JPS63249934A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS63249934A
JPS63249934A JP8372387A JP8372387A JPS63249934A JP S63249934 A JPS63249934 A JP S63249934A JP 8372387 A JP8372387 A JP 8372387A JP 8372387 A JP8372387 A JP 8372387A JP S63249934 A JPS63249934 A JP S63249934A
Authority
JP
Japan
Prior art keywords
tape
cleaning
time
decreased
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8372387A
Other languages
Japanese (ja)
Inventor
Kaji Maezawa
可治 前澤
Kidai Nochi
能智 紀台
Shigeki Kawase
茂樹 河瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8372387A priority Critical patent/JPS63249934A/en
Publication of JPS63249934A publication Critical patent/JPS63249934A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To decrease head clogging and drop-outs and so that tape damages are decreased by subjecting the front and rear faces of a vapor deposited tape to solvent cleaning and plasma cleaning at the time of producing the tape. CONSTITUTION:The front and rear faces of the vapor deposited tape are cleaned by combining the wet cleaning with an org. solvent or the like and dry cleaning such as plasma discharge treatment to remove the deposits and transferred matter which are contaminants and to clean the front and rear faces at the time of producing said tape. The drop-out of the initial time are thereby decreased to 1/5-1/8 the value prior to the cleaning and the clogging time at the time of repetitive traveling is also decreased to about 1/50 value in the case of using this tape as, for example, a tape for videos. In addition, the generation of noises is lessened in still characteristic and the tape damages are decreased as well.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、磁気記録媒体の製造方法に関するもので、特
に高密度記録媒体である蒸着テープの製造時に、テープ
の表裏面を湿式および乾式洗浄する磁気記録媒体の製造
方法に関するものである。
Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for manufacturing a magnetic recording medium, and in particular, when manufacturing a vapor-deposited tape, which is a high-density recording medium, the front and back surfaces of the tape are wet- and dry-cleaned. The present invention relates to a method of manufacturing a magnetic recording medium.

(従来の技術) 近年、磁気記録媒体は、磁気記録密度の向上に見られる
ように、その技術的発展はめざましいものがある。従来
の磁気記録媒体の例としてオーディオ、ビデオ用テープ
の材料に用いられるγ−Fe203粉末、CrO2粉末
、純鉄粉末等を樹脂等のバインダーとともに高分子フィ
ルム」二に塗着せしめた、いわゆる塗布型の磁気記録媒
体がある。しかし、従来の塗布型テープより保磁力、記
録密度。
(Prior Art) In recent years, the technological development of magnetic recording media has been remarkable, as seen in the improvement of magnetic recording density. An example of conventional magnetic recording media is the so-called coating type, in which γ-Fe203 powder, CrO2 powder, pure iron powder, etc., which are used as materials for audio and video tapes, are coated on a polymer film along with a binder such as resin. There are several magnetic recording media. However, it has higher coercive force and recording density than conventional coated tape.

電磁変換特性を改良するため、真空蒸着法、メッキ、イ
オンブレーティング、スパッタリング等の方法でFe 
、 Ni 、 Co 、 Cr 、等の磁性金属を単独
、もしくは合金で高分子フィルム基板上に蒸着する金属
薄膜型磁気記録媒体の検討がなされている。また強磁性
金属薄膜型記録媒体として、斜方入射蒸着法を用いたオ
ーディオ用テープが既に実用化されている。
In order to improve the electromagnetic conversion characteristics, Fe is
2. Description of the Related Art Metal thin film type magnetic recording media in which magnetic metals such as , Ni, Co, Cr, etc., alone or in an alloy, are deposited on a polymer film substrate have been studied. Furthermore, as a ferromagnetic metal thin film type recording medium, an audio tape using an oblique incidence deposition method has already been put into practical use.

