JPS63236563A - Manufacturing of lb membranes - Google Patents
Manufacturing of lb membranesInfo
- Publication number
- JPS63236563A JPS63236563A JP62069337A JP6933787A JPS63236563A JP S63236563 A JPS63236563 A JP S63236563A JP 62069337 A JP62069337 A JP 62069337A JP 6933787 A JP6933787 A JP 6933787A JP S63236563 A JPS63236563 A JP S63236563A
- Authority
- JP
- Japan
- Prior art keywords
- surface pressure
- membrane
- film
- rate
- compression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000012528 membrane Substances 0.000 title abstract description 18
- 238000007906 compression Methods 0.000 claims abstract description 29
- 230000006835 compression Effects 0.000 claims abstract description 28
- 230000008859 change Effects 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 abstract description 13
- 230000007547 defect Effects 0.000 abstract description 8
- 230000004888 barrier function Effects 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 40
- 239000010410 layer Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012154 double-distilled water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000001165 hydrophobic group Chemical group 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、半導体あるいは分子デバイスの機能をになう
部分である薄膜の作製方法に関４し、単分子膜累積法、
すなわちラングミーアープロジェット法（ＬＢ法）を用
いるＬＢ膜作製法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for producing a thin film, which is a functional part of a semiconductor or molecular device, and includes a monolayer accumulation method,
That is, the present invention relates to a method for producing an LB film using the Langmier-Projet method (LB method).
従来の技術
ラングミュア・プロジェット法（ＬＢ法）は、分子層を
一層ずつ累積させることを可能にする技術である。その
方法は、親水基と疎水基で構成される分子を、支持液体
面例えば水面上に展開して単分子膜を形成し、その単分
子膜を固体膜と呼ばれる状態まで圧縮し、その膜を基板
上に引上げ累積させるものである。このため単分子膜を
どのように圧縮するかが、固体膜の出来具合、しいては
累積したＬＢ膜の配向性、欠陥の程度に強く影響する。BACKGROUND OF THE INVENTION The Langmuir-Prodgett method (LB method) is a technique that allows the accumulation of molecular layers layer by layer. In this method, molecules composed of hydrophilic and hydrophobic groups are spread on a supporting liquid surface, such as water, to form a monomolecular film, and the monomolecular film is compressed to a state called a solid film. It is pulled up and accumulated on the substrate. For this reason, how the monomolecular film is compressed strongly influences the quality of the solid film, as well as the accumulated orientation of the LB film and the degree of defects.
従来この圧縮過程は圧縮速度の一定の条件下で行われて
いた。Conventionally, this compression process was carried out under conditions of constant compression speed.
発明が解決しようとする問題点
従来の技術では、単分子膜の圧縮は圧縮速度を一定、す
なわち単位時間あたりの膜面積の減少を一定にして行な
われている。圧縮速度が一定では、圧縮速度をその時の
膜表面積で割った面積変化率は、圧縮にしたがって急激
に増大する。このため、従来の圧縮速度一定の条件では
累積のための表面圧付近では、表面圧が急激に上昇する
こととなり、これは平衡状態からのずれを起因するもの
であり、ＬＢ膜の欠陥等の原因となっている。Problems to be Solved by the Invention In conventional techniques, monomolecular membranes are compressed at a constant compression rate, that is, at a constant reduction in membrane area per unit time. When the compression speed is constant, the area change rate, which is the compression speed divided by the membrane surface area at that time, increases rapidly as the compression increases. Therefore, under the conventional condition of constant compression speed, the surface pressure increases rapidly near the surface pressure due to accumulation, and this is caused by deviation from the equilibrium state, and is caused by defects in the LB film, etc. It is the cause.
本発明は上記問題点を解決するためになされたもので、
より平衡に近い状態を保持しつつ欠陥の少ないＬＢ膜を
作製することを可能ならしめることを目的とするもので
ある。The present invention has been made to solve the above problems,
The purpose is to make it possible to produce an LB film with fewer defects while maintaining a state closer to equilibrium.
問題点を解決するための手段
本発明は上記目的を達成するもので支持液体（例えば水
）面上単分子膜を気体膜の状態からＬＢ膜の累積を行う
所定の表面圧状態まで圧縮する過程において、膜表面積
に対する表面圧の変化率（ｄπ／ｄ Ｓ） を測定し
、これを用いて圧縮速度を制御することにより、欠陥の
少ないＬＢ膜の作表を可能とするものである。Means for Solving the Problems The present invention achieves the above object, and includes a process of compressing a monomolecular film on the surface of a supporting liquid (e.g., water) from a gas film state to a predetermined surface pressure state in which an LB film is accumulated. In this method, the rate of change in surface pressure with respect to the film surface area (dπ/d S) is measured, and this is used to control the compression speed, thereby making it possible to tabulate LB films with fewer defects.
