JPS63253508A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To execute pattern formation only by the magnetic core forming stage, to execute others by machining stages and to improve reliability and strength by forming a synthetic magnetic material layer on a substrate in a lamination stage for a magnetic head and forming magnetic cores by lamination of photoresists and pattern formation, then executing lamination of glass material layers and head gaps. CONSTITUTION:The amorphous magnetic Ca-Nb-Zr-Ta system layer 13 is formed on the magnetic film forming surface 12a of the substrate 12 consisting of a nonmagnetic material and the magnetic core 15 is formed via a protective film 14 on the layer 13 and is worked to form the 2nd magnetic head substrate 17. The layers of the magnetic core 20 and the glass material 16 are also formed on the magnetic film forming surface on the 1st substrate 19 formed with a groove 18 for disposing a winding to form the 1st magnetic head substrate 22. The head gap 23 consisting of the nonmagnetic material having a prescribed thickness is formed on the substrates 17, 22 and the substrates are bonded in such a manner that the track parts 24 of the cores 15, 20 face each other to form a gap bar 25 which is cut at a gap 26 for the winding; thereafter, the winding 29 is wound on the cut pieces and the magnetic heads 27, 28 are obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a magnetic head which is effective for use in magnetic recording and reproduction.

Conventional technology In recent years, magnetic recording technology has rapidly progressed toward higher densities, and recording media are becoming increasingly high in coercive force using fine alloy powder media. Alloy magnetic materials such as sendust and amorphous materials having density are used.

For example, 2-channel, 1-head thin film heads using various alloy magnetic materials are being considered as recording and reproducing heads for electronic still cameras (for example, Uemura et al., "Thin Film Magnetic Head for Electronic Still Cameras", Institute of Electrical Communication Engineers of Japan). Technical report MR84
-85 reference).

Hereinafter, a method of manufacturing the above-mentioned conventional thin film head will be described with reference to the drawings.

FIGS. 3a and 3b are a front view and a cross-sectional view of a main part of a conventional thin film head, respectively.

This thin film head has a lower core 2 formed of a thin film of an alloy magnetic material such as sendust on a flat surface of a non-magnetic ferrite substrate 1, and then a layer of a head gap material 3 such as silicon dioxide (Sin, 2) formed. , a first interlayer insulating layer 4 thereon. First coil layer6. Second interlayer insulating layer 6. Second coil layer7. After the third interlayer insulating layer 8 is sequentially laminated, the upper core 9 of the alloy magnetic material is formed.

Furthermore, aluminum oxide (AIJz) is added to the upper layer of this upper core 9.
After forming a protective film 10 using a material such as OS), adhering an upper non-magnetic ferrite substrate 11 on top of the protective film 1o, the head chip is constructed by cutting the head chip into a predetermined size.

Problems to be Solved by the Invention However, in the above-mentioned conventional method for manufacturing a thin film magnetic head, it is necessary to successively laminate different materials and repeat pattern formation by etching or the like. For this reason, there are various problems such as cracks and chemical reactions caused by differences in the physical and chemical properties of various materials, and reliability problems due to delamination and adhesion and insulation caused by materials that are weak in strength and temperature such as resin. Furthermore, there were various problems such as problems in mass production due to the difficulty of the manufacturing process.

The present invention solves the above-mentioned problems, and aims to provide a method for manufacturing a magnetic head that improves workability and product reliability.

Means for Solving Interlayer Points In order to achieve the above object, the method for manufacturing a magnetic head of the present invention provides a method for manufacturing a magnetic head in which the windings of a first base body are provided with winding grooves made of a non-magnetic material having a substantially rectangular parallelepiped shape. A step of mirror-finishing one plane of a second base made of a non-magnetic material having a substantially rectangular parallelepiped shape and a surface provided with a wire arrangement groove, and forming a synthetic magnetic material layer on the mirror surfaces of the first and second bases. a step of coating a photoresist on the synthetic magnetic material layer of at least one of the first and second substrates, and a step of baking a pattern of a predetermined shape on the photoresist to form a protective film of the photoresist. a step of removing the synthetic magnetic material layer that does not face the lower part of the protective film by etching to form a pair of magnetic cores having tracks; filling the surface having the magnetic cores with a glass material; a step of mirror-finishing the surface filled with glass material until it reaches a predetermined thickness; and mirror-finishing or composite of at least one of the first and second substrates provided with the mirror-finished magnetic core or synthetic magnetic material layer. forming a head gap made of a non-magnetic material to a predetermined thickness on a magnetic material layer; and bonding the first and second substrates together via the head gap with the magnetic cores facing each other to form a gap bar. forming a winding gap between the pair of magnetic cores that is substantially orthogonal to the surface of the gap bar containing the magnetic core and has a depth that reaches the winding groove; a step of cutting the gap bar into a predetermined shape; and a step of arranging the windings for each of the two magnetic heads consisting of the magnetic core and the head gap through the winding groove and the winding gap. It has the following.

