JPS63231716A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS63231716A JPS63231716A JP6526687A JP6526687A JPS63231716A JP S63231716 A JPS63231716 A JP S63231716A JP 6526687 A JP6526687 A JP 6526687A JP 6526687 A JP6526687 A JP 6526687A JP S63231716 A JPS63231716 A JP S63231716A
- Authority
- JP
- Japan
- Prior art keywords
- amorphous
- protective layer
- magnetic recording
- recording medium
- corrosion resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 35
- 239000011241 protective layer Substances 0.000 claims abstract description 20
- 239000010410 layer Substances 0.000 claims abstract description 13
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 11
- 239000010409 thin film Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 abstract description 32
- 230000007797 corrosion Effects 0.000 abstract description 16
- 238000005260 corrosion Methods 0.000 abstract description 16
- 230000001681 protective effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000011651 chromium Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- -1 nitrogen ions Chemical class 0.000 description 3
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006388 chemical passivation reaction Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 229910000428 cobalt oxide Inorganic materials 0.000 description 2
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910005580 NiCd Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 229940044175 cobalt sulfate Drugs 0.000 description 1
- 229910000361 cobalt sulfate Inorganic materials 0.000 description 1
- KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は磁気記録媒体に関する。更に詳細には、本発明
は耐食性に優れた新規な磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to magnetic recording media. More specifically, the present invention relates to a novel magnetic recording medium with excellent corrosion resistance.
[従来の技術]
真空蒸着やスパッタリング等でつくられる強磁性金属薄
膜磁気記録媒体は、高密度磁気記録に適した特性を有す
る反面、磁気ヘッド等との摺動の際、摩耗や損傷を受は
易く、史に人気中において磁性層表面が腐食し、これに
よって走行性が劣化するという欠点を有している。[Prior Art] Although ferromagnetic metal thin film magnetic recording media made by vacuum deposition or sputtering have characteristics suitable for high-density magnetic recording, they are susceptible to wear and damage when sliding with magnetic heads, etc. However, the surface of the magnetic layer is easily corroded during the course of its popularity, which deteriorates running performance.
これらの欠点を解消するために、この磁性層表面にコバ
ルト酸化膜を形成したり(特開昭58−130428、
特開昭58−41439.特開昭59−83031)
、湿式にてクロム保護膜を形成することが提案されてい
る。In order to eliminate these drawbacks, a cobalt oxide film is formed on the surface of this magnetic layer (Japanese Unexamined Patent Publication No. 58-130428,
Japanese Patent Publication No. 58-41439. JP-A-59-83031)
It has been proposed to form a chromium protective film using a wet process.
しかし、コバルト酸化膜では、より腐食性の強い低pH
環境での耐食性が十分ではない。また、一般に耐食性に
優れるといわれるクロム保護膜についても、湿式法では
、テープ摺動時の機械的強度が十分でなく、蒸着やスパ
ッタによるクロム保護膜でも、機械的強度、耐食性いず
れもが満足できる水準にまで達していない。However, cobalt oxide films are more corrosive at low pH.
Corrosion resistance in the environment is not sufficient. In addition, with regard to chromium protective films, which are generally said to have excellent corrosion resistance, wet methods do not provide sufficient mechanical strength during tape sliding, and vapor-deposited or sputtered chromium protective films cannot satisfy both mechanical strength and corrosion resistance. It has not reached the standard.
[発明が解決しようとする問題点]
この発明は、1−記の腐食環境における磁性膜の易腐食
性という欠点を解決し、以て耐食性および耐久性に優れ
た磁気記録媒体を提供することを目的とする。[Problems to be Solved by the Invention] The present invention aims to solve the drawback of 1- that the magnetic film is easily corroded in a corrosive environment, thereby providing a magnetic recording medium with excellent corrosion resistance and durability. purpose.
[問題点を解決するためのL段]
前記従来技術の問題点を解決するために本発明者が長年
にわたり広範な実験と試作を続けた結果、基体1−に設
けられた強磁性金属薄膜層の表面に非晶質保護層を形成
することにより耐食性および耐久性に優れた磁気記録媒
体が得られることが発見された。[L stage for solving the problems] In order to solve the problems of the above-mentioned conventional technology, the present inventor continued extensive experiments and prototype production for many years, and as a result, a ferromagnetic metal thin film layer provided on the base 1- It has been discovered that a magnetic recording medium with excellent corrosion resistance and durability can be obtained by forming an amorphous protective layer on the surface of the magnetic recording medium.
