JPS6322731U - - Google Patents

Info

Publication number
JPS6322731U
JPS6322731U JP11722586U JP11722586U JPS6322731U JP S6322731 U JPS6322731 U JP S6322731U JP 11722586 U JP11722586 U JP 11722586U JP 11722586 U JP11722586 U JP 11722586U JP S6322731 U JPS6322731 U JP S6322731U
Authority
JP
Japan
Prior art keywords
substrate
optical system
irradiating
voltage
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11722586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11722586U priority Critical patent/JPS6322731U/ja
Publication of JPS6322731U publication Critical patent/JPS6322731U/ja
Pending legal-status Critical Current

Links

JP11722586U 1986-07-29 1986-07-29 Pending JPS6322731U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11722586U JPS6322731U (US06623731-20030923-C00012.png) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11722586U JPS6322731U (US06623731-20030923-C00012.png) 1986-07-29 1986-07-29

Publications (1)

Publication Number Publication Date
JPS6322731U true JPS6322731U (US06623731-20030923-C00012.png) 1988-02-15

Family

ID=31002541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11722586U Pending JPS6322731U (US06623731-20030923-C00012.png) 1986-07-29 1986-07-29

Country Status (1)

Country Link
JP (1) JPS6322731U (US06623731-20030923-C00012.png)

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