JPS6322466B2 - - Google Patents
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- Publication number
- JPS6322466B2 JPS6322466B2 JP56027752A JP2775281A JPS6322466B2 JP S6322466 B2 JPS6322466 B2 JP S6322466B2 JP 56027752 A JP56027752 A JP 56027752A JP 2775281 A JP2775281 A JP 2775281A JP S6322466 B2 JPS6322466 B2 JP S6322466B2
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- JP
- Japan
- Prior art keywords
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- yellow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 description 43
- 239000000975 dye Substances 0.000 description 38
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 19
- 229910021417 amorphous silicon Inorganic materials 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 18
- 230000003595 spectral effect Effects 0.000 description 10
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 9
- 239000003086 colorant Substances 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 238000000926 separation method Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 239000000049 pigment Substances 0.000 description 4
- RZSYLLSAWYUBPE-UHFFFAOYSA-L Fast green FCF Chemical compound [Na+].[Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=2C(=CC(O)=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 RZSYLLSAWYUBPE-UHFFFAOYSA-L 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- GUYIZQZWDFCUTA-UHFFFAOYSA-N (pentadecachlorophthalocyaninato(2-))-copper Chemical compound [Cu+2].N1=C([N-]2)C3=C(Cl)C(Cl)=C(Cl)C(Cl)=C3C2=NC(C2=C(Cl)C(Cl)=C(Cl)C(Cl)=C22)=NC2=NC(C2=C(Cl)C(Cl)=C(Cl)C(Cl)=C22)=NC2=NC2=C(C(Cl)=C(C(Cl)=C3)Cl)C3=C1[N-]2 GUYIZQZWDFCUTA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- DEXKHGVSCDMMLD-UHFFFAOYSA-N [ClH]1N=CC=C1 Chemical compound [ClH]1N=CC=C1 DEXKHGVSCDMMLD-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- NLMHXPDMNXMQBY-UHFFFAOYSA-L chembl260999 Chemical compound [Na+].[Na+].C1=CC(NC(=O)C)=CC=C1N=NC(C(=CC1=C2)S([O-])(=O)=O)=C(O)C1=CC=C2NC(=O)NC1=CC=C(C(O)=C(N=NC=2C=CC=CC=2)C(=C2)S([O-])(=O)=O)C2=C1 NLMHXPDMNXMQBY-UHFFFAOYSA-L 0.000 description 2
- VYXSBFYARXAAKO-WTKGSRSZSA-N chembl402140 Chemical compound Cl.C1=2C=C(C)C(NCC)=CC=2OC2=C\C(=N/CC)C(C)=CC2=C1C1=CC=CC=C1C(=O)OCC VYXSBFYARXAAKO-WTKGSRSZSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- SWGJCIMEBVHMTA-UHFFFAOYSA-K trisodium;6-oxido-4-sulfo-5-[(4-sulfonatonaphthalen-1-yl)diazenyl]naphthalene-2-sulfonate Chemical compound [Na+].[Na+].[Na+].C1=CC=C2C(N=NC3=C4C(=CC(=CC4=CC=C3O)S([O-])(=O)=O)S([O-])(=O)=O)=CC=C(S([O-])(=O)=O)C2=C1 SWGJCIMEBVHMTA-UHFFFAOYSA-K 0.000 description 2
- NLXFWUZKOOWWFD-UHFFFAOYSA-N 1-(2-hydroxyethylamino)-4-(methylamino)anthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C(NCCO)=CC=C2NC NLXFWUZKOOWWFD-UHFFFAOYSA-N 0.000 description 1
- FKHNZQFCDGOQGV-UHFFFAOYSA-N 2,3-dimethylquinoxaline Chemical compound C1=CC=C2N=C(C)C(C)=NC2=C1 FKHNZQFCDGOQGV-UHFFFAOYSA-N 0.000 description 1
- FOQABOMYTOFLPZ-UHFFFAOYSA-N 2-[n-ethyl-4-[(4-nitrophenyl)diazenyl]anilino]ethanol Chemical compound C1=CC(N(CCO)CC)=CC=C1N=NC1=CC=C([N+]([O-])=O)C=C1 FOQABOMYTOFLPZ-UHFFFAOYSA-N 0.000 description 1
- AJIRUIWLEVHQMU-UHFFFAOYSA-N 3-aminophenazin-2-ol Chemical compound C1=CC=C2N=C(C=C(C(N)=C3)O)C3=NC2=C1 AJIRUIWLEVHQMU-UHFFFAOYSA-N 0.000 description 1
- STOOUUMSJPLRNI-UHFFFAOYSA-N 5-amino-4-hydroxy-3-[[4-[4-[(4-hydroxyphenyl)diazenyl]phenyl]phenyl]diazenyl]-6-[(4-nitrophenyl)diazenyl]naphthalene-2,7-disulfonic acid Chemical compound OS(=O)(=O)C1=CC2=CC(S(O)(=O)=O)=C(N=NC=3C=CC(=CC=3)C=3C=CC(=CC=3)N=NC=3C=CC(O)=CC=3)C(O)=C2C(N)=C1N=NC1=CC=C([N+]([O-])=O)C=C1 STOOUUMSJPLRNI-UHFFFAOYSA-N 0.000 description 1
- VVAVKBBTPWYADW-UHFFFAOYSA-L Biebrich scarlet Chemical compound [Na+].[Na+].OC1=CC=C2C=CC=CC2=C1N=NC(C(=C1)S([O-])(=O)=O)=CC=C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 VVAVKBBTPWYADW-UHFFFAOYSA-L 0.000 description 1
- SGHZXLIDFTYFHQ-UHFFFAOYSA-L Brilliant Blue Chemical compound [Na+].[Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=2C(=CC=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 SGHZXLIDFTYFHQ-UHFFFAOYSA-L 0.000 description 1
- RDFLLVCQYHQOBU-GPGGJFNDSA-O Cyanin Natural products O([C@H]1[C@H](O)[C@H](O)[C@H](O)[C@H](CO)O1)c1c(-c2cc(O)c(O)cc2)[o+]c2c(c(O[C@H]3[C@H](O)[C@@H](O)[C@H](O)[C@H](CO)O3)cc(O)c2)c1 RDFLLVCQYHQOBU-GPGGJFNDSA-O 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- DBDVUUCUDYNZHB-UHFFFAOYSA-K azocard green g Chemical compound [Na+].[Na+].[Na+].[O-]S(=O)(=O)C1=CC2=CC(S([O-])(=O)=O)=C(N=NC=3C=CC(=CC=3)C=3C=CC(=CC=3)N=NC=3C=C(C(O)=CC=3)C([O-])=O)C(O)=C2C(N)=C1N=NC1=CC=C([N+]([O-])=O)C=C1 DBDVUUCUDYNZHB-UHFFFAOYSA-K 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 239000000038 blue colorant Substances 0.000 description 1
