JPS63259807A - Production of magnetic head - Google Patents
Production of magnetic headInfo
- Publication number
- JPS63259807A JPS63259807A JP9400487A JP9400487A JPS63259807A JP S63259807 A JPS63259807 A JP S63259807A JP 9400487 A JP9400487 A JP 9400487A JP 9400487 A JP9400487 A JP 9400487A JP S63259807 A JPS63259807 A JP S63259807A
- Authority
- JP
- Japan
- Prior art keywords
- track width
- block
- magnetic material
- magnetic
- prescribed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000696 magnetic material Substances 0.000 claims abstract description 19
- 239000000956 alloy Substances 0.000 claims abstract description 8
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 7
- 238000005530 etching Methods 0.000 claims abstract description 4
- 230000035699 permeability Effects 0.000 claims description 6
- 230000004907 flux Effects 0.000 claims description 3
- 239000011162 core material Substances 0.000 claims 1
- 238000004804 winding Methods 0.000 abstract description 12
- 239000011521 glass Substances 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000011007 phosphoric acid Nutrition 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は最短記録波長が1μm以下の高密度磁気記録再
生を行うために必要な磁気ヘッドの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a magnetic head necessary for performing high-density magnetic recording and reproducing with a shortest recording wavelength of 1 μm or less.
[発明の概要〕
本発明の磁気ヘッドの製造方法は、高透磁率を有する酸
化物磁性材料、あるいは高透磁率、高飽和磁束密度を有
する合金磁性材料ブロックに、トラック溝を所定のトラ
ック幅よりも広い間隔で形成し、その後HCIあるいは
、H3PO4等によりエツチングすることにより所定の
トラック幅を得ることを特徴とする。[Summary of the Invention] The method for manufacturing a magnetic head of the present invention includes forming track grooves with a predetermined track width in a block of an oxide magnetic material having high magnetic permeability or an alloy magnetic material having high magnetic permeability and high saturation magnetic flux density. It is characterized in that the tracks are formed at wide intervals and then etched using HCI, H3PO4, etc. to obtain a predetermined track width.
従来の磁気ヘッドの製造方法を嶌7図がら溶11図を用
いて説明する。A conventional method of manufacturing a magnetic head will be explained with reference to Figures 7 and 11.
まず、酸化物磁性材料あるいは合金磁性材料のブロック
1に内部巻線溝2と外部巻線溝3をダイシングソー等の
切削加工により付す。続いて、トラック溝4′fニドラ
ック幅5の間隔で切削加工により加工を付す。次に、内
部巻線溝2とトラック溝4にガラス6を充填し、その後
7の部分のガラスを切削し、ギャップ対向面となる面を
鏡面に研磨する。その後、ギャップ材となる5i02等
をスパッタリング等により0.15μm程度形成し、2
つのブロックのギャップ対向面同士を付き合わせガラス
の部分を溶着し、8の部分よりt7I断することにより
第11図の様な磁気へラドチップを得る。First, an internal winding groove 2 and an external winding groove 3 are formed on a block 1 made of an oxide magnetic material or an alloy magnetic material by cutting using a dicing saw or the like. Subsequently, the track grooves 4'f are machined by cutting at intervals of the track width 5. Next, the internal winding groove 2 and the track groove 4 are filled with glass 6, and then the glass in the portion 7 is cut, and the surface facing the gap is polished to a mirror finish. After that, a gap material such as 5i02 is formed with a thickness of about 0.15 μm by sputtering etc., and 2
The gap-opposing surfaces of the two blocks are brought together and the glass portions are welded together, and then cut at point 8 at t7I to obtain a magnetic held tip as shown in FIG. 11.
上記従来の磁気ヘッドの製造方法において、トラック溝
等を加工する場合、ダイシングソー等の切削加工により
磁性材料に、加工表面から2〜3μmの部分に大きな加
工歪が大きな加工歪が入った部分では磁気特性が大幅に
劣化してしまう。特に、トラック幅を形成する部分(以
後トラック部分とする。)では、加工歪が入った部分は
有効に作用しないため、有効トラック幅が所定のトラッ
ク幅より狭くなってしまう。有効トラック幅の減少によ
り、再生出力も減少してしまうという問題点がある。In the above-mentioned conventional magnetic head manufacturing method, when processing track grooves, etc., the magnetic material is cut with a dicing saw, etc., and a large processing strain occurs in the area 2 to 3 μm from the processing surface. Magnetic properties will deteriorate significantly. Particularly, in the part forming the track width (hereinafter referred to as track part), the part where processing strain has occurred does not work effectively, so the effective track width becomes narrower than the predetermined track width. There is a problem in that as the effective track width decreases, the reproduction output also decreases.
