JPS6322382B2 - - Google Patents

Info

Publication number
JPS6322382B2
JPS6322382B2 JP58176907A JP17690783A JPS6322382B2 JP S6322382 B2 JPS6322382 B2 JP S6322382B2 JP 58176907 A JP58176907 A JP 58176907A JP 17690783 A JP17690783 A JP 17690783A JP S6322382 B2 JPS6322382 B2 JP S6322382B2
Authority
JP
Japan
Prior art keywords
bubble
propagation
propagation path
ion implantation
permalloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58176907A
Other languages
Japanese (ja)
Other versions
JPS6070577A (en
Inventor
Seiichi Iwasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58176907A priority Critical patent/JPS6070577A/en
Publication of JPS6070577A publication Critical patent/JPS6070577A/en
Publication of JPS6322382B2 publication Critical patent/JPS6322382B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/14Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)

Description

【発明の詳細な説明】 発明の技術分野 本発明は電子計算装置の記憶装置として用いら
れる磁気バブルメモリ装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a magnetic bubble memory device used as a storage device for an electronic computing device.

従来技術と問題点 従来、磁気バブルメモリ素子の伝播路には第1
図a,bに示すパーマロイ薄膜により形成された
伝播路1と第2図a,bに示す如きイオン注入に
より形成された伝播路2が知られている。そして
何れもホトリソグラフイ技術を応用して形成され
る。ところが前者のパーマロイによる伝播路1は
バブル径の2/3以下のギヤツプgが必要であるた
め、1μm程度の微小バブルを用いた場合、0.7μm
以下のギヤツプが要求され、通常のホトリソグラ
フイ技術では実現できない欠点があつた。一方後
者のイオン注入伝播路2はイオン注入部と非イオ
ン注入部の境界に生ずるチヤージドウオールによ
つてバブルを伝播させるため、ギヤツプを必要と
せず1μm程度の最小寸法で1μm以下のバブルを伝
播させることができる。しかしこのイオン注入伝
播路でバブルを停止保持する場合、凹部(以下カ
スプと称す)4には極めて小さい保持磁界(以下
ホールド磁界と称す)で保持できるが凸部(以下
テイツプと称す)5に停止保持するためには極め
て大きなホールド磁界が必要になる。第3図に示
すようにホールド磁界方向6を90゜ずつ変化させ
ても必ず1個所以上はテイツプに停止するバブル
7があるため全体としてホールド磁界の大きさは
極めて大きくする必要があるという欠点があつ
た。なおパーマロイ伝播路においては小さなホー
ルド磁界でいずれの位置にも停止、保持すること
ができる。
Conventional technology and problems Conventionally, the propagation path of a magnetic bubble memory element has a first
A propagation path 1 formed by a permalloy thin film as shown in FIGS. a and b, and a propagation path 2 formed by ion implantation as shown in FIGS. 2 a and b are known. All of them are formed by applying photolithography technology. However, the former permalloy propagation path 1 requires a gap g of 2/3 or less of the bubble diameter, so when using microbubbles of about 1 μm, the gap g is 0.7 μm.
The following gap was required, and there were drawbacks that could not be achieved using normal photolithography technology. On the other hand, the latter ion implantation propagation path 2 propagates bubbles through a charged wall that occurs at the boundary between the ion implanted part and the non-ion implanted part, so it does not require a gap and propagates bubbles of 1 μm or less with a minimum dimension of about 1 μm. can be done. However, when the bubble is stopped and held in this ion implantation propagation path, it can be held in the concave portion (hereinafter referred to as the cusp) 4 with an extremely small holding magnetic field (hereinafter referred to as the hold magnetic field), but it is stopped in the convex portion (hereinafter referred to as the tape) 5. In order to hold it, an extremely large holding magnetic field is required. As shown in Fig. 3, even if the hold magnetic field direction 6 is changed by 90 degrees, there is always one or more bubbles 7 that stop at the tape, so the overall size of the hold magnetic field must be extremely large. It was hot. Note that in the permalloy propagation path, it is possible to stop and hold at any position with a small hold magnetic field.