- NNBFNNNWANBMTI-UHFFFAOYSA-M brilliant green Chemical compound OS([O-])(=O)=O.C1=CC(N(CC)CC)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](CC)CC)C=C1 NNBFNNNWANBMTI-UHFFFAOYSA-M 0.000 description 1
- WRXJEOCPOOEWII-UHFFFAOYSA-N brilliant green zh Chemical compound C1=CC=C[C]2C(=O)C(C3=C45)=CC=C4C(C4=C67)=C(Br)C=C7C(=O)[C]7C=CC=CC7=C6C=C(OC)C4=C5C(OC)=C(Br)C3=C21 WRXJEOCPOOEWII-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- RDFLLVCQYHQOBU-ZOTFFYTFSA-O cyanin Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC(C(=[O+]C1=CC(O)=C2)C=3C=C(O)C(O)=CC=3)=CC1=C2O[C@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 RDFLLVCQYHQOBU-ZOTFFYTFSA-O 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- JBBPTUVOZCXCSU-UHFFFAOYSA-L dipotassium;2',4',5',7'-tetrabromo-4,7-dichloro-3-oxospiro[2-benzofuran-1,9'-xanthene]-3',6'-diolate Chemical compound [K+].[K+].O1C(=O)C(C(=CC=C2Cl)Cl)=C2C21C1=CC(Br)=C([O-])C(Br)=C1OC1=C(Br)C([O-])=C(Br)C=C21 JBBPTUVOZCXCSU-UHFFFAOYSA-L 0.000 description 1
- FCCOTXHFDDRSDO-UHFFFAOYSA-L disodium 5-[[4-[[4-[(3-carboxylato-4-hydroxyphenyl)diazenyl]phenyl]carbamoylamino]phenyl]diazenyl]-2-hydroxybenzoate Chemical compound [Na+].[Na+].Oc1ccc(cc1C([O-])=O)N=Nc1ccc(NC(=O)Nc2ccc(cc2)N=Nc2ccc(O)c(c2)C([O-])=O)cc1 FCCOTXHFDDRSDO-UHFFFAOYSA-L 0.000 description 1
- SLZCDQVDTBWJND-UHFFFAOYSA-L disodium 8-[[4-[4-[(4-ethoxyphenyl)diazenyl]-3-methylphenyl]-2-methylphenyl]diazenyl]-7-hydroxynaphthalene-1,3-disulfonate Chemical compound CCOC1=CC=C(C=C1)N=NC2=C(C=C(C=C2)C3=CC(=C(C=C3)N=NC4=C(C=CC5=CC(=CC(=C54)S(=O)(=O)O)S(=O)(=O)[O-])[O-])C)C.[Na+].[Na+] SLZCDQVDTBWJND-UHFFFAOYSA-L 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- VYXSBFYARXAAKO-UHFFFAOYSA-N ethyl 2-[3-(ethylamino)-6-ethylimino-2,7-dimethylxanthen-9-yl]benzoate;hydron;chloride Chemical compound [Cl-].C1=2C=C(C)C(NCC)=CC=2OC2=CC(=[NH+]CC)C(C)=CC2=C1C1=CC=CC=C1C(=O)OCC VYXSBFYARXAAKO-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000040 green colorant Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- CXKWCBBOMKCUKX-UHFFFAOYSA-M methylene blue Chemical compound [Cl-].C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 CXKWCBBOMKCUKX-UHFFFAOYSA-M 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- FZIOOTTWDRFBKU-UHFFFAOYSA-N n,4-dimethylbenzamide Chemical compound CNC(=O)C1=CC=C(C)C=C1 FZIOOTTWDRFBKU-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 239000001062 red colorant Substances 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- FTUYQIPAPWPHNC-UHFFFAOYSA-M sodium;4-[[4-[benzyl(ethyl)amino]phenyl]-[4-[benzyl(ethyl)azaniumylidene]cyclohexa-2,5-dien-1-ylidene]methyl]benzene-1,3-disulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](CC)CC=2C=CC=CC=2)C=2C(=CC(=CC=2)S([O-])(=O)=O)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC=C1 FTUYQIPAPWPHNC-UHFFFAOYSA-M 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- MPCYPRXRVWZKGF-UHFFFAOYSA-J tetrasodium 5-amino-3-[[4-[4-[(8-amino-1-hydroxy-3,6-disulfonatonaphthalen-2-yl)diazenyl]phenyl]phenyl]diazenyl]-4-hydroxynaphthalene-2,7-disulfonate Chemical compound [Na+].[Na+].[Na+].[Na+].C1=C(S([O-])(=O)=O)C=C2C=C(S([O-])(=O)=O)C(N=NC3=CC=C(C=C3)C3=CC=C(C=C3)N=NC3=C(C=C4C=C(C=C(C4=C3O)N)S([O-])(=O)=O)S([O-])(=O)=O)=C(O)C2=C1N MPCYPRXRVWZKGF-UHFFFAOYSA-J 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000001060 yellow colorant Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/40—Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled
- H04N25/44—Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled by partially reading an SSIS array
- H04N25/447—Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled by partially reading an SSIS array by preserving the colour pattern with or without loss of information
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/10—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
- H04N25/11—Arrangement of colour filter arrays [CFA]; Filter mosaics
- H04N25/13—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
- H04N25/134—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements based on three different wavelength filter elements
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Facsimile Heads (AREA)
- Color Television Image Signal Generators (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
【発明の詳細な説明】
本発明は、カラーテレビジヨンカメラ等に用い
られる固体撮像素子に応用されるカラー電気信号
を得る為の、色分離型の光導電素子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a color separation type photoconductive element for obtaining color electrical signals applied to solid-state image sensors used in color television cameras and the like.
