JPS63242396A - Treatment of development waste liquid - Google Patents
Treatment of development waste liquidInfo
- Publication number
- JPS63242396A JPS63242396A JP62078308A JP7830887A JPS63242396A JP S63242396 A JPS63242396 A JP S63242396A JP 62078308 A JP62078308 A JP 62078308A JP 7830887 A JP7830887 A JP 7830887A JP S63242396 A JPS63242396 A JP S63242396A
- Authority
- JP
- Japan
- Prior art keywords
- waste liquid
- treatment
- insoluble inorganic
- tank
- developer waste
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002699 waste material Substances 0.000 title claims abstract description 30
- 239000007788 liquid Substances 0.000 title claims abstract description 24
- 239000010802 sludge Substances 0.000 claims abstract description 25
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims abstract description 22
- 239000011347 resin Substances 0.000 claims abstract description 15
- 229920005989 resin Polymers 0.000 claims abstract description 15
- 239000001506 calcium phosphate Substances 0.000 claims abstract description 9
- 229910000389 calcium phosphate Inorganic materials 0.000 claims abstract description 9
- 235000011010 calcium phosphates Nutrition 0.000 claims abstract description 9
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 claims abstract description 9
- 238000005273 aeration Methods 0.000 claims abstract description 5
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 25
- 150000002484 inorganic compounds Chemical class 0.000 claims description 10
- 229910010272 inorganic material Inorganic materials 0.000 claims description 10
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 239000011574 phosphorus Substances 0.000 claims description 6
- -1 phosphorus compound Chemical class 0.000 claims description 4
- 229940043430 calcium compound Drugs 0.000 claims description 3
- 150000001674 calcium compounds Chemical class 0.000 claims description 3
- 239000011790 ferrous sulphate Substances 0.000 claims description 2
- 235000003891 ferrous sulphate Nutrition 0.000 claims description 2
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 claims description 2
- RUTXIHLAWFEWGM-UHFFFAOYSA-H iron(3+) sulfate Chemical compound [Fe+3].[Fe+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O RUTXIHLAWFEWGM-UHFFFAOYSA-H 0.000 claims description 2
- 229910000359 iron(II) sulfate Inorganic materials 0.000 claims description 2
- 229910000360 iron(III) sulfate Inorganic materials 0.000 claims description 2
- 239000002253 acid Substances 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 239000003513 alkali Substances 0.000 abstract description 4
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 4
- 239000001110 calcium chloride Substances 0.000 description 4
- 229910001628 calcium chloride Inorganic materials 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 239000006228 supernatant Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 239000003504 photosensitizing agent Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 239000004254 Ammonium phosphate Substances 0.000 description 1
- 241000283986 Lepus Species 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910000148 ammonium phosphate Inorganic materials 0.000 description 1
- 235000019289 ammonium phosphates Nutrition 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- VSGNNIFQASZAOI-UHFFFAOYSA-L calcium acetate Chemical compound [Ca+2].CC([O-])=O.CC([O-])=O VSGNNIFQASZAOI-UHFFFAOYSA-L 0.000 description 1
- 239000001639 calcium acetate Substances 0.000 description 1
- 235000011092 calcium acetate Nutrition 0.000 description 1
- 229960005147 calcium acetate Drugs 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010612 desalination reaction Methods 0.000 description 1
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 1
- ZPWVASYFFYYZEW-UHFFFAOYSA-L dipotassium hydrogen phosphate Chemical compound [K+].[K+].OP([O-])([O-])=O ZPWVASYFFYYZEW-UHFFFAOYSA-L 0.000 description 1
- 235000019797 dipotassium phosphate Nutrition 0.000 description 1
- 229910000396 dipotassium phosphate Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 235000016709 nutrition Nutrition 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- ROUPZXDBSPQFLE-UHFFFAOYSA-N triazanium;phosphate;hydrate Chemical compound [NH4+].[NH4+].[NH4+].O.[O-]P([O-])([O-])=O ROUPZXDBSPQFLE-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
- Y02W10/10—Biological treatment of water, waste water, or sewage
Landscapes
- Activated Sludge Processes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は現像廃液の処理方法に関するものであり、詳し
くは半導体製造分野において、テトラメチルアンモニウ
ムハイドロオキサイド（以下、ＴＭＡＲと略す）を洗浄
剤に用いた、レジストの現像工程から排出される現像廃
液の活性汚泥処理法による工業的有利な処理方法に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for treating developer waste, and more specifically, in the field of semiconductor manufacturing, tetramethylammonium hydroxide (hereinafter abbreviated as TMAR) is used as a cleaning agent. The present invention relates to an industrially advantageous treatment method using an activated sludge treatment method for developing waste liquid discharged from a resist developing process.
