JPS6326045U - - Google Patents
Info
- Publication number
- JPS6326045U JPS6326045U JP11787286U JP11787286U JPS6326045U JP S6326045 U JPS6326045 U JP S6326045U JP 11787286 U JP11787286 U JP 11787286U JP 11787286 U JP11787286 U JP 11787286U JP S6326045 U JPS6326045 U JP S6326045U
- Authority
- JP
- Japan
- Prior art keywords
- damper
- negative pressure
- clean room
- pressure
- vane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002159 abnormal effect Effects 0.000 claims 7
- 230000002265 prevention Effects 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
Landscapes
- Safety Valves (AREA)
- Ventilation (AREA)
- Air-Flow Control Members (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986117872U JPH058385Y2 (https=) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986117872U JPH058385Y2 (https=) | 1986-07-31 | 1986-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6326045U true JPS6326045U (https=) | 1988-02-20 |
| JPH058385Y2 JPH058385Y2 (https=) | 1993-03-02 |
Family
ID=31003793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986117872U Expired - Lifetime JPH058385Y2 (https=) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058385Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03117841A (ja) * | 1989-09-28 | 1991-05-20 | Nec Yamaguchi Ltd | 圧力差制御装置 |
| JP2009505061A (ja) * | 2005-08-09 | 2009-02-05 | カムフィル ファー，インコーポレーテッド | 一体型封じ込めシステム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4876522U (https=) * | 1971-12-23 | 1973-09-21 | ||
| JPS5716451U (https=) * | 1980-06-23 | 1982-01-27 |
-
1986
- 1986-07-31 JP JP1986117872U patent/JPH058385Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4876522U (https=) * | 1971-12-23 | 1973-09-21 | ||
| JPS5716451U (https=) * | 1980-06-23 | 1982-01-27 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03117841A (ja) * | 1989-09-28 | 1991-05-20 | Nec Yamaguchi Ltd | 圧力差制御装置 |
| JP2009505061A (ja) * | 2005-08-09 | 2009-02-05 | カムフィル ファー，インコーポレーテッド | 一体型封じ込めシステム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058385Y2 (https=) | 1993-03-02 |