従来CCD等の固体撮像素子を用いた単板式固
体撮像装置では、カラーフイルタ・アレイと撮像
セルを一対一に重ね合わせて色分離を行なう。こ
の様な固体撮像装置ではカラーフイルタエレメン
トとCCDの撮像セルの間の重ね合わせが完全で
あつても、CCDの各セル間で信号漏洩があるた
め、混色が生じて色分離が不確実になるといおう
問題がある。 Conventionally, in a single-chip solid-state imaging device using a solid-state imaging device such as a CCD, color separation is performed by overlapping a color filter array and an imaging cell one-on-one. In such a solid-state imaging device, even if the color filter element and the CCD imaging cell are perfectly overlapped, signal leakage occurs between each CCD cell, resulting in color mixture and uncertain color separation. There is a problem.
また、別にはカラーフイルターアレイをCCD
の撮像セル上に一体化して設ける試みがなされて
いる。すなわち、CCD上に高分子からなる媒染
層を形成し、各色の染料を用いて所定のパターン
に染色する方法がある。 In addition, there is also a CCD color filter array.
Attempts have been made to provide it integrally on the imaging cell. That is, there is a method in which a mordant layer made of polymer is formed on the CCD and dyed in a predetermined pattern using dyes of various colors.
更にパターン形成法としては適当な染料を溶解
した染色浴中に浸漬処理する染色法、あるいは昇
華性を有する染料を被着色部と近接又は接触させ
て、その染料を加熱することにより熱転写する方
法が挙げられる。 Furthermore, as a pattern forming method, there is a dyeing method in which the dye is immersed in a dye bath in which a suitable dye is dissolved, or a thermal transfer method in which a sublimable dye is brought close to or in contact with the part to be colored and the dye is heated. Can be mentioned.
また蒸気圧が低く且つ熱分解しにくい染料を基
板上に真空蒸着し、その後所定のパターンにドラ
イエツチングすることによつて、所定パターンを
もつ染料蒸着膜を形成させる方法等が知られてい
る。 Also known is a method in which a dye deposited film having a predetermined pattern is formed by vacuum-depositing a dye that has a low vapor pressure and is difficult to thermally decompose onto a substrate, and then dry etching it into a predetermined pattern.
しかしながら、カラーフイルターとCCDの撮
像セルの間の重ね合せが必要であつて、混合ある
いは色分離が不確実といつた欠点が避けられな
い。 However, the overlay between the color filter and the CCD imaging cell is necessary, and disadvantages such as unreliable mixing or color separation are inevitable.
本発明は、上記従来例の重ね合わせの精度と手
間の煩雑さ等の欠点を除去すると同時にカラーフ
イルターエレメント機能と感光性センサーとを一
体化し、所定の感度域に於いて極めて高感度で色
分離精度が著しく高い光導電素子を提供すること
を目的とする。 The present invention eliminates the drawbacks of the conventional example, such as overlay accuracy and laboriousness, and at the same time integrates the color filter element function and photosensitive sensor, and achieves color separation with extremely high sensitivity in a predetermined sensitivity range. An object of the present invention is to provide a photoconductive element with extremely high precision.
本発明の光導電素子は、光導電素子用の支持体
と、シリコン原子を母体とする非晶質材料（以後
ａ−Siと表記す）で構成された光導電層と、該層
上に設けられた色素層と、該色素層上に設けられ
た一対の信号取出し用の電極とを有する事を特徴
とする。 The photoconductive element of the present invention includes a support for the photoconductive element, a photoconductive layer made of an amorphous material (hereinafter referred to as a-Si) having silicon atoms as a matrix, and a photoconductive layer provided on the layer. It is characterized by having a dye layer and a pair of signal extraction electrodes provided on the dye layer.
本発明の望ましい実施態様例によれば、狭帯域
分光感度を有するアレー素子は、光導電素子用と
して所定の前処理加工が施された支持体上に、先
ずグロー放電法，スパツタリング法，イオンプレ
ーテイング法，反応性電子ビーム蒸着法，CVD
法，等によつて、ａ−Siから成る光導電層を形成
する。 According to a preferred embodiment of the present invention, an array element having narrow band spectral sensitivity is first prepared by a glow discharge method, a sputtering method, an ion spraying method, etc. Teing method, reactive electron beam evaporation method, CVD
A photoconductive layer made of a-Si is formed by a method such as A-Si.