強磁性金属薄膜型テープは真空蒸着法等に見られるよう
にテープの表面性は従来の塗布型テープと比較して非常
にすぐれ、数百Å以下の表面性を維持することも可能で
ビデオ用テープとして利用した場合、ノイズの少ないカ
ラー出力の高い、高画質が得られる。しかし表面性を良
くすると画質は改善されるが、記録再生時にヘッドとテ
ープの摩擦係数は上昇し、走行が不安定となり、目づま
りが発生しやすく、スチルライフが短い。また表面性を
良くすることで、テープ表面の汚染物質がドロップアウ
ト、目づまり発生の主要因となり、これらテープ表面の
汚染物質の低減が急務とされる。第2図は従来の蒸着テ
ープの製造工程を示す。
The surface properties of ferromagnetic metal thin film tapes, as seen in vacuum evaporation methods, are much superior to those of conventional coated tapes, and it is possible to maintain surface properties of several hundred Å or less, making them ideal for video applications. When used as a tape, high image quality with low noise and high color output can be obtained. However, although improving the surface quality improves image quality, the coefficient of friction between the head and tape increases during recording and playback, making running unstable, clogging easily occurring, and still life short. In addition, by improving the surface properties, contaminants on the tape surface become the main cause of dropouts and clogging, and there is an urgent need to reduce these contaminants on the tape surface. FIG. 2 shows the manufacturing process of a conventional vapor deposition tape.

高分子フィルムに磁性金属を斜方蒸着し、該表裏面にコ
ーティング層を設けることで原反完成品となる。しかる
後、8mm幅に裁断し、インカセを行い、8ml11ビ
デオ用蒸着テープができあがる。第3図は従来の蒸着テ
ープの断面図を示すものである。
A finished product is obtained by obliquely depositing a magnetic metal onto a polymer film and providing a coating layer on the front and back surfaces. Thereafter, it is cut into 8 mm width and incased to complete an 8 ml 11 video vapor deposition tape. FIG. 3 shows a cross-sectional view of a conventional vapor deposition tape.

第3図において、1は高分子フィルム、2は高分子フィ
ルム1上に蒸着した強磁性金属、3は高分子フィルム1
の裏面に塗布したバックコーティング層、4は磁性金属
表面に塗布した潤滑剤、5゜6はテープ表面の汚染物質
の有機、無機材料の付着物を示す。
In Figure 3, 1 is a polymer film, 2 is a ferromagnetic metal deposited on the polymer film 1, and 3 is a polymer film 1.
4 is a lubricant applied to the surface of the magnetic metal, and 5°6 is the organic and inorganic contaminant deposits on the tape surface.

以」二のように構成された従来の蒸着テープの表面の汚
染物質の発生源として、製造工程における高分子フィル
ム、およびテープの切粉、蒸着時の磁性金属粉、および
テープを構成する各種材料中の不純物、製造時の雰囲気
中にあるダスト、機械および各種ローラからの汚染物質
が主因で、これらの汚染物質がテープ表面に付着または
転写されるものである。汚染物質は、有機、無機の多岐
にわたり、その粒子径も1μm以下から数百pmまで広
範囲にわたる。
Sources of contaminants on the surface of conventional vapor deposition tapes configured as described above include polymer films during the manufacturing process, tape chips, magnetic metal powder during vapor deposition, and various materials that make up the tape. The main causes are impurities in the tape, dust in the atmosphere during manufacturing, and contaminants from machines and various rollers, and these contaminants are attached to or transferred to the tape surface. There are a wide variety of contaminants, both organic and inorganic, and their particle sizes range widely from 1 μm or less to several hundred pm.

このような汚染物質を含んだ蒸着テープは、例えば繰返
し走行時に、RF出力の低下、ヘッド目づまり、ドロッ
プアラ1〜の増加の要因となり画像の乱れを生じる。ま
た、スチル特性においてもノイズの増加、目づまりおよ
びテープ損傷を与える要因になる。
A vapor-deposited tape containing such contaminants, for example, causes a decrease in RF output, head clogging, and an increase in drop errors, resulting in image disturbance during repeated running. Furthermore, in still characteristics, it becomes a factor that increases noise, causes clogging, and damages the tape.

(発明が解決しようとする問題点) このように上記従来の製造工程でできた蒸着テープの表
裏面は多くのコンタミをうけ、汚染物質を含有するため
ヘッド目づまり、ドロップアウト。
(Problems to be Solved by the Invention) As described above, the front and back surfaces of the vapor-deposited tape produced by the above-mentioned conventional manufacturing process are subject to a lot of contamination and contain contaminants, resulting in head clogging and dropouts.

テープ損傷等の問題点を有していた。There were problems such as damage to the tape.

本発明は」二記問題点に鑑み、テープ表面を洗浄し、汚
染物質を少なくすることで、ヘッド目づまり、ドロップ
アウトを低減し、テープ損傷を少なくする蒸着テープの
製造方法を提供するものである。
In view of the above problems, the present invention provides a method for manufacturing a vapor-deposited tape that reduces head clogging, dropouts, and tape damage by cleaning the tape surface and reducing contaminants. be.

