JPS63225722A - Sliding member - Google Patents

Abstract

PURPOSE:To obtain a sliding member which is excellent in wear-resistance and lubricating ability and can be used stably extending from a room temperature to high temperature by forming a nickel-base alloy layer having the same roughness as that of the surface of a base metal, the thickness of which is controlled, on the surface of a structural member. CONSTITUTION:A sliding member has an alloy layer containing 7-29% Al and 2% or less B by atomic percentage, the residual part being composed of Ni composition, which is substantially made by an intermetallic compound, formed on the surface of a structural member requiring wear-resistance and lubricating ability by vapor plating method. That is, an alloy layer containing by atomic percentage 7-29% Al, 2% B and containing in single or compound 12% or less Ti, 10% or less V, 1.6% or less Zr, 7% or less Nb, 5% or less Mo, 7% or less Hf, 9% or less Ta and 5% or less W, 20% or less in total, the residual part being composed of Ni composition, which is made up by an intermetallic compound, is formed on the surface of the structural member requiring wear-resistance and lubricating ability by vapor plating method.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a sliding member applied in various fields.

[Conventional technology]

Conventional sliding materials under dry friction conditions include (1) polymeric resin, (2) sintered material of solid lubricant and metal, and (3)
) Ceramics, etc., but (1) and (2) have good sliding properties under temperature conditions from room temperature to 200°C, but in the high temperature range where it is actually necessary under dry friction conditions. It cannot be used because the material becomes unstable. In the case of ceramics (3), they can be used at high temperatures and have good wear resistance, but have a high coefficient of friction and poor lubricity.

The present inventors first discovered that Ni, an intermetallic compound mainly composed of Ni and mulch, has excellent wear resistance and lubricity in the temperature range from room temperature to high temperature, and can be applied to sliding members in various fields.
Developed the base alloy (Patent Applications 1986-116167 and 1986)
1-116L68), and also developed a sliding member in which the surface of the structural member was coated with a Ni-based alloy by thermal spraying (Japanese Patent Application No. 61-114169). Although this invention has the advantage of being inexpensive, it is difficult to control the dimensions of the alloy layer using thermal spraying, and the surface is rough, so surface finishing may be required after the alloy layer is formed.

[Problems to be solved by the invention] The present invention forms a Ni-based alloy layer mainly composed of intermetallic compounds Ni and AI on the surface of a structural member, with a roughness comparable to that of the base material and a controlled thickness. The present invention aims to provide a sliding member which has excellent wear resistance and lubricity and can be stably used from room temperature to high temperature.

[Means for solving problems]

The present invention uses vapor phase plating methods such as sputtering and ion blasting to coat the surfaces of structural members (base materials) that require wear resistance and lubricity, rather than conventional thermal spraying. Ni, which is mainly composed of intermetallic compounds Ni and Al, has the same roughness as the finish and has a controlled thickness.
By forming a base alloy layer, it is possible to provide a sliding member that can be stably used from room temperature to high temperature without requiring surface finishing after forming the alloy layer.

That is, the present invention provides the following advantages: (1) The surface of a structural member that requires wear resistance and lubricity is coated with a material having a composition of 7 to 29% Ar, B2- or less in atomic percentage, and the remainder being substantially Ni. (2) A sliding member characterized in that an alloy layer substantially composed of an intermetallic compound is formed by vapor phase plating. Contains Aj 7-29%, B2% in molecular fraction and Ti
12% or less, V10% or less.

Zr: 1.6% or less, Ntl: 7% or less, Mo: 5% or less, Hf: 7% or less, Ta: 9% or less, W: 5% or less, individually or in combination, with a total of 20 Ti or less, the remainder being substantially K Ni, and substantially A sliding member (3) characterized in that an alloy layer composed of an intermetallic compound is formed by vapor phase plating on the surface of a structural member that requires wear resistance and lubricity. A47-29%, B2- or less, Fe
15% or less, the remainder being substantially composed of Ni, and an alloy layer substantially composed of an intermetallic compound formed by a vapor phase plating method, and ( 4) Atomic percentage of AI 7-29%, B2% or less, IFe on the surface of structural members that require wear resistance and lubricity.
Contains 15- or less, and Ti 12 or less, ■ 10% or less, Zr 1.6% or less, Nb 7 or less, Mo 5% or less,
An alloy layer containing up to 20% of Hf, up to 7% Ta, up to 5% W, singly or in combination, with the remainder consisting essentially of Ni, and consisting essentially of an intermetallic compound, is formed by vapor phase plating. This is a sliding member characterized by being formed.