According to the above manufacturing method, the lamination step includes laminating a synthetic magnetic material layer on a substrate, a photoresist, and a glass material layer after forming a magnetic core by patterning.

The process consists of laminating the head gap, and pattern formation is only required in the process of forming the magnetic core, and the rest is formed by machining. The number of processes for high-precision patterns is reduced, and mass productivity is improved. Furthermore, since the number of laminated parts is reduced, cracks and delaminations are less likely to occur, and the substrates can be joined by glass welding, improving reliability and strength.

EXAMPLE Hereinafter, a method of manufacturing a magnetic head according to an example of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view illustrating a method of manufacturing a magnetic head according to a first embodiment of the present invention.

In FIG. 1, first, the magnetic film forming surface 12 & of the second substrate 12 made of a non-magnetic material such as nickel oxide-magnesium oxide-titanium oxide (NiO-MgO-Ti02) is polished to a mirror finish (FIG. 1a), and then A cobalt-nio7''-zirconium-tantalum (Go-Wb-Zr-Ta) based amorphous magnetic material layer 13 is formed on the magnetic film forming surface 121L by sputtering (FIG. 1b). A photoresist 14 is coated on the Wb-Zr-Ta based amorphous magnetic material layer 13.
In FIG. 1g), a mask pattern is baked on the photoresist 14 using ultraviolet rays, and unnecessary photoresist 14 is removed by baking and rinsing to form a protective film 14' of the photoresist 14 (FIG. 1d).

Next, the unnecessary portion of the Go-Wb-Zr-Ta based amorphous magnetic material layer 13 that does not correspond to the lower part of the protective film 141 is removed by etching (Fig. 1e), and then the protective film 14' is removed using a resist stripper. to form a pair of magnetic cores 15 (FIG. 1fχ) Next, the magnetic cores 1
After melting and filling the glass material 16 on the magnetic film forming surface 12 & on which the magnetic core 16 is formed, mirror processing is performed so that the magnetic core 16 has a predetermined thickness to form a second magnetic head base 17 ( Figure 1g).

On the other hand, a pair of magnetic cores 20° and a layer of glass material 21 are similarly formed on the magnetic film forming surface of the first base body 19 in which the winding groove 18 is formed, and the first magnetic head base body 22 is formed. form (Fig. 1 h).

Next, 5i0
A non-magnetic material layer 23 such as No. 2 is formed by sputtering to a predetermined thickness, and the track portions 24, 24' of each magnetic core 15, 20 are joined so as to face each other, using the non-magnetic material layer 23 as a head gap. are integrated to form a gapper 25 (FIG. 1i).

Next, the winding gap 26, which has a depth D that intersects the magnetic core 16, 20 and the glass material 16, 21 layer of the gapper 26 at a substantially right angle and reaches the winding groove 18, is opened with a pair of magnetic wires. formed between the core 15.20 and the glass material 16.
The magnetic core 15 is perpendicular to the layer 21 and approximately parallel to the winding gap 26.
．． The portion where 20 does not exist is cut to a predetermined size at the position indicated by the two-dot chain line in FIG. 1j, and a single magnetic head is constructed (FIG. 1j).

Next, through the winding arrangement groove 18 and the winding gap 26, the windings 29 are independently arranged for the two magnetic heads 27 and 28 of the single magnetic head, and the two magnetic heads 27 and 28 are independently arranged. The manufacturing process of the head is completed (Fig. 1k).

According to the above example, compared to the conventional method of forming a multilayer structure by laminating different materials, the number of laminated layers is reduced, and as a result, cracks and delamination caused by differences in material properties are reduced, and product reliability is improved. This not only improves performance, but also facilitates unit work in the manufacturing process, improving workability.

Next, a second embodiment of the present invention will be described with reference to FIG. - First, the second magnetic head base 17 is constructed in the same manner as described in the first embodiment by the steps shown in FIGS. 1a to 1g.

Next, regarding the first magnetic head base 30, Go, 7Nb-Zr-
A Ta-based amorphous magnetic material layer 33 is formed and configured.

Go-Nb-Zr-T of the first magnetic head base 3o
A nonmagnetic material layer 34 of a predetermined thickness is formed as a head gap on top of either the a-based amorphous magnetic material layer 33, the magnetic core 15 of the second magnetic head base 17, or the glass material 16 layer. The first magnetic head base 30 and the second magnetic head base 17 are integrally joined via the magnetic material layer 34 to form a gear knob bar.