作 用
本発明は、上記のように単分子膜を圧縮する際の圧縮速
度を、膜の表面積に対する表面圧の変化率により制御し
ているため、単分子膜が気体膜状態から液体膜状態、固
体膜状態への顆次変化するにつれて、従来の圧縮速度一
定の条件の場合のような表面圧の上昇が急激になってゆ
き、配向状態に乱れが生じるという問題を解決すること
を可能にしている。Function The present invention controls the compression speed when compressing a monomolecular film by the rate of change in surface pressure with respect to the surface area of the film, as described above, so that the monomolecular film changes from a gas film state to a liquid film state, As the condyle changes to a solid film state, it is possible to solve the problem that the surface pressure rises rapidly and the orientation state becomes disordered as in the case of conventional conditions where the compression rate is constant. There is.
本発明の圧縮速度は、より好ましくは、膜表面に対する
表面圧の変化率の逆数に比例して制御することが望まし
い。この場合は表面圧の時間的変化は常に一定となり、
固体膜化する時の欠陥の発生が防止できる。More preferably, the compression speed of the present invention is controlled in proportion to the reciprocal of the rate of change in surface pressure with respect to the membrane surface. In this case, the temporal change in surface pressure is always constant,
It is possible to prevent defects from occurring when forming a solid film.
実施例 以下に本発明の実施例を図面を用いて詳細に説明する。Example Embodiments of the present invention will be described in detail below with reference to the drawings.
図は本発明の一実施例におけるＬＢ膜佳作製法具現化す
る装置の概要断面図である。The figure is a schematic cross-sectional view of an apparatus that embodies a method for producing an LB film according to an embodiment of the present invention.
図において１は形成された単分子膜、２は水槽、３は単
分子膜１を圧縮するだめのバリヤー、４はバリヤー３を
移動させる変速モーター、５はバリヤー３の動きに基づ
き単分子膜１の膜表面積を検出する膜面積検出器、６は
単分子膜１の表面圧を検出する表面圧検出器、７は単分
子膜１の圧縮速度を制御する圧縮制御装置である。In the figure, 1 is the formed monomolecular film, 2 is a water tank, 3 is a barrier for compressing the monomolecular film 1, 4 is a variable speed motor that moves the barrier 3, and 5 is a monomolecular film 1 based on the movement of the barrier 3. 6 is a surface pressure detector that detects the surface pressure of the monomolecular film 1 , and 7 is a compression control device that controls the compression speed of the monomolecular film 1 .
本装置は以下のように動作する。すなわち膜面積検出器
５によって得られた膜表面積と表面圧検出器６によって
得られた表面圧とを用い、圧縮制御装置７において表面
積に対する表面圧の変化率を求め、これに基づいて変速
モーターを制御しこれによりバリヤー３を移動させて単
分子膜１の圧縮速度を制御するよってしている。This device operates as follows. That is, using the membrane surface area obtained by the membrane area detector 5 and the surface pressure obtained by the surface pressure detector 6, the rate of change in surface pressure with respect to the surface area is determined in the compression control device 7, and the variable speed motor is controlled based on this. The compression speed of the monomolecular film 1 is controlled by moving the barrier 3.
次により具体的に述べる。This will be explained in more detail next.
ステアリン酸を１ｍｇ／ｃｃの濃度でベンゼンに溶かし
、５ｘｌＱ−’Ｍのｃｄ（、Ｉ！２を含む２回蒸留水上
に展開して単分子膜１を形成し、その面積−表面圧等温
線を膜面積検出器５及び表面圧検出器６を用いて測定し
た。表面圧が５ｍＮ／ｍ以上のところで比例定数を３．
５ ｍＮ／ ｍｉｎとして、面積に対する表面圧の変化
率の逆数に比例するように圧縮制御装置７を用いて単分
子膜１の圧縮速度を制御した。この結果、膜の崩壊圧は
７５ ｍ Ｎ ／ ｍ に達した。また、この方法に
より圧縮した後、ガラス基板上に２７層累積してＸ線回
折の測定を行ない。Stearic acid was dissolved in benzene at a concentration of 1 mg/cc and spread on double distilled water containing 5xlQ-'M cd (,I!2) to form a monomolecular film 1, and its area-surface pressure isotherm was It was measured using a membrane area detector 5 and a surface pressure detector 6.The proportionality constant was set to 3.
