JPS63260113A - Magnetic field generating element - Google Patents
Magnetic field generating elementInfo
- Publication number
- JPS63260113A JPS63260113A JP62094442A JP9444287A JPS63260113A JP S63260113 A JPS63260113 A JP S63260113A JP 62094442 A JP62094442 A JP 62094442A JP 9444287 A JP9444287 A JP 9444287A JP S63260113 A JPS63260113 A JP S63260113A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- closed loop
- pattern
- field generating
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 58
- 239000000463 material Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 abstract description 14
- 238000005265 energy consumption Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 3
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 2
- 238000000992 sputter etching Methods 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000008034 disappearance Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- -1 alloys such as b-Ga Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052713 technetium Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は通常の磁性材料に代わる新しい磁場発生素子
に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a new magnetic field generating element that replaces ordinary magnetic materials.
（従来の技術と発明が解決しようとする問題点）従来、
磁場の発生素子としては、電流の流れているコイルと強
磁性体が使われてきた。しがし、電流の流れているコイ
ルは、常時電流を流す必要性から発熱が問題となり、か
つ消費電力も大きくなるという欠点があった。一方、強
磁性体は磁場発生体としてエネルギーの消費は無いが、
任意の磁場を発生させるという目的には反磁場の発生を
考慮する必要性から形状が制限されるため不十分であっ
た。(Problems to be solved by conventional technology and invention) Conventionally,
Coils carrying current and ferromagnetic materials have been used as magnetic field generating elements. However, coils with current flowing through them have the disadvantage of generating heat due to the need for constant current flow, and high power consumption. On the other hand, ferromagnetic materials consume no energy as magnetic field generators, but
This was insufficient for the purpose of generating an arbitrary magnetic field because the shape was limited by the need to consider the generation of a demagnetizing field.
本発明の目的は少エネルギー消費で任意の磁場を発生す
る簡便な磁場発生素子を提供することにある。An object of the present invention is to provide a simple magnetic field generating element that generates an arbitrary magnetic field with low energy consumption.
（問題点を解決するための手段）
本発明は基板上に形成された超伝導材料から成る閉ルー
プコイルを有する磁場発生パターンを備えたことを特徴
とする磁場発生素子と、基板上に形成された超伝導材料
から成る閉ループコイルを有する磁場発生パターンと該
閉ループコイルに磁場を印加する手段とを備えたことを
特徴とする磁場発生素子である。(Means for Solving the Problems) The present invention provides a magnetic field generating element characterized by comprising a magnetic field generating pattern having a closed loop coil made of a superconducting material formed on a substrate, and a magnetic field generating element formed on a substrate. A magnetic field generating element characterized by comprising a magnetic field generating pattern having a closed loop coil made of a superconducting material and means for applying a magnetic field to the closed loop coil.
本発明に使用される基板としては、特別の制約は無いが
、表面の平坦なＳｉ単結晶板、ガラス板、石英板、サフ
ァイア板、＾Ｑ２０３や５ｉ０２やＳｉＣやＴｉＯ□等
を主成分とするセラミックス板、ステンレスやＣｕ等の
合金を含む金属板、ポリエステルやポリイミドやポリ−
カーボネート等のプラスティック板、等非超伝導材料が
適する。There are no particular restrictions on the substrate used in the present invention, but substrates whose main components are flat-surfaced Si single crystal plates, glass plates, quartz plates, sapphire plates, ^Q203, 5i02, SiC, TiO□, etc. Ceramic plates, metal plates containing alloys such as stainless steel and Cu, polyester, polyimide, and polyester.
Non-superconducting materials such as plastic plates such as carbonate are suitable.