ＴＭＡＲを用いたレジストの現像工程から排出される廃
液中には、ＴＭＡＲを主成分とし、他に少竜のレジスト
由来物（例えば、フェノール系樹脂、感光剤）を含んで
おり、高いｐＨ（例えば１０〜／弘）を示す。該廃液の
活性汚泥法による処理方法としては、処理槽内にアルカ
リを供給することにより、ＴＭＡＲの分解に伴い生成す
る酸を中和しながら、ＴＭＡＨの分解、無害化を行う方
法が知られている（例えば、造水技術ｖｏ１．／コ盃コ
／りｒ６ 乙ｊ〜ｔ７ページ）。The waste liquid discharged from the resist development process using TMAR contains TMAR as the main component, and also contains substances derived from Shoryu's resist (e.g., phenolic resin, photosensitizer), and has a high pH (e.g. 10~/Hiro). As a method for treating this waste liquid using the activated sludge method, there is a known method in which TMAH is decomposed and rendered harmless by supplying alkali into the treatment tank to neutralize the acid generated as a result of the decomposition of TMAR. (For example, Water Desalination Technology vol. 1./Korakeko/R.6 Otsuj-t7 pages).
しかしながら、この公知の方法では、ＴＭＡＲの分解は
良好に行われるが、上記廃液中に溶解するレジスト由来
物の除去には、何ら注目しておらず、従って、処理水々
質の向上には、他の処理法を併用する必要がある。However, although this known method decomposes TMAR well, it does not pay any attention to the removal of resist-derived substances dissolved in the waste liquid, and therefore, it is difficult to improve the quality of treated water. It is necessary to use other treatment methods together.
本発明は、前記問題点を解決するためになされたもので
あり、その要旨は、レジスト由来の樹目旨を含有するＴ
ＭＡＲ現像廃液を活性汚泥処理槽に供給して曝気条件下
にて処理するに当り、核処理槽のｐＨをｔ〜７．５に制
御すると共に不溶性無機化合物を存在させることを特徴
とするレジスト出来物含有、ＴＭＡＲ現像廃液の処理方
法である。The present invention has been made to solve the above problems, and the gist thereof is to provide T
MAR development waste liquid is supplied to an activated sludge treatment tank and treated under aeration conditions, and the pH of the nuclear treatment tank is controlled to t~7.5, and an insoluble inorganic compound is present. This is a method for treating TMAR developer waste solution containing substances.
以下、本発明の詳細な説明する。The present invention will be explained in detail below.
本発明で対象となる現像廃液は、ＴＭＡＨを主成分とし
、レジスト由来の樹脂、例えば、通常はフェノール樹脂
、感光剤等を含有（〜でいる。The developer waste solution that is the object of the present invention has TMAH as its main component and contains a resist-derived resin, such as usually a phenol resin, a photosensitizer, and the like.
これらの樹脂分の濃度は、ＴｏＣ換算で７０〜！ｒ ０
０ ｐｐｍである。また、現像廃液のｐＨはＴＭＡＨに
よって１０〜／グの高塩基性を呈している。The concentration of these resin components is 70~ in terms of ToC! r 0
It is 0 ppm. Further, the pH of the developer waste liquid exhibits a highly basic pH of 10 to 10 g/g due to TMAH.
本発明は、このような現［象廃液を公知の方法に従って
、活性汚泥処理槽に供給し曝気条件下にて処理すること
を基本とするものである。活性汚泥処理に利用する汚泥
としては、特に制限はないが、下水処理場等の汚泥を予
め該廃液で馴養処理して用いる。The present invention is based on the fact that the waste liquid from such a phenomenon is supplied to an activated sludge treatment tank and treated under aeration conditions according to a known method. The sludge used in activated sludge treatment is not particularly limited, but sludge from a sewage treatment plant or the like is used after being acclimatized with the waste liquid in advance.
活性汚泥処理は、通常汚泥槽に必須栄希塩として、不足
分の窒素源およびリン源を供給しながら運転されるが、
本発明方法では、処理対象の廃液中にＴＭＡＲとして十
分な窒素源が含まれているので、これについては別途供
給する必要はない。リン源としては、公知の方法と同様
に、例えば、リン酸、リン酸アンモニウム、リン酸水素
カリウム等が用いられる。Activated sludge treatment is normally operated while supplying the necessary nitrogen and phosphorus sources to the sludge tank as essential Sakae diluted salt.