該光導電層上に色素層を溶液法，蒸着法等の手
段によつて積層した後、２相の出力信号を得るた
めの電極を形成する。更に必要に応じて色素層及
び電極の保護或いは過剰な紫外成分を除去する目
的で、絶縁性ポリマー層を被覆することが出来
る。 After a dye layer is laminated on the photoconductive layer by a solution method, vapor deposition method, or the like, electrodes for obtaining two-phase output signals are formed. Furthermore, if necessary, an insulating polymer layer can be coated for the purpose of protecting the dye layer and electrodes or removing excess ultraviolet components.
以下本発明を図面に従つて詳細に説明する。 The present invention will be explained in detail below with reference to the drawings.
第１図には、本発明による色分離型、若しくは
狭帯域分光感度を有するアレー状光導電素子の好
適な実施態様例が示される。全体として１で示さ
れるアレー状素子は、支持体２とａ−Siの光導電
層３、更に該光導電層３上に色素層４を積層した
後、電極５，５′を設けて示される。 FIG. 1 shows a preferred embodiment of the color separation type or array photoconductive element having narrow band spectral sensitivity according to the present invention. The array element, generally designated 1, is shown as having a support 2, an a-Si photoconductive layer 3, a dye layer 4 laminated on the photoconductive layer 3, and electrodes 5, 5' provided thereon. .
色素層４は、アレー状素子が必要とする分光感
度に応答する様に種々の色をもつて構成される。 The dye layer 4 is constructed with various colors to respond to the spectral sensitivity required by the array element.
また、本発明によるアレー素子の感度は、ａ−
Siの光導電層３と積層される色素層４とによつて
決められる。すなわち、色素層４の選択によつて
分光感度のみならず、明抵抗と暗抵抗の比を種々
にとることが出来る。従つて、例えば、赤（Ｒ），
緑(G)，青(B)の分光感度分布と、感度とを任意にコ
ントロールすることが出来る。然るに、一部の
色、例えばＧのみを特に高感度にすることも、ま
たＲ，Ｇ，Ｂ三色の感度を均等にすることも可能
である。 Furthermore, the sensitivity of the array element according to the present invention is a-
It is determined by the Si photoconductive layer 3 and the laminated dye layer 4. That is, by selecting the dye layer 4, not only the spectral sensitivity but also the ratio of bright resistance to dark resistance can be varied. Therefore, for example, red (R),
The spectral sensitivity distribution and sensitivity of green (G) and blue (B) can be controlled arbitrarily. However, it is possible to make only some colors, for example, G, particularly highly sensitive, or to make the sensitivity of the three colors R, G, and B equal.
次に具体的に本発明の構成部材について説明す
る。 Next, the constituent members of the present invention will be specifically explained.
ａ−Si層３は、例えばグロー放電法によつて形
成される。 The a-Si layer 3 is formed by, for example, a glow discharge method.
ａ−Si層３中にドーピングされる不純物として
は、ａ−Si層３をｎ型にする場合には、周期律表
第族の元素、例えばＮ，Ｐ，AS，Sb，Bi，等
が好適なものとして挙げられ、Ｐ型にするには、
周期律表第族の元素、例えばＢ，Al，Ga，In，
Tl等が好適なものとして挙げられる。 As the impurity to be doped into the a-Si layer 3, when the a-Si layer 3 is made to be n-type, elements of Group 1 of the periodic table, such as N, P, AS, Sb, Bi, etc., are preferable. To make it P-type,
Elements from groups of the periodic table, such as B, Al, Ga, In,
Preferred examples include Tl and the like.
これ等の不純物はａ−Si層３中に含有される量
がppmオーダーであるので、層３を構成する物質
程，公害性に注意をする必要はないが、出来る限
り公害性のないものを使用するのが好ましい。こ
の様な観点からすれば、形成されるａ−Si層３の
電気的光学的特性を加味して、例えば、Ｂ，As，
Ｐ，Sb等が最適である。ａ−Si層３中にドーピ
ングされる不純物の量は、電気的，光学的特性に
よつて適宜選択されるが、周期律表第族の不純
物の場合には10-6〜10-3元素比、好適には10-5〜
10-4元素比、周期律表第族の不純物の場合に
は、10-8〜10-5元素比、好適には10-8〜10-7元素
比とするのが望ましい。ａ−Siから成る光導電層
３の層厚としては、通常の場合0.5〜10μ、好適に
は１〜5μとされる。 Since the amount of these impurities contained in the a-Si layer 3 is on the order of ppm, it is not necessary to pay as much attention to their pollution properties as the substances constituting the layer 3, but it is necessary to use materials that are as non-polluting as possible. It is preferable to use From this point of view, considering the electrical and optical characteristics of the a-Si layer 3 to be formed, for example, B, As,
P, Sb, etc. are optimal. The amount of impurity doped into the a-Si layer 3 is appropriately selected depending on the electrical and optical characteristics, but in the case of impurities from Group 3 of the periodic table, the element ratio is 10 -6 to 10 -3 . , preferably 10 -5 ~
In the case of impurities belonging to group 1 of the periodic table, the element ratio is preferably 10 -8 to 10 -5 , preferably 10 -8 to 10 -7 . The thickness of the photoconductive layer 3 made of a-Si is usually 0.5 to 10 microns, preferably 1 to 5 microns.
