JPS63232235A - Impregnated cathode and its manufacture - Google Patents
Impregnated cathode and its manufactureInfo
- Publication number
- JPS63232235A JPS63232235A JP62063794A JP6379487A JPS63232235A JP S63232235 A JPS63232235 A JP S63232235A JP 62063794 A JP62063794 A JP 62063794A JP 6379487 A JP6379487 A JP 6379487A JP S63232235 A JPS63232235 A JP S63232235A
- Authority
- JP
- Japan
- Prior art keywords
- cup
- point metal
- cathode
- electron
- melting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 229910052751 metal Inorganic materials 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 30
- 238000002844 melting Methods 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims abstract description 16
- 230000002093 peripheral effect Effects 0.000 claims abstract description 4
- 230000008018 melting Effects 0.000 claims description 24
- 239000000126 substance Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 12
- 238000003466 welding Methods 0.000 claims description 11
- 230000008016 vaporization Effects 0.000 abstract 2
- 230000004927 fusion Effects 0.000 abstract 1
- 239000011148 porous material Substances 0.000 abstract 1
- 238000009834 vaporization Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 150000004645 aluminates Chemical class 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 239000003870 refractory metal Substances 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 206010067482 No adverse event Diseases 0.000 description 1
- FQNGWRSKYZLJDK-UHFFFAOYSA-N [Ca].[Ba] Chemical compound [Ca].[Ba] FQNGWRSKYZLJDK-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Solid Thermionic Cathode (AREA)
Abstract
Description
【発明の詳細な説明】
［音盆トのヂ１１用昼野］
本発明は高電流密度カソードとして電子管等に用いられ
る含浸形カソードおよびその製造方法に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Hiruno for Sound Basin Di11] The present invention relates to an impregnated cathode used as a high current density cathode in electron tubes and the like, and a method for manufacturing the same.
高電流密度カソードとして使用される含浸形カソードは
、Ｂａ−Ｃａアルミネート等の電子放出物質が含浸され
たタングステン（Ｗ）、モリブデン（Ｍｏ）等の高融点
金属の多孔質からなるカソード基体と、タンタル（Ｔａ
） ＋ Ｍｏ等の高融点金属からなるカップと、Ｔａ
またはＭｏ等の高融点金属からなるカン−トスリーブと
を具備する。そして、カソード基体をカップに装着し、
このカソード基体の装着されたカップをカン−トスリー
ブの頂部に挿入し、カソードスリーブ側方からレーザ光
を照射してカソードスリーブ、カップ、カソード基体を
溶接固澹して形成される。An impregnated cathode used as a high current density cathode has a cathode base made of a porous metal with a high melting point such as tungsten (W) or molybdenum (Mo) impregnated with an electron-emitting substance such as Ba-Ca aluminate; Tantalum (Ta
) + cup made of high melting point metal such as Mo, and Ta
Or a cant sleeve made of a high melting point metal such as Mo. Then, attach the cathode substrate to the cup,
The cup with the cathode base mounted thereon is inserted into the top of the cant sleeve, and a laser beam is irradiated from the side of the cathode sleeve to weld and solidify the cathode sleeve, cup, and cathode base.
ところで、カソード基体は融点が３３７０℃のＷで形成
され、カップ及びカン−トスリーブは融点が２９４０℃
のＴ＆または融点が２６１７℃のＭ。By the way, the cathode base is made of W with a melting point of 3370°C, and the cup and cant sleeve are made of W with a melting point of 2940°C.
T& or M with a melting point of 2617°C.
で形成されているため、これらを溶接するには少なくと
も一方の金属の融点以上に溶接部を加熱する必要がある
。しかし、カソード基体には電子放出物質が含浸されて
いてこの電子放出物質は融点が１７００℃程度であるの
で、溶接時にこの電子放出物質が溶融、蒸発して溶接部
に穴があくことがあるという問題点があった。Therefore, in order to weld these metals, it is necessary to heat the weld to a temperature higher than the melting point of at least one of the metals. However, since the cathode substrate is impregnated with an electron-emitting substance and the melting point of this electron-emitting substance is approximately 1,700°C, this electron-emitting substance may melt and evaporate during welding, causing holes in the weld. There was a problem.