(問題点を解決するための手段) 上記問題点を解決するために本発明の磁気記録媒体の製
造方法は、蒸着テープの製造時に、高分子フィルムまた
は高分子フィルムに磁性金属を蒸着した該表裏面を湿式
洗浄と乾式洗浄とを行う。
(Means for Solving the Problems) In order to solve the above-mentioned problems, the method for manufacturing a magnetic recording medium of the present invention provides a method for manufacturing a magnetic recording medium of the present invention, in which a polymer film or a polymer film on which a magnetic metal is vapor-deposited is produced. Perform wet cleaning and dry cleaning on the back side.

(作 用) 本発明は蒸着テープの製造時に、有機溶媒等の湿式洗浄
とプラズマ放電処理等の乾式洗浄を組合せることでテー
プ表裏面を洗浄し、汚染物質である付着物、転写物を除
去し、表裏面を清浄にする。
(Function) When producing a vapor-deposited tape, the present invention cleans the front and back surfaces of the tape by combining wet cleaning using an organic solvent and dry cleaning such as plasma discharge treatment to remove deposits and transfers that are contaminants. and clean the front and back sides.

この結果例えばビデオ用テープとして使用する場合、初
期時のドロップアウトは洗浄前に比べも1150位の値
になり、かっスチル特性についてもノイズの発生が低減
され、テープ損傷も少なくなる。
As a result, when used as a video tape, for example, the initial dropout value becomes about 1150 points compared to before cleaning, noise generation is reduced in the still characteristics, and tape damage is also reduced.

更に詳しくは、従来のテープ表面は多種多様の付着物が
ついており、これら付着物の元素分析を行うと、無機系
元素として、Na+に+Mg+Ca、A6.Ti。
More specifically, the surface of conventional tapes has a wide variety of deposits, and elemental analysis of these deposits reveals that they are inorganic elements such as Na+, +Mg+Ca, A6. Ti.

Fe、Co、Nj +Cr、Cu、Zn等が検出され、
それらの金属の化合物として、C2○、 F 、 P 
、 S 、CQが見られる。
Fe, Co, Nj +Cr, Cu, Zn, etc. were detected,
As compounds of those metals, C2○, F, P
, S, and CQ are seen.

また有機系化合物としては、C,H,N、F、Cff、
S。
In addition, organic compounds include C, H, N, F, Cff,
S.

Si、P等を含有した成分が検出される。これら元素を
含む付着物質として主なものは、ベースフィルムである
ポリエステル、磁性金属、空気中のダスト、および各種
製造装置からの発生物質である。
Components containing Si, P, etc. are detected. The main adhered substances containing these elements are polyester as the base film, magnetic metals, dust in the air, and substances generated from various manufacturing equipment.

また、蒸着テープ表面の汚染物質の多くは製造時に付着
、転写される。例えばスリット工程においてはテープ構
成材料である、ポリエステル、磁性金属、バックコート
材料、滑剤等が検出される。
Furthermore, many of the contaminants on the surface of the vapor deposition tape are attached and transferred during manufacturing. For example, in the slitting process, tape constituent materials such as polyester, magnetic metal, back coat material, lubricant, etc. are detected.

またポリエステルについては、フィルムメーカから入荷
時にすでに付着しており、磁性金属については、蒸着時
の汚染、および真空破壊時に発生する磁性金属粉体の付
着が主因である。蒸着テープの製造はクリーンルーム内
で行われるが、空気中の浮遊物じん、人体から発生する
汚染物質はさけられない。製造装置からの発生源として
は金属ローラ、ゴムローラ、ベルトなどのフィルム駆動
機構からの摩擦および転写による汚染が多い。これら汚
染物質の大きさ、形状は広範囲で複雑である。
In addition, for polyester, it is already attached when the film is received from the film manufacturer, and for magnetic metal, the main causes are contamination during vapor deposition and adhesion of magnetic metal powder generated when the vacuum is broken. Vapor-deposited tape is manufactured in a clean room, but airborne dust and pollutants generated by the human body cannot be avoided. The most common sources of contamination from manufacturing equipment are friction and transfer from film drive mechanisms such as metal rollers, rubber rollers, and belts. These pollutants come in a wide range of sizes and shapes and are complex.

