JPS6324260U - - Google Patents
Info
- Publication number
- JPS6324260U JPS6324260U JP11854586U JP11854586U JPS6324260U JP S6324260 U JPS6324260 U JP S6324260U JP 11854586 U JP11854586 U JP 11854586U JP 11854586 U JP11854586 U JP 11854586U JP S6324260 U JPS6324260 U JP S6324260U
- Authority
- JP
- Japan
- Prior art keywords
- target
- substrate
- sputtering
- spaced apart
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11854586U JPS6324260U (ar) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11854586U JPS6324260U (ar) | 1986-07-31 | 1986-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6324260U true JPS6324260U (ar) | 1988-02-17 |
Family
ID=31005097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11854586U Pending JPS6324260U (ar) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324260U (ar) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011084768A (ja) * | 2009-10-14 | 2011-04-28 | Stanley Electric Co Ltd | 成膜装置および強誘電体膜の製造方法 |
| JP2011149086A (ja) * | 2009-12-22 | 2011-08-04 | Canon Anelva Corp | スパッタリング装置及び電子デバイスの製造方法 |
-
1986
- 1986-07-31 JP JP11854586U patent/JPS6324260U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011084768A (ja) * | 2009-10-14 | 2011-04-28 | Stanley Electric Co Ltd | 成膜装置および強誘電体膜の製造方法 |
| JP2011149086A (ja) * | 2009-12-22 | 2011-08-04 | Canon Anelva Corp | スパッタリング装置及び電子デバイスの製造方法 |
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