このような含浸形カソードを電子管に組み込み寿命試験
を行なったところ、カットオフ電圧が大幅に変化してし
まう現象がみられた。またこの電子管を分解調査したと
ころ、カソード基体がわずかな力でカップ及びスリーブ
から脱落してしまうことが判った。When such an impregnated cathode was incorporated into an electron tube and a life test was conducted, a phenomenon in which the cutoff voltage changed significantly was observed. Further, when this electron tube was disassembled and investigated, it was found that the cathode base fell off from the cup and sleeve with a slight force.
このよう表問題点に対処するために、例えば特開昭５９
−１０８２３号公報に示すようにカソード基体とカップ
の間に溶接材を介在させたり、また特開昭５９−１１１
２２２号公報に示すようにカソード基体の側壁部に凹部
を形成し、この凹部に対応するカップ及びカン−トスリ
ーブの部分にレーザ光を照射し溶融させて得られるカッ
プ及びカン−トスリーブの突出部と凹部の固着によυカ
ソード基体を固定する方法等が提案されている。In order to deal with such table problems, for example,
As shown in Japanese Patent Publication No. 10823, a welding material is interposed between the cathode substrate and the cup, and
As shown in Japanese Patent No. 222, a concave portion is formed in the side wall of the cathode base, and a protruding portion of the cup and cant sleeve obtained by irradiating and melting the portion of the cup and cant sleeve corresponding to the concave portion with a laser beam. A method of fixing the υ cathode substrate by fixing the concave portion has been proposed.
これらの方法は、いずれにおいても電子放出物質が含浸
された多孔性Ｗよシなるカソード基体。In all of these methods, the cathode substrate is made of porous W impregnated with an electron-emitting substance.
カップ及びカン−トスリーブを直接溶接することは困難
であるので、その改善案を提供するものであるが、これ
らの方法によっても強固に固着することができなかった
。Since it is difficult to directly weld the cup and cant sleeve, we have proposed an improvement plan, but even with these methods, it has not been possible to firmly fix the cup and cant sleeve.
本発明は前述した従来の問題に鑑みてなされたものでち
ゃ、その目的はカソード基体、カップおよびスリーブを
強固に溶接固着することができる含浸形カンードおよび
その製造方法を提供することにある。The present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to provide an impregnated cand and a method for manufacturing the same, in which a cathode substrate, a cup, and a sleeve can be firmly fixed by welding.
本発明による含浸形カンードは、高融点金属のカップ内
に挿入した多孔質焼結体に電子放出物質を含浸させたカ
ソード基体を収納する高融点金属のカップの周面に余剰
電子放射物質が存在しない構成としたものである。In the impregnated cando according to the present invention, an excess electron-emitting substance exists on the circumferential surface of a cup made of a high-melting point metal that houses a cathode substrate in which a porous sintered body is inserted into a cup made of a high-melting point metal and impregnated with an electron-emitting substance. This is a configuration in which this is not the case.
本発明による含浸形カソードの製造方法は、高融点金属
のカップ内に多孔質焼結体を挿入し、電子放出物質を含
浸させたカソード基体を収納する高融点金属のカップと
高融点金属の支持体との溶接に先立って予めカップの周
面に付着した余剰電子放出物質を除去するものである。The method for manufacturing an impregnated cathode according to the present invention includes inserting a porous sintered body into a cup made of a high melting point metal, and supporting the cup made of a high melting point metal that houses a cathode substrate impregnated with an electron emitting substance, and supporting the high melting point metal. This is to remove excess electron-emitting material that has adhered to the circumferential surface of the cup before welding it to the body.