[Effect]

According to the present invention, if the surface of the structural member is finished to the desired roughness before coating, it is not necessary to finish the surface after forming the alloy layer, and the dimensional accuracy is also good. In addition, it has excellent adhesion between the alloy layer and structural members, and has a dense structure, so it can withstand use under high surface pressure and has excellent corrosion resistance.

As for the composition of the alloy layer, by using an alloy target as described in Examples below, it is possible to obtain a sliding member that is inexpensive and has excellent sliding properties from room temperature to high temperature.

The reasons for limiting the components of the alloy layer formed by the vapor phase plating method in the present invention will be described below.

Al: Al is Lx, type intermetallic compound (ml, At)
It is an indispensable element for forming , and its necessary composition range is 7 to 29 at. A if less than 7at,%
l is dissolved in the matrix and does not form an Lx-type intermetallic compound.

Also, 29 at.

Although Lx-type intermetallic compounds are formed even when the temperature is exceeded, the ductility necessary for a structural material is not sufficient. A preferred range within this range is 9 to 21 at.

%, a particularly preferred range is 9 to 18 at.%.

BIB is effective in improving the ductility of Lx and type intermetallic compounds such as Ni and Al at room temperature and near room temperature.

However, if it exceeds 2 at.%, sufficient ductility cannot be obtained and on the contrary it becomes brittle. Within this range, the preferred range is 0.04 to
1.4 at,%, particularly preferred range is 0.14 to 0
．． 5 at, chi.

1”e:IPe is Lx, type intermetallic compound Ni, Al
It is effective in improving the ductility of. This is because Ni and Al have strong covalent bonding properties, but Fe has the effect of increasing the gold bonding properties in Ni, A /, and for this reason, adding Fe can improve the ductility of Ni and Ae. It is. 1 at,
If the content is less than 15%, the effect is not sufficient (15at%, even if it exceeds 15%, the effect of adding more than that cannot be expected. Within this range, the preferable range is 3 to 12at%, and the particularly preferable range is 5at%). ~10at,%.

Ti, Zr, Hf, 7.Nb, Ta, Mo, W: These elements are Lx.

Type 111 of intermetallic compounds. Since it forms a solid solution in Al and strengthens it, it has the effect of increasing the strength of the alloy of the present invention.

The sliding properties are good even without the addition of these elements, but when they are added, the hardness increases and the sliding properties are even better.

The amount of each element added is based on the difference in the solid solubility limit of each element in Ni and Al, and the atomic percentage is Ti: 12% or less, V:
10% or less, Zr: T6% or less, Nb: 7T or less, Mo
: 5% or less, )if near% or less, Ta: 9 or less, W:
It will be less than 5%. In addition, when adding in combination, each element can be dissolved independently, but even if the total amount exceeds 20 at. It is not preferable to add more than 20 at%.

However, even when added within the above range, the amount of AZ and Fe
Although the solid solubility limit may be exceeded in some cases due to the amount, addition within this range will not cause any problem in terms of sliding properties.

〔Example〕

FIG. 1 shows a method for producing an alloy layer using high-frequency bipolar sputtering. There are structural members (JXEJ E[E?
516) 2 is fixed to the substrate wt and the pole 15, and the alloy target 10, which is the material of the alloy layer melted and formed in a vacuum high-frequency furnace, is fixed to the target electrode 16. Its composition is shown in Table 1. In addition, a shutter 6 is located at the intermediate position between the electrodes.
Set up.

After preliminary evacuation of the inside of the vacuum container 3, argon gas is introduced from the gas outlet 1, and the high frequency voltage 13 generated by the control device 14 is applied between the shutter 6 and the substrate electrode 15 using the changeover switch 12 to generate a glow discharge. is raised, and the surface of the structural member 2 is plasma cleaned. Next, a high frequency voltage 13 is applied between the shutter 6 and the target electrode 16 to cause a glow discharge, and after the target surface is plasma cleaned, when the jacquard 6 is opened, particles of the target material 10 are deposited onto the surface of the structural member 2 due to sputtering phenomenon. An alloy layer 2 is formed by adhesion.

(at, chi) The remainder consists of Ni.

Table 2 shows parameters during plasma cleaning and coating. The composition of the produced alloy layer 7 is EP MA (1!
:1eatron Prove Miaro Ana”
As a result of investigation by 1yais), alloy target 10
The composition was almost the same as that of

In FIG. 1, 4 is cooling water, 5 is a shield, 8 is sputtered particles, 9 is argon ion, and 11 is a flow rate adjusting pulp.

Table 2 KAl-? on a Ni target different from the alloy target 10 mentioned above? The alloy layer 7 can also be produced using a composite target on which metal chips such as B are placed. With this method, it is difficult to control the composition of a multi-component alloy, but the target production cost is low.

