JPS6321631A - Diaphragm driving device - Google Patents

Diaphragm driving device

Info

Publication number
JPS6321631A
JPS6321631A JP16612186A JP16612186A JPS6321631A JP S6321631 A JPS6321631 A JP S6321631A JP 16612186 A JP16612186 A JP 16612186A JP 16612186 A JP16612186 A JP 16612186A JP S6321631 A JPS6321631 A JP S6321631A
Authority
JP
Japan
Prior art keywords
rings
internal
aperture
ring
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16612186A
Other languages
Japanese (ja)
Inventor
Takashi Kodama
児玉 隆司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP16612186A priority Critical patent/JPS6321631A/en
Publication of JPS6321631A publication Critical patent/JPS6321631A/en
Pending legal-status Critical Current

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  • Diaphragms For Cameras (AREA)

Abstract

PURPOSE:To operate a diaphram blade speedily and accurately by driving a stop through the relative rotation between two rings, moving the diaphragm in one direction in the reciprocal operation, and locking the rings alternately. CONSTITUTION:A voltage is applied to a lamination type piezoelectric element 13 and then a lever 8 rotates clockwise to energize both internal and internal rings 3 and 2 which are pressed against a roller 9 clockwise. Only the external ring 2 rotates clockwise owing to the difference in locking force between sliding members A and B and the quantity of rotation is about twice as large as the displacement of the roller 9, so respective blades 5 rotate clockwise around a pin 4 to start stopping-down operation. When the voltage application to the element 13 is stopped, the element 13 moves reversely to its original position and the lever 8 rotates counterclockwise. At such a time, the locking forces of the member A to the external ring 2 is stronger than that of the member B to the internal ring 3, so the external ring 2 does not rotate and the internal ring 3 rotates according to the counterclockwise rotation of the roller 9. Therefore, the diaphragm blades 5 rotate clockwise through the relative rotation between both internal external rings to perform stopping-down operation.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、カメラ等における撮影レンズの絞り駆り装置
に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an aperture driving device for a photographing lens in a camera or the like.

(従来の技術) 撮影レンズ、特にSLRの撮影レンズにおいては、レバ
ー等の機械的伝達機構によって、撮影レンズ部に内蔵し
ている絞り羽根を、ボデー本体側から駆動するのが一般
的である。しかるに最近は、絞り装置の「軽薄短小化」
をはかるべく、電磁的手段により絞り羽根を駆動する装
置が提案されている。またバイモルフ型の圧電素子を駆
動源とし、電圧を印加したときの変位で絞り羽根を駆動
する装置も提案されている。
(Prior Art) In a photographic lens, particularly an SLR photographic lens, the aperture blades built into the photographic lens section are generally driven from the main body side by a mechanical transmission mechanism such as a lever. However, recently, aperture devices have become lighter, thinner, and smaller.
In order to achieve this, a device has been proposed in which the aperture blades are driven by electromagnetic means. Furthermore, a device has been proposed in which a bimorph type piezoelectric element is used as a drive source and the aperture blades are driven by displacement when a voltage is applied.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記電磁的手段による駆動装置では、マグネットを構成
するための磁心およびコイルを必要とするが、収納容積
が自ずから制限されるため、極小型のマグネットしか使
用できない。このため駆動トルクが小さく、加速が遅い
。しかも慣性があるため、高$li度な位置ぎめが困難
であるといった欠点もある。またマグネットの磁気的影
響を受けることになるので、絞り羽根をはじめ各構成部
材に鉄等の素材を使用しにくく、強度上の問題を生じる
。このため現在はLSのレンズシャッターのプログラム
シャッターとして利用されているに過ぎない。
The drive device using electromagnetic means requires a magnetic core and a coil to constitute the magnet, but since the storage volume is naturally limited, only extremely small magnets can be used. Therefore, the driving torque is small and acceleration is slow. Moreover, since there is inertia, there is also a drawback that positioning with a high degree of precision is difficult. In addition, since it is subject to the magnetic influence of the magnet, it is difficult to use materials such as iron for the aperture blades and other constituent members, resulting in strength problems. For this reason, it is currently only used as a program shutter for the lens shutter of LS.