次に色素層４を構成する材料として有効に用い
られるものとして、例えば、
青色着色剤
スミノールレベリングブルーＲ（住友化学製）、
スミノールフアストネイビー（同）、パテントブ
ルーAF（バーデイツシユ・アニリン製）、アシラ
ンアストールＢ（バイエル製）、アイゼンベイジツ
クシアニン6GH（保土谷化学製）、メチレンブル
ーFZ（住友化学製）、セブロンブルー2G（デユポ
ン製）、ダイアクリルスプラブルー5GL（三菱化成
製）、ダイレクトカツパーブルー2B（住友化学
製）、ジユラゾールブルー2GN（インペリアル・
ケミカル製）、カヤラススプラブルーBWL（日本
化学製）、ベンゾニユーブルー5BS（バイエル製）、
ニホンスレンブルーGCD（住友化学製）、カーボ
ノールブルーLBN（日本化薬製）、インダスレン
ブルーRS−Ｄ（バーデイツシユ・アニリン製）、
ミツイパツトブリリアントブルー4G（三井東圧化
学製）、スミカロンブルーＳ−3RF（住友化学製）、
テラシルブルーBG（チバ・ガイギー製）、ラチル
ブルーBCN（デユポン製）、カヤロンフアストブ
ルーFN（日本化薬製）、チバノンダークブルー
MB（チバ・ガイギー製）、スミトーンフアースト
ブルーRS（住友化学製）、ミケスレンブルーGCD
（三井東圧化学製）など。 Next, materials that can be effectively used for forming the dye layer 4 include, for example, the blue colorant Suminol Leveling Blue R (manufactured by Sumitomo Chemical);
Suminol Fast Navy (same), Patent Blue AF (manufactured by Bardate Aniline), Acilan Astor B (manufactured by Bayer), Eisenbeijituku Cyanin 6GH (manufactured by Hodogaya Chemical), Methylene Blue FZ (manufactured by Sumitomo Chemical), Seblon Blue 2G (manufactured by Dupont), Diacrylic Splash Blue 5GL (manufactured by Mitsubishi Kasei), Direct Cutpur Blue 2B (manufactured by Sumitomo Chemical), Diyurazol Blue 2GN (manufactured by Imperial Chemical Co., Ltd.)
(manufactured by Chemical), Kayaras Supra Blue BWL (manufactured by Nippon Kagaku), Benzony Blue 5BS (manufactured by Bayer),
Nihon Thren Blue GCD (manufactured by Sumitomo Chemical), Carbonol Blue LBN (manufactured by Nippon Kayaku), Industhrene Blue RS-D (manufactured by Verdate Aniline),
Mitsuipat Brilliant Blue 4G (manufactured by Mitsui Toatsu Chemicals), Sumikaron Blue S-3RF (manufactured by Sumitomo Chemicals),
Terrasil Blue BG (manufactured by Ciba Geigy), Latil Blue BCN (manufactured by Dupont), Kayalon Fast Blue FN (manufactured by Nippon Kayaku), Cibanon Dark Blue
MB (manufactured by Ciba Geigy), Sumitone First Blue RS (manufactured by Sumitomo Chemical), Mikethlene Blue GCD
(manufactured by Mitsui Toatsu Chemical) etc.
赤色着色剤
スミノールフアーストレツドBconc（住友化学
製）、スミアクリルレツドＮ−RL（同）、アイゼン
カチロンフロキシンFF（保土谷化学製）、ダイレ
クトスカーレツトBA（住友化学製）、クロラゾー
ルレツドBK（インペリアル・ケミカル製）、ベン
ゾルービン6BS（バイエル製）、ミツイダイレクト
スカーレツト3BX（三井東圧化学製）、ニホンス
レンレツドFBB（住友化学製）、チバノンブリリ
アントピンクＲ（チバ・ガイギー製）、スミカロン
レツドＳ−GG（住友化学製）、ダイヤセリトンレ
ツドＲ（三菱化成製）、ルラフイツクスレツドBF
（バーデイツシユ・アニリン製）、チバセツトレツ
ド2G（チバ・ガイギー製）、カヤロンフアースト
スカーレツトＢ（日本化薬製）、スミトーンカーミ
ンＢ（住友化学製）、ダイニチ＃930フアストレツ
ド（大日精化製）、クロモフタールレツド2RF（チ
バ・ガイギー製）、サンカシアレツドＹ（デユポン
製）、No.601デープレツドバイオレツト（東洋イン
キ製）など。Red colorant Suminoru Fastret Bconc (manufactured by Sumitomo Chemical), Sumia Acrylic Red N-RL (manufactured by Sumitomo Chemical), Eisenkathylon Phloxin FF (manufactured by Hodogaya Chemical), Direct Scarlet BA (manufactured by Sumitomo Chemical), Chlorazole Red BK (manufactured by Imperial Chemical), Benzolubin 6BS (manufactured by Bayer), Mitsui Direct Scarlet 3BX (manufactured by Mitsui Toatsu Chemical), Nihon Suren Red FBB (manufactured by Sumitomo Chemical), Cibanon Brilliant Pink R (manufactured by Ciba Chemical) (manufactured by Geigy), Sumikaron Red S-GG (manufactured by Sumitomo Chemical), Diaceriton Red R (manufactured by Mitsubishi Kasei), Rura Fix Thread BF
(manufactured by Verdate Aniline), Ciba Settretsu 2G (manufactured by Ciba Geigy), Kayalon Fast Scarlet B (manufactured by Nippon Kayaku), Sumitone Carmine B (manufactured by Sumitomo Chemical), Dainichi #930 Fastret (manufactured by Dainichiseika) , Cromophthal Red 2RF (manufactured by Ciba Geigy), Sankasia Red Y (manufactured by Dupont), No. 601 Deep Red Violet (manufactured by Toyo Ink), etc.
