JPS6322404U - - Google Patents
Info
- Publication number
- JPS6322404U JPS6322404U JP11630586U JP11630586U JPS6322404U JP S6322404 U JPS6322404 U JP S6322404U JP 11630586 U JP11630586 U JP 11630586U JP 11630586 U JP11630586 U JP 11630586U JP S6322404 U JPS6322404 U JP S6322404U
- Authority
- JP
- Japan
- Prior art keywords
- bellows unit
- bellows
- drive mechanism
- utility
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008602 contraction Effects 0.000 claims 3
Landscapes
- Actuator (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11630586U JPS6322404U (ko) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11630586U JPS6322404U (ko) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322404U true JPS6322404U (ko) | 1988-02-15 |
Family
ID=31000770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11630586U Pending JPS6322404U (ko) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322404U (ko) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013518224A (ja) * | 2010-01-29 | 2013-05-20 | バット ホールディング アーゲー | 扉機構 |
| JP2014199106A (ja) * | 2013-03-29 | 2014-10-23 | 住友重機械工業株式会社 | 微動アクチュエータ |
| JP2021156364A (ja) * | 2020-03-27 | 2021-10-07 | 住友重機械工業株式会社 | アクチュエータ装置及びステージ装置 |
-
1986
- 1986-07-29 JP JP11630586U patent/JPS6322404U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013518224A (ja) * | 2010-01-29 | 2013-05-20 | バット ホールディング アーゲー | 扉機構 |
| JP2014199106A (ja) * | 2013-03-29 | 2014-10-23 | 住友重機械工業株式会社 | 微動アクチュエータ |
| JP2021156364A (ja) * | 2020-03-27 | 2021-10-07 | 住友重機械工業株式会社 | アクチュエータ装置及びステージ装置 |