In the method of the present invention, the waste liquid to be treated contains a sufficient nitrogen source as TMAR, so there is no need to separately supply this. As the phosphorus source, for example, phosphoric acid, ammonium phosphate, potassium hydrogen phosphate, etc. are used as in known methods.
また、本発明方法では、高塩基性の現像廃液を汚泥槽に
供給するが、該廃液中のＴＭＡＲの分解によって、主と
してＮｏ、；” １Ｎｏ；が生成し槽内ｐＨが酸性側に
低下する。よって本発明では、ＴＭＡＲ分解速度の高い
槽内ｐＨである６〜７．５を維持するために、通常アル
カリを添加してｐＨ制御を行うが、前記酸根の生成速度
が遅いような場合には、適宜酸を添加して槽内ｐＨを前
記範囲に制御する必要がある。アルカリとしては１通常
、水酸化ナトリウムが用いられるが、他に水酸化カルシ
ウム、炭酸ナトリウム等も用いられることがある。また
、酸としては、硫酸、塩酸等が用いられる。Further, in the method of the present invention, a highly basic developing waste liquid is supplied to the sludge tank, but due to the decomposition of TMAR in the waste liquid, No. 1No; is mainly produced, and the pH in the tank is lowered to the acidic side. Therefore, in the present invention, in order to maintain the pH in the tank of 6 to 7.5 at which the TMAR decomposition rate is high, alkali is usually added to control the pH, but in cases where the acid radical production rate is slow, It is necessary to control the pH in the tank within the above range by adding an appropriate acid.As the alkali, sodium hydroxide is usually used, but calcium hydroxide, sodium carbonate, etc. may also be used. Further, as the acid, sulfuric acid, hydrochloric acid, etc. are used.
更に、本発明では、活性汚泥処理槽内に、不溶性無機化
合物を共存させるが、これにより生物分解されない現像
廃液中の樹脂分を効率的に除去できるのである。すなわ
ち、樹脂分は廃液中では、溶解しており、それがため汚
泥との共沈作用によっても除去することは、はぼ不可能
である。また、廃液のｐＨを例えば≠以下にまで低下さ
せれば、不溶物として析出させることもできるが、ｐＨ
値が中性付近を外れると汚泥槽でのＴＭＡＨ分解速度が
低下するという問題が生じる。勿論、樹脂分の処理と、
ＴＭＡＨの処理とを別工程で実施することも不可能では
ないが、工程数の増加、ｐＨ調整の煩わしさ等があって
、工業的に有利な方法とはならない。Furthermore, in the present invention, an insoluble inorganic compound is allowed to coexist in the activated sludge treatment tank, which makes it possible to efficiently remove the resin component in the developer waste solution that is not biodegradable. That is, the resin component is dissolved in the waste liquid, and therefore it is almost impossible to remove it even by co-precipitation with the sludge. In addition, if the pH of the waste liquid is lowered to, for example, ≠ or below, it can be precipitated as an insoluble substance, but the pH
If the value deviates from around neutrality, a problem arises in that the TMAH decomposition rate in the sludge tank decreases. Of course, processing the resin,
Although it is not impossible to carry out the treatment of TMAH in a separate process, it is not an industrially advantageous method because the number of steps increases, the pH adjustment is troublesome, etc.
尚、本発明において、不溶性無機化合物にょシ溶解樹脂
分が除去できる理由は、必ずしも明らかではないが、お
そらく吸着現象によるものであり、特に後述するリン酸
カルシウム、硫酸アルミニウム等を用いた場合には、イ
オン的な吸着現象によるものと推定される。The reason why the dissolved resin content can be removed from insoluble inorganic compounds in the present invention is not necessarily clear, but it is probably due to an adsorption phenomenon. Especially when calcium phosphate, aluminum sulfate, etc., which will be described later, are used, ions are removed. It is presumed that this is due to a natural adsorption phenomenon.