[問題点を解決するだめの手段〕
本発明の磁気ヘッドの製造方法は、高透磁率を有する酸
化物磁性材料、あるいは高透磁率、高飽和磁束密度を有
する合金磁性材料ブロックに、トラック溝を所定のトラ
ック幅よりも広い間隔で形成し、その後HCIあるいは
、H3PO4等によりエツチングすることにより所定の
トラック幅を得ることを特徴とする。[Means for Solving the Problems] The method for manufacturing a magnetic head of the present invention involves forming track grooves in a block of oxide magnetic material having high magnetic permeability or alloy magnetic material having high magnetic permeability and high saturation magnetic flux density. It is characterized in that it is formed at intervals wider than a predetermined track width, and then etched with HCI, H3PO4, etc. to obtain a predetermined track width.
[作 用]
本発明によれば、トラック幅を形成する部分の全幅が有
効に記録・再生時に作用するため、高出力の磁気ヘッド
を得ることができる。特に、狭トラツク幅の磁気ヘッド
の場合、本発明による効果が顕著にあられれる。[Function] According to the present invention, since the entire width of the portion forming the track width effectively acts during recording and reproduction, a high-output magnetic head can be obtained. Particularly, in the case of a magnetic head with a narrow track width, the effects of the present invention are noticeable.
本発明の実施例を第1図から嘉6図を用いて説明する。 Embodiments of the present invention will be described using FIGS. 1 to 6.
1ず、酸化物磁性材料、あるいは合金磁性材料のブロッ
ク9に、内部巻線溝1oと外部巻線溝を加工する。次に
、第2図の様にトラック溝12を所定のトラック幅より
も6μm程度広い間隔13で形成する。次に、このよう
にして加工されたブロック’k、HCIやH3P O4
gft、 ’jf”用いてエツチングすることにより、
3μm程度エツチングして、第3図の様にトラック部分
をトラック幅13がら所定のトラック幅14にする。First, an internal winding groove 1o and an external winding groove are formed in the block 9 made of oxide magnetic material or alloy magnetic material. Next, as shown in FIG. 2, track grooves 12 are formed at intervals 13 about 6 μm wider than the predetermined track width. Next, the block processed in this way, HCI or H3P O4
By etching using gft and 'jf',
Etching is performed by about 3 μm to change the track width from 13 to a predetermined track width 14 as shown in FIG.
その後、ガラス15をモールドし、ギヤツブ対向面を鏡
面状に研磨し、その部分にギャップ材となるSiO2等
をスパッタリング等の方法により0.15μm程度形成
する。この様にして得られた2つのブロックをギヤツブ
対向面同士付き合わせガラス溶着することにより君5図
の様なブロックを得る。その後テープ摺動面に曲率をつ
け、16部分より切断することによシ汚6図の様な磁気
へラドチップを得る。Thereafter, glass 15 is molded, the surface facing the gear is polished to a mirror finish, and a gap material such as SiO2 is formed on that part to a thickness of about 0.15 μm by sputtering or the like. The two blocks obtained in this manner are joined together with their gear facing surfaces and glass welded to obtain a block as shown in Figure 5. Thereafter, a curvature is applied to the sliding surface of the tape and the tape is cut from 16 parts to obtain a magnetic radial tip as shown in Fig. 6.
本発明によれば、トラック幅方向の加工歪を除去するこ
とができ、高出力の磁気ヘッドを得ることができる。According to the present invention, processing distortion in the track width direction can be removed, and a high-output magnetic head can be obtained.
