JPS6322743U - - Google Patents
Info
- Publication number
- JPS6322743U JPS6322743U JP11732986U JP11732986U JPS6322743U JP S6322743 U JPS6322743 U JP S6322743U JP 11732986 U JP11732986 U JP 11732986U JP 11732986 U JP11732986 U JP 11732986U JP S6322743 U JPS6322743 U JP S6322743U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- hole
- wall surface
- view
- cleaning jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 238000011109 contamination Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
第１図ａは本考案に係る洗浄治具を示す斜視図
、第１図ｂは同図ａ中のＸ―Ｘ線断面図である。
第２図ａは本考案に係る他の実施例を示す斜視図
、第２図ｂは同図ａ中のＹ―Ｙ線断面図である。
第３図ａは本考案に係る洗浄治具を連結させた状
態を示す斜視図、第３図ｂは同図ａに示した洗浄
治具を用いた洗浄装置を示す断面図である。第４
図ａは従来の洗浄治具であるバスケツトを示す斜
視図、第４図ｂは同図ａ中のＺ―Ｚ線断面図であ
る。第５図は被洗浄物体の汚れの度合を測定する
ための水滴接触角を説明する断面図である。
１，１０……洗浄治具、１ｂ，１０ｂ……テー
パ部、２……被洗浄物体。
FIG. 1a is a perspective view showing a cleaning jig according to the present invention, and FIG. 1b is a sectional view taken along the line XX in FIG. 1a.
FIG. 2a is a perspective view showing another embodiment of the present invention, and FIG. 2b is a sectional view taken along the line Y--Y in FIG. 2a.
FIG. 3a is a perspective view showing a state in which the cleaning jig according to the present invention is connected, and FIG. 3b is a sectional view showing a cleaning apparatus using the cleaning jig shown in FIG. 3a. Fourth
Figure 4a is a perspective view showing a basket which is a conventional cleaning jig, and Figure 4b is a sectional view taken along the line Z--Z in Figure 4a. FIG. 5 is a sectional view illustrating a water droplet contact angle for measuring the degree of contamination of an object to be cleaned. 1, 10...Cleaning jig, 1b, 10b...Tapered portion, 2...Object to be cleaned.
Claims (1)
、該貫通孔の内壁面または内壁面の底部に被洗浄
物体を保持するテーパ部を形成したことを特徴と
する洗浄治具。 1. A cleaning jig, characterized in that a plate-like body is provided with a through hole for storing an object to be cleaned, and a tapered portion for holding the object to be cleaned is formed on the inner wall surface of the through hole or the bottom of the inner wall surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11732986U JPS6322743U (en) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11732986U JPS6322743U (en) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322743U true JPS6322743U (en) | 1988-02-15 |
Family
ID=31002739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11732986U Pending JPS6322743U (en) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322743U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010505272A (en) * | 2006-09-29 | 2010-02-18 | ラム リサーチ コーポレーション | Carrier for reducing entrance and / or exit marks left by a substrate processing meniscus |
| CN109701930A (en) * | 2018-11-30 | 2019-05-03 | 南安市博铭工业设计有限公司 | Reduce the wafer cleaning bearing device of scratch and washmarking |
-
1986
- 1986-07-29 JP JP11732986U patent/JPS6322743U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010505272A (en) * | 2006-09-29 | 2010-02-18 | ラム リサーチ コーポレーション | Carrier for reducing entrance and / or exit marks left by a substrate processing meniscus |
| CN109701930A (en) * | 2018-11-30 | 2019-05-03 | 南安市博铭工业设计有限公司 | Reduce the wafer cleaning bearing device of scratch and washmarking |