG.

〔Effect of the invention〕

As explained in detail above, the present invention uses a large-diameter handle fiber, a long focal length (fl) collimator lens, and a short focal length (f2) spherical lens to achieve
This has the effect of eliminating the need to adjust the optical axis relative to the object to be examined, resulting in high work efficiency.At the same time, since the optical device is integrated, significant economic benefits can be obtained in terms of both maintenance and operation. .

[Brief explanation of the drawing]

1 and 2 are block diagrams showing first and second embodiments of the present invention, and FIG. 3 is a block diagram showing an example of a conventional characteristic inspection optical device. DESCRIPTION OF SYMBOLS 1... Laser diode, 2... Bundle fiber, 3... Collimating lens, 4... Ball lens, 5...
...Receiver, 6...Fiber, 7...Three-axis stage. Agent Patent Attorney Susumu Uchihara 1 Radio diode diagram 3

Claims (1)

[Claims] A large-diameter handle fiber, a long-focus collimator lens provided behind the handle fiber and having an aperture angle equal to or greater than the aperture angle of the handle fiber, and a short-focus ball lens provided behind the collimator lens. An optical device for inspecting characteristics of an optical semiconductor element, characterized in that the handle fiber, the collimator lens, and the ball lens are fixedly coupled together with their optical axes aligned with each other.