腐食環境における磁性膜の腐食は、主に電気化学的反応
の結果であり、これは、磁性膜に存在する種々の不均一
性(粒界の存在、組成等)が大きな原因であると思われ
る。Corrosion of magnetic films in corrosive environments is mainly the result of electrochemical reactions, and this seems to be largely due to various inhomogeneities (existence of grain boundaries, composition, etc.) that exist in magnetic films. .
アモルファス合金類はその均質性から極めて耐食性に優
れていることが発見された。特に、Cr等の不働態膜を
形成しやすい元素を含むアモルファスでは、不働態膜の
形成により、耐食性が一段と高まることが確認された。It has been discovered that amorphous alloys have extremely good corrosion resistance due to their homogeneity. In particular, it has been confirmed that in amorphous materials containing elements that tend to form passive films, such as Cr, corrosion resistance is further enhanced by the formation of passive films.
非晶質保護層はCrに限定されない。すなわち、非晶質
化して磁性膜の耐食性および耐久性を向にさせることの
できる元素(例えば、Mo)、合金または化合物であれ
ば何れのものも使用できる。The amorphous protective layer is not limited to Cr. That is, any element (eg, Mo), alloy, or compound that can be amorphized to improve the corrosion resistance and durability of the magnetic film can be used.
このような材料は当業者に周知である。Such materials are well known to those skilled in the art.
非晶質保護層は磁性膜の表面を非晶質化させることによ
り形成できる。例えば、強磁性金属薄膜層の表面に加速
エネルギーが50keV以1・、のアルゴン又は窒素イ
オンを照射することにより、前記強磁性金属薄膜層の表
面に非晶質保護層を形成させることができる。The amorphous protective layer can be formed by making the surface of the magnetic film amorphous. For example, an amorphous protective layer can be formed on the surface of the ferromagnetic metal thin film layer by irradiating the surface of the ferromagnetic metal thin film layer with argon or nitrogen ions having an acceleration energy of 50 keV or more.
この方法により得られた磁気記録媒体の断面を第1図に
示す。強磁性金属薄膜層3の表面から所定の深さの非晶
質保護層5aが形成されている。A cross section of a magnetic recording medium obtained by this method is shown in FIG. An amorphous protective layer 5a is formed at a predetermined depth from the surface of the ferromagnetic metal thin film layer 3.
符号1は基板を示す。Reference numeral 1 indicates a substrate.
別法として、磁性膜の−1−にペーパーデポジション法
により保護層を積層させ、この保護層に加速エネルギー
が50keV以−1−のアルゴン又は窒素イオンを照射
することにより、非晶質保護層を形成させることができ
る。Alternatively, a protective layer is laminated on the magnetic film by a paper deposition method, and by irradiating this protective layer with argon or nitrogen ions with an acceleration energy of 50 keV or more, an amorphous protective layer can be formed. can be formed.
この方法により得られた磁気記録媒体は、第2図に示さ
れるように、保護層7の表面に所定の深さの非晶質保護
層5bを有する。The magnetic recording medium obtained by this method has an amorphous protective layer 5b of a predetermined depth on the surface of the protective layer 7, as shown in FIG.
あるいは非晶質保護膜自体を磁性膜1−に積層させるこ
ともできる。例えば、保護膜構成成分を高周波スパッタ
リング法によりアモルファス化して磁性膜」−に積層さ
せることもできる。Alternatively, the amorphous protective film itself can be laminated on the magnetic film 1-. For example, the components of the protective film can be made amorphous by high-frequency sputtering and then laminated onto the magnetic film.
この方法では第3図に示されるように、磁性膜3の上に
非晶質保護層5Cが直接積層される。In this method, as shown in FIG. 3, an amorphous protective layer 5C is directly laminated on the magnetic film 3.
非晶質保護層の厚み自体は特に限定されないが、−・般
的に50人〜300人の範囲内の厚さに形成することが
好ましい。50人未満では充分な耐食性および耐久性改
善効果が得られない。一方、300人よりも厚くなると
スペーシングロス等の問題が発生し、好ましくない。Although the thickness of the amorphous protective layer itself is not particularly limited, it is generally preferable to form it to a thickness within the range of 50 to 300 layers. If there are fewer than 50 people, sufficient corrosion resistance and durability improvement effects cannot be obtained. On the other hand, if the number of participants exceeds 300, problems such as spacing loss will occur, which is not desirable.