一方、バイモルフ型の圧電素子を駆動源としたものでは
、元来変位が小さく、絞り殿構の駆動には適していない
。このため実用化されるには至っていない。
On the other hand, a device using a bimorph type piezoelectric element as a drive source inherently has a small displacement and is not suitable for driving an aperture shank structure. For this reason, it has not yet been put into practical use.

そこで本発明は、駆動トルクが大きく、高速かつ^精度
な動作が可能で、磁気的影響もなく、強度上の問題がな
い、絞り駆動装置を提供することを目的とする。
SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide an aperture drive device that has a large drive torque, is capable of high-speed and accurate operation, is free from magnetic influence, and has no problems with strength.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、上記問題点を解決し目的を達成するために、
次のような手段を講じたことを特徴としている。
In order to solve the above problems and achieve the objectives, the present invention has the following features:
It is characterized by the following measures:

■ 同軸的に回動自在に配置された二つのリングを設け
る。
■ Provide two rings that are coaxially rotatable.

■ この二つのリングに二端が係合し、上記二つのリン
グの相対回転角により開口径を決定される複数枚の絞り
羽根を設ける。
(2) A plurality of aperture blades are provided whose two ends engage with these two rings and whose aperture diameter is determined by the relative rotation angle of the two rings.

■ 前記二つのリングに周面を接触させ、上記二つのリ
ングに回転力を与える回転部材を設ける。
(2) A rotating member is provided that brings its circumferential surface into contact with the two rings and applies rotational force to the two rings.

■ この回転部材を上記二つのリングの回転中心まわり
に往復動作させる駆動手段を設ける。
(2) A driving means is provided for reciprocating this rotating member around the rotation centers of the two rings.

■ 前記回転部材の往動時および復動時において、上記
二つのリングを交互に係止する係止手段を設ける。
(2) A locking means is provided for alternately locking the two rings when the rotating member moves forward and backward.

〔作用〕[Effect]

このような手段を講じたことにより、次のような作用を
呈する。すなわち、絞りを二つのリングの相対回転で駆
動するようにし、かつ駆動手段による往復の両動作にお
いて、絞りを一方向に動かすように二つのリングを交互
に係止するようにしたので、圧電素子のような駆動変位
の少ない駆動手段でも、絞り羽根を迅速にしかも11度
よく動作させ得るものとなる。またマグネットを使用し
ないので、磁気的影響もなく、強度上の問題が生じない
By taking such measures, the following effects are achieved. In other words, the diaphragm is driven by the relative rotation of the two rings, and the two rings are alternately locked so that the diaphragm is moved in one direction during both reciprocating movements by the driving means, so that the piezoelectric element Even with a drive means with a small drive displacement like this, the aperture blades can be operated quickly and with a good 11 degrees. Furthermore, since no magnets are used, there is no magnetic influence and no strength problems arise.

〔実施例〕〔Example〕

第1図および第2図は本発明の一実施例の構成を示す正
面図および断面図である。第1図および第2図に示すよ
うに、絞り装置の基板1には、二つの絞りリング2.3
が基板1と同心円状に回動自在に取付けられている。外
リング2には等間隔で同心円状に複数(本例では6個)
のビン4が設けられている。同様に内リング3には複数
(本例では6個)の溝38が形成されている。これらの
ビン4および溝3aに対応して絞り羽根5が取付けられ
ている。すなわち絞り羽根5は、その一部に設けた孔を
ビン4に係合させると共に、他の一部に同値したビン6
を溝38に係合させている。
1 and 2 are a front view and a sectional view showing the structure of an embodiment of the present invention. As shown in FIGS. 1 and 2, the base plate 1 of the diaphragm device includes two diaphragm rings 2.3.
is rotatably mounted concentrically with the substrate 1. The outer ring 2 has a plurality of concentric rings arranged at equal intervals (six in this example).
A bin 4 is provided. Similarly, a plurality of (six in this example) grooves 38 are formed in the inner ring 3. Aperture blades 5 are attached corresponding to these bins 4 and grooves 3a. That is, the diaphragm blade 5 has a hole provided in a part thereof engaged with the bottle 4, and a hole provided in a part thereof engages with the bottle 4, and a hole provided in the other part thereof has the same size as the bottle 6.
is engaged with the groove 38.

これらの絞り羽根5を押えるように取付は板7が配置さ
れている。
A mounting plate 7 is arranged so as to press down these aperture blades 5.

