JPS63229620A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS63229620A JPS63229620A JP6271987A JP6271987A JPS63229620A JP S63229620 A JPS63229620 A JP S63229620A JP 6271987 A JP6271987 A JP 6271987A JP 6271987 A JP6271987 A JP 6271987A JP S63229620 A JPS63229620 A JP S63229620A
- Authority
- JP
- Japan
- Prior art keywords
- metallic film
- thin film
- metal thin
- ferromagnetic metal
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 48
- 230000001681 protective effect Effects 0.000 claims abstract description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 23
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000001301 oxygen Substances 0.000 claims abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- 239000010409 thin film Substances 0.000 claims description 49
- 239000010408 film Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 15
- 150000002894 organic compounds Chemical class 0.000 claims description 9
- 230000003647 oxidation Effects 0.000 abstract description 11
- 238000007254 oxidation reaction Methods 0.000 abstract description 11
- 239000002904 solvent Substances 0.000 abstract description 7
- 239000000126 substance Substances 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract 1
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 18
- 239000010410 layer Substances 0.000 description 14
- -1 polyethylene terephthalate Polymers 0.000 description 14
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 9
- 229920001577 copolymer Polymers 0.000 description 9
- 235000014113 dietary fatty acids Nutrition 0.000 description 7
- 239000000194 fatty acid Substances 0.000 description 7
- 229930195729 fatty acid Natural products 0.000 description 7
- 239000000314 lubricant Substances 0.000 description 7
- TWJNQYPJQDRXPH-UHFFFAOYSA-N 2-cyanobenzohydrazide Chemical compound NNC(=O)C1=CC=CC=C1C#N TWJNQYPJQDRXPH-UHFFFAOYSA-N 0.000 description 6
- 235000021360 Myristic acid Nutrition 0.000 description 6
- TUNFSRHWOTWDNC-UHFFFAOYSA-N Myristic acid Natural products CCCCCCCCCCCCCC(O)=O TUNFSRHWOTWDNC-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000006247 magnetic powder Substances 0.000 description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 150000004665 fatty acids Chemical class 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- GHVNFZFCNZKVNT-UHFFFAOYSA-N decanoic acid Chemical compound CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- UKMSUNONTOPOIO-UHFFFAOYSA-N docosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCCCC(O)=O UKMSUNONTOPOIO-UHFFFAOYSA-N 0.000 description 2
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 2
- 238000001227 electron beam curing Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000005395 methacrylic acid group Chemical group 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 description 1
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- LOUICXNAWQPGSU-UHFFFAOYSA-N 2,2,3,3-tetrafluorooxirane Chemical compound FC1(F)OC1(F)F LOUICXNAWQPGSU-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- 235000021357 Behenic acid Nutrition 0.000 description 1
- 239000005632 Capric acid (CAS 334-48-5) Substances 0.000 description 1
- 239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 1
- 229920001747 Cellulose diacetate Polymers 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000005639 Lauric acid Substances 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 235000021314 Palmitic acid Nutrition 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007754 air knife coating Methods 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 229940116226 behenic acid Drugs 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- GCSJLQSCSDMKTP-UHFFFAOYSA-N ethenyl(trimethyl)silane Chemical compound C[Si](C)(C)C=C GCSJLQSCSDMKTP-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- GBMDVOWEEQVZKZ-UHFFFAOYSA-N methanol;hydrate Chemical compound O.OC GBMDVOWEEQVZKZ-UHFFFAOYSA-N 0.000 description 1
- POPACFLNWGUDSR-UHFFFAOYSA-N methoxy(trimethyl)silane Chemical compound CO[Si](C)(C)C POPACFLNWGUDSR-UHFFFAOYSA-N 0.000 description 1
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 229960002446 octanoic acid Drugs 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 1
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 1
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- CWMFRHBXRUITQE-UHFFFAOYSA-N trimethylsilylacetylene Chemical group C[Si](C)(C)C#C CWMFRHBXRUITQE-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、強磁性金属薄膜を磁気記録層とする磁気記録
媒体の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method of manufacturing a magnetic recording medium having a magnetic recording layer made of a ferromagnetic metal thin film.
(従来の技術)
従来、磁気記録媒体としては非磁性支持体上にY−Fe
20.、Coを含有する’I Fe20i *F83
04等の酸化物磁性粉末、あるいはFe、Co、Ni等
を主成分とする合金磁性粉末を塩化ビニル−酢酸ビニル
共重合体、ポリウレタン等の有機バインダー中に分散さ
せ、塗布、乾燥させた塗布形の磁気記録媒体が広く使用
されている。(Prior Art) Conventionally, as a magnetic recording medium, Y-Fe is used on a non-magnetic support.