超伝導材料としては、周知のＶ、Ｐｂ、Ｔｃ、Ｎｂ等の
純金属やＶ−Ｇａ、 Ｍｏ−Ｎ 、 Ｎｂ−Ｇｅ、 Ｎ
ｂ−Ｇａ、 Ｎｂ−Ａ Ｑ等の合金を含む金属、Ａ２Ｃ
ｕＯ４で表わされるセラミックス（但しＡ＝Ｙ、Ｌａ、
等）やＢ３−、ＣｘＣｕ２Ｏ７または８２−ＸＣｘＣｕ
Ｏ４で表わされるセラミックス（但し、Ｂ＝Ｌａ、Ｙ、
Ｓｃ、Ｙｂ。Superconducting materials include well-known pure metals such as V, Pb, Tc, and Nb, as well as V-Ga, Mo-N, Nb-Ge, and Nb.
Metals including alloys such as b-Ga, Nb-A Q, A2C
Ceramics represented by uO4 (where A=Y, La,
etc.) or B3-, CxCu2O7 or 82-XCxCu
Ceramics represented by O4 (however, B=La, Y,
Sc, Yb.
Ｅｒ、Ｉ（ｏ、Ｄｙ、Ｔｍ 、Ｌｕ、等； Ｃ＝Ｂａ、
Ｓｒ、−等）等が適する。Er, I(o, Dy, Tm, Lu, etc.; C=Ba,
Sr, -, etc.) are suitable.
本発明の磁場発生素子を動作させるためには温度制御手
段が必要である。この温度制御手段としては、前記超伝
導材料を超伝導状態に保持できるものでなければならな
い。金属系の超伝導材料を用いる場合は液体１１ｅまた
は、Ｈｅ液化器が、セラミックス系の超伝導材料を用い
る場合には前記液体１１ｅ、）Ｈｅ液化器、に加え、液
体Ｎ２、液体０２、液体空気、高圧からの断熱膨張を使
った冷却器、等が適する。Temperature control means is required to operate the magnetic field generating element of the present invention. This temperature control means must be capable of maintaining the superconducting material in a superconducting state. When a metal-based superconducting material is used, the liquid 11e or the He liquefier is used; when a ceramic-based superconducting material is used, in addition to the liquid 11e,) the He liquefier, liquid N2, liquid 02, and liquid air. , a cooler using adiabatic expansion from high pressure, etc. are suitable.
また閉ループコイルに磁場を印加する手段としては、外
部の永久磁石を用いる場合と、該閉ループコイルに近接
してコイルを形成する場合などがある。Further, as means for applying a magnetic field to the closed loop coil, there are two methods: using an external permanent magnet, and forming a coil close to the closed loop coil.
（作用）
本発明の磁場発生素子を用いれば、極薄の磁場発生体が
構成でき、超伝導状態に保持されているため少ない消費
エネルギーで磁場を発生し続は得る。また、任意の時点
で、この磁場発生素子の発生している磁場を消滅させる
こともできる。このような効果は従来の手段では不可能
である。(Function) If the magnetic field generating element of the present invention is used, an ultra-thin magnetic field generating body can be constructed, and since it is maintained in a superconducting state, a magnetic field can be generated with less energy consumption. Furthermore, the magnetic field generated by the magnetic field generating element can be extinguished at any time. Such an effect is not possible with conventional means.
（実施例１）
表面の研磨されたＳｉ基板上にＮｂを１０００λ蒸着し
、次いで、周知のフォトリングラフィ技術を用いて、フ
ォトレジストパターンを形成後、イオンミリング法でエ
ツチングし、第１図で示したような閉ループコイルを形
成した。この上に保護膜と′してＳｉＯ□を１μｍスパ
ッタし磁場発生パターンとした。このパターンに垂直に
磁力線が通るように外部より永久磁石で磁場を印加した
まま、液体１１ｅの入ったデユワ−ビンに挿入し、その
後、永久磁石を除去した。この時、印加された磁場の消
滅を妨げるように各閉ループコイル内に電流が誘起され
、そのまま永久電流として流れ続けた。この結果、磁場
発生パターンから磁力線が発生した。この場合、この磁
場発生パターンは、極薄の永久磁石と等価となった。こ
れは、従来の永久磁石では反磁場のため達成できなかっ
た薄さと磁場強度を有していた。(Example 1) Nb was evaporated to a thickness of 1000λ on a Si substrate with a polished surface. Next, a photoresist pattern was formed using a well-known photolithography technique, and then etched using an ion milling method. A closed loop coil was formed as shown. On top of this, SiO□ was sputtered to a thickness of 1 μm as a protective film to form a magnetic field generation pattern. While applying a magnetic field from the outside with a permanent magnet so that lines of magnetic force pass perpendicularly to this pattern, it was inserted into a dewar bottle containing liquid 11e, and then the permanent magnet was removed. At this time, a current was induced in each closed loop coil to prevent the applied magnetic field from disappearing, and continued to flow as a persistent current. As a result, lines of magnetic force were generated from the magnetic field generation pattern. In this case, this magnetic field generation pattern was equivalent to an ultra-thin permanent magnet. It had a thinness and magnetic field strength that could not be achieved with conventional permanent magnets due to the demagnetizing field.
