JPS6326045U - - Google Patents

Info

Publication number
JPS6326045U
JPS6326045U JP11787286U JP11787286U JPS6326045U JP S6326045 U JPS6326045 U JP S6326045U JP 11787286 U JP11787286 U JP 11787286U JP 11787286 U JP11787286 U JP 11787286U JP S6326045 U JPS6326045 U JP S6326045U
Authority
JP
Japan
Prior art keywords
damper
negative pressure
clean room
pressure
vane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11787286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058385Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986117872U priority Critical patent/JPH058385Y2/ja
Publication of JPS6326045U publication Critical patent/JPS6326045U/ja
Application granted granted Critical
Publication of JPH058385Y2 publication Critical patent/JPH058385Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)
JP1986117872U 1986-07-31 1986-07-31 Expired - Lifetime JPH058385Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986117872U JPH058385Y2 (enrdf_load_stackoverflow) 1986-07-31 1986-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986117872U JPH058385Y2 (enrdf_load_stackoverflow) 1986-07-31 1986-07-31

Publications (2)

Publication Number Publication Date
JPS6326045U true JPS6326045U (enrdf_load_stackoverflow) 1988-02-20
JPH058385Y2 JPH058385Y2 (enrdf_load_stackoverflow) 1993-03-02

Family

ID=31003793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986117872U Expired - Lifetime JPH058385Y2 (enrdf_load_stackoverflow) 1986-07-31 1986-07-31

Country Status (1)

Country Link
JP (1) JPH058385Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117841A (ja) * 1989-09-28 1991-05-20 Nec Yamaguchi Ltd 圧力差制御装置
JP2009505061A (ja) * 2005-08-09 2009-02-05 カムフィル ファー，インコーポレーテッド 一体型封じ込めシステム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4876522U (enrdf_load_stackoverflow) * 1971-12-23 1973-09-21
JPS5716451U (enrdf_load_stackoverflow) * 1980-06-23 1982-01-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4876522U (enrdf_load_stackoverflow) * 1971-12-23 1973-09-21
JPS5716451U (enrdf_load_stackoverflow) * 1980-06-23 1982-01-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117841A (ja) * 1989-09-28 1991-05-20 Nec Yamaguchi Ltd 圧力差制御装置
JP2009505061A (ja) * 2005-08-09 2009-02-05 カムフィル ファー，インコーポレーテッド 一体型封じ込めシステム

Also Published As

Publication number Publication date
JPH058385Y2 (enrdf_load_stackoverflow) 1993-03-02

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