緑色着色剤
スミノールミリングブリリアントグリーン5G
（住友化学製）、アシラングリーンSFG（バーデイ
ツシユ・アニリン製）、ダイアシツドフアストグ
リーンGW（三菱化成製）、エリオグリーンSN（チ
バ・ガイギー製）、アイゼンダイヤモンドグリー
ンGH（保土谷化学製）、アストラマラカイドグリ
ーンＢ（バイエル製）、スミアクリルブリリアント
グリーンＢ（住友化学製）、アイゼンダイレクトグ
リーンBH（保土谷化学製）、ミツイダイレクトグ
リーンGC（三井東圧化学製）、ジユラゾールグリ
ーン5B（インペリアル・ケミカル製）、ベンザミ
ンフアストグリーンGFL（バイエル製）、ニホン
スレンブリリアントグリーンＢ（住友化学製）、ミ
ケスレンブリリアントグリーンGG（三井東圧化
学製）、レゾリングリーンＣ−FGS（バイエル
製）、ダイニチシアニングリーンFG（大日精化
製）、スミトーンフアストグリーンイエロー5G
（住友化学製）、シアニングリーントナー（東洋イ
ンキ製）など。Green colorant Suminol Milling Brilliant Green 5G
(manufactured by Sumitomo Chemical), Asilane Green SFG (manufactured by Verdate Aniline), Diamond Fast Green GW (manufactured by Mitsubishi Kasei), Erio Green SN (manufactured by Ciba Geigy), Eisen Diamond Green GH (manufactured by Hodogaya Chemical), Astra Malachide Green B (manufactured by Bayer), Sumia Acrylic Brilliant Green B (manufactured by Sumitomo Chemical), Eisen Direct Green BH (manufactured by Hodogaya Chemical), Mitsui Direct Green GC (manufactured by Mitsui Toatsu Chemical), Diyurazol Green 5B (manufactured by Imperial・Manufactured by Chemical), Benzamine Fast Green GFL (manufactured by Bayer), Nihon Thren Brilliant Green B (manufactured by Sumitomo Chemical), Mikethrene Brilliant Green GG (manufactured by Mitsui Toatsu Chemical), Resolin Green C-FGS (manufactured by Bayer), Dainichi Cyanine Green FG (manufactured by Dainichiseika), Sumitone Fast Green Yellow 5G
(manufactured by Sumitomo Chemical), cyanine green toner (manufactured by Toyo Ink), etc.
黄色着色剤
スミノールミリングイエロー０（住友化学製）、
アシランイエローGG（バイエル製）、パラチンフ
アストイエローGRN（バーデイツシユ・アニリン
製）、フルオレセンSP（インペリアル・ケミカル
製）、ミツイメタニルイエロー（三井東圧化学
製）、スミアクリルイエローＮ−3RL（住友化学
製）、セリトンフアストイエローＧ（バーデイツシ
ユ・アニリン製）、カヤロンフアストイエローGL
（日本化薬製）、アイゼンカチロンイエロー3GLH
（保土谷化学製）、マキロンイエロー5GL（チバ・
ガイギー製）、クリソフエニン（住友化学製）、ク
ロラゾールイエロー3G（インペリアル・ケミカル
製）、スチルベンイエローGX（デユポン製）、ミ
ツイダイレクトフアストイエローBC（三井東圧化
学製）、ベンゾヴイスコースイエローRL（バイエ
ル製）、ニホンスレンイエロー3GC（住友化学製）、
チバノンイエローGC（チバ・ガイギー製）、スミ
カロンイエローＳ−Ｒ（住友化学製）、セリトンフ
アストイエローＧ（バーデイツシユ・アニリン製）
テララシルゴールデンイエローRL（チバ・ガイギ
ー製）、ミケトンフアストイエローGL（三井東圧
化学製）、ダイニチフアストイエローＧ（大日精化
製）、クロモフタールイエローA2R（チバ・ガイ
ギー製）、パリオゲンイエローRT（バーデイツシ
ユ・アニリン製）など。Yellow colorant Suminol Milling Yellow 0 (manufactured by Sumitomo Chemical),
Asilane Yellow GG (manufactured by Bayer), Paratin Fast Yellow GRN (manufactured by Verdeitsch Aniline), Fluorescene SP (manufactured by Imperial Chemical), Mitsui Methanil Yellow (manufactured by Mitsui Toatsu Chemicals), Sumiacryl Yellow N-3RL (Sumitomo (manufactured by Kagaku), Seriton Fast Yellow G (manufactured by Bardate Aniline), Kayalon Fast Yellow GL
(manufactured by Nippon Kayaku), Eisenkatilone Yellow 3GLH
(manufactured by Hodogaya Chemical), Makiron Yellow 5GL (Ciba・
Geigy), Chrysophenin (Sumitomo Chemical), Chlorazole Yellow 3G (Imperial Chemical), Stilbene Yellow GX (DuPont), Mitsui Direct Fast Yellow BC (Mitsui Toatsu Chemical), Benzoviscose Yellow RL ( (manufactured by Bayer), Nihonsuren Yellow 3GC (manufactured by Sumitomo Chemical),
Cibanon Yellow GC (manufactured by Ciba Geigy), Sumikalon Yellow S-R (manufactured by Sumitomo Chemical), Seriton Fast Yellow G (manufactured by Verdate Aniline)
Terrasil Golden Yellow RL (manufactured by Ciba-Geigy), Miketon Fast Yellow GL (manufactured by Mitsui Toatsu Chemicals), Dainichi Fast Yellow G (manufactured by Dainichiseika), Cromophthal Yellow A2R (manufactured by Ciba-Geigy), Palyogen Yellow RT (manufactured by Bardate Aniline), etc.