20. , 'I Fe20i *F83 containing Co
A coated type in which oxide magnetic powder such as 04 or alloy magnetic powder mainly composed of Fe, Co, Ni, etc. is dispersed in an organic binder such as vinyl chloride-vinyl acetate copolymer or polyurethane, coated, and dried. magnetic recording media are widely used.
近年、高密度化の要求の高まりと共に、強磁性金属薄膜
で磁気記録層とする磁気記録媒体が注目を集めている。In recent years, with the increasing demand for higher density, magnetic recording media in which the magnetic recording layer is made of a ferromagnetic metal thin film have been attracting attention.
かかる強磁性金属薄膜型磁気記録媒体の製造方法は、非
磁性支持体上に強磁性金属材料からなる金f′1jtI
薄膜を、真空蒸着法、スパッタリング法、イオンブレー
ティング法等により形成し、保護層を溶液塗布法、プラ
ズマ重合法、又は真空蒸着法等により強磁性金属薄膜上
に形成し、必要に応じて、さらにバックコート層を塗布
し、所定の形状に加工するのが一般的である。この強磁
性金属薄膜型磁気記録媒体は種々の磁気特性の点のみな
らず、磁性層厚を極めて薄くすることが可能であるため
。The method for manufacturing such a ferromagnetic metal thin film type magnetic recording medium involves depositing gold f'1jtI made of a ferromagnetic metal material on a non-magnetic support.
A thin film is formed by a vacuum evaporation method, a sputtering method, an ion blating method, etc., a protective layer is formed on the ferromagnetic metal thin film by a solution coating method, a plasma polymerization method, a vacuum evaporation method, etc., and if necessary, It is common to further apply a back coat layer and process it into a predetermined shape. This ferromagnetic metal thin film type magnetic recording medium not only has various magnetic properties, but also because the magnetic layer thickness can be made extremely thin.
長時間記録が可能であるなどの数々の利点を有している
。It has many advantages such as being able to record for a long time.
しかしながら、上記強磁性金属薄膜は塗布型の磁性層と
異なり、磁性層中に滑剤を含浸させることができないの
で、強磁性金属薄膜の耐摩耗性。However, unlike a coated magnetic layer, the ferromagnetic metal thin film described above cannot have a lubricant impregnated into the magnetic layer, so the wear resistance of the ferromagnetic metal thin film is limited.
走行性、走行耐久性等を改善し、酸化等の経時変化を小
さくするための表面処理は重要である。Surface treatment is important to improve running properties, running durability, etc., and to reduce changes over time such as oxidation.
このため、従来から強磁性金属薄膜層上に種々の有機化
合物からなる保護膜を設けて耐摩耗性。For this reason, protective films made of various organic compounds have traditionally been provided on ferromagnetic metal thin film layers to improve wear resistance.
走行性あるいは耐酸化性を改善することが行われている
。例えば1種々の潤滑剤または被膜性のよい樹脂を塗布
したり、あるいは近年においては、潤滑剤等を真空蒸着
したり、有機化合物のモノマーガスをプラズマ重合した
りして有機化合物からなる保護膜を強磁性金属薄膜層上
に設けることが試みられている。Efforts are being made to improve running properties or oxidation resistance. For example, protective films made of organic compounds can be formed by applying various lubricants or resins with good coating properties, or in recent years, by vacuum-depositing lubricants, etc., or by plasma polymerizing monomer gas of organic compounds. Attempts have been made to provide it on a ferromagnetic metal thin film layer.
(発明が解決しようとする問題点)
ところが、これらの有機化合物からなる保護膜は、強磁
性金属薄膜層に対する接着性が良好でなく、磁気ヘッド
との摺接によって比較的短時間で保護膜が剥離、破壊し
たり、高温多湿のきびしい条件下では保護膜下の強磁性
金属薄膜層が比較的短時間で腐食したり、保護膜自体が
剥離したりする場合があり、未だ耐久性および耐酸化性
は充分に改善されていない。(Problems to be Solved by the Invention) However, the protective film made of these organic compounds does not have good adhesion to the ferromagnetic metal thin film layer, and the protective film is removed in a relatively short time due to sliding contact with the magnetic head. Under harsh conditions of high temperature and humidity, the ferromagnetic metal thin film layer under the protective film may corrode in a relatively short period of time, or the protective film itself may peel off. performance has not been sufficiently improved.
