JPS6323316A - 露光量制御方法 - Google Patents

露光量制御方法

Info

Publication number
JPS6323316A
JPS6323316A JP62146377A JP14637787A JPS6323316A JP S6323316 A JPS6323316 A JP S6323316A JP 62146377 A JP62146377 A JP 62146377A JP 14637787 A JP14637787 A JP 14637787A JP S6323316 A JPS6323316 A JP S6323316A
Authority
JP
Japan
Prior art keywords
value
exposure
shutter
time
exposure amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62146377A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0221131B2 (enrdf_load_stackoverflow
Inventor
Mitsugi Yamamura
山村　貢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62146377A priority Critical patent/JPS6323316A/ja
Publication of JPS6323316A publication Critical patent/JPS6323316A/ja
Publication of JPH0221131B2 publication Critical patent/JPH0221131B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62146377A 1987-06-12 1987-06-12 露光量制御方法 Granted JPS6323316A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62146377A JPS6323316A (ja) 1987-06-12 1987-06-12 露光量制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62146377A JPS6323316A (ja) 1987-06-12 1987-06-12 露光量制御方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55147090A Division JPS5771132A (en) 1980-10-21 1980-10-21 Exposure controlling system

Publications (2)

Publication Number Publication Date
JPS6323316A true JPS6323316A (ja) 1988-01-30
JPH0221131B2 JPH0221131B2 (enrdf_load_stackoverflow) 1990-05-11

Family

ID=15406337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62146377A Granted JPS6323316A (ja) 1987-06-12 1987-06-12 露光量制御方法

Country Status (1)

Country Link
JP (1) JPS6323316A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0221131B2 (enrdf_load_stackoverflow) 1990-05-11

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