JPS63256358A - Measuring device for dimension in grinding - Google Patents

Abstract

PURPOSE:To measure a dimension with high accuracy in the way of grinding by providing a cover member which is not brought in contact with the second tracing needle at least in the region of the outer circumference of the second tracing needle of the first tracing needle abutting to the upper surface of a table and the second tracing needle abutting to the upper surface of a work piece mounted on the table. CONSTITUTION:The second tracing needle 11 has a cover member 19 covering the whole region of the outer circumference thereof in such a way so as not to be in contact with the second tracing needle 11. In the way of grinding a work piece 13 with a grindstone 15 while supplying cooling water for grinding from a cooling pipe 18, the grinding is stopped once so that the first tracing needle 10 and the second tracing needle 11 are abutted to the upper surfaces of a table 12 and the work piece 13 respectively. The displacement of the second tracing needle 8 is measured as the thickness of the work piece 13. In this case, even if the temperature in the cooling wafer for grinding rises by the frictional heat of the grinding and then flows out as high temperature water, the flow is cut off by the cover member 19 so as not to be in contact with the second tracing needle 11. Therefore, the temperature of both tracing needles 10 and 11 are equal to each other so as to enable measurement with high accuracy while the rolling of the tracing needle 11 caused by the flow is eliminated.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to grinding dimensions during grinding when grinding the upper surface of a workpiece such as a semiconductor wafer or a ceramic substrate placed on a table with a grindstone. This invention relates to a grinding dimension measuring device for measuring.

(Prior art) When grinding the upper surface of a workpiece such as a semiconductor wafer or a ceramic substrate, the workpiece is rotated on a table and a grindstone is fed down a fixed distance from above. Measure the dimensions, and if the predetermined amount has not been ground 5, for example, feed the grinding wheel a fixed amount again and lower it.
I'm trying to re-grind it.

The measurement of the grinding dimension is performed by a grinding dimension measuring device. This has a first stylus that contacts the top surface of the table and a second stylus that contacts the top surface of the workpiece, and the amount of vertical displacement of the second stylus with respect to the first stylus. It is configured to measure. During grinding, frictional heat is generated in the workpiece due to grinding, so cooling water for grinding or the like is supplied to the upper surface of the workpiece to cool the workpiece.

[Problems to be solved by the invention] By the way, cooling the workpiece with cooling water for grinding can suppress the temperature rise of the workpiece to some extent, but on the other hand, the cooling water turns into high-temperature water and flows out. When applied to the second stylus, the temperature of the second stylus increases considerably. For this reason, the first
A large temperature difference will occur between the stylus and the second stylus, and a difference in linear expansion will occur between the stylus. Then, in a grinding dimension measuring device configured to measure the amount of displacement in the vertical direction, there is a problem in that the measurement accuracy is slightly deteriorated. Further, when water pressure due to high temperature water is applied to the second stylus, this may cause the second stylus to take a horizontal image, which similarly causes a problem in that measurement accuracy deteriorates.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a grinding dimension measuring device that can accurately measure grinding dimensions during grinding.

[Means for solving problems]

A first aspect of the grinding dimension measuring device according to the present invention is that the first stylus contacts the top surface of the table, and the second stylus contacts the top surface of the workpiece placed on the table. The present invention is characterized in that at least the second stylus is provided with a cover member in its outer peripheral region that does not come into contact with the second stylus.

Further, a second aspect of the grinding dimension measuring device according to the present invention is as follows:
Of the first stylus that contacts the top surface of the table and the second stylus that contacts the top surface of the workpiece placed on the table, at least the second stylus contacts the second stylus. The device is characterized in that it has a cover member that covers the entire outer periphery of the device, and is configured to allow gas or liquid to flow into the cover member from top to bottom.

[Effect]

The first aspect of the grinding dimension measuring device according to the present invention is configured as described above, so that when grinding the upper surface of the workpiece on the table, the temperature of the cooling water for grinding increases due to the frictional heat caused by the grinding. However, even if the high-temperature water flows out, this flow is blocked by the cover member and does not touch the second stylus.

Therefore, the temperature of the second stylus does not rise significantly compared to the first stylus, and the second stylus does not oscillate laterally due to the water flow.

Further, a second aspect of the grinding dimension measuring device according to the present invention is as follows:
Since the structure is as described above, the flow of high temperature water is blocked by the cover member in the same way as in the first aspect. Further, the gas or liquid flowing inside the cover member from top to bottom flows out through the gap between the lower edge of the cover member and the upper surface of the workpiece, and this flow directs the flow of high-temperature water to the second stylus. The second touch button acts to lower the temperature of the second touch button.

〔Example〕

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In addition, in the explanation of the drawings, the same elements are given the same reference numerals,
Omit duplicate explanations.

FIG. 1 is a perspective view of a grinding dimension measuring device according to an embodiment. As shown in the figure, this grinding dimension measuring device 1 includes a base 2, a support 3 erected on the base 2, a movable member 4 externally fitted on the support 3 so as to be able to move vertically, and the movable member 4. A measuring device main body 6 is fixed to the measuring device main body 6 via a connecting member 5, a first arm 7 and a second arm 8 are connected to the measuring device main body 6 so as to be movable in the vertical direction, and the first arm 7, the second arm 8, and 2
The first stylus 10° and the second stylus are respectively fixed to the tip of the arm 8.
It has a stylus 11. The second stylus 11 is surrounded by a force bar member 19. Here, the measuring device main body 6 includes a support mechanism (not shown) that supports the first arm 7 and the second arm 8 such that they can be displaced in the vertical direction, and a detection device that electrically converts and outputs the amount of displacement U. A container (not shown) is built-in.