不溶性無機化合物としては、特に制限はないが通常は、
リン酸カルシウム、硫酸アルミニウム、硫酸第１鉄、硫
酸第２鉄等が挙げられるが、少量の存在量で効果的なも
のは、リン酸カルシウム、硫酸アルミニウムであり、特
にリン酸カルシウムが好ましい。リン酸カルシウムとじ
ては、活性汚泥槽内に、塩化カルシウム、硝酸カルシウ
ム、酢酸カルシウム等の水溶性カルシウム化合物とリン
化合物を添加して該槽内で生成したものを用いることも
できる。この場合、リン化合物としては、必須栄養塩と
して供給されているものを利用でき、従って、過剰のリ
ン化合物を予め添加しである場合は、水溶性カルシウム
化合物のみを添加すれば足りる。There are no particular restrictions on insoluble inorganic compounds, but usually,
Examples include calcium phosphate, aluminum sulfate, ferrous sulfate, ferric sulfate, etc., but those that are effective in small amounts are calcium phosphate and aluminum sulfate, with calcium phosphate being particularly preferred. Calcium phosphate may also be produced in an activated sludge tank by adding a water-soluble calcium compound such as calcium chloride, calcium nitrate, calcium acetate, etc. and a phosphorus compound to the tank. In this case, the phosphorus compound that is supplied as an essential nutritional salt can be used, and therefore, if an excess of the phosphorus compound has been added in advance, it is sufficient to add only the water-soluble calcium compound.
前記不溶性の無機化合物の存在量は、これが多いほど樹
脂分の除去の点からは好ましいが、通常は、！０〜１０
，０００ ｐｐｍ、好ましくは２００〜／、０００ ｐ
ｐｍである。The larger the amount of the insoluble inorganic compound present, the better from the standpoint of removing resin components, but usually... 0-10
,000 ppm, preferably 200~/,000 p
It is pm.
本発明による活性汚泥処理法は連続法、回分法のいずれ
によっても実施できるが、現像廃液量が少量の場合は、
回分法によるのが有利である。回分法では、予め廃液を
中和処理した後、所定時間曝気処理してＴＭＡＨの分解
と樹脂分の除去を行い、汚泥を静置沈降抜上澄液を処理
水として中間パイプから抜き出す。また、樹脂分を捕捉
した不溶性無機化合物は、余剰汚泥と共に抜き出すのが
簡便である。The activated sludge treatment method according to the present invention can be carried out by either a continuous method or a batch method, but when the amount of developer waste liquid is small,
Preference is given to using the batch method. In the batch method, after the waste liquid is neutralized in advance, it is aerated for a predetermined period of time to decompose TMAH and remove the resin content, and the sludge is left to settle and the supernatant liquid is extracted from the intermediate pipe as treated water. Furthermore, it is convenient to extract the insoluble inorganic compound that has captured the resin content together with the excess sludge.
以下、実施例により、本発明をさらに詳細に説明する。 Hereinafter, the present invention will be explained in more detail with reference to Examples.
実施例／
容量ｊｔの処理槽に、予め馴養処理された汚泥と中和し
たレジスト廃液を各々コ、ｊｔずつ供給しさらに、リン
酸アンモニウム水和物３．６２量と、塩化カルシウム２
．ｔ♂？量を添加後、曝気処理を行った。汚泥濃度３０
００ ｐｐｍ、処理温度２０℃、槽内ｐＨ７，０で制御
し、３ｊ時間処理した。その後７時間静置して汚泥を沈
降分離した後、上澄液の分析を行った。得られた分析結
果を以下に示す。尚添加した塩化カルシウムから、計算
上ｊ ００ ｐｐｍのリン酸カルシウムが生成存在する
。Example: A treatment tank with a capacity of jt was supplied with sludge that had been acclimatized in advance and jt of neutralized resist waste liquid, and further, 3.62 amounts of ammonium phosphate hydrate and 200 g of calcium chloride were added.
．． t♂? After adding the amount, aeration treatment was performed. Sludge concentration 30
00 ppm, the treatment temperature was 20° C., and the pH inside the tank was controlled to be 7.0, and the treatment was carried out for 3j hours. After that, the sludge was allowed to stand for 7 hours to be separated by sedimentation, and then the supernatant liquid was analyzed. The analysis results obtained are shown below. It is calculated that j 00 ppm of calcium phosphate is generated from the added calcium chloride.
槽内初期＃に度
ＴＭＡＨタｊ Ｏｐｐｍ
樹脂分（ＴＯＣ換算）乙Ｏｐｐｍ
処理後上澄液
Ｔ Ｍ Ａ ＨＯ’、２ ｐｐｍ以下
樹脂分（Ｔｏｏ換算）１０ｐｐｍ
比較例／
実施例／において、塩化カルシウムを添加しないほかは
、全く同様に処理を行ったところ、上澄液の樹脂分（Ｔ
ＯＣ！換算）は！ Ｉ ｐｐｍであった。Initial # in the tank TMAH Ta J Oppm Resin content (TOC conversion) Oppm Supernatant liquid after treatment TMA HO', 2 ppm or less Resin content (Too conversion) 10 ppm In Comparative Example/Example/, calcium chloride was When the treatment was carried out in exactly the same manner except that no addition was made, the resin content of the supernatant (T
OC! Conversion) is! It was I ppm.