The compression speed of the monomolecular film 1 was controlled using the compression control device 7 so as to be 5 mN/min in proportion to the reciprocal of the rate of change in surface pressure with respect to area. As a result, the collapse pressure of the membrane reached 75 mN/m. Furthermore, after compression by this method, 27 layers were accumulated on a glass substrate and X-ray diffraction measurements were performed.
その回折強度、半値巾の解析を行った結果、膜が同一面
内で乱れたドメインは約１０チと見積られ、非常に均一
な膜を作製することができた。As a result of analyzing the diffraction intensity and half-width, it was estimated that the number of disordered domains within the same plane of the film was about 10, and a very uniform film could be produced.
比較のために、バリヤー３を一定の速度で移動させ、単
分子膜１の圧縮を一定速度で行った場合について記す。For comparison, a case will be described in which the barrier 3 is moved at a constant speed and the monomolecular film 1 is compressed at a constant speed.
圧縮速度一定の圧縮は、２０７ａ／ｍｉｎで行った。他
の条件は同じにして、面積−表面圧曲線を測定した。こ
の結果、膜の崩壊圧は４ Ｑ ｍ Ｎ ／ ｍ であ
った。また圧縮速度一定で圧縮した後、ガラス基板上に
２７層累積してＸ線回折の測定を行ない、その回折強度
、半値巾の解析を行った結果、膜が同一面内で乱れたド
メインは約５０％であった。Compression at a constant compression speed was performed at 207 a/min. The area-surface pressure curve was measured under the same conditions. As a result, the collapse pressure of the membrane was 4 Q m N/m. In addition, after compressing at a constant compression rate, we accumulated 27 layers on a glass substrate and measured the X-ray diffraction, and analyzed the diffraction intensity and half-width. As a result, the domains in which the film was disordered within the same plane were approximately It was 50%.
発明の効果
以上のように、本発明は、水面上単分子膜を気体膜の状
態からＬＢ膜の累積を行う所定の表面圧まで圧縮する際
に、圧縮速度を、表面積に対する表面圧の変化率による
制御を行うようにしたもので、崩壊圧が高く欠陥が少な
い累積が良好なＬＢ膜を得ることができる利点を有する
。Effects of the Invention As described above, the present invention provides a method for compressing a monomolecular film on a water surface from a gas film state to a predetermined surface pressure at which an LB film is accumulated. This method has the advantage that an LB film with high collapse pressure, few defects, and good accumulation can be obtained.
図は本発明の一実施例におけるＬＢ膜佳作製法具現化す
るだめの概要断面図である。
１・・・単分子膜、２・・・水槽、３・・・バリヤー、
４・・・変速モーター、５・・・膜面積検出器、６・・
・表面圧検出器、７・・・圧縮制御装置。The figure is a schematic cross-sectional view of a device embodying a method for producing an LB film according to an embodiment of the present invention. 1... Monomolecular film, 2... Water tank, 3... Barrier,
4... Variable speed motor, 5... Membrane area detector, 6...
- Surface pressure detector, 7... Compression control device.
Claims (2)
状態から所定の表面圧まで圧縮するに際し、圧縮速度を
、膜表面積に対する表面圧の変化率により制御すること
を特徴とするＬＢ膜作製法。(1) When compressing a monomolecular film formed on the support liquid surface from a gas film state to a predetermined surface pressure, the compression speed is controlled by the rate of change in surface pressure with respect to the film surface area. LB film production method.
逆数に比例させて制御することを特徴とする特許請求の
範囲第１項記載のＬＢ膜作製法。(2) The method for producing an LB film according to claim 1, characterized in that the compression speed is controlled in proportion to the reciprocal of the rate of change in surface pressure with respect to the film surface area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62069337A JPS63236563A (en) | 1987-03-24 | 1987-03-24 | Manufacturing of lb membranes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62069337A JPS63236563A (en) | 1987-03-24 | 1987-03-24 | Manufacturing of lb membranes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63236563A true JPS63236563A (en) | 1988-10-03 |
Family
ID=13399635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62069337A Pending JPS63236563A (en) | 1987-03-24 | 1987-03-24 | Manufacturing of lb membranes |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63236563A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01215373A (en) * | 1988-02-25 | 1989-08-29 | Toshiba Corp | Apparatus for producing thin organic film |
-
1987
- 1987-03-24 JP JP62069337A patent/JPS63236563A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01215373A (en) * | 1988-02-25 | 1989-08-29 | Toshiba Corp | Apparatus for producing thin organic film |
| JP2677587B2 (en) * | 1988-02-25 | 1997-11-17 | 株式会社東芝 | Organic thin film manufacturing equipment |
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