JPS6322255B2 - - Google Patents
Info
- Publication number
- JPS6322255B2 JPS6322255B2 JP56070345A JP7034581A JPS6322255B2 JP S6322255 B2 JPS6322255 B2 JP S6322255B2 JP 56070345 A JP56070345 A JP 56070345A JP 7034581 A JP7034581 A JP 7034581A JP S6322255 B2 JPS6322255 B2 JP S6322255B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- lens
- defect
- diffracted light
- far
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 38
- 238000007689 inspection Methods 0.000 claims description 19
- 230000001427 coherent effect Effects 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 230000002950 deficient Effects 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 230000000737 periodic effect Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000011179 visual inspection Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 208000003464 asthenopia Diseases 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7034581A JPS57184957A (en) | 1981-05-09 | 1981-05-09 | Defect inspecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7034581A JPS57184957A (en) | 1981-05-09 | 1981-05-09 | Defect inspecting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57184957A JPS57184957A (en) | 1982-11-13 |
JPS6322255B2 true JPS6322255B2 (fr) | 1988-05-11 |
Family
ID=13428733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7034581A Granted JPS57184957A (en) | 1981-05-09 | 1981-05-09 | Defect inspecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57184957A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01147747U (fr) * | 1988-03-28 | 1989-10-12 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4581370B2 (ja) * | 2003-10-09 | 2010-11-17 | ソニー株式会社 | 凹凸パターン検査装置及び凹凸パターン検査方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52146601A (en) * | 1976-05-28 | 1977-12-06 | Rca Corp | Method of detecting defect of vortex groove formed on disk surface and device therefor |
JPS5414790A (en) * | 1977-07-05 | 1979-02-03 | Mitsubishi Electric Corp | Surface inspecting apparatus |
-
1981
- 1981-05-09 JP JP7034581A patent/JPS57184957A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52146601A (en) * | 1976-05-28 | 1977-12-06 | Rca Corp | Method of detecting defect of vortex groove formed on disk surface and device therefor |
JPS5414790A (en) * | 1977-07-05 | 1979-02-03 | Mitsubishi Electric Corp | Surface inspecting apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01147747U (fr) * | 1988-03-28 | 1989-10-12 |
Also Published As
Publication number | Publication date |
---|---|
JPS57184957A (en) | 1982-11-13 |
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