Next, FIG. 2 shows a method for producing an alloy layer using the ion blating method. The structural member 2 is installed inside the vacuum container 3. The temperature during coating of the structural member 2 can be raised by the heater 221C, and the adhesion between the alloy layer and the base can be further strengthened. A plurality of crucibles 1B are provided, and evaporated gold R425 is placed in each crucible. For example, Ni-A
In the case of j-B-Fe, four crucibles are installed for each metal. Further, a bias voltage is applied to the structural member 2 so that the adhesion conditions can be controlled.

The inside of the vacuum container S is evacuated, and Ar gas 19 is introduced from the Ar inlet 1. In this state, the plasma gun 17 is operated to irradiate the evaporation material 2S with electrons 20, and each crucible 1
When the temperature of step 8 is controlled, the vapor deposition material 2S evaporates,
Ionized ions 21 adhere to the surface of the structural member 2,
An alloy layer 7 having a predetermined composition can be formed. Table 3 shows the parameters during coating, and Table 4 shows the composition of the alloy layer. Although it is possible to use a single crucible and use an alloy vapor deposition material, it is difficult to control the composition.

Table 5 ″ Table (at, %) (at, h) The remaining part is made of Ni.For sliding members in which a coating layer of an intermetallic compound was formed on the structural member by the above vapor phase plating method, the results were shown at room temperature. A sliding test was conducted in a dry atmosphere at 700°C.The test conditions were a surface pressure of 5, a velocity of 9f/6i1 (L 1 t
s/B for 10 hours, and the mating material was bearing steel J.SU
, T2. Commercially available polymer materials, solid lubricant-containing sintered metal materials, and ceramics were used as comparative materials for sliding properties.

Table 5 shows the test results. Comparison polymer materials and solid lubricant engraved metal sintered materials exhibit good sliding properties at room temperature, but cannot be used at high temperatures as the materials become unstable due to heat above 200°C. It is. On the other hand, ceramics such as Al and O, which have excellent heat resistance, have less wear.
The friction coefficient is high at approximately 0.5.

Similar results were obtained in a similar test using the sputtering method.

Compared to these comparative materials, the sliding member of the present invention has a lower amount of wear and a lower coefficient of friction both at room temperature and high temperature, and stably exhibits excellent sliding characteristics. Note that the sliding member of the present invention can of course be used not only under dry friction but also under oil lubrication.

〔Effect of the invention〕

The sliding member of the present invention is inexpensive and exhibits stable and excellent sliding properties from room temperature to high temperature, so it can be used as a sliding member for a variety of purposes. In particular, it has sliding properties at high temperatures that are not found in other materials, so it can be applied to boiler bearings, valves for ultra-high temperature and high pressure turbines, etc., and its range of use is wide.

In addition, it has excellent not only sliding properties but also corrosion resistance.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a method for manufacturing the sliding member of the present invention by a sputtering method, and FIG. WJ2 is a diagram showing a method for manufacturing the same sliding member by an ion blating method. Sub-Agents 1) Meifuku Agent Ryo Hagiwara − Sub-Agent Atsuo Anzai

Claims (4)

[Claims] (1) On the surface of a structural member that requires wear resistance and lubricity, the atomic percentage consists of 7 to 29% Al, 2% or less B, and the balance is substantially Ni, and is substantially free of intermetallic compounds. 1. A sliding member, characterized in that the alloy layer is formed by a vapor plating method. (2) The surface of a structural member that requires wear resistance and lubricity contains 7 to 29% Al and 2% B in atomic percentage and Ti1
2% or less, V10% or less, Zr1.6% or less, Nb7%
Below, Mo5% or less, Hf7% or less, Ta9% or less, W
5% or less, singly or in combination, with a total of 20% or less, the remainder consisting essentially of Ni, and forming an alloy layer consisting essentially of an intermetallic compound by a vapor phase plating method. Characteristic sliding members. (3) On the surface of structural members that require wear resistance and lubricity, atomic percentages of Al7 to 29%, B2% or less, Fe15
% or less, the remainder being substantially composed of Ni, and the remaining being substantially composed of an intermetallic compound. (4) On the surface of structural members that require wear resistance and lubricity, the atomic percentage is 7 to 29% Al, 2% or less B, and 15% Fe.
Contains the following, Ti 12% or less, V 10% or less, Zr
1.6% or less, Nb 7% or less, Mo 5% or less, Hf 7%
Below, Ta9% or less and W5% or less are used alone or in combination.
1. A sliding member characterized in that an alloy layer is formed by a vapor phase plating method, the alloy layer having a composition of 0% or less, the remainder of which is substantially composed of Ni, and which is substantially composed of an intermetallic compound.