第1図から第6図は、本発明の磁気ヘッドの製造方法の
一実施例を示す図である。第7図から第11図は、従来
の磁気ヘッドの製造方法の一実施例を示す図である。
に酸化物磁性材料あるいは合金磁性材料2:内部巻線溝
3:外部巻線溝 4ニドラツク溝 5:所定の
トラック幅 6:ガラス 7:内部巻線溝 8:
切断ライン9二酸化物磁性材料、あるいは、合金磁性材
料10:内部巻線溝 11:外部巻線溝12ニドラッ
ク溝 13:所定のトラック幅方向6μmの幅 1
4:所定のトラック幅15ニガラス 16:切断ライ
ン
代理人 弁理士 杉 山 毅 至(他1名)1N開昭
63−259807(3)
14 q
第21!1
n rl
亡 OM第V凶 完Op
第9図
第10阻
第11図1 to 6 are diagrams showing an embodiment of the method for manufacturing a magnetic head of the present invention. 7 to 11 are diagrams showing an example of a conventional method for manufacturing a magnetic head. Oxide magnetic material or alloy magnetic material 2: Internal winding groove 3: External winding groove 4 Ni track groove 5: Predetermined track width 6: Glass 7: Internal winding groove 8:
Cutting line 9 Dioxide magnetic material or alloy magnetic material 10: Internal winding groove 11: External winding groove 12 Nidrach groove 13: Width of 6 μm in predetermined track width direction 1
4: Predetermined track width 15 Nigarasu 16: Cutting line agent Patent attorney Takeshi Sugiyama (and 1 other person) 1N Kaisho 63-259807 (3) 14 q 21st!1 n rl
Death OM No. V Kyou Complete OP Figure 9
Claims (1)
高飽和磁束密度を有する合金磁性材料をコア材料として
用いる磁気ヘッドの製造方法において、前記磁性材料ブ
ロックにトラック幅を得るための溝を所定のトラック幅
より広い間隔で形成し、その後、HCIあるいはH_3
PO_4等によりエッチングすることにより所定のトラ
ック幅を得ることを特徴とする磁気ヘッドの製造方法。1. In a method for manufacturing a magnetic head using an oxide magnetic material having high magnetic permeability or an alloy magnetic material having high magnetic permeability and high saturation magnetic flux density as a core material, grooves for obtaining a track width are formed in the magnetic material block in a predetermined manner. HCI or H_3
A method for manufacturing a magnetic head, characterized in that a predetermined track width is obtained by etching with PO_4 or the like.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9400487A JPS63259807A (en) | 1987-04-16 | 1987-04-16 | Production of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9400487A JPS63259807A (en) | 1987-04-16 | 1987-04-16 | Production of magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63259807A true JPS63259807A (en) | 1988-10-26 |
Family
ID=14098277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9400487A Pending JPS63259807A (en) | 1987-04-16 | 1987-04-16 | Production of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63259807A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005026180A1 (en) | 2003-09-08 | 2005-03-24 | Ube Industries, Ltd. | PROCESS FOR PRODUCTION OF TRIALKOXYHALOSILANES, PROCESS FOR PRODUCTION OF ALKOXY(DIALKYLAMINO)SILANES, CATALYSTS FOR (CO)POLYMERIZATION OF α-OLEFINS, CATALYST COMPONENTS THEREFOR, AND PROCESSES FOR POLYMERIZATION OF α-OLEFINS WITH THE CATALYSTS |
US7238758B2 (en) | 2002-08-19 | 2007-07-03 | Ube Industries, Ltd. | Catalysts for polymerization or copolymerization of α-olefins, catalyst components thereof, and processes for polymerization of α-olefins with the catalysts |
-
1987
- 1987-04-16 JP JP9400487A patent/JPS63259807A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7238758B2 (en) | 2002-08-19 | 2007-07-03 | Ube Industries, Ltd. | Catalysts for polymerization or copolymerization of α-olefins, catalyst components thereof, and processes for polymerization of α-olefins with the catalysts |
EP3020738A2 (en) | 2002-08-19 | 2016-05-18 | Toho Titanium Co., Ltd. | Catalyst and catalyst component thereof |
WO2005026180A1 (en) | 2003-09-08 | 2005-03-24 | Ube Industries, Ltd. | PROCESS FOR PRODUCTION OF TRIALKOXYHALOSILANES, PROCESS FOR PRODUCTION OF ALKOXY(DIALKYLAMINO)SILANES, CATALYSTS FOR (CO)POLYMERIZATION OF α-OLEFINS, CATALYST COMPONENTS THEREFOR, AND PROCESSES FOR POLYMERIZATION OF α-OLEFINS WITH THE CATALYSTS |
US7396951B2 (en) | 2003-09-08 | 2008-07-08 | Ube Industries, Ltd. | Process for production of trialkoxyhalosilanes |
US7396950B2 (en) | 2003-09-08 | 2008-07-08 | Ube Industries, Ltd. | Process for production of trialkoxyhalosilanes |
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