本発明ば上記した事情に鑑みなされたもので、繰り返し
走行耐久性、および金属薄膜の耐酸化性の改良された磁
気記録媒体の製造方法を提供するものである。The present invention has been made in view of the above-mentioned circumstances, and provides a method for manufacturing a magnetic recording medium with improved repeated running durability and oxidation resistance of a metal thin film.
(問題点を解決するための手段)
上記問題点を解決するために、本発明の磁気記録媒体の
製造方法は、非磁性支持体上に設けられた強磁性金属薄
膜表面に対し、水を10wt%〜80wt%含むアルコ
ールで処理し、次いでこの強磁性金属薄膜上に有機化合
物からなる保護膜を形成することを特徴とするものであ
る。(Means for Solving the Problems) In order to solve the above problems, the method for manufacturing a magnetic recording medium of the present invention includes applying 10 wt. % to 80 wt % of alcohol, and then a protective film made of an organic compound is formed on the ferromagnetic metal thin film.
(作 用)
本発明者等の実験によれば、強磁性金属薄膜表面は、微
小な粉塵、および欠落した磁性粉等の無機異物、その他
種々の有機異物で汚染されており、これらの異物が走行
耐久性能を劣化させ、さらに保護膜との接着性に悪影響
を及ぼしている。このような強磁性金属薄膜の表面を、
水を10%it%〜80wt含むアルコールで処理する
と、溶剤の主として物理的洗浄力により無機異物が除去
され、化学的洗浄力により水溶性および油溶性の有機異
物が除去される。しかも強磁性金属薄膜表面の一部が酸
化物ないし水酸化物に変化し活性化される。このように
、清浄でしかも非常に活性化された強磁性金属薄膜表面
に、潤滑剤等を真空蒸着するかもしくは有機化合物のモ
ノマーガスをプラズマ重合するか、あるいは潤滑剤や被
膜性のよい樹脂等を塗布するなどして有機化合物からな
る保護膜を形成すると、保護膜が強磁性金属薄膜上に強
固に被着されて走行耐久性および耐酸化性が充分に改善
されるものである。(Function) According to experiments conducted by the present inventors, the surface of a ferromagnetic metal thin film is contaminated with fine dust, inorganic foreign matter such as missing magnetic powder, and various other organic foreign matter. This deteriorates the running durability and also has an adverse effect on the adhesion with the protective film. The surface of such a ferromagnetic metal thin film is
When water is treated with alcohol containing 10% it% to 80wt, inorganic foreign substances are removed mainly by the physical detergency of the solvent, and water-soluble and oil-soluble organic foreign substances are removed by the chemical detergency. Moreover, a part of the surface of the ferromagnetic metal thin film is converted into oxide or hydroxide and activated. In this way, on the surface of a clean and highly activated ferromagnetic metal thin film, a lubricant or the like can be vacuum-deposited, or an organic compound monomer gas can be plasma-polymerized, or a lubricant or a resin with good film properties can be applied. When a protective film made of an organic compound is formed by coating the ferromagnetic metal thin film, the protective film is firmly adhered to the ferromagnetic metal thin film, and the running durability and oxidation resistance are sufficiently improved.
(実施例)
以下、本発明による磁気記録媒体の製造方法の一実施例
をその工程順序に従って説明する6強磁性金属薄膜を被
着形成する非磁性支持体の素材としては、ポリエチレン
テレフタレート、ポリブチレンテレフタレート等に代表
されるポリエステル類、ポリエチレン、ポリプロピレン
等に代表されるポリオレフィン類、セルロースジアセテ
ート、セルローストリアセテート等に代表されるセルロ
ース誘導体、ポリエーテルケトン、ポリエーテルエーテ
ルケトン、ポリ塩化ビニル、ポリ塩化ビニリデン、ポリ
イミド、ポリアミドイミド、ポリカーボネート等が用い
られる。(Example) An example of the method for producing a magnetic recording medium according to the present invention will be described below according to the process order.6 Materials for the nonmagnetic support on which the ferromagnetic metal thin film is deposited include polyethylene terephthalate, polybutylene, etc. Polyesters such as terephthalate, polyolefins such as polyethylene and polypropylene, cellulose derivatives such as cellulose diacetate and cellulose triacetate, polyetherketone, polyetheretherketone, polyvinyl chloride, and polyvinylidene chloride. , polyimide, polyamideimide, polycarbonate, etc. are used.