二つの絞りリング2および°3には、絞り羽根5の取付
は方向とは逆向きに、各々二つの立上がり部2a、2b
および3b、3Cが三箇所に設けられている。また基板
1の他の面すなわち絞りリング2,3を取付けた側とは
反対側の面には、軸8aによって回動自在に軸支された
レバー8が配置されている。レバー8の一端、すなわち
基板1の中心に対して軸8aとは反対側に位置する一端
には、硬質ゴムなどより形成された回転部材としてのロ
ーラ9が回動自在に軸支されている。このO−ラ9は、
前述の立上がり部2a、3bとの間に、この立上がり部
2a、3bに対して周面を圧接するように11着されて
いる。レバー8の他端にはビン10が配置されており、
基板1に配置したビン11との間にバネ12が取付けら
れている。
The two aperture rings 2 and °3 have two rising parts 2a and 2b, respectively, in which the aperture blades 5 are attached in opposite directions.
, 3b and 3C are provided at three locations. A lever 8 rotatably supported by a shaft 8a is arranged on the other surface of the substrate 1, that is, the surface opposite to the side on which the aperture rings 2 and 3 are attached. A roller 9 as a rotating member made of hard rubber or the like is rotatably supported at one end of the lever 8, that is, one end located on the opposite side of the shaft 8a with respect to the center of the substrate 1. This O-La 9 is
Eleven parts are attached between the above-mentioned rising parts 2a and 3b so that the peripheral surface is pressed against the rising parts 2a and 3b. A bottle 10 is arranged at the other end of the lever 8,
A spring 12 is attached between the bottle 11 and the bottle 11 arranged on the substrate 1.

かくしてこのレバー8は反時計方向に付勢されている。This lever 8 is thus biased counterclockwise.

またレバー8の一端近傍には、一端をレバー8に接触さ
せ他端を基板1に固定されて、駆動手段としての積層型
圧電素子13が配設されている。
Further, near one end of the lever 8, a laminated piezoelectric element 13 is disposed as a driving means, with one end in contact with the lever 8 and the other end fixed to the substrate 1.

一方、前記絞りリング2の他の立上がり部2bには、弾
性板21.圧電素子22.!fivJ吸収板23、固定
部材24を一体化した摺動部材Aが、板バネ25により
付勢されて圧着配置されている。
On the other hand, the other rising portion 2b of the aperture ring 2 is provided with an elastic plate 21. Piezoelectric element 22. ! A sliding member A, in which the fivJ absorbing plate 23 and the fixing member 24 are integrated, is biased by a leaf spring 25 and placed in a crimped manner.

また前記絞りリング3の他の立上がり部3Cには、弾性
板31.圧電素子32.振動吸収板33.固定部材34
を一体化した摺動部材Bが、板バネ35により付勢され
て圧着配置されている。
Further, on the other rising portion 3C of the aperture ring 3, an elastic plate 31. Piezoelectric element 32. Vibration absorbing plate 33. Fixed member 34
A sliding member B, which is integrated with the above, is biased by a leaf spring 35 and placed in a crimped manner.

上記圧電素子22.32は、第3図に示すように互いに
分極方向が異なる複数(本例では3四)の圧電体より構
成されており、電圧を印加することにより、第4図のよ
うに各々バイモルフ屈曲するものである。
As shown in FIG. 3, the piezoelectric elements 22 and 32 are composed of a plurality of piezoelectric bodies (34 in this example) having mutually different polarization directions. Each is bimorph bent.

次に第5図〜第6図を適時参照して動作を説明する。積
層型圧電素子13および二つの摺動部材A、Bにおける
圧N素子22.32には、第5図に示すようなパルス状
の電圧が印加される。すなわち、開動部材Aの圧電素子
22には積層型圧電素子13に電圧が印加されていると
きに同時に電圧が印加され、摺動部材Bの圧電素子32
には積層型圧電素子13に電圧が印加されていないとき
に電圧が印加される。
Next, the operation will be explained with reference to FIGS. 5 and 6. A pulsed voltage as shown in FIG. 5 is applied to the laminated piezoelectric element 13 and the pressure-N elements 22, 32 in the two sliding members A and B. That is, a voltage is applied to the piezoelectric element 22 of the opening member A at the same time that a voltage is applied to the laminated piezoelectric element 13, and a voltage is applied to the piezoelectric element 32 of the sliding member B.
A voltage is applied to the stacked piezoelectric element 13 when no voltage is applied to it.

