JPS63215906A - Method and apparatus for measuring 3-d object utilizing normal plane image information - Google Patents

Abstract

PURPOSE:To enable description of a measuring data by drawing-oriented expression easily understandable to a technician, by determining the shape or the like of an object to be measured utilizing personal computer-processed image information of a TV video and attitude control information of a work. CONSTITUTION:This apparatus is made up of a reference base 2 for securely supporting an object 1 to be measured, control measuring systems 12-16 for measuring fine displacement of reference base 2, a contact type sensor 3 and a TV camera 4 aligned in the optical axis and separated at a specified distance in the direction of (y) axis from the reference base 2. Moreover, two optical pattern projectors 5 are provided on both sides of the camera 4 in such a manner as to have the optical axis or the like aligned in same plane and an optical system or the like to form images of patterns A1 and A2 coming from the projectors 5 on the object 1 on the reference base 2 as focused synthetic pattern A. Then, attitude and displacement information of the object 1 as obtained during the formation of the respective images are inputted into an information processor 6 to generate a pixel unit drawing of the object 1 while pixel unit dimensions are measured. This enables automatic measurement of main shape or the like of the object being measured accurately during a waiting time of steps of machining starting with raw material.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for measuring the shape and dimensions of a three-dimensional object, particularly a method for optically measuring the shape and dimensions of a three-dimensional object using image information. It is related to.

(Prior Art) Conventionally, as a method for measuring a three-dimensional object, in addition to a method using image information, there are a line measurement method using a light cutting method, a point measurement method using a triangulation method, a moiré method, and the like. As an optical measurement method using image information, for example, rMIcROOP, the journal of the Micro-Optical Research Group of the Optics Conference of the Japan Society of Applied Physics,
TIcs NE Do J 19862/14 Vol.
4 Nal, pages 14 to 19, "Distance and Shape Measurement Using Trinocular Stereoscopic Viewing" is known.

(Problems to be Solved by the Invention) However, in all conventional three-dimensional measurement methods that use image information, a three-dimensional object under illumination is observed from an oblique direction by a camera, and the obtained image information is It processes images. Therefore, when trying to obtain image information of an object with a metallic glossy or semi-glossy surface, such as a metal workpiece processed by an NC processing machine, using the above-mentioned conventional method, not only shadows appear on the rear side of the object, but also shadows appear on the rear side of the object. An object is a positive shape that appears on the front side, a mirror image that appears on the object itself due to its complex shape, a pseudo-projection image that is affected by a ghost image that appears between parts separated by small gaps due to slits on the object, etc. Because it is obtained as image information, there is a problem that not only accurate shapes cannot be measured but also the dimension measurement accuracy is poor. It is simply not possible to cope with today's manufacturing field, where many attempts are being made to shift to a production system.

For this reason, the present invention aims to adopt a method of describing measurement data in a diagrammatic representation that is easy for engineers to understand. The purpose of this project is to provide a new method for obtaining a good photographic target image by using computer-processed image information of the TV image of the measurement slope at the object surface position on the axis and workpiece posture control information. The present invention seeks to provide an illumination system and an optical non-contact length measurement system.

In order to achieve the above-mentioned object, the present inventors have identified problems in this usage of conventional three-dimensional coordinate measuring machines, and measurement dimensional errors in shape confirmation technology using the so-called computer vision method in which compound-eye or tri-eye TV cameras are arranged. We investigated the cause of the occurrence and researched an algorithm for measuring the dimensions of a simple-shaped three-dimensional object (maximum dimensions 10100 x 100 x 100) made of non-transparent material using a hybrid measurement method using a non-contact measurement system and a single-axis contact sensor. As a result, we have developed dimensions that can be used in a computer integrated manufacturing system (C1M system) that efficiently processes product information that can be used for the purpose of improving quality in a comprehensive sense by reducing the defective rate of products in high-mix, low-volume production. We have discovered a new display method that enables high-precision measurements and makes effective use of measurement data.

In recent years, modern biomagic methods such as FMS and FA have become prominent as a result of the practical use and development of CAD/CAM. In some cases, the actual inspection process uses special inspection jigs, but in many cases, simple inspection tools such as calipers and hide gauges are used, and the process is often done manually.
For this reason, the inspection process has become a bottleneck on automated production lines. Defects in the shape and dimensions of workpieces occur at the production site, and even in an environment where the temperature changes by several tens of degrees throughout the year, the function automatically corrects measurement errors caused by this, and is particularly effective in high-mix, low-volume production. There is a strong need for the development of a practical microcomputer-controlled dimension measuring system that functions effectively in a CIM system in a man- and labor-saving manner.

In developing such a measurement system, the present inventors first determined the number of effective digits at the minimum and sufficient number of required individual workpieces, each of which is reliable, that is, with good reproducibility. We envision the form of a measurement system that can collect and express measurement data in a short period of time, and examine the problems with current measurement equipment and measurement techniques in order to evaluate their practicality in such usage environments and the possibility of practical use in the near future. As a result of careful consideration, we aim to provide a measuring method and device based on the following basic requirements.