上記強磁性金属薄膜としてtよ、真空蒸着法、イオンブ
レーティング法、スパッタ法等により形成されるGo、
Ni、Fe等を主体とする金属薄膜、あるいはそれらの
合金を主体とする金属薄膜(例えばGo−Nu、Co−
Cr、Co−Fe、Co−Ni−Cr等)があげられる
。As the ferromagnetic metal thin film, Go formed by a vacuum evaporation method, an ion blating method, a sputtering method, etc.
Metal thin films mainly composed of Ni, Fe, etc., or metal thin films mainly composed of alloys thereof (e.g. Go-Nu, Co-
Cr, Co-Fe, Co-Ni-Cr, etc.).
次に、必要に応じて上記強磁性金属薄膜と反対側の支持
体表面に、バックコート層を形成する。Next, if necessary, a back coat layer is formed on the surface of the support opposite to the ferromagnetic metal thin film.
バックコートの主バインダーとしは、ポリエステル系、
ポリウレタン系、ビニル系、アクリル系があげられ、添
加フィラーとしては、微粒子状酸化アルミニウム、微粒
子状酸化チタン、シリカ、炭酸カルシウム、カーボンブ
ラック等があげられる。The main binder of the back coat is polyester,
Examples include polyurethane, vinyl, and acrylic fillers, and examples of fillers added include finely divided aluminum oxide, finely divided titanium oxide, silica, calcium carbonate, and carbon black.
引き続いて、上記強磁性金属薄膜表面を、水を10wt
%〜80wt%含むアルコールで処理した後、この強磁
性金属薄膜表面に有機化合物からなる保護膜を形成する
。Subsequently, the surface of the ferromagnetic metal thin film was coated with 10 wt of water.
% to 80 wt % of alcohol, a protective film made of an organic compound is formed on the surface of this ferromagnetic metal thin film.
処理に用いるアルコール類としては、例えばメタノール
、エタノール、n−プロパツール、イソプロパツール等
の単体あるいは混合物があげられる。Examples of alcohols used in the treatment include methanol, ethanol, n-propanol, isopropanol, and the like alone or in mixtures.
処理方法としては、強磁性金属薄膜を含水アルコール中
を単に通過させるだけでもよく、また、強磁性金属薄膜
表面を多量の含水アルコールで処理した後、表面に残っ
た余分の溶剤を金属ロールでかき取るスリットリバース
方式、あるいは高圧エアで吹き飛ばすエアーナイフコー
ティング方式等も適用できる。As a treatment method, it is sufficient to simply pass the ferromagnetic metal thin film through hydrous alcohol, or the surface of the ferromagnetic metal thin film may be treated with a large amount of hydrous alcohol and then the excess solvent remaining on the surface is scraped off with a metal roll. A slit reverse method in which the coating is removed or an air knife coating method in which the material is blown out with high-pressure air can also be applied.
保護膜としては、一般的な保護膜すべてが適用できる0
例えば、潤滑剤、熱可塑性樹脂、熱硬化性樹脂、電子線
硬化樹脂、プラズマ重合膜等による保護膜である。As a protective film, all general protective films can be applied.
For example, it is a protective film made of a lubricant, a thermoplastic resin, a thermosetting resin, an electron beam curing resin, a plasma polymerized film, or the like.
潤滑剤としては、シリコンオイル、フッ素化合物、脂肪
酸、脂肪酸エステル、パラフィン、界面活性剤等を用い
ることができ、脂肪酸としてはカプリル酸、カプリン酸
、ラウリン酸、ミリスチン酸、パルミチン酸、ステアリ
ン酸、ベヘン酸、オレイン酸、リノール酸、リルイン酸
等であり、脂肪酸エステルとしては、炭素数12〜16
個の一塩基性脂肪酸と炭素数3〜12個のm個アルコー
ルからなる脂肪酸エステル類等が使用される。シリコン
オイルとしては、ジアルキルポリシロキサン、ジアルコ
キシポリシロキサン、モノアルキルモノアルコキシポリ
シロキサン、モノアルキルモノアルコキシポリシロキサ
ン、フェニルポリシロキサン、フロロアルキルポリシロ
キサン等が使用できる。フッ素化合物としては、パーフ
ロロアルキルカルボン酸、パーフロロアルキルリン酸エ
ステル、パーフロロアルキルトリメチルアンモニウム塩
、パーフロロエチレンオキサイド、パーフロロアルキル
脂肪酸エステル等が使用できる。As the lubricant, silicone oil, fluorine compounds, fatty acids, fatty acid esters, paraffin, surfactants, etc. can be used, and the fatty acids include caprylic acid, capric acid, lauric acid, myristic acid, palmitic acid, stearic acid, and behenic acid. acid, oleic acid, linoleic acid, liluic acid, etc., and the fatty acid ester has 12 to 16 carbon atoms.