またその粒径は1p以下から100/ffi以上にもわ
たる。付着物質は溶媒抽出等で形状のない抽出成分も検
出される。これらの汚染物質が単独、あるいは混合する
ことで、ドロップアウト、目づまり、スチル時のノイズ
発生の原因になっている。本発明の製造方法はこれらテ
ープ表面の汚染物質を低減することで、ビデオテープと
して必要な前記諸特性を改善する。
Moreover, the particle size ranges from less than 1 p to more than 100/ffi. As for attached substances, extracted components without shape can also be detected by solvent extraction. These contaminants alone or in combination cause dropouts, clogging, and noise during still recording. The manufacturing method of the present invention reduces the contaminants on the tape surface, thereby improving the various properties necessary for a videotape.

(実施例) 以下、本発明の実施例の磁気記録媒体の製造方法につい
て説明する。
(Example) Hereinafter, a method for manufacturing a magnetic recording medium according to an example of the present invention will be described.

実施例1 第1図は本発明の一実施例の製造工程図を示すものであ
る。図において(3)、(4)は本実施例の洗浄工程を
示し、他は従来例と同様である。本発明の一実施例にお
ける洗浄工程Aは溶媒液による湿式洗浄、洗浄工程Bは
放電処理により乾式洗浄を示す。500mm幅のポリエ
ステルフィルム上に磁性金属(Co−Nj、)を斜方蒸
着し、該表裏面をイソプロピルアルコールで洗浄後、乾
燥させ、次にアルゴンガス中のプラズマ放電処理で洗浄
する。この場合放電条件として、高周波(RF)電源を
用い、0、 Itorrの圧力下で行った。乾式洗浄後
、裏面に無機顔料、潤滑剤、バインダーの混合物をバッ
クコートし、表面に潤滑剤としてステアリン酸アミドを
塗布する。
Example 1 FIG. 1 shows a manufacturing process diagram of an example of the present invention. In the figure, (3) and (4) show the cleaning steps of this embodiment, and the rest are the same as the conventional example. In one embodiment of the present invention, cleaning process A is wet cleaning using a solvent solution, and cleaning process B is dry cleaning using electric discharge treatment. A magnetic metal (Co--Nj) is obliquely deposited on a 500 mm wide polyester film, and the front and back surfaces are washed with isopropyl alcohol, dried, and then cleaned by plasma discharge treatment in argon gas. In this case, the discharge conditions were a radio frequency (RF) power source and a pressure of 0. Itorr. After dry cleaning, the backside is backcoated with a mixture of inorganic pigment, lubricant, and binder, and the surface is coated with stearamide as a lubricant.

実施例2 実施例1と同じ構成で洗浄工程AとBを入れ換え、乾式
洗浄後に湿式洗浄を行う。その他諸条件については実施
例1と同一である。
Example 2 The cleaning steps A and B are replaced with the same configuration as in Example 1, and wet cleaning is performed after dry cleaning. Other conditions are the same as in Example 1.

実施例3 実施例1において蒸着後、バックコーティングを行い、
該表面を実施例1と同様の洗浄工程を経てフロントコ−
1〜を行う。構成材料、洗浄方法などの諸条件は実施例
1と同一である。
Example 3 After vapor deposition in Example 1, back coating was performed,
The surface was subjected to the same cleaning process as in Example 1, and then a front coating was applied.
Do 1~. Conditions such as constituent materials and cleaning method are the same as in Example 1.

実施例4 実施例1における洗浄工程AでIPAに換えてエチルア
ルコールを用いた。その他は実施例1と同じである。
Example 4 In the cleaning step A of Example 1, ethyl alcohol was used instead of IPA. The rest is the same as in Example 1.

実施例5 実施例1における洗浄工程Bでアルゴンガスに換え、酸
素ガスを用いた。他は実施例1と同じである。
Example 5 In the cleaning step B of Example 1, oxygen gas was used instead of argon gas. The rest is the same as in Example 1.

実施例6 実施例1における洗浄工程Bでアルゴンガスに換え、フ
ロンガス−酸素の混合ガス雰囲気中でのプラズマ処理を
行った。他は実施例1と同じである。
Example 6 In the cleaning step B of Example 1, plasma treatment was performed in a mixed gas atmosphere of chlorofluorocarbon gas and oxygen instead of using argon gas. The rest is the same as in Example 1.

