JPS632604Y2 - - Google Patents

Info

Publication number
JPS632604Y2
JPS632604Y2 JP1982005687U JP568782U JPS632604Y2 JP S632604 Y2 JPS632604 Y2 JP S632604Y2 JP 1982005687 U JP1982005687 U JP 1982005687U JP 568782 U JP568782 U JP 568782U JP S632604 Y2 JPS632604 Y2 JP S632604Y2
Authority
JP
Japan
Prior art keywords
membrane
vacuum controller
outer peripheral
held
effective diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982005687U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58109559U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP568782U priority Critical patent/JPS58109559U/ja
Publication of JPS58109559U publication Critical patent/JPS58109559U/ja
Application granted granted Critical
Publication of JPS632604Y2 publication Critical patent/JPS632604Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP568782U 1982-01-21 1982-01-21 バキユ−ムコントロ−ラ Granted JPS58109559U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP568782U JPS58109559U (ja) 1982-01-21 1982-01-21 バキユ−ムコントロ−ラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP568782U JPS58109559U (ja) 1982-01-21 1982-01-21 バキユ−ムコントロ−ラ

Publications (2)

Publication Number Publication Date
JPS58109559U JPS58109559U (ja) 1983-07-26
JPS632604Y2 true JPS632604Y2 (enrdf_load_html_response) 1988-01-22

Family

ID=30018483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP568782U Granted JPS58109559U (ja) 1982-01-21 1982-01-21 バキユ−ムコントロ−ラ

Country Status (1)

Country Link
JP (1) JPS58109559U (enrdf_load_html_response)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144017Y2 (enrdf_load_html_response) * 1972-03-29 1976-10-26
JPS608150Y2 (ja) * 1979-10-23 1985-03-20 京三電機株式会社 ダイアフラム式圧力応動装置

Also Published As

Publication number Publication date
JPS58109559U (ja) 1983-07-26

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