本発明においては、カソード基体を挿入した高融点金属
のカップの周面に付着した余剰電子放出物質を除去する
ことにより、高融点金属のカップと高融点金属の支持体
との溶接時に電子放出物質が溶融、蒸発して溶接部に穴
あきが生ずるのを防止できる。また、高融点金属のカッ
プ表面に付着した電子放出物質がヒータ側に蒸発し、ヒ
ータの寿命を短かくすることを防止できる。In the present invention, by removing excess electron-emitting material adhering to the circumferential surface of the refractory metal cup into which the cathode substrate is inserted, the electron-emitting material can be removed during welding between the refractory metal cup and the refractory metal support. can prevent holes from forming in the welded area due to melting and evaporation. Further, it is possible to prevent the electron-emitting substance adhering to the surface of the high-melting-point metal cup from evaporating toward the heater and shortening the life of the heater.
以下、図面を用いて本発明の実施例を詳細に説明する。 Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明による含浸形カンードの一実施例を示す
図で同図（ａ）は縦断面図、同図（ｂ）は同図（ａ）の
Ａ−Ａ’線断面図である。同図において、１は高融点金
属として例えばタングステンの多孔質焼結体に電子放出
物質を含浸させたほぼペレット状のカソード基体、２は
カソード基体１を収納する高融点金属として例えばモリ
ブデン製のカップ（以下カップと称する）、３はカソー
ド基体１を収納したカップ２を上部に支持固定する高融
点金属として例えばタンタル製のカソードスリーブ（以
下スリーブと称する）、４はカソード基体１．カップ２
およびスリーブ３を一体的に固定するレーザ光５の照射
により溶接固着された溶接部、６はスリーブ３内にらせ
ん状に配置されてカソード基体１を加熱して電子放出を
行なうヒータである。1A and 1B are diagrams showing one embodiment of an impregnated cand according to the present invention, in which FIG. 1A is a longitudinal sectional view and FIG. 1B is a sectional view taken along the line AA' in FIG. In the figure, reference numeral 1 denotes a nearly pellet-shaped cathode substrate made of a porous sintered body of tungsten impregnated with an electron-emitting substance as a high-melting point metal, and 2 a cup made of, for example, molybdenum, as a high-melting point metal that houses the cathode substrate 1. (hereinafter referred to as a cup), 3 is a cathode sleeve (hereinafter referred to as a sleeve) made of, for example, tantalum as a high melting point metal for supporting and fixing the cup 2 containing the cathode base 1 thereon, and 4 is a cathode base 1. cup 2
and a welded portion 6 which is welded and fixed by irradiation with a laser beam 5 to integrally fix the sleeve 3. A heater 6 is disposed spirally within the sleeve 3 and heats the cathode base 1 to emit electrons.
次にこのように構成される含浸形カンードの製造方法に
ついて説明する。Next, a method for manufacturing the impregnated cand constructed as described above will be explained.
まず、タングステン粉末をプレス成形した多孔質基体を
還元性雰囲気中で焼結して多孔質焼結体を形成し、第２
図（ａ）に示すようにこの多孔質焼結体１ａをカップ２
内に詰め、レーザ浴接を行ない、さらにカップ２内に詰
めた多孔質焼結体１ａ内にバリウム−カルシウム・アル
ミネートの電子放出物質を含浸させてカソード基体１を
形成する。この場合、カソード基体１およびカップ２の
周面には多量の余剰電子放出物質１ｂ が付着される。First, a porous substrate formed by press-molding tungsten powder is sintered in a reducing atmosphere to form a porous sintered body.
As shown in Figure (a), this porous sintered body 1a is placed in a cup 2.
The porous sintered body 1a packed in the cup 2 is further impregnated with an electron-emitting substance of barium-calcium aluminate to form the cathode substrate 1. In this case, a large amount of excess electron-emitting material 1b is attached to the peripheral surfaces of the cathode substrate 1 and the cup 2.