以上のような製造方法で作った蒸着テープの諸性能と結
果について述べる。
The various performances and results of the vapor-deposited tape produced using the above manufacturing method will be described.

性能評価は市販の8mmビデオデツキを試験機として試
作し、信号記録後、初期のドロップアウト、およびスチ
ルライフについて調べ、テープの繰返し走行による耐久
性能はヘッド目づまり時間。
For performance evaluation, a commercially available 8mm video deck was prototyped as a test device, and after recording the signal, initial dropout and still life were investigated, and durability performance due to repeated tape running was measured by head clogging time.

RFの出力変動を測定することで評価した。ドロップア
ウトは0.5μsから50Ilsの大きさの範囲を一1
0dBの出力低下で測定した。測定結果はいずれも従来
例に対する相対比較を行った。
Evaluation was made by measuring RF output fluctuations. The dropout ranges in magnitude from 0.5 μs to 50 Ils.
Measured with 0 dB output reduction. All measurement results were compared relative to conventional examples.

代表的な測定結果を表に示す。Typical measurement results are shown in the table.

表 ドロップアウトは各大きさに対するドロップアウト数を
平均化し、従来例との相対比較を行った。
For table dropouts, the number of dropouts for each size was averaged and a relative comparison was made with the conventional example.

市販の8mmビデオデツキの試験機による繰返し走行時
でのヘッド目づまり、RF小出力変化は120分長チー
プで、200パスの繰返し走行することで評価した。R
F小出力変化は200パス走行時での出力の最大落込み
を、ヘッド目づまり時間は、目づまりのトータルを累積
し、100時間当りのレートに換算し、従来例と比較し
た。スチルライフの良否はノイズによって判定したが、
従来品ではノイズがあるのに対して、本発明のものでは
ノイズが発生しない。この結果テープ表裏面を湿式法、
乾式法で洗浄することでRF小出力低下は低減でき、ヘ
ッド目づまり、およびドロップアウトは大幅に減少する
ことが解った。
Head clogging and small RF output changes during repeated running using a commercially available 8mm video deck tester were evaluated by running 200 passes repeatedly with a 120 minute long cheap. R
The F small output change was the maximum drop in output during 200 passes, and the head clogging time was calculated by cumulating the total amount of clogging, converting it into a rate per 100 hours, and comparing it with the conventional example. The quality of still life was determined by noise.
While the conventional product has noise, the product of the present invention does not. As a result, the front and back sides of the tape were wet-processed.
It has been found that by cleaning using the dry method, small RF output drops can be reduced, and head clogging and dropouts can be significantly reduced.

次に本発明の実施例の効果を要因分析するため、テープ
洗浄前後の表面異物分析と洗浄後の分析を行った。その
結果、湿式洗浄においては付着物と洗浄後に可溶な抽出
物が見られ、また乾式洗浄においては表面有機物が除去
されていた。この結果本発明の実施例によれば、蒸着テ
ープの表裏面を溶媒で湿式洗浄し、そしてプラズマ放電
などの乾式洗浄することで、テープ表面の多種多様の汚
染物質を除去することで、ドロップアウト、ヘッド目づ
まり、およびRF出力の安定性を得ることができる。
Next, in order to analyze the factors contributing to the effects of the embodiments of the present invention, surface foreign matter analysis before and after tape cleaning and analysis after cleaning were performed. As a result, deposits and soluble extracts were observed in wet cleaning, and surface organic matter was removed in dry cleaning. As a result, according to the embodiment of the present invention, by wet-cleaning the front and back surfaces of the vapor-deposited tape with a solvent and then dry-cleaning using plasma discharge, etc., a wide variety of contaminants on the tape surface can be removed, resulting in dropout. , head clogging, and stability of RF output.

なお本発明は、上記実施例における洗浄工程に限定され
ることなく、他の方法も可能で、また洗浄溶媒について
も有機、無機溶媒あるいはその混合液を用いても良い。
Note that the present invention is not limited to the cleaning step in the above embodiments, and other methods are also possible, and organic, inorganic solvents, or a mixture thereof may be used as the cleaning solvent.

また乾式洗浄法についても上記実施例に限定することな
く他の方法も可能で、プラズマ処理ガスについても窒素
、空気、水素、メタン等の有機ガス、アンモニア、ある
いはフッ素系ガスを用いても同様の効果がある。
In addition, the dry cleaning method is not limited to the above example, and other methods are also possible, and the plasma processing gas may be nitrogen, air, hydrogen, organic gas such as methane, ammonia, or fluorine gas. effective.