Thereafter, the winding gap 26 is formed in the same manner as in the first embodiment, and the winding groove 31 and the winding gap 36 are passed through.
The windings 29 are arranged independently for each of the two heads, and the manufacturing process for the two magnetic heads is completed.

In FIG. 2, reference numeral 34 denotes a convex portion provided on the glass layer 16 in order to reinforce the bond between the first magnetic head base body 17 and the second magnetic head base body 17.

According to the above-mentioned second embodiment, since the step of patterning the magnetic core is reduced, workability is improved and a manufacturing method with high mass productivity can be realized.

Effects of the Invention According to the present invention, the lamination step includes a step of forming a synthetic magnetic material layer on the mirror surfaces of the first and second substrates, and a step of forming a synthetic magnetic material layer on at least one of the first and second substrates. a step of applying a photoresist on the layer, a step of filling the surface having the magnetic core with a glass material, and a step of forming a head gap on the mirror surface or synthetic magnetic material layer of at least one of the first and second substrates. Since the manufacturing method includes a process of baking a pattern in a predetermined shape, that is, a pair of magnetic core shapes, onto photoresist as a pattern forming process, the number of laminated layers and the number of pattern forming steps are reduced, and as a result, the number of layers is reduced. The probability of peeling, cracking, or defects due to chemical reactions is reduced, improving yield and product reliability. Furthermore, since the lamination process and pattern forming process are reduced, and all other processes are formed by machining, workability is improved, and as a result, mass productivity is also improved.

[Brief explanation of drawings]

FIG. 1A is a perspective view showing the manufacturing process of a magnetic head to which the method of manufacturing a magnetic head of the first embodiment of the present invention is applied;
FIG. 2 is a perspective view showing the manufacturing process of a magnetic head to which the method of manufacturing a magnetic head according to the second embodiment of the present invention is applied, and FIGS. 3a and 3b are magnetic heads to which the conventional method of manufacturing a magnetic head is applied. FIG. 2 is a front view and a sectional view of a main part. 12.19...Substrate, 12&...Magnetic film forming surface, 13...Go-Wb-Zr-Ta
system amorphous magnetic material layer, 15...magnetic core,
16...Glass material, 17°22...Magnetic head base, 18...Winding arrangement groove, 2o...
...Magnetic core, 23...Nonmagnetic material layer (head gap), 24.24'...Track portion, 25...Gap bar, 26... ...Gap for winding, 27.28...Magnetic head, 29...
... Winding wire, 3o ... Magnetic head base, 31
......Winding arrangement groove, 32...Base body, 33
. . . Go-Nb-Zr-Ta-based amorphous magnetic material layer, 34 . . . Non-magnetic material layer (head gap). Name of agent: Patent attorney Toshio Nakao and 1 other person No. 3
Diagram (a) Do (b) Jinko -1 summary
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Claims (1)

[Claims] A method for manufacturing a magnetic head that integrally comprises two magnetic heads that maintain a predetermined distance on a sliding surface with a recording medium and have respective head gaps disposed on substantially the same straight line, the method comprising: The surface of the first base body provided with the winding groove groove made of a rectangular parallelepiped-shaped non-magnetic material and one plane of the second base body made of a substantially rectangular parallelepiped-shaped non-magnetic material are mirror-finished. a step of processing, a step of forming a synthetic magnetic material layer on the mirror surfaces of the first and second substrates, and a synthetic magnetic material layer of at least one of the synthetic magnetic material layers of the first and second substrates. a step of applying a photoresist on the photoresist, a step of baking a pattern of a predetermined shape on the photoresist to form a protective film of the photoresist, and removing the synthetic magnetic material layer that does not face the lower part of the protective film by etching. a step of forming a pair of magnetic cores having tracks, filling a surface with the magnetic core with a glass material, and mirror-finishing the surface filled with the glass material until the magnetic core reaches a predetermined thickness; forming a head gap made of a non-magnetic material to a predetermined thickness on the mirror surface on which the magnetic core is disposed or on the synthetic magnetic material layer of at least one of the first and second substrates on which the synthetic magnetic material layer is provided; a step of forming a gap bar by joining the first and second base bodies together with the head gap in between and with the magnetic core facing each other; and forming a winding gap between a pair of magnetic cores with a depth that reaches the winding groove, cutting the gap bar into a predetermined shape, and forming a winding gap deep enough to reach the winding groove. A method for manufacturing a magnetic head comprising the step of disposing windings for each of two magnetic heads consisting of the magnetic core and head gap through a winding gap.