非晶質保護層の厚さは照射エネルギーおよび/または照
射時間を制御するか、あるいは、保護層の積層厚さを制
御することにより変化させることができる。The thickness of the amorphous protective layer can be changed by controlling the irradiation energy and/or the irradiation time, or by controlling the laminated thickness of the protective layer.
[実施例] 以下、実施例により本発明を史に詳細に説明する。[Example] Hereinafter, the present invention will be explained in detail with reference to examples.
実m
フィルム基板として10μm厚のポリエチレンテレフタ
レート(PET)フィルムを用い、強磁性金属としてC
o−10wt%Ni−10wt%Cr合金を5X10”
−5TorrのL1ニカドで電子ビーム溶解により15
00人の厚さまで斜方蒸着を行った。A 10 μm thick polyethylene terephthalate (PET) film was used as the film substrate, and C was used as the ferromagnetic metal.
o-10wt%Ni-10wt%Cr alloy 5X10”
15 by electron beam melting in L1 NiCd at -5 Torr.
Oblique deposition was carried out to a thickness of 0.00 mm.
この時蒸若室にはノズルから酸素ガスを0.4J2/m
in導入し、形成される磁性膜の磁気特性を向1−させ
た。At this time, oxygen gas is supplied to the steaming chamber from the nozzle at 0.4 J2/m.
The magnetic properties of the formed magnetic film were improved.
こうして作成した蒸着原反をその後、別のイオン処理槽
にセットし、80keVのAr+イオンで表面を照射し
た。照射時間は約1秒間であった。The vapor-deposited original fabric thus created was then set in another ion treatment tank, and the surface was irradiated with 80 keV Ar+ ions. The irradiation time was about 1 second.
災血旌λ
強磁性金属としてCo−20wt%Niを1300人蒸
着した後、この蒸着層の−1−にCo−10wt%Ni
−10vt%Crを200人蒸着積層した以外は、実施
例1と同様な処理を行った。After 1300 people deposited Co-20wt%Ni as a ferromagnetic metal, Co-10wt%Ni was deposited on -1- of this deposited layer.
The same process as in Example 1 was performed except that -10vt% Cr was deposited and laminated by 200 people.
ル佼叶上
イオン11ち込み(ミキシング)の工程を除いた以外は
、実施例1と同様な蒸着膜を作成した。A vapor deposited film similar to that of Example 1 was prepared except that the step of mixing 11 ions was removed.
工佼健1 イオン打ち込み(ミキシング)の−[程を除いた6一 以外は、実施例2と同様な蒸着膜を作成した。Ken Kouki 1 Ion implantation (mixing) - [61 excluding moderation] Except for this, a deposited film similar to that of Example 2 was created.
前記のようにして作製された磁気記録媒体について耐食
性試験を行った。A corrosion resistance test was conducted on the magnetic recording medium produced as described above.
二酸化硫黄を0.5ppm含む人気雰囲気(35°C,
75%RH)ドで各実施例および比較例の磁性膜を50
時間曝露した後、8mll1幅に裁断してテープとした
。これをφ4のSUS製の固定ピン(表面粗さRa==
0.1/1m)に巻き角90°で巻きつけ、テープの一
端には20gの重錘をつけて送り速度1 m/minの
条件ドで摺動テストをした。Popular atmosphere containing 0.5 ppm sulfur dioxide (35°C,
The magnetic films of each example and comparative example were heated at 75% RH
After being exposed for a period of time, the tape was cut into 8 ml width. Connect this with a φ4 SUS fixing pin (surface roughness Ra==
0.1/1 m) at a winding angle of 90°, a 20 g weight was attached to one end of the tape, and a sliding test was performed at a feed rate of 1 m/min.
100回摺動後の結果を下記の表1に盟約して示す。The results after sliding 100 times are shown in Table 1 below.
この50時間曝露後の磁性膜表面をESCA(X線光電
子分光分析法)により分析したところ、実施例1および
2の媒体は、硫化物又は硫酸塩の存在が認められなかっ
たのに対し、比較例の媒体では、何れの場合も苫しい量
のコバルト硫酸塩の存在が認められた。When the surface of the magnetic film after this 50-hour exposure was analyzed by ESCA (X-ray photoelectron spectroscopy), the presence of sulfide or sulfate was not observed in the media of Examples 1 and 2, whereas in comparison In each case, the presence of a disturbing amount of cobalt sulfate was observed in the example media.
