JPS6321930U - - Google Patents
Info
- Publication number
- JPS6321930U JPS6321930U JP11488786U JP11488786U JPS6321930U JP S6321930 U JPS6321930 U JP S6321930U JP 11488786 U JP11488786 U JP 11488786U JP 11488786 U JP11488786 U JP 11488786U JP S6321930 U JPS6321930 U JP S6321930U
- Authority
- JP
- Japan
- Prior art keywords
- reduction
- plane
- utility
- model registration
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Variable Magnification In Projection-Type Copying Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11488786U JPS6321930U (en, 2012) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11488786U JPS6321930U (en, 2012) | 1986-07-25 | 1986-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6321930U true JPS6321930U (en, 2012) | 1988-02-13 |
Family
ID=30998034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11488786U Pending JPS6321930U (en, 2012) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6321930U (en, 2012) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48102646A (en, 2012) * | 1972-04-11 | 1973-12-24 | ||
| JPS58122541A (ja) * | 1982-01-18 | 1983-07-21 | Hitachi Ltd | 投影露光装置 |
-
1986
- 1986-07-25 JP JP11488786U patent/JPS6321930U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48102646A (en, 2012) * | 1972-04-11 | 1973-12-24 | ||
| JPS58122541A (ja) * | 1982-01-18 | 1983-07-21 | Hitachi Ltd | 投影露光装置 |