When measuring the grinding dimension, the tip of the first stylus 10 is brought into contact with the top surface of the table 12, and the tip of the second stylus 11 is placed on the workpiece 13 (for example, a semiconductor wafer) placed on the table 12. , ceramic substrate, etc.). On the other hand, when grinding the upper surface of the workpiece 13, the workpiece 13 is rotated on the table 12, and the grinding wheel 15
This is carried out by feeding and lowering a fixed amount from above via the descending shaft 16. As a result, the entire upper surface of the workpiece 13 is ground, but during this time, the cooling pipe 18 is always used to grind the workpiece 13.
Cooling water for grinding is supplied to the top surface of the machine.

FIG. 2 is a perspective view showing a main part of the first embodiment of the grinding dimension measuring device according to the present invention.

As illustrated in FIG. For example, it consists of a cylindrical ceramic pipe.
As shown in FIG. 2(b), it may be a cylindrical ceramic pipe with a longitudinal opening 20 on the negative side, or it may be a ceramic plate with a cross section bent into a substantially V-shape as shown in FIG. 2(C). . In addition, in the case of FIGS. 3(b) and 3(C), the opening side is arranged downstream of the flow of cooling water for grinding.

Next, the operation of the grinding dimension measuring device according to the above embodiment will be explained.

While grinding the workpiece 13 with the grindstone 15 while supplying cooling water for grinding from the cooling pipe 18, the grinding is temporarily stopped and the first stylus 10 and the second stylus 11 are moved to the table 12 and the workpiece, respectively. It is brought into contact with the upper surface of the workpiece 13. Since the first arm 7 and the second arm 8 are each supported so as to be displaceable in the vertical direction, the second arm 8 is displaced upward by the thickness of the workpiece 13, and with this amount of displacement, the dimension already ground is is measured via the measuring device main body 6. When the predetermined amount of grinding is not completed, for example, the grindstone 15 is sent downward by a fixed distance to perform re-grinding.

During grinding, the temperature of the workpiece 13 rises due to frictional heat, and the grinding cooling water is heated by this heat and flows out as high-temperature water. However, according to this embodiment, the flow of high temperature water is blocked by the cover member 19 and the second stylus 1
1 without directly touching the first stylus 10 and the second stylus 1.
1 is maintained at approximately the same temperature, and therefore the line portions of both hands are equal, making it possible to measure with high precision.

FIG. 3 is a sectional view of essential parts showing the configuration and operation of the second embodiment of the grinding dimension measuring device according to the present invention.

As shown in the figure, gas or liquid is configured to flow into the cover member 19 from top to bottom as shown by arrow A. Here, as the gas or liquid, one having a constant temperature and a low temperature is suitable, and cold water is suitable.

Next, the operation of this second aspect will be explained.

As shown in FIG. 3, the flow of gas or liquid flowing from top to bottom within the cover member 19 (arrow A) repels the flow of high temperature water (arrow B) away from the stylus 11. , and this flow (arrow A) lowers the temperature of the second stylus 11. Therefore, the amount of linear expansion of both hands becomes equal, and it is possible to measure with -II accuracy.

The present invention is not limited to the above-mentioned embodiments, and various modifications are possible.

For example, the cover member 19 can be provided not only on the outer periphery of the second stylus 11 but also on the outer periphery of the first stylus 10. This is particularly effective when the heated high-temperature water flows also at the position of the first stylus 10.

〔Effect of the invention〕

As explained above in detail, according to the grinding dimension measuring device according to the present invention, at least the second stylus of both stylus is cut off from the flow of heated high-temperature water, and this second stylus has no excess water. No more high temperature water.

Therefore, there is almost no difference in the amount of linear expansion between the first stylus and the second stylus, and there are effects such as enabling highly accurate measurement.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment of a grinding method measuring device according to the present invention, FIGS. 2(a) to (C) are perspective views of a cover member,
FIG. 3 is a sectional view showing a main part of a second embodiment of the grinding dimension measuring device according to the present invention. 1.... Grinding dimension measuring device, 6... Measuring device main body,
7...First arm, 8...Second arm, 10...
First stylus, 11... Second stylus, 12... Table,
13...Workpiece, 15...Whetstone, 19...Cover member. Fig. 1 (a) (b) (c) Cover member of the embodiment Fig. 2 Main part of the embodiment Fig. 3

Claims (1)

[Scope of Claims] 1. A first stylus that comes into contact with the top surface of a table, and a second stylus that comes into contact with the top surface of a workpiece placed on the table, the first stylus In the grinding dimension measuring device that measures the grinding dimension of the workpiece ground on the table based on the amount of vertical displacement of the second stylus with reference to A grinding dimension measuring device characterized in that the needle is provided with a cover member in its outer peripheral region that does not come into contact with the second stylus. 2. The grinding dimension measuring device according to claim 1, wherein the cover member is a cylindrical ceramic pipe. 3. The grinding dimension measuring device according to claim 1, wherein the cover member is a cylindrical ceramic pipe having a longitudinal opening on one side. 4. The grinding dimension measuring device according to claim 1, wherein the cover member is a ceramic plate bent into a substantially V-shaped cross section. 5. The first stylus contacts the top surface of the table, and the second stylus contacts the top surface of the workpiece placed on the table, and the first stylus contacts the first stylus as a reference. In the grinding dimension measuring device that measures the grinding dimension of the workpiece ground on the table based on the amount of vertical displacement of two stylus, at least the second stylus among the two stylus
A grinding dimension measuring device comprising a cover member that covers the entire outer circumference of the stylus without contacting the stylus, and is configured to allow gas or liquid to flow from top to bottom within the cover member. .