これらの曝露テスト前の試料のRHEEI)(反射電子
線回折)パターンを撮ったところ、比較例の媒体では主
元素であるコバルトの酸化物ピーク(Coo)が認めら
れたのに対し、実施例の媒体では、それが判別しにく(
なっており、表面層はイオンの打ち込みによりミキシン
グがおこり、非晶質化していることが明らかであった。When the RHEEI (reflection electron diffraction) pattern of these samples was taken before the exposure test, an oxide peak (Coo) of cobalt, the main element, was observed in the medium of the comparative example, whereas an oxide peak (Coo) of cobalt, the main element, was observed in the medium of the comparative example. In the media, it is difficult to distinguish (
It was clear that the surface layer had been mixed due to ion implantation and had become amorphous.
なお、実施例ではイオン打ち込み処理工程を別に設けた
が同一装置にイオンガンを組み込んでイオン打ち込み処
理工程を連続的に実施することもできる。Although the ion implantation process is provided separately in the embodiment, the ion gun can be incorporated into the same device to continuously perform the ion implantation process.
「発明の効果コ
以」−説明したように、本発明の磁気記録媒体は磁性膜
の表面に非晶質保護膜を有する。"Effects of the Invention" - As explained above, the magnetic recording medium of the present invention has an amorphous protective film on the surface of the magnetic film.
従来の酸化物保護膜に比べて、本発明の非晶質保護膜は
均質性が高いので、極めて優れた耐食性を発揮する。特
に、Cr等の不働態膜を形成しやすい元素を含んだアモ
ルファスでは、不働態膜の形成により、 ・層優れた耐
食性を示す。Compared to conventional oxide protective films, the amorphous protective film of the present invention has higher homogeneity and therefore exhibits extremely superior corrosion resistance. In particular, amorphous materials containing elements that tend to form passive films, such as Cr, exhibit excellent corrosion resistance due to the formation of passive films.
第1図は本発明の磁気記録媒体の一例の断面図であり、
第2図は本発明の磁気記録媒体の別の例の断面図であり
、第3図は本発明の磁気記録媒体の他の例の断面図であ
る。
■・・・基板、3・・・磁性膜+ 5 a 、5 b及
び5c・・・非晶質保護膜、7・・・保護層FIG. 1 is a cross-sectional view of an example of the magnetic recording medium of the present invention,
FIG. 2 is a cross-sectional view of another example of the magnetic recording medium of the present invention, and FIG. 3 is a cross-sectional view of another example of the magnetic recording medium of the present invention. ■...Substrate, 3...Magnetic film + 5a, 5b and 5c...Amorphous protective film, 7...Protective layer
Claims (2)
において、前記強磁性金属薄膜層の表面に非晶質保護層
を有することを特徴とする磁気記録媒体。(1) A magnetic recording medium comprising a ferromagnetic metal thin film layer provided on a substrate, characterized in that the ferromagnetic metal thin film layer has an amorphous protective layer on the surface thereof.
とする特許請求の範囲第1項に記載の磁気記録媒体。(2) The magnetic recording medium according to claim 1, wherein the amorphous protective layer is made of amorphous Cr.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6526687A JPS63231716A (en) | 1987-03-19 | 1987-03-19 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6526687A JPS63231716A (en) | 1987-03-19 | 1987-03-19 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63231716A true JPS63231716A (en) | 1988-09-27 |
Family
ID=13281944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6526687A Pending JPS63231716A (en) | 1987-03-19 | 1987-03-19 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63231716A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007184019A (en) * | 2006-01-04 | 2007-07-19 | Hitachi Global Storage Technologies Netherlands Bv | Perpendicular magnetic recording medium and magnetic storage using the medium |
JP2011141913A (en) * | 2010-01-05 | 2011-07-21 | Hitachi Ltd | Patterned medium and fabrication method thereof |
-
1987
- 1987-03-19 JP JP6526687A patent/JPS63231716A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007184019A (en) * | 2006-01-04 | 2007-07-19 | Hitachi Global Storage Technologies Netherlands Bv | Perpendicular magnetic recording medium and magnetic storage using the medium |
JP4499044B2 (en) * | 2006-01-04 | 2010-07-07 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | Perpendicular magnetic recording medium and magnetic storage device using the same |
JP2011141913A (en) * | 2010-01-05 | 2011-07-21 | Hitachi Ltd | Patterned medium and fabrication method thereof |
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