（実施例２）
実施例１と同様に磁場発生パターンを形成した。但し、
ここでは、Ｎｂ蒸着膜の代りに、第２図のような形状を
有するＹ３−、ＢａｘＣｕ２０７ （但しｘ；１．５）
セラミックスのスパッタ膜を用いた。(Example 2) A magnetic field generation pattern was formed in the same manner as in Example 1. however,
Here, instead of the Nb vapor deposited film, Y3-, BaxCu207 having the shape as shown in Fig. 2 (however, x; 1.5)
A sputtered ceramic film was used.
外部より印加する手段として永久磁石を用いた点は、実
施例１と同様であるが、温度制御手段として、液体Ｈｅ
の入ったデユワ−ビンの代りに液体窒素の入ったデユワ
−ビンを用いた。This is the same as in Example 1 in that a permanent magnet is used as the means for externally applying the voltage, but liquid He is used as the temperature control means.
A dewar bottle containing liquid nitrogen was used instead of a dewar bottle containing liquid nitrogen.
この場合、極薄の永久磁石と等価になったことは、実施
例１と同様であるが、さらに、コイルに電流を流し続け
る従来の磁場発生器に比しエネルギーの消耗量が少くな
った。In this case, it is equivalent to an ultra-thin permanent magnet, which is the same as in Example 1, but furthermore, the amount of energy consumed is less than that of a conventional magnetic field generator that continues to flow current through the coil.
（実施例３）
実施例１と同様に磁場発生パターンを形成した。但し、
この際、閉ループコイル２と同じ材料でコイル３を形成
した。(Example 3) A magnetic field generation pattern was formed in the same manner as in Example 1. however,
At this time, the coil 3 was formed from the same material as the closed loop coil 2.
コイル３に電流を流しながら液体１１ｅデユワ−ビンに
挿入し、次いで、コイル３に流れている電流を遮断した
。この時、実施例１と同様の磁場発生素子が形成された
。The liquid 11e was inserted into the dewarbin while a current was flowing through the coil 3, and then the current flowing through the coil 3 was cut off. At this time, a magnetic field generating element similar to that in Example 1 was formed.
（実施ＰＡ４）
実施例２と同様に磁場発生パターンを形成した。但し、
この際閉ループコイル２゛と同じ材料でコイル３゛を形
成した。(Execution PA4) A magnetic field generation pattern was formed in the same manner as in Example 2. however,
At this time, coil 3' was formed from the same material as closed loop coil 2'.
コイル３′に電流を流しながら液体Ｎ２デユワ−ビンに
挿入し、次いで、コイル３゛に流れている電流を遮断し
た。この時実施例１と同様の磁場発生素子が形成された
。The coil 3' was inserted into a liquid N2 dewarbin while a current was flowing through it, and then the current flowing through the coil 3' was cut off. At this time, a magnetic field generating element similar to that in Example 1 was formed.
（発明の効果）
本発明は、以上の実施例で明らかな如く、極薄の永久磁
石として作用するだけでなく、閉ループコイル２又は２
゛の形状及び磁場を印加する手段による磁場の加え方を
調節することにより、任意の磁場を発生することができ
る。また、従来のコイルを用いた磁場発生素子に比し、
消費エネルギーも少くできた。(Effects of the Invention) As is clear from the above embodiments, the present invention not only functions as an extremely thin permanent magnet, but also functions as a closed loop coil 2 or 2.