次にこのカソード基体１が収納されたカップ２を純水を
収容した容器に浸漬し、一定温度（約２０℃〕、一定時
間（約ｌＯ分〕超音波を力■えてカソード基体１および
カップ２の周面に付着している余剰電子放出物質１ｂを
除去した後、さらに水分をアルコール等の有機Ｍ剤で取
シ除き、次いで水素雰囲気中で加熱処理を行なう。この
結果、第２図Φ）に示すようにカソード基体１およびカ
ップ２の周面に付着した余剰電子放出物質１ｂは完全に
除去される。次にこのカソード基体１の上面を約５０μ
ｍ８度研磨した後、第１図に示すようにこのカソード基
体１を収納したカップ２をスリーブ３に組立て溶接部４
にレーザ光５を照射し、溶接固着を行なって含浸形カソ
ードを製作する。Next, the cup 2 containing the cathode substrate 1 is immersed in a container containing pure water, and ultrasonic waves are applied at a constant temperature (approximately 20°C) for a specified period of time (approximately 10 minutes) to separate the cathode substrate 1 and the cup 2. After removing the excess electron-emitting substance 1b adhering to the circumferential surface of the substrate, the moisture is further removed with an organic M agent such as alcohol, and then heat treatment is performed in a hydrogen atmosphere.As a result, as shown in FIG. As shown in , the excess electron emitting material 1b attached to the circumferential surfaces of the cathode substrate 1 and the cup 2 is completely removed.Next, the upper surface of the cathode substrate 1 is
After polishing by m8 degrees, as shown in FIG.
The impregnated cathode is manufactured by irradiating it with laser light 5 and welding and fixing it.
このようにして製作された含浸形カソードは、溶接部４
を例えば走査形電子顕微鏡を用いて観察した結果、第３
図に糸すようなし〜ザ光５の照射により電子放出物質が
激しく気化し、この圧力で溶接部４に穴Ｔがあく現象を
確実に防止することができる。また、第１図に示した溶
接部４は断面観察でも固着がより強固となっていること
が明らかとなった。さらにとの含浸形カソードをプ２ウ
ン管に実装してエミッション特性全評価した結果、悪影
響が全く生じていないことが確認された。The impregnated cathode manufactured in this way has a welded part 4
For example, as a result of observing using a scanning electron microscope, the third
As shown in the figure, the electron-emitting substance is violently vaporized by irradiation with the light 5, and this pressure can reliably prevent the phenomenon in which a hole T is formed in the welded portion 4. Furthermore, cross-sectional observation of the welded portion 4 shown in FIG. 1 revealed that the adhesion was even stronger. Furthermore, when the impregnated cathode was mounted on a pump tube and the emission characteristics were fully evaluated, it was confirmed that there were no adverse effects at all.
なお、前述した実施例においては、カソード基体１およ
びカップ２の周面に付着した余剰電子放出物質１ｂの除
去法として純水中超音波除去の他に酸溶液中除去等の方
法でも良く、エミッション特性に悪影響がないものであ
れば、いずれの除去方法でも良い。In the above-described embodiment, as a method for removing the excess electron-emitting substance 1b attached to the circumferential surfaces of the cathode substrate 1 and the cup 2, a method such as removal in an acid solution may be used in addition to ultrasonic removal in pure water. Any removal method may be used as long as it does not have an adverse effect on the
以上説明したように本発明によれは、高融点金属の多孔
質焼結体に電子放出物質を含浸させたカソード基体が収
納された高融点金属のカップ周面に余剰電子放出物質が
存在しない構成としたことにより、高融点金属の支持体
との溶接時に余剰電子放出物質の溶融、蒸発による穴あ
きの発生がなくなるので、カップと支持体とが強固に固
着されるとともに余剰電子放出物質が蒸発等でヒータ側
に飛散されなくなるので、ヒータ芯線に被覆しているア
ルミネートの亀裂、剥離の発生がなくなシ、ヒータ寿命
が長くなり、品質および信頼性の高い含浸形カソードが
得られる。また、カソード基体を収納したカップと支持
体との溶接固着に先立って予めカップ周面に付着した余
剰電子放出物質を除去したことにより、カップと支持体
とが極めて良好に溶接固着され、高品質、高信頼性の含
浸形゛カソードが生産性良く得られるなどの極めて優れ
た効果を茗する。As explained above, the present invention has a configuration in which no surplus electron emitting substance exists on the circumferential surface of a cup made of a high melting point metal in which a cathode substrate in which a porous sintered body of a high melting point metal is impregnated with an electron emitting substance is housed. This eliminates the occurrence of holes due to melting and evaporation of excess electron-emitting material during welding with a high-melting-point metal support, so the cup and support are firmly fixed, and excess electron-emitting material is prevented from evaporating. Since the aluminate is not scattered to the heater side, cracks and peeling of the aluminate covering the heater core wire are eliminated, the heater life is extended, and an impregnated cathode with high quality and reliability can be obtained. In addition, by removing excess electron-emitting substances adhering to the circumferential surface of the cup before welding and fixing the support to the cup containing the cathode substrate, the cup and the support can be welded and fixed extremely well, resulting in high quality. It has extremely excellent effects such as highly reliable impregnated cathodes that can be obtained with good productivity.