発明の目的 本発明は上記従来の欠点に鑑み、通常のホトリ
ソグラフイ技術で微小バブルの伝播路を形成する
ことができ、しかも小さなホールド磁界でバブル
保持することができる磁気バブルメモリ素子を提
供することを目的とするものである。
OBJECTS OF THE INVENTION In view of the above-mentioned conventional drawbacks, the present invention provides a magnetic bubble memory element that can form a propagation path for microbubbles using ordinary photolithography technology and can hold bubbles with a small holding magnetic field. The purpose is to

発明の構成 そしてこの目的は本発明によれば、バブル結晶
の表面にイオン注入法によりバブル伝播路を形成
した磁気バブルメモリ素子において、前記イオン
注入バブル伝播路は該伝播路上でホールド磁界に
よりバブルが停止する凸部近傍に該イオン注入伝
播路に沿つてパーマロイ伝播素子を配置したこと
を特徴とする磁気バブルメモリ素子を提供すこと
によつて達成される。
Structure of the Invention According to the present invention, in a magnetic bubble memory element in which a bubble propagation path is formed on the surface of a bubble crystal by ion implantation, the ion-implanted bubble propagation path is such that bubbles are prevented from being formed on the propagation path by a holding magnetic field. This is achieved by providing a magnetic bubble memory element characterized in that a permalloy propagation element is arranged along the ion implantation propagation path near the convex portion where the ion implantation stops.

発明の実施例 以下、本発明実施例を図面によつて詳述する。Examples of the invention Embodiments of the present invention will be described in detail below with reference to the drawings.

第4図は本発明による磁気バブルメモリ素子を
説明するための図であり、aは構成図、bは作用
説明図である。同図において、10はイオン注入
部、11は非イオン注入部、12はイオン注入伝
播路、13はパーマロイ伝播素子をそれぞれ示し
ている。
FIG. 4 is a diagram for explaining the magnetic bubble memory element according to the present invention, in which a is a block diagram and b is an explanatory diagram of the operation. In the figure, 10 indicates an ion implantation section, 11 a non-ion implantation section, 12 an ion implantation propagation path, and 13 a permalloy propagation element.

本実施例は図に示す如くイオン注入伝播路12
のバブルがホールド磁界により停止するテイツプ
近傍に沿つてシエブロン形のパーマロイ伝播素子
13を配置したものである。
In this embodiment, as shown in the figure, the ion implantation propagation path 12
A chevron-shaped permalloy propagation element 13 is arranged along the vicinity of the tape where the bubble is stopped by the holding magnetic field.

このように構成された本実施例はパーマロイ伝
播素子13間のギヤツプ部はイオン注入伝播路1
2のカスプ14が伝播を受け持つためパーマロイ
伝播素子13のギヤツプgをバブル径以上にする
ことができ、従つて通常のホトリソグラフイ技術
でも微小バブルの伝播路の作成が可能となる。
In this embodiment configured in this way, the gap between the permalloy propagation elements 13 is connected to the ion implantation propagation path 1.
Since the cusp 14 of No. 2 takes charge of propagation, the gap g of the permalloy propagation element 13 can be made larger than the bubble diameter. Therefore, it is possible to create a propagation path for microbubbles even with ordinary photolithography technology.

またバブルを停止保持する場合第4図bのよう
にホールド磁界15を矢印方向に印加しておけば
伝播路の上側ではパーマロイ伝播素子13の頂点
に、下側ではイオン注入伝播路のカスプ14にそ
れぞれバブル16,17が保持される。このとき
必要なホールド磁界の大きさはパーマロイ伝播素
子13の頂点にバブルを安定に保持する大きさで
よく、イオン注入伝播路のテイツプに保持する場
合に比較して1/3以下の大きさとなる。
In addition, to stop and hold the bubble, if the hold magnetic field 15 is applied in the direction of the arrow as shown in FIG. Bubbles 16 and 17 are held respectively. The required holding magnetic field at this time is sufficient to stably hold the bubble at the apex of the permalloy propagation element 13, and is less than 1/3 of the size when holding the bubble at the tape of the ion implantation propagation path. .

第5図は他の実施例を説明するための図であ
り、aはダイヤモンド型、bは非ダイヤモンド型
を示す。同図において、第4図と同一部分は同一
符号を付して示した。
FIG. 5 is a diagram for explaining another embodiment, in which a shows a diamond type and b shows a non-diamond type. In this figure, the same parts as in FIG. 4 are designated by the same reference numerals.

本実施例が前実施例と異なるところはa,bと
もパーマロイ伝播素子13が非対称シエブロンで
あることである。
This embodiment differs from the previous embodiment in that the permalloy propagation elements 13 in both a and b are asymmetric chevrons.

このように構成された本実施例はパーマロイ伝
播素子13が矢印で示すバブルの進行方向に対し
て非対称であるので前実施例に比しバブルの伝播
がさらに安定化される。
In this embodiment configured as described above, the permalloy propagation element 13 is asymmetrical with respect to the bubble traveling direction indicated by the arrow, so that bubble propagation is further stabilized compared to the previous embodiment.