Fatty acid esters consisting of monobasic fatty acids and m alcohols having 3 to 12 carbon atoms are used. As the silicone oil, dialkylpolysiloxane, dialkoxypolysiloxane, monoalkylmonoalkoxypolysiloxane, monoalkylmonoalkoxypolysiloxane, phenylpolysiloxane, fluoroalkylpolysiloxane, etc. can be used. As the fluorine compound, perfluoroalkyl carboxylic acid, perfluoroalkyl phosphate, perfluoroalkyltrimethylammonium salt, perfluoroethylene oxide, perfluoroalkyl fatty acid ester, etc. can be used.
熱可塑性樹脂としては、塩化ビニル−酢酸ビニル共重合
体、塩化ビニル−酢酸ビニル−ビニルアルコール共重合
体、塩化ビニル−塩化ビニリデン共重合体、塩化ビニル
−アクリロニトリル共重合体、アクリル酸エステル−ア
クリロニトリル共重合体、アクリル酸エステル−塩化ビ
ニリデン共重合体、アクリル酸エステル−スチレン共重
合体、メタクリル酸エステル−アクリロニトリル共重合
体、メタクリル酸エステル−塩化ビニリデン共重合体、
メタクリル酸エステル−スチレン共重合体。Examples of thermoplastic resins include vinyl chloride-vinyl acetate copolymer, vinyl chloride-vinyl acetate-vinyl alcohol copolymer, vinyl chloride-vinylidene chloride copolymer, vinyl chloride-acrylonitrile copolymer, and acrylic acid ester-acrylonitrile copolymer. polymer, acrylic ester-vinylidene chloride copolymer, acrylic ester-styrene copolymer, methacrylic ester-acrylonitrile copolymer, methacrylic ester-vinylidene chloride copolymer,
Methacrylic acid ester-styrene copolymer.
およびこれらの混合物が使用される。and mixtures thereof are used.
熱硬化性樹脂としては、フェノール樹脂、エポキシ樹脂
、ポリウレタン樹脂、尿素樹脂、メラミン樹脂、アルキ
ッド樹脂、シリコン樹脂等が使用される。As the thermosetting resin, phenol resin, epoxy resin, polyurethane resin, urea resin, melamine resin, alkyd resin, silicone resin, etc. are used.
電子線硬化樹脂としては、アクリル酸エステル。Acrylic ester is used as electron beam curing resin.
メタクリル酸エステル、ビニル酢酸エステル等が使用さ
れる。Methacrylic acid ester, vinyl acetate, etc. are used.
プラズマ重合におけるモノマーガスとしては、通常用い
られるものであれば何でもよく、例えばCF4.C2F
4.C2F、 、C3F、 、C,H,F、C,)I2
F、等の含フツ素化合物、テトラメチルシラン、ヘキサ
メチルジシラザン、ビニルトリメチルシラン、テトラメ
トキシシラン、ヘキサメチルジシロキサン、オクタメチ
ルミクロテトラシロキサン、トリメチルシリルアセチレ
ン、トリメチルメトキシシラン等のケイ素系化合物、メ
タン、エタン、プロパン、エチレン、プロピレン、アセ
トニトリル等の炭化水素化合物等が使用される。Any commonly used monomer gas may be used in plasma polymerization, such as CF4. C2F
4. C2F, ,C3F, ,C,H,F,C,)I2
Fluorine-containing compounds such as F, silicon compounds such as tetramethylsilane, hexamethyldisilazane, vinyltrimethylsilane, tetramethoxysilane, hexamethyldisiloxane, octamethylmicrotetrasiloxane, trimethylsilylacetylene, trimethylmethoxysilane, methane Hydrocarbon compounds such as , ethane, propane, ethylene, propylene, and acetonitrile are used.
本発明は、含水アルコールで強磁性金属薄膜表面を処理
する際、該表面上に付着した微小な粉塵、欠落した磁性
粉等の無機異物は、処理溶剤の圧力といった物理的洗浄
力や、処理溶剤が無機異物と強磁性金属薄膜との界面に
作用することにより。In the present invention, when the surface of a ferromagnetic metal thin film is treated with hydrous alcohol, inorganic foreign matter such as fine dust attached to the surface and missing magnetic powder can be removed by physical cleaning power such as the pressure of the treatment solvent or by the treatment solvent. acts on the interface between the inorganic foreign matter and the ferromagnetic metal thin film.