第１図（ａ） 、 （ｂ）は本発明による含浸形カソー
ドの一実施例を示す縦断面図、そのＡ−Ａ’線断面図、
第２図（ａ） 、 （ｂ）は本発明による含浸形カソー
ドの製造方法の一実施例を示す含浸形カソードの要部縦
断面図、第３図（ａ） 、 （ｂ）は従来の含浸形カソ
ードの一例を示す縦断面図、そのＡ−Ａ’線断面図であ
る。
１・・・・カソード基体、１ａ ・・・・多孔質基体
、１ｂ ・・・・電子放出物質、１ｃ ・・・・余
剰電子放出物質、２・・・・モリブデン製カップ（カッ
プ）、３・畳・・タンタル裂カソードスリープ（スリー
ブ〕、４・・・・溶接部、５・・・・レーザ光、６・・
・・ヒータ、γ・・・・穴。FIGS. 1(a) and 1(b) are longitudinal sectional views showing one embodiment of the impregnated cathode according to the present invention, and sectional views taken along the line AA'thereof;
FIGS. 2(a) and (b) are longitudinal cross-sectional views of main parts of an impregnated cathode showing an example of the method for manufacturing an impregnated cathode according to the present invention, and FIGS. FIG. 2 is a vertical cross-sectional view showing an example of a shaped cathode, and a cross-sectional view taken along the line AA'. DESCRIPTION OF SYMBOLS 1... Cathode base, 1a... Porous base, 1b... Electron emitting material, 1c... Excess electron emitting material, 2... Molybdenum cup (cup), 3... Tatami... Tantalum split cathode sleeve (sleeve), 4... Welded part, 5... Laser light, 6...
...Heater, γ...hole.
Claims (1)
せたカソード基体と、前記カソード基体を収納する高融
点金属カップと、前記カップを溶接により支持固定する
高融点金属支持体とを備え、前記カップの周面に電子放
出物質が存在しない構成としたことを特徴とする含浸形
カソード。 ２、高融点金属の多孔質焼結体に電子放出物質を含浸さ
せたカソード基体を収納する高融点金属カップと、前記
カップを溶接により支持固定する高融点金属支持体とを
備え、前記カップの周面に付着した余剰電子放出物質を
除去した後に前記支持体と溶接することを特徴とした含
浸形カソードの製造方法。[Scope of Claims] 1. A cathode base made of a porous sintered body of high melting point metal impregnated with an electron emitting substance, a high melting point metal cup for housing the cathode base, and a high melting point metal cup for supporting and fixing the cup by welding. 1. An impregnated cathode comprising: a melting point metal support; and an electron-emitting substance is not present on the circumferential surface of the cup. 2. A high melting point metal cup that houses a cathode substrate made of a porous sintered body of a high melting point metal impregnated with an electron emitting substance, and a high melting point metal support that supports and fixes the cup by welding; 1. A method for manufacturing an impregnated cathode, which comprises welding the cathode to the support after removing excess electron-emitting material adhering to the peripheral surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62063794A JPS63232235A (en) | 1987-03-20 | 1987-03-20 | Impregnated cathode and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62063794A JPS63232235A (en) | 1987-03-20 | 1987-03-20 | Impregnated cathode and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63232235A true JPS63232235A (en) | 1988-09-28 |
Family
ID=13239638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62063794A Pending JPS63232235A (en) | 1987-03-20 | 1987-03-20 | Impregnated cathode and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63232235A (en) |
-
1987
- 1987-03-20 JP JP62063794A patent/JPS63232235A/en active Pending
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