そこで今、積層型圧電素子13に電圧を印加すると、こ
の圧電素子13は第6図の矢印方向に伸長変位し、レバ
ー8を時計方向に回動させる。このとき、圧N素子22
にも電圧が印加されるため、摺動部材Aの弾性板21が
屈曲して外リング2の立上がり部2bに接触するが、こ
の接触部は屈曲部の山の部分のみとなる。これに対して
摺動部材Bの弾性板31は内リング3の立上がり部3C
に全面圧接している。したがって、レバー8の時計方向
の回動により、ロー59と圧接している内リング3.外
リング2ともに時計方向に付勢されるが、摺動部材A、
Bの係止力は、内リング3の方がはるかに大きいため、
内リング3は回動ぜず、結果としてロー59の時計方向
への回動に伴い、外リング2のみが時計方向に回動する
。このときの外リング2の回動量は、ローラ9のレバー
8による変位の約2倍に等しい。したがって各絞り羽根
5はビン4を中心に時計方向に回動して絞り込みが開始
する。
Now, when a voltage is applied to the laminated piezoelectric element 13, the piezoelectric element 13 is elongated and displaced in the direction of the arrow in FIG. 6, causing the lever 8 to rotate clockwise. At this time, the pressure N element 22
Since a voltage is applied to the sliding member A, the elastic plate 21 of the sliding member A is bent and comes into contact with the rising portion 2b of the outer ring 2, but this contact portion is only at the peak of the bent portion. On the other hand, the elastic plate 31 of the sliding member B
It is in full pressure contact with. Therefore, due to the clockwise rotation of the lever 8, the inner ring 3. is in pressure contact with the row 59. Both outer ring 2 is biased clockwise, but sliding member A,
The locking force of B is much larger for inner ring 3, so
The inner ring 3 does not rotate, and as a result, only the outer ring 2 rotates clockwise as the row 59 rotates clockwise. The amount of rotation of the outer ring 2 at this time is approximately twice the displacement of the roller 9 by the lever 8. Therefore, each aperture blade 5 rotates clockwise around the bin 4 to start narrowing down.

次に積層型圧電素子13への電圧印加が停止すると、積
層型圧電素子13は元の位置まで逆向きに変位する。そ
うすると、レバー8の他端に取付けであるバネ12の引
張り力により、レバー8は反時計方向に回動する。この
とき、摺動部材Bの圧電素子32に電圧が印加されるた
め、弾性板31が屈曲して立上がり部3Cに接触するが
、この接触部は屈曲部の山の部分のみとなる。これに対
して摺動部材Aの弾性板21は外リング2の立上がり部
2Cに全面圧接している。したがって、この場合の外リ
ング2および内リング3への係止力は、摺動部材Aの方
が強い。このため、外リング2は回動せず、ローラ9の
反時計方向への回動に伴い、内リング3が反時計方向に
回動する。この結果、絞り羽根5は外リング2と内リン
グ3との相対的な回動により、さらに時計方向に回動し
て絞り込まれる。
Next, when the voltage application to the laminated piezoelectric element 13 is stopped, the laminated piezoelectric element 13 is displaced in the opposite direction to its original position. Then, the lever 8 rotates counterclockwise due to the tensile force of the spring 12 attached to the other end of the lever 8. At this time, since a voltage is applied to the piezoelectric element 32 of the sliding member B, the elastic plate 31 is bent and comes into contact with the rising portion 3C, but this contact portion is only at the peak of the bent portion. On the other hand, the elastic plate 21 of the sliding member A is in full pressure contact with the rising portion 2C of the outer ring 2. Therefore, in this case, the sliding member A has a stronger locking force on the outer ring 2 and the inner ring 3. Therefore, the outer ring 2 does not rotate, and the inner ring 3 rotates counterclockwise as the roller 9 rotates counterclockwise. As a result, the aperture blades 5 further rotate clockwise due to the relative rotation between the outer ring 2 and the inner ring 3 and are narrowed down.