本発明において、現像廃液を処理するに当り、活性汚泥
槽内のｐＨを６〜７．３に制御することにより、高効率
かつ安定的に、ＴＭＡＲの完全な分解、無害化が行える
。さらに、該汚泥槽内に不溶性無機化合物を存在させる
ことによりレジスト由来の樹脂分が除去され、処理水々
質が向上する。In the present invention, by controlling the pH in the activated sludge tank to 6 to 7.3 when processing the developer waste, TMAR can be completely decomposed and rendered harmless with high efficiency and stability. Furthermore, by allowing the insoluble inorganic compound to exist in the sludge tank, resin components derived from the resist are removed, and the quality of the treated water is improved.
出 願 人 三菱化成工業株式会社 代 理 人 弁理士 長谷用 −ほか１名Sender: Mitsubishi Chemical Industries, Ltd. Representative: Patent Attorney Hase - 1 other person
Claims (4)
モニウムハイドロオキサイド現像廃液を活性汚泥槽に供
給し曝気条件下にて処理するに当り、該処理槽内のｐＨ
を６〜７．５に制御すると共に不溶性無機化合物を存在
させることを特徴とする現像廃液の処理法。(1) When a tetramethylammonium hydroxide developer waste solution containing resist-derived resin is supplied to an activated sludge tank and treated under aeration conditions, the pH in the treatment tank is
1. A method for treating a developer waste solution, which comprises controlling the pH value to 6 to 7.5 and allowing the presence of an insoluble inorganic compound.
ルミニウム、硫酸第１鉄または、硫酸第２鉄であること
を特徴とする特許請求の範囲第１項記載の現像廃液の処
理法。(2) The method for treating developer waste solution according to claim 1, wherein the insoluble inorganic compound is calcium phosphate, aluminum sulfate, ferrous sulfate, or ferric sulfate.
のカルシウム化合物とリン化合物とを供給して形成され
たものであることを特徴とする特許請求の範囲第２項記
載の現像廃液の処理方法。(3) The method for treating developer waste liquid according to claim 2, wherein the calcium phosphate is formed by supplying a water-soluble calcium compound and a phosphorus compound into an activated sludge treatment tank. .
範囲第１項ないし第３項のいずれかに記載の現像廃液の
処理方法。(4) The method for treating developer waste solution according to any one of claims 1 to 3, wherein the amount of the insoluble inorganic compound present is 50 to 10,000 ppm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62078308A JPH08235B2 (en) | 1987-03-31 | 1987-03-31 | Development waste treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62078308A JPH08235B2 (en) | 1987-03-31 | 1987-03-31 | Development waste treatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63242396A true JPS63242396A (en) | 1988-10-07 |
| JPH08235B2 JPH08235B2 (en) | 1996-01-10 |
Family
ID=13658301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62078308A Expired - Lifetime JPH08235B2 (en) | 1987-03-31 | 1987-03-31 | Development waste treatment method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08235B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009208012A (en) * | 2008-03-05 | 2009-09-17 | Japan Organo Co Ltd | Water treating method and water treating apparatus |
| JP2009226325A (en) * | 2008-03-24 | 2009-10-08 | Japan Organo Co Ltd | Water treatment method and water treatment apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56147695A (en) * | 1980-02-29 | 1981-11-16 | Linde Ag | Method and device for biologically purifying waste water |
| JPS5942094A (en) * | 1982-09-01 | 1984-03-08 | Green Kaken:Kk | Method for decreasing cod in waste liquid of x-ray photograph for medical purpose |
-
1987
- 1987-03-31 JP JP62078308A patent/JPH08235B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56147695A (en) * | 1980-02-29 | 1981-11-16 | Linde Ag | Method and device for biologically purifying waste water |
| JPS5942094A (en) * | 1982-09-01 | 1984-03-08 | Green Kaken:Kk | Method for decreasing cod in waste liquid of x-ray photograph for medical purpose |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009208012A (en) * | 2008-03-05 | 2009-09-17 | Japan Organo Co Ltd | Water treating method and water treating apparatus |
| JP2009226325A (en) * | 2008-03-24 | 2009-10-08 | Japan Organo Co Ltd | Water treatment method and water treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08235B2 (en) | 1996-01-10 |
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