JPS6157519U - - Google Patents
Info
- Publication number
- JPS6157519U JPS6157519U JP14175784U JP14175784U JPS6157519U JP S6157519 U JPS6157519 U JP S6157519U JP 14175784 U JP14175784 U JP 14175784U JP 14175784 U JP14175784 U JP 14175784U JP S6157519 U JPS6157519 U JP S6157519U
- Authority
- JP
- Japan
- Prior art keywords
- exposure apparatus
- photomasks
- superimposed
- semiconductor wafer
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14175784U JPS6157519U (en, 2012) | 1984-09-19 | 1984-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14175784U JPS6157519U (en, 2012) | 1984-09-19 | 1984-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6157519U true JPS6157519U (en, 2012) | 1986-04-17 |
Family
ID=30700096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14175784U Pending JPS6157519U (en, 2012) | 1984-09-19 | 1984-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6157519U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006126460A (ja) * | 2004-10-28 | 2006-05-18 | Shinko Electric Ind Co Ltd | 露光装置および露光方法 |
-
1984
- 1984-09-19 JP JP14175784U patent/JPS6157519U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006126460A (ja) * | 2004-10-28 | 2006-05-18 | Shinko Electric Ind Co Ltd | 露光装置および露光方法 |