無機異物の強磁性金属薄膜表面に対する親和力が減少し
て除去される。また、強磁性金属薄膜表面を汚染してい
る有機異物はその内の水溶性異物は処理溶剤中の水に、
油溶性異物は処理溶剤中のアルコールに溶解することに
より除去される。The affinity of the inorganic foreign matter to the surface of the ferromagnetic metal thin film decreases and is removed. In addition, organic foreign matter contaminating the surface of the ferromagnetic metal thin film, including water-soluble foreign matter, is absorbed into the water in the processing solvent.
Oil-soluble foreign substances are removed by dissolving them in alcohol in the processing solvent.
さらに、強磁性金属薄膜表面の一部が処理溶液中の水に
より酸化物ないし水酸化物に変化し、活性化されること
により保護膜との密着性が向上する。Further, a part of the surface of the ferromagnetic metal thin film is changed into an oxide or hydroxide by the water in the treatment solution and is activated, thereby improving the adhesion with the protective film.
以上のように、強磁性金属薄膜表面が清浄でしかも保護
膜が強固に被着することにより、走行耐久性および耐酸
化性等が改善されるのである。As described above, by keeping the surface of the ferromagnetic metal thin film clean and firmly adhering to the protective film, running durability, oxidation resistance, etc. are improved.
以下、さらに本発明の実施例について図面を参照しなが
ら説明する。Hereinafter, embodiments of the present invention will be further described with reference to the drawings.
第1図は本発明の実施例によって製造された磁気記録媒
体の基本構成を示す拡大断面図である。FIG. 1 is an enlarged sectional view showing the basic structure of a magnetic recording medium manufactured according to an embodiment of the present invention.
第1図において、1はバックコート層、2はベースフィ
ルム、3は強磁性金属薄膜、4は保護膜である。In FIG. 1, 1 is a back coat layer, 2 is a base film, 3 is a ferromagnetic metal thin film, and 4 is a protective film.
第2図は本発明の方法で作成した磁気記録媒体表面拡大
図で1図示のように強磁性金属薄膜5の表面の微小粉塵
や欠落磁性片等の無機異物6の多くが除去される。また
有機異物7の多くも除去される。更に、強磁性金属薄膜
5の表面の一部が酸化物ないし水酸化物に変化し、保護
膜8との密着性が向上する。これらの作用により、ドロ
ップアウトあるいは目づまりといった走行耐久性、およ
び耐酸化性が改善される。FIG. 2 is an enlarged view of the surface of a magnetic recording medium prepared by the method of the present invention, and as shown in FIG. 1, most of the inorganic foreign matter 6 such as minute dust and missing magnetic pieces on the surface of the ferromagnetic metal thin film 5 has been removed. Also, most of the organic foreign matter 7 is also removed. Furthermore, a part of the surface of the ferromagnetic metal thin film 5 changes into oxide or hydroxide, and the adhesion with the protective film 8 is improved. These effects improve running durability such as dropout or clogging, and oxidation resistance.
一方、従来法で作成した磁気記録媒体は、第3図に示す
ように、強磁性金属薄膜5表面に欠落磁性片等の無機異
物6や有機異物7が多く存在し、しかも強磁性金属薄膜
5表面の活性も小さいので保護膜8の密着性が悪く、走
行耐久性や耐酸化性に問題がある。On the other hand, in the magnetic recording medium prepared by the conventional method, as shown in FIG. Since the surface activity is also low, the adhesion of the protective film 8 is poor, causing problems in running durability and oxidation resistance.
比較例1
厚さ10戸のポリエチレンテレフタレートフィルム上に
、直径1mの円筒キャンに沿わせて最小入射角43度で
4 X 1O−4torrの酸素中でGoを電子ビーム
蒸着し、膜厚約1500人の強磁性金属薄膜を形成した
被処理ウェブを準備した6
比較例2
比較例1で作成した被処理ウェブをミリスチン酸の11
000ppベンゼン溶液中に浸漬し、乾燥して強磁性金
属薄膜表面にミリスチン酸からなる保護膜を形成した。Comparative Example 1 Go was electron beam evaporated on a polyethylene terephthalate film with a thickness of 10 units along a cylindrical can with a diameter of 1 m in oxygen at 4 x 10-4 torr at a minimum incident angle of 43 degrees, and the film thickness was approximately 1500 mm. Comparative Example 2 The treated web prepared in Comparative Example 1 was prepared using myristic acid 11.