マゼンタ着色剤
ソーラーアシツドスカーレツトBA（住友化学
製）、アシランスカーレツトV3R（バイエル製）、
アイゼンアシツドローダミンBH（保土谷化学
製）、エリオシンスカーレツト4R（インペリア
ル・ケミカル製）、ローダミン6G（チバ・ガイギ
ー製）、ローダミンF4G（バーデイツシユ・アニリ
ン製）、カヤクダイレクトフアストスカーレツト
4BS（日本化薬製）など。Magenta colorant Solar Acid Scarlet BA (manufactured by Sumitomo Chemical), Acilan Scarlet V3R (manufactured by Bayer),
Eisenashitsu Rhodamine BH (manufactured by Hodogaya Chemical), Eriosin Scarlet 4R (manufactured by Imperial Chemical), Rhodamine 6G (manufactured by Ciba Geigy), Rhodamine F4G (manufactured by Verdate Aniline), Kayaku Direct Fast Scarlet
4BS (manufactured by Nippon Kayaku) etc.
シアン着色剤
２，３−ジメチル−キノキザリン、２−ヒドロ
キシ−３−アミノ−フエナジン、ヒドロキシ−ア
ミノ−ナフタジン−スルホン酸など。Cyan colorant 2,3-dimethyl-quinoxaline, 2-hydroxy-3-amino-phenazine, hydroxy-amino-naphthazine-sulfonic acid, etc.
本発明では、前述の各着色剤を単独で用いるこ
とも２種以上組合せて用いることもできる。 In the present invention, each of the above-mentioned colorants can be used alone or in combination of two or more.
また本発明に於いては、色素をａ−Si層上に薄
く塗布する方法や、昇華性の良い染料をａ−Si層
３に近接又は接触させて、該染料を加熱すること
により熱転写する方法、更には熱分解しにくい染
料，顔料をａ−Si層３上に真空蒸着により形成す
る蒸着膜法などが有効に用いられる。また蒸着膜
法は、その膜厚をコントロールすることが出来る
ところから簡便な方法である。染料，顔料の蒸着
膜は、真空度10-4〜10-5Torrとし、加熱温度を
250〜500℃の範囲として形成されるのが望まし
い。膜厚は、0.2〜10μ、好ましくは0.5〜2μに形
成される。 In addition, in the present invention, there is a method of applying a thin layer of dye onto the a-Si layer, and a method of thermal transfer by bringing a dye with good sublimation property close to or in contact with the a-Si layer 3 and heating the dye. Furthermore, a vapor deposition method in which dyes and pigments that are difficult to decompose due to thermal decomposition are formed on the a-Si layer 3 by vacuum vapor deposition can be effectively used. Further, the vapor deposition method is a simple method because the film thickness can be controlled. Deposit films of dyes and pigments at a vacuum level of 10 -4 to 10 -5 Torr and heating temperature.
Preferably, the temperature is in the range of 250 to 500°C. The film thickness is 0.2 to 10μ, preferably 0.5 to 2μ.
次に第１図に示す素子の製造例の１つに就いて
詳細に説明する。 Next, one example of manufacturing the device shown in FIG. 1 will be described in detail.
第２図には第１図に示されるアレー素子のXY
一点鎖線に於ける断面図が示される。 Figure 2 shows the XY of the array element shown in Figure 1.
A cross-sectional view along the dashed line is shown.
先ず、表面を清浄化したガラス基板２を、グロ
ー放電蒸着槽内の所定位置に固定した。然る後、
ArガスとSiH4ガスとを蒸着槽内に導入した。続
いて、高周波電源をオンし、電極間に13.56MHz
の高周波を印加し、ａ−Si層３を形成した。グロ
ー放電電流は約5mA／cm3，電圧2000Vで、ａ−Si
層３の成長速度は４Å／secで、約3.5時間の蒸着
時間を必要とした。その結果、5μ厚のａ−Si層３
を形成した。 First, the glass substrate 2 whose surface had been cleaned was fixed at a predetermined position in a glow discharge deposition tank. After that,
Ar gas and SiH 4 gas were introduced into the deposition tank. Next, turn on the high frequency power supply and apply 13.56MHz between the electrodes.
A high frequency wave was applied to form an a-Si layer 3. The glow discharge current is approximately 5 mA/cm 3 , the voltage is 2000 V, and the a-Si
The growth rate of layer 3 was 4 Å/sec and required a deposition time of about 3.5 hours. As a result, a 5μ thick a-Si layer 3
was formed.
次に通常の抵抗加熱型蒸着装置を用いて、染料
や顔料の蒸着を行つて色素層４の形成を行つた。
即ち真空度を５×10-4Torrとし、室温で鉛−フ
タロシアニンによる蒸着膜を、ａ−Si層３の所定
の位置に蒸着されるようステンレスマスクを介し
て、形成した。 Next, dyes and pigments were vapor-deposited using a conventional resistance heating type vapor deposition apparatus to form a dye layer 4.
That is, the degree of vacuum was set to 5×10 −4 Torr, and a vapor-deposited film of lead-phthalocyanine was formed at a predetermined position on the a-Si layer 3 through a stainless steel mask at room temperature.
蒸着膜厚は0.4μmであつた。引き続き、Cu−フ
タロシアニンによる蒸着膜を所定の位置に形成し
た。更に、ローダミン6Gによる蒸着膜を所定の
位置に形成した。蒸着膜厚は0.8μであつた。 The thickness of the deposited film was 0.4 μm. Subsequently, a deposited film of Cu-phthalocyanine was formed at a predetermined position. Furthermore, a vapor deposition film of Rhodamine 6G was formed at a predetermined position. The deposited film thickness was 0.8μ.
最後に、出力信号を取り出すための電極５，
５′をアルミニウムによつて形成した。 Finally, electrode 5 for extracting the output signal,
5' was formed from aluminum.