この動作を所定回数繰返せば、所定の絞り山が得られる
。絞り羽根5を反対方向に作動させるには、積層型圧電
素子13への電圧印加に対する摺動部材AおよびBの各
圧電素子22.32への電圧印加タイミングを、前記の
場合とは逆の関係にすればよい。
By repeating this operation a predetermined number of times, a predetermined aperture thread can be obtained. In order to operate the aperture blades 5 in the opposite direction, the timing of voltage application to each piezoelectric element 22, 32 of sliding members A and B with respect to the voltage application to the laminated piezoelectric element 13 is set in a relationship opposite to that in the above case. Just do it.

なお本発明は前記各実施例に限定されるものではない、
、例えば前記実施例では、絞りリング2゜3を駆動部と
して摩擦ローラ9を用いたが、ギヤ等を利用してもよい
。またレバー8の復帰にバネを用いたが、交互に動作す
る圧電素子を複数個用いるようにしてもよい。さらに絞
りリング2.3の係止手段として摺動部材A、Bを用い
たがこれに限られるものではない。また絞り量制御をさ
らに向上させるために、絞りリング2.3にエンコーダ
機能を付加し、各々の相対位置または絶対位置を求めて
圧電素子群の駆動にフィードバックするようにしてもよ
い。さらに積層型圧電素子13を数k thで駆動し、
この圧電素子13の高発生応力を利用してレバー比を大
きくし、ローラ9の変位を一層大きくするようにしても
よい。このようにすれば、絞り羽根5を数ms以内に開
放から最少絞りまで作動させることができるので、絞り
羽根5の駆動のみならず、レンズシャッター駆動装置と
しても利用できる。このほか本発明の要旨を逸脱しない
範囲で種々変形実施できるのは勿論である。
Note that the present invention is not limited to the above embodiments.
For example, in the embodiment described above, the friction roller 9 was used with the aperture ring 2.3 as the driving unit, but a gear or the like may also be used. Further, although a spring is used to return the lever 8, a plurality of piezoelectric elements that operate alternately may be used. Further, although the sliding members A and B are used as means for locking the aperture ring 2.3, the present invention is not limited to this. Furthermore, in order to further improve the aperture amount control, an encoder function may be added to the aperture ring 2.3, and the relative or absolute position of each ring may be determined and fed back to the drive of the piezoelectric element group. Furthermore, the laminated piezoelectric element 13 is driven at several kth,
The lever ratio may be increased by utilizing the high stress generated by the piezoelectric element 13, and the displacement of the roller 9 may be further increased. In this way, the aperture blades 5 can be operated from the aperture opening to the minimum aperture within several milliseconds, and therefore can be used not only for driving the aperture blades 5 but also as a lens shutter driving device. Of course, various other modifications can be made without departing from the spirit of the present invention.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、絞りを二つのリングの相対回転で駆動
するようにし、かつ駆動手段の往復動作の両動作におい
て絞りを一方向に動かすように、リングを交互に係止す
るように構成したので、圧電素子のような駆動変位の少
ない駆動手段でも、絞り羽根を迅速にしかも精度よく動
作させ得る。
According to the present invention, the diaphragm is driven by the relative rotation of the two rings, and the rings are alternately locked so that the diaphragm is moved in one direction during both reciprocating movements of the driving means. Therefore, the aperture blades can be operated quickly and accurately even with a drive means such as a piezoelectric element that has a small drive displacement.

またマグネットを使用しないので、磁気的影響がない。Also, since no magnets are used, there is no magnetic influence.