発明の効果 以上、詳細に説明したように本発明の磁気バブ
ルメモリ素子は、イオン注入伝播路のテイツプ近
傍にパーマロイ伝播素子を配し、この部分のバブ
ル伝播をパーマロイ伝播素子が受け持ち、パーマ
ロイ伝播素子のギヤツプ部では伝播をイオン注入
伝播路が受け持つようにしたものであつて、通常
のホトリソグラフイ技術によつて微小バブルの伝
播路を形成でき、しかも小さなホールド磁界でバ
ブルを保持することができるといつた効果大なる
ものである。
Effects of the Invention As described above in detail, the magnetic bubble memory element of the present invention includes a permalloy propagation element disposed near the tape of the ion implantation propagation path, and the permalloy propagation element takes charge of bubble propagation in this portion. In the gap part, the ion implantation propagation path is responsible for propagation, and the propagation path for microbubbles can be formed using ordinary photolithography technology, and the bubbles can be held with a small holding magnetic field. The effect is huge.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のパーマロイによる伝播路を示す
図、第2図は従来のイオン注入による伝播路を示
す図、第3図は従来のイオン注入伝播路における
バブル停止位置の説明図、第4図は本発明による
磁気バブルメモリ素子を説明するための図、第5
図は他の実施例を説明するための図である。 図面において、10はイオン注入部、11は非
イオン注入部、12はイオン注入伝播路、13は
パーマロイ伝播素子をそれぞれ示す。
Fig. 1 is a diagram showing a propagation path using conventional permalloy, Fig. 2 is a diagram showing a propagation path using conventional ion implantation, Fig. 3 is an explanatory diagram of the bubble stop position in the conventional ion implantation propagation path, and Fig. 4 5 is a diagram for explaining the magnetic bubble memory device according to the present invention.
The figure is a diagram for explaining another embodiment. In the drawings, reference numeral 10 indicates an ion implantation section, 11 indicates a non-ion implantation section, 12 indicates an ion implantation propagation path, and 13 indicates a permalloy propagation element.

Claims (1)

【特許請求の範囲】 1 バブル結晶の表面にイオン注入法によりバブ
ル伝播路を形成した磁気バブルメモリ素子におい
て、前記イオン注入バブル伝播路は該伝播路上で
ホールド磁界によりバブルが停止する凸部近傍に
該イオン注入伝播路に沿つてパーマロイ伝播素子
を配置したことを特徴とする磁気バブルメモリ素
子。 2 パーマロイ伝播素子間のギヤツプがバブル径
以上であることを特徴とする特許請求の範囲第1
項記載の磁気バブルメモリ素子。 3 パーマロイ伝播素子がバブルの伝播方向に対
して非対称であることを特徴とする特許請求の範
囲第1項又は第2項記載の磁気バブルメモリ素
子。
[Scope of Claims] 1. In a magnetic bubble memory element in which a bubble propagation path is formed on the surface of a bubble crystal by ion implantation, the ion-implanted bubble propagation path is located near a convex portion where a bubble is stopped by a holding magnetic field on the propagation path. A magnetic bubble memory element characterized in that a permalloy propagation element is arranged along the ion implantation propagation path. 2. Claim 1, characterized in that the gap between the permalloy propagation elements is equal to or larger than the bubble diameter.
The magnetic bubble memory device described in . 3. The magnetic bubble memory device according to claim 1 or 2, wherein the permalloy propagation device is asymmetrical with respect to the bubble propagation direction.
JP58176907A 1983-09-27 1983-09-27 Magnetic bubble memory element Granted JPS6070577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58176907A JPS6070577A (en) 1983-09-27 1983-09-27 Magnetic bubble memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58176907A JPS6070577A (en) 1983-09-27 1983-09-27 Magnetic bubble memory element

Publications (2)

Publication Number Publication Date
JPS6070577A JPS6070577A (en) 1985-04-22
JPS6322382B2 true JPS6322382B2 (en) 1988-05-11

Family

ID=16021837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58176907A Granted JPS6070577A (en) 1983-09-27 1983-09-27 Magnetic bubble memory element

Country Status (1)

Country Link
JP (1) JPS6070577A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04114801U (en) * 1991-03-20 1992-10-09 シユウ,ダー−ジエン Freely rotating furniture legs

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5896705A (en) * 1981-12-04 1983-06-08 Hitachi Ltd Magnetic bubble memory element
JPS58108085A (en) * 1981-12-18 1983-06-28 Hitachi Ltd Magnetic bubble element
JPS6032197A (en) * 1983-08-03 1985-02-19 Hitachi Ltd Magnetic bubble element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5896705A (en) * 1981-12-04 1983-06-08 Hitachi Ltd Magnetic bubble memory element
JPS58108085A (en) * 1981-12-18 1983-06-28 Hitachi Ltd Magnetic bubble element
JPS6032197A (en) * 1983-08-03 1985-02-19 Hitachi Ltd Magnetic bubble element

Also Published As

Publication number Publication date
JPS6070577A (en) 1985-04-22

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