所定位置に蒸着法によつて形成された色素層４
及び電極５，５′は、第２図に示す様な、構成を
以つて示すことが出来る。 Dye layer 4 formed at a predetermined position by vapor deposition method
The electrodes 5, 5' can be shown in a configuration as shown in FIG.
アレイ状に形成される各色素層４は一辺を10μ
とし、色素層上に形成される一対の電極間隔は
5μとした。色素層４の一辺の大きさは、目的に
応じて、20μ以下に設定され、電極間隔もまた３
〜20μに設定される。 Each dye layer 4 formed in an array has a side of 10μ.
The distance between the pair of electrodes formed on the dye layer is
It was set to 5μ. The size of one side of the dye layer 4 is set to 20 μ or less depending on the purpose, and the electrode spacing is also set to 3
Set to ~20μ.
本発明に於ては、第２図に示す様に色素層４及
び電極層５，５′の上部に更に、保護の目的或い
は、紫外線カツトのためのフイルター効果の目的
を以つて、高分子樹脂によるオーバーコート層６
を設けることが出来る（図に於いては煩雑さを避
ける為にオーバーコート層は、電極５，５′より
離して示してある）。 In the present invention, as shown in FIG. 2, a polymer resin is further added on top of the dye layer 4 and the electrode layers 5 and 5' for the purpose of protection or a filter effect for cutting off ultraviolet rays. Overcoat layer 6
(In the figure, the overcoat layer is shown separated from the electrodes 5, 5' to avoid complexity).
第３図には、上記の様にして作成されたアレー
素子のＲ，Ｇ，Ｂ部の各波長光による光信号を出
力信号として検出した際の分光感度特性を示し
た。 FIG. 3 shows the spectral sensitivity characteristics when optical signals of each wavelength light of the R, G, and B portions of the array element prepared as described above are detected as output signals.
尚、各色素層の別の配列例を第４図に示した。
色素層の配列は上記以外任意にとることが出来
る。 Incidentally, another arrangement example of each dye layer is shown in FIG.
The arrangement of the dye layer can be arbitrarily arranged other than the above.
以上説明した様にａ−Si層３上に各色素層４を
アレイ状に配列することによつて、各色素に対応
するａ−Si層３の分光感度分布を任意に変えられ
ることを示した。 As explained above, by arranging each dye layer 4 in an array on the a-Si layer 3, it was shown that the spectral sensitivity distribution of the a-Si layer 3 corresponding to each dye can be changed arbitrarily. .
更に本発明では、色素層４に含まれる染料或い
は顔料の濃度によつて、分光感度極大波長を数10
ミクロン移行出来る他、光導電感度をコントロー
ルすることが出来るので、各色のアレーに於て、
光導電感度を任意に設定することが出来る。例え
ば緑(G)に於て、色素量を赤（Ｒ）、青(B)の２倍に
することによつて、視感度分布に近似した分光感
度を有するアレー素子を形成することが出来る等
の各種効果が挙げられる。 Furthermore, in the present invention, depending on the concentration of the dye or pigment contained in the dye layer 4, the maximum wavelength of spectral sensitivity can be adjusted to several tens of
In addition to being able to transfer microns, it is also possible to control the photoconductive sensitivity, so in each color array,
Photoconductive sensitivity can be set arbitrarily. For example, by doubling the amount of dye for green (G) as for red (R) and blue (B), it is possible to form an array element with spectral sensitivity that approximates the luminous sensitivity distribution. Various effects can be mentioned.
第１図は、本発明の好適な実施態様例の模式的
斜視図、第２図は、第１図の一点鎖線XYに於け
る切断面を示す模式的切断面図、第３図は、本発
明の光導電素子の分光感度の例を示す図、第４図
は、色素層の配列パターン例を示す説明図であ
る。
１……アレー状光導電素子、２……支持体、３
……光導電層、４……色素層、５，５′……電極、
６……オーバーコート層。
FIG. 1 is a schematic perspective view of a preferred embodiment of the present invention, FIG. 2 is a schematic cross-sectional view taken along the dashed line XY in FIG. 1, and FIG. FIG. 4, which is a diagram showing an example of the spectral sensitivity of the photoconductive element of the invention, is an explanatory diagram showing an example of the arrangement pattern of the dye layer. DESCRIPTION OF SYMBOLS 1...Array photoconductive element, 2...Support, 3
...Photoconductive layer, 4...Dye layer, 5,5'...Electrode,
6...Overcoat layer.
Claims (1)
体とする非晶質材料で構成された光導電層と、該
層上に設けられた色素層と、該色素層上に設けら
れた一対の信号取出し用の電極とを有する事を特
徴とする光導電素子。1. A support for a photoconductive element, a photoconductive layer made of an amorphous material containing silicon atoms as a matrix, a dye layer provided on the layer, and a pair of photoconductive layers provided on the dye layer. A photoconductive element characterized by having an electrode for signal extraction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56027752A JPS57141973A (en) | 1981-02-27 | 1981-02-27 | Light conductive element |
| US06/350,727 US4430666A (en) | 1981-02-27 | 1982-02-22 | Photoelectric converting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56027752A JPS57141973A (en) | 1981-02-27 | 1981-02-27 | Light conductive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57141973A JPS57141973A (en) | 1982-09-02 |
| JPS6322466B2 true JPS6322466B2 (en) | 1988-05-12 |
Family
ID=12229747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56027752A Granted JPS57141973A (en) | 1981-02-27 | 1981-02-27 | Light conductive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57141973A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59229861A (en) * | 1983-05-24 | 1984-12-24 | Fuji Xerox Co Ltd | Color original reader |
-
1981
- 1981-02-27 JP JP56027752A patent/JPS57141973A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57141973A (en) | 1982-09-02 |
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