Any desired magnetic field can be generated by adjusting the shape of the magnetic field and the way the magnetic field is applied by the means for applying the magnetic field. In addition, compared to magnetic field generating elements using conventional coils,
Energy consumption was also reduced.
なお、前記実施例では、基本として、Ｓｉ板を、超伝導
材料として、Ｎｂ及びＹＣｕＯを例として挙げたが、こ
れに限るものでなく、２種以上の材料を併用してもよい
。また、磁場を印加する手段として、永久磁石と、閉ル
ープコイル２又は２゛に隣接並置されたコイル３又は３
°を例に示したが、この例に限るものではない、さらに
、温度制御手段として液体１１ｅおよび液体Ｎ２デユワ
−ビンを示したがこれに限るものでもない。また、閉ル
ープコイルの数は単数であってもよく、また大きさ、形
成密度も任意である。In the above embodiments, a Si plate was used as a basic material, and Nb and YCuO were used as superconducting materials, but the material is not limited to these, and two or more materials may be used in combination. Further, as a means for applying a magnetic field, a permanent magnet and a coil 3 or 3 disposed adjacent to the closed loop coil 2 or 2' are used.
Although the liquid 11e and the liquid N2 dewarbin are shown as temperature control means, the present invention is not limited to this example. Moreover, the number of closed loop coils may be singular, and the size and formation density are also arbitrary.
また、セラミックス膜をスパッタで形成する代わりにス
クリーン印刷で形成することもできる。Furthermore, instead of forming the ceramic film by sputtering, it can also be formed by screen printing.
要は、先に述べた如く、磁場発生パターンと、磁場を印
加する手段と、温度制御手段を有するものであればよい
。In short, as described above, any device may be used as long as it has a magnetic field generation pattern, a means for applying a magnetic field, and a means for controlling temperature.
第１図、第２図、第３図および第４図は、本発明の実施
例を示す図で、１は基板、２および２゛は閉ループコイ
ル、３および３゛はコイルをそれ第１図
第２図
第３図
第４図1, 2, 3, and 4 are diagrams showing embodiments of the present invention, in which 1 is a substrate, 2 and 2'' are closed loop coils, and 3 and 3'' are coils. Figure 2 Figure 3 Figure 4
Claims (2)
コイルを有する磁場発生パターンを備えたことを特徴と
する磁場発生素子。(1) A magnetic field generating element comprising a magnetic field generating pattern having a closed loop coil made of a superconducting material formed on a substrate.
コイルを有する磁場発生パターンと該閉ループコイルに
磁場を印加する手段とを備えたことを特徴とする磁場発
生素子。(2) A magnetic field generating element comprising: a magnetic field generating pattern having a closed loop coil made of a superconducting material formed on a substrate; and means for applying a magnetic field to the closed loop coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62094442A JPS63260113A (en) | 1987-04-17 | 1987-04-17 | Magnetic field generating element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62094442A JPS63260113A (en) | 1987-04-17 | 1987-04-17 | Magnetic field generating element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63260113A true JPS63260113A (en) | 1988-10-27 |
Family
ID=14110375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62094442A Pending JPS63260113A (en) | 1987-04-17 | 1987-04-17 | Magnetic field generating element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63260113A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6489173A (en) * | 1987-09-30 | 1989-04-03 | Fujitsu Ltd | Connecting method for superconducting component |
| US5525949A (en) * | 1991-06-19 | 1996-06-11 | Oxford Instruments (Uk) Ltd. | Energy storage device |
-
1987
- 1987-04-17 JP JP62094442A patent/JPS63260113A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6489173A (en) * | 1987-09-30 | 1989-04-03 | Fujitsu Ltd | Connecting method for superconducting component |
| US5525949A (en) * | 1991-06-19 | 1996-06-11 | Oxford Instruments (Uk) Ltd. | Energy storage device |
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