JPS6322457U - - Google Patents

Info

Publication number
JPS6322457U
JPS6322457U JP11653686U JP11653686U JPS6322457U JP S6322457 U JPS6322457 U JP S6322457U JP 11653686 U JP11653686 U JP 11653686U JP 11653686 U JP11653686 U JP 11653686U JP S6322457 U JPS6322457 U JP S6322457U
Authority
JP
Japan
Prior art keywords
fixed
movable base
base
feed screw
contract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11653686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0625735Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986116536U priority Critical patent/JPH0625735Y2/ja
Publication of JPS6322457U publication Critical patent/JPS6322457U/ja
Application granted granted Critical
Publication of JPH0625735Y2 publication Critical patent/JPH0625735Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
  • Moving Of Heads (AREA)
JP1986116536U 1986-07-28 1986-07-28 精密移動装置 Expired - Lifetime JPH0625735Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986116536U JPH0625735Y2 (ja) 1986-07-28 1986-07-28 精密移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986116536U JPH0625735Y2 (ja) 1986-07-28 1986-07-28 精密移動装置

Publications (2)

Publication Number Publication Date
JPS6322457U true JPS6322457U (US20050075337A1-20050407-C00081.png) 1988-02-15
JPH0625735Y2 JPH0625735Y2 (ja) 1994-07-06

Family

ID=31001220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986116536U Expired - Lifetime JPH0625735Y2 (ja) 1986-07-28 1986-07-28 精密移動装置

Country Status (1)

Country Link
JP (1) JPH0625735Y2 (US20050075337A1-20050407-C00081.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102491163B1 (ko) * 2020-12-31 2023-01-19 포항공과대학교 산학협력단 초고진공용 정밀 변위구동 액추에이터

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56127521U (US20050075337A1-20050407-C00081.png) * 1980-02-25 1981-09-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56127521U (US20050075337A1-20050407-C00081.png) * 1980-02-25 1981-09-28

Also Published As

Publication number Publication date
JPH0625735Y2 (ja) 1994-07-06

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