JPS6323629U - - Google Patents

Info

Publication number
JPS6323629U
JPS6323629U JP11784986U JP11784986U JPS6323629U JP S6323629 U JPS6323629 U JP S6323629U JP 11784986 U JP11784986 U JP 11784986U JP 11784986 U JP11784986 U JP 11784986U JP S6323629 U JPS6323629 U JP S6323629U
Authority
JP
Japan
Prior art keywords
detection circuit
output
discharge
circuit
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11784986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11784986U priority Critical patent/JPS6323629U/ja
Publication of JPS6323629U publication Critical patent/JPS6323629U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP11784986U 1986-07-30 1986-07-30 Pending JPS6323629U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11784986U JPS6323629U (enrdf_load_stackoverflow) 1986-07-30 1986-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11784986U JPS6323629U (enrdf_load_stackoverflow) 1986-07-30 1986-07-30

Publications (1)

Publication Number Publication Date
JPS6323629U true JPS6323629U (enrdf_load_stackoverflow) 1988-02-16

Family

ID=31003749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11784986U Pending JPS6323629U (enrdf_load_stackoverflow) 1986-07-30 1986-07-30

Country Status (1)

Country Link
JP (1) JPS6323629U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020052013A (ja) * 2018-09-28 2020-04-02 株式会社島津製作所 真空度検出装置、及び電子線照射システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020052013A (ja) * 2018-09-28 2020-04-02 株式会社島津製作所 真空度検出装置、及び電子線照射システム

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