(発明の効果) 以上のように本発明によれば、蒸着テープを溶媒、プラ
ズマ洗浄することで、テープ表面の付着物を除去し、ド
ロップアウト、ヘッド目づまり、スチルライフが改善さ
れるといった優れた効果を得ることができる。
(Effects of the Invention) As described above, according to the present invention, by cleaning a vapor-deposited tape with a solvent and plasma, deposits on the tape surface can be removed and dropouts, head clogging, and still life can be improved. You can get the same effect.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の磁気記録媒体の製造方法を
示す工程図、第2図は従来の磁気記録媒体の製造方法を
示す工程図、第3図は従来のテープ構成を示す断面図で
ある。 特許出願人 松下電器産業株式会社 第1図 第2図 第3図 ら
FIG. 1 is a process diagram showing a method for manufacturing a magnetic recording medium according to an embodiment of the present invention, FIG. 2 is a process diagram showing a conventional method for manufacturing a magnetic recording medium, and FIG. 3 is a cross-sectional diagram showing a conventional tape structure. It is a diagram. Patent applicant Matsushita Electric Industrial Co., Ltd. Figure 1 Figure 2 Figure 3 et al.

Claims (1)

【特許請求の範囲】[Claims] 蒸着テープの製造時に、テープの表裏面を溶媒洗浄およ
びプラズマ洗浄することを特徴とする磁気記録媒体の製
造方法。
A method for manufacturing a magnetic recording medium, which comprises performing solvent cleaning and plasma cleaning on the front and back surfaces of the tape when manufacturing the vapor-deposited tape.
JP8372387A 1987-04-07 1987-04-07 Production of magnetic recording medium Pending JPS63249934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8372387A JPS63249934A (en) 1987-04-07 1987-04-07 Production of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8372387A JPS63249934A (en) 1987-04-07 1987-04-07 Production of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS63249934A true JPS63249934A (en) 1988-10-17

Family

ID=13810434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8372387A Pending JPS63249934A (en) 1987-04-07 1987-04-07 Production of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS63249934A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02162521A (en) * 1988-12-16 1990-06-22 Mitsubishi Kasei Corp Production of magnetic recording medium
JP2007265583A (en) * 2006-03-30 2007-10-11 Hoya Corp Manufacturing method of magnetic recording disk

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02162521A (en) * 1988-12-16 1990-06-22 Mitsubishi Kasei Corp Production of magnetic recording medium
JP2007265583A (en) * 2006-03-30 2007-10-11 Hoya Corp Manufacturing method of magnetic recording disk

Similar Documents

Publication Publication Date Title
JP2830544B2 (en) Magnetic recording media
US20050161427A1 (en) Method of working a workpiece containing magnetic material and method of manufacturing a magnetic recording medium
US5589263A (en) Magnetic recording medium having a ferromagnetic metal thin film, a dry etched layer, a carbonaceous film, and a lubricant film
JPS63249934A (en) Production of magnetic recording medium
JP4491934B2 (en) Method for manufacturing thin film magnetic recording medium
JP2761859B2 (en) Magnetic recording media
JPS62256227A (en) Production of magnetic recording medium
JPS62279521A (en) Production of magnetic recording medium
JPH0475577B2 (en)
JPS6019047B2 (en) Method for manufacturing magnetic recording media
JPH0566648B2 (en)
JPH0613335A (en) Method of plasma cvd for fabricating thin film
JPH01263915A (en) Magnetic recording medium
JPS6366727A (en) Production of magnetic recording medium
RU1777171C (en) Process of manufacture of carrier of magnetic audio recording
JP2953271B2 (en) Manufacturing method of magnetic recording medium
JPS60121520A (en) Magnetic recording medium
JP2977618B2 (en) Magnetic recording method
Yoshida et al. Reliability of obliquely deposited Co-O thin film with carbon protective layer
JPS6398823A (en) Magnetic recording medium and its production
JPH01196715A (en) Magnetic recording medium
JPH07238376A (en) Production of metallic thin film body and device therefor
JPS6361420A (en) Magnetic recording medium and its production
JPS61162824A (en) Production of magnetic recording medium
JPH10105959A (en) Magnetic recording medium