かくして駆動トルクが大きく、高速かつ高精度な動作が
可能で、磁気的影響がなく強度上の問題もない、絞り駆
動装置を提供できる。
In this way, it is possible to provide an aperture drive device that has a large drive torque, can operate at high speed and with high precision, is free from magnetic influence, and has no problems with strength.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図は本発明の一実施例を示す正面図お
よび断面図、第3図および第4図は同実施例の圧電素子
の構成および作動態様を示す斜視図、第5図は駆動用印
加電圧の波形を示す図、第6図および第7図は動作説明
図である。 1・・・基板、2.3・・・二つのリング、5・・・絞
り羽根、9・・・ローラ(回転部材)、12・・・復帰
バネ、13・・・積層型圧電素子、A、B・・・摺動部
材(係止手段)。 出願人代理人 弁理士 外弁 淳 第2 図 n、32 第3図     第4図 第5図 第6図 M7図 手続ネ「■正置 昭和6に!9・可5日 特許庁長官 黒 1)明 M  殿 ]、事件の表示 特願昭61−166121号 2、発明の名称 絞り駆動装置 3、補正をする者 事件との関係 特許出願人 (037)オリンパス光学工業株式会社4、代理人 東京都千代田区霞が関3丁目7番2号USEヒル5、自
発補正 6、補正の対象 明細書全文 7、補正の内容
1 and 2 are front views and sectional views showing one embodiment of the present invention, FIGS. 3 and 4 are perspective views showing the configuration and operating mode of the piezoelectric element of the same embodiment, and FIG. The diagrams illustrating the waveforms of the applied voltage for driving, and FIGS. 6 and 7 are operation explanatory diagrams. DESCRIPTION OF SYMBOLS 1... Substrate, 2.3... Two rings, 5... Aperture blade, 9... Roller (rotating member), 12... Return spring, 13... Laminated piezoelectric element, A , B...Sliding member (locking means). Applicant's agent Patent attorney Atsushi Gaiben Figure 2 N, 32 Figure 3 Figure 4 Figure 5 Figure 6 Figure M7 Procedure ``■ Masaaki in 1939! 9/5th Commissioner of the Patent Office Black 1) Akira M], Indication of the case, Patent Application No. 166121/1986 2, Name of the invention Aperture drive device 3, Person making the amendment Relationship to the case Patent applicant (037) Olympus Optical Industry Co., Ltd. 4, Agent Tokyo USE Hill 5, 3-7-2 Kasumigaseki, Chiyoda-ku, Voluntary amendment 6, Full text of specification subject to amendment 7, Contents of amendment

Claims (1)

【特許請求の範囲】[Claims] 同軸的に回動自在に配置された二つのリングと、この二
つのリングに二端が係合し上記二つのリングの相対回転
角により開口径を決定される複数枚の絞り羽根と、前記
二つのリングに周面を接触させ上記二つのリングに回転
力を与える回転部材と、この回転部材を上記二つのリン
グの回転中心まわりに往復動作させる駆動手段と、前記
回転部材の往動時および復動時において上記二つのリン
グを交互に係止する係止手段とを具備したことを特徴と
する絞り駆動装置。
two rings arranged coaxially and rotatably, a plurality of aperture blades whose two ends engage with these two rings and whose aperture diameter is determined by the relative rotation angle of the two rings; a rotating member that brings its peripheral surface into contact with the two rings and applies rotational force to the two rings; a drive means that reciprocates the rotating member around the rotation centers of the two rings; 1. A diaphragm drive device comprising a locking means for alternately locking the two rings during movement.
JP16612186A 1986-07-15 1986-07-15 Diaphragm driving device Pending JPS6321631A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16612186A JPS6321631A (en) 1986-07-15 1986-07-15 Diaphragm driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16612186A JPS6321631A (en) 1986-07-15 1986-07-15 Diaphragm driving device

Publications (1)

Publication Number Publication Date
JPS6321631A true JPS6321631A (en) 1988-01-29

Family

ID=15825419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16612186A Pending JPS6321631A (en) 1986-07-15 1986-07-15 Diaphragm driving device

Country Status (1)

Country Link
JP (1) JPS6321631A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6390216U (en) * 1986-12-01 1988-06-11
US5234846A (en) * 1992-04-30 1993-08-10 International Business Machines Corporation Method of making bipolar transistor with reduced topography
US5258318A (en) * 1992-05-15 1993-11-02 International Business Machines Corporation Method of forming a BiCMOS SOI wafer having thin and thick SOI regions of silicon

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6390216U (en) * 1986-12-01 1988-06-11
US5234846A (en) * 1992-04-30 1993-08-10 International Business Machines Corporation Method of making bipolar transistor with reduced topography
US5331199A (en) * 1992-04-30 1994-07-19 International Business Machines Corporation Bipolar transistor with reduced topography
US5258318A (en) * 1992-05-15 1993-11-02 International Business Machines Corporation Method of forming a BiCMOS SOI wafer having thin and thick SOI regions of silicon

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