The ferromagnetic metal thin film was immersed in a 000pp benzene solution and dried to form a protective film made of myristic acid on the surface of the ferromagnetic metal thin film.
実施例1
下記の処理液1〜6を準備し、比較例1で作成した被処
理ウェブの強磁性金属薄膜表面をそれぞれ処理した後、
これらをミリスチン酸の11000ppベンゼン溶液中
に浸漬し、乾燥してミリスチン酸からなる保護膜を形成
した。なお、処理方法としてはエアドクタ一方法を応用
し、処理時、強磁性金属薄膜表面に残存した多量の処理
液をエアーで吹き飛ばし、続いて100℃で乾燥させた
。Example 1 After preparing the following treatment solutions 1 to 6 and treating the surface of the ferromagnetic metal thin film of the treated web prepared in Comparative Example 1,
These were immersed in a 11,000 ppp solution of myristic acid in benzene and dried to form a protective film made of myristic acid. As a treatment method, an air doctor method was applied, and during the treatment, a large amount of treatment liquid remaining on the surface of the ferromagnetic metal thin film was blown away with air, followed by drying at 100°C.
処理液
■メタノール
■メタノール+水(水5wt%含有)
■メタノール+水(水10%+1%含有)■メタノール
+水(水50wt%含有)■メタノール+水(水80w
t%含有)■メタノール+水(水90wt%含有)実施
例2
下記の処理液7〜9を準備し、比較例1で作成した被処
理ウェブの強磁性金属薄膜表面をそれぞれ処理した後、
これらをミリスチン酸の11000ppベンゼン溶液中
に浸漬し、乾燥してミリスチン酸からなる保護膜を形成
した。なお、処理方法は実施例1と同様である。Treatment liquid ■ Methanol ■ Methanol + water (contains 5 wt% water) ■ Methanol + water (contains 10% water + 1%) ■ Methanol + water (contains 50 wt% water) ■ Methanol + water (80 w water
methanol + water (containing 90 wt% water) Example 2 After preparing the following treatment solutions 7 to 9 and treating the surface of the ferromagnetic metal thin film of the treated web prepared in Comparative Example 1,
These were immersed in a 11,000 ppp solution of myristic acid in benzene and dried to form a protective film made of myristic acid. Note that the processing method is the same as in Example 1.
処理液
■エタノール+水(水50wt%)
■n−プロパツール+水(水50wt%)■イソプロパ
ツール+水(水50wt%)比較例1,2および実施例
1,2で準備した15am幅、長さ500mの各々のウ
ェブから、幅8mmにスリットして得たテープを任意に
10my5巻抽出して、走行耐久性(目づまり、ドロッ
プアウト)を8ミリビデオテープレコーダで測定した。Treatment liquid ■ Ethanol + water (50 wt% water) ■ n-propanol + water (50 wt% water) ■ Isopropanol + water (50 wt% water) 15 am width prepared in Comparative Examples 1 and 2 and Examples 1 and 2 , 5 rolls of 10my tape were arbitrarily extracted from each 500m long web by slitting it into a width of 8mm, and running durability (clogging, dropout) was measured using an 8mm video tape recorder.
走行耐久性評価は、繰返し50pass走行における目
づまり時間で行なった。ドロップアウトについては、走
行初期における15μsec、 −16dB以上の落ち
込みの1分間当りの平均個数で評価した。また強磁性金
属薄膜の耐酸化性については、各々のテープを60℃、
90%RIIQ境下で2週間放置した時のテープ表面の
変化(変色、錆等)で評価した。これらの評価結果をま
とめると次表のようになる。The running durability was evaluated based on the clogging time during repeated 50-pass running. Dropouts were evaluated based on the average number of drops of −16 dB or more per minute for 15 μsec at the beginning of the run. In addition, regarding the oxidation resistance of the ferromagnetic metal thin film, each tape was heated at 60°C.
Evaluation was made based on changes in the tape surface (discoloration, rust, etc.) when the tape was left for 2 weeks under 90% RIIQ conditions. The results of these evaluations are summarized in the table below.
(発明の効果)
以上説明したように、本発明の製造方法によれば、走行
耐久性および強磁性薄膜の耐酸化性が改善され、かつ均
一にその性能を得ることができるといった優れた効果が
ある。(Effects of the Invention) As explained above, according to the manufacturing method of the present invention, excellent effects such as improved running durability and oxidation resistance of the ferromagnetic thin film and uniform performance can be obtained. be.
