Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co LtdfiledCriticalMatsushita Electric Industrial Co Ltd
Priority to JP5115479ApriorityCriticalpatent/JPS55142071A/ja
Publication of JPS55142071ApublicationCriticalpatent/JPS55142071A/ja
Publication of JPS6326153B2publicationCriticalpatent/JPS6326153B2/ja
Radiation curable coating composition comprising three or more (meth) acryloyl polyfunctional monomer, phenol novolak epoxy (meth) acrylate oligomer, and a photoinitiator
Photomask original form having layer for protecting film surface and method for preparing the same, and protective layer-forming liquid for photomask original form