JPS6326045U - - Google Patents

Info

Publication number
JPS6326045U
JPS6326045U JP11787286U JP11787286U JPS6326045U JP S6326045 U JPS6326045 U JP S6326045U JP 11787286 U JP11787286 U JP 11787286U JP 11787286 U JP11787286 U JP 11787286U JP S6326045 U JPS6326045 U JP S6326045U
Authority
JP
Japan
Prior art keywords
damper
negative pressure
clean room
pressure
vane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11787286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058385Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986117872U priority Critical patent/JPH058385Y2/ja
Publication of JPS6326045U publication Critical patent/JPS6326045U/ja
Application granted granted Critical
Publication of JPH058385Y2 publication Critical patent/JPH058385Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)
  • Safety Valves (AREA)
JP1986117872U 1986-07-31 1986-07-31 Expired - Lifetime JPH058385Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986117872U JPH058385Y2 (de) 1986-07-31 1986-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986117872U JPH058385Y2 (de) 1986-07-31 1986-07-31

Publications (2)

Publication Number Publication Date
JPS6326045U true JPS6326045U (de) 1988-02-20
JPH058385Y2 JPH058385Y2 (de) 1993-03-02

Family

ID=31003793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986117872U Expired - Lifetime JPH058385Y2 (de) 1986-07-31 1986-07-31

Country Status (1)

Country Link
JP (1) JPH058385Y2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117841A (ja) * 1989-09-28 1991-05-20 Nec Yamaguchi Ltd 圧力差制御装置
JP2009505061A (ja) * 2005-08-09 2009-02-05 カムフィル ファー,インコーポレーテッド 一体型封じ込めシステム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4876522U (de) * 1971-12-23 1973-09-21
JPS5716451U (de) * 1980-06-23 1982-01-27

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419182A (en) * 1977-07-14 1979-02-13 Fuji Electric Co Ltd Control mechanism for pole circuit breaker

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4876522U (de) * 1971-12-23 1973-09-21
JPS5716451U (de) * 1980-06-23 1982-01-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117841A (ja) * 1989-09-28 1991-05-20 Nec Yamaguchi Ltd 圧力差制御装置
JP2009505061A (ja) * 2005-08-09 2009-02-05 カムフィル ファー,インコーポレーテッド 一体型封じ込めシステム

Also Published As

Publication number Publication date
JPH058385Y2 (de) 1993-03-02

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