第1図は本発明の実施例に係る磁気記録媒体の製造方法
により得ることのできる磁気記録媒体の拡大断面図、第
2図は同磁気記録媒体を示す表面拡大図、第3図は従来
の磁気記録媒体を示す表面図である。
1 ・・・バックコート層、 2・・・ベースフィルム
、 3 ・・・強磁性金属薄膜、 4・・・保護膜、
5・・・強磁性金属薄膜。
6 ・・・無機異物、 7 ・・・有機異物、 8・・
保護膜。
第1図
1・ バックコート層
2′・ べ゛−スフJ12レム
3 ・楓壜住金属薄膜
4 ・ イAミ、(護FIG. 1 is an enlarged sectional view of a magnetic recording medium that can be obtained by the method of manufacturing a magnetic recording medium according to an embodiment of the present invention, FIG. 2 is an enlarged surface view of the same magnetic recording medium, and FIG. 3 is a conventional FIG. 2 is a surface view showing a magnetic recording medium. 1... Back coat layer, 2... Base film, 3... Ferromagnetic metal thin film, 4... Protective film,
5...Ferromagnetic metal thin film. 6...Inorganic foreign matter, 7...Organic foreign matter, 8...
Protective film. Figure 1 1・Back coat layer 2'・Base J12 Rem 3・Kaede bottle housing metal thin film 4・I Ami (protection)
Claims (1)
の強磁性金属薄膜の表面に対し、水を10wt%から8
0wt%含むアルコールで処理し、さらにこの上に有機
化合物からなる保護膜を設けることを特徴とする磁気記
録媒体の製造方法。A ferromagnetic metal film containing oxygen is formed on a non-magnetic support, and water is added from 10 wt% to 8 wt% to the surface of this ferromagnetic metal thin film.
A method for manufacturing a magnetic recording medium, which comprises treating the medium with alcohol containing 0 wt%, and further providing a protective film made of an organic compound thereon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6271987A JPS63229620A (en) | 1987-03-19 | 1987-03-19 | Production of magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6271987A JPS63229620A (en) | 1987-03-19 | 1987-03-19 | Production of magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63229620A true JPS63229620A (en) | 1988-09-26 |
Family
ID=13208436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6271987A Pending JPS63229620A (en) | 1987-03-19 | 1987-03-19 | Production of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63229620A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07326183A (en) * | 1994-05-31 | 1995-12-12 | Nec Corp | Washing method of magnetic recording apparatus component |
-
1987
- 1987-03-19 JP JP6271987A patent/JPS63229620A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07326183A (en) * | 1994-05-31 | 1995-12-12 | Nec Corp | Washing method of magnetic recording apparatus component |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4835070A (en) | Magnetic recording medium and method of producing the same | |
JPS63229620A (en) | Production of magnetic recording medium | |
US5376465A (en) | Magnetic recording medium having a ferromagnetic thin film and hydrolysis resistant protective layer comprising a tertiary carboxylic acid having at least two fluorine atoms | |
JP2808738B2 (en) | Thin film magnetic recording media | |
JP2794580B2 (en) | Manufacturing method of magnetic recording media | |
JP3143982B2 (en) | Method and apparatus for manufacturing magnetic recording medium | |
JPH0262716A (en) | Magnetic recording medium | |
JPS61131227A (en) | Magnetic recording medium | |
JPH02101620A (en) | Magnetic recording medium | |
JPH01105317A (en) | Magnetic recording medium | |
JPH0518176B2 (en) | ||
JPH0481247B2 (en) | ||
JPH02110828A (en) | Production of magnetic recording medium | |
JPH01204214A (en) | Magnetic recording medium | |
JPS63121115A (en) | Magnetic recording medium | |
JPS63102040A (en) | Production of magnetic recording medium | |
JPS5942639A (en) | Metallic thin film type magnetic recording medium | |
JPS63121119A (en) | Production of magnetic recording medium | |
JPH0136164B2 (en) | ||
JPS59223934A (en) | Production of magnetic recording medium | |
JPS61284827A (en) | Magnetic recording medium | |
JPS59175030A (en) | Production of magnetic recording medium | |
JPS61284823A (en) | Magnetic recording medium | |
JPS6199938A (en) | Manufacture of magnetic recording medium | |
JPS6267720A (en) | Magnetic recording medium |