(1) The measurement method is a non-contact hybrid method. (2) Non-contact measurement can use both visible and infrared light. (3) In principle, the non-contact measurement method This is an applied form of the distance measurement method, and during measurement, the object dimension is obtained from the detected change component based on the initially calibrated dimension, regardless of the distance between the measured object and the optical pattern projector. (4) During the waiting time of each step of machining the material, prior to measuring the dimensions of the work, , we will create drawings based on TV footage, reduce the number of locations that require measurement, and use a method to include the actual dimensions in the drawings.

(Means for Solving the Problems) According to the present invention, as shown in FIG. The object to be measured 1 is fixed on a reference stand 2 that can be moved slightly at angles α and T around the and a T installed at a position spaced apart from the object to be measured by a predetermined distance in the y-axis direction of the reference stand with the optical axis Y aligned with the y-axis direction.
Two optical pattern projectors 5 are provided on both sides of the V left camera with their optical axes located in the same plane as the optical axis of the TV camera.
projecting two optical patterns At and A2 onto the surface of the object to be measured, and measuring at least one of the displacements of the reference table in the X-axis, y-axis, y-axis, and z-axis directions and around the X-axis, y-axis, and z-axis; By adjusting the position and orientation of the object to be measured, the two optical patterns are imaged as one focused composite pattern A on the measurement point area of the object to be measured, and the measurement point area surface 1a of the object to be measured is is set perpendicular to the optical axis Y of the TV left camera, the object to be measured is imaged by the left TV camera, and the slope image information of the object obtained thereby is input to the information processing device 6, and the object to be measured is inputted to the information processing device 6. The reference table 2 is displaced according to the slope image information of the object to be measured 1 to image the focused composite pattern A on various surfaces of the object to be measured 1, and the object to be measured at each of these imaging times is The posture and displacement information of the object is transmitted to the information processing device 6.
The slope image information is input to create a pixel-by-pixel drawing of the object to be measured, and at the same time, the pixel-by-pixel dimensions are measured, thereby measuring the shape and dimensions of the three-dimensional object using the slope image information.

Further, according to the present invention, an apparatus for carrying out the above-mentioned method includes a reference stand 2 that fixes and supports an object to be measured 1, and this reference stand 2, as shown in FIGS. 1 to 3. Fine displacement devices 7 to 11 capable of finely displacing in the orthogonal horizontal X-axis and Y-axis directions and two vertical axes directions and around the X-axis and Z-axis, and each fine displacement amount of the reference table 2. and the reference stand 2
A contact sensor 3 for measuring actual dimensions is installed above the object to be measured 1 and can move up and down only in the vertical direction; A TV camera 4 is installed with its optical axis aligned with the TV camera 4, and two optical pattern projectors are installed on both sides of the TV camera 4, with their optical axes located in the same plane as the TV camera's optical axis. 5, and an optical system 17.18 that images the two patterns A+ and Az output from the optical pattern projector 5 onto the object to be measured 1 on the reference stand 2 as one focused composite pattern A. , the micro-movement displacement device, the micro-movement displacement amount measuring device, and an electronic information processing device 6 connected to a TV camera.

In the measurement according to the present invention, the parts of the measuring device other than the information processing device, that is, the reference stand 2, the TV camera 4, the optical pattern projector 5, the optical system 17 and 18, and the parts related thereto, are A fluorescent lighting panel is placed above the object to be measured 1 on the reference stand 2 and on the opposite side of the TV camera 4 to prevent scattered light from the outside from hitting the surface of the object to be measured 1 on the reference stand 2. (FCP)
It is preferable to install an I9 and an electroluminescent plate (EL) 20, respectively, to prevent measurement errors caused by images of similar objects such as shadows of the object to be measured 1. .

In addition, as will be described later as the fine displacement amount measuring devices 12 to 16, two rotary potentiometers connected in reverse phase are used, and a toothed belt gear is attached to the rotation input shaft of this rotary potentiometer. It is preferable to provide a configuration in which a toothed belt is passed between the rotational output shaft of the fine displacement device and the gear on the rotational output shaft of the fine displacement device, thereby obtaining rotational input.

Furthermore, the TV camera 4 is movable in the optical axis Y direction and the X-axis direction orthogonal thereto, and the optical pattern projectors 5, 5 are mounted on a support frame that can rotate around the optical axis Y of the TV camera 4. It is preferable to provide them fixedly at positions on both sides of the TV camera 4.

Optical pattern A,,A! It is preferable to use a pattern in which the T-shapes are closed and faced sideways so that the focused point synthesis pattern A on the plane becomes a cross-shaped pattern.

The contact sensor 3 is used, for example, at the start of measurement to measure the representative actual dimensions of the object to be measured by lowering it from above and bringing it into contact with the upper end of the object to be measured on the reference stand. After the reference stand is reset to the normal position at the start of the measurement, it is lowered again and brought into contact with the upper end of the object to be measured again to re-measure its representative actual dimensions, thereby preventing measurement errors. At the same time, it is preferable that the next object to be measured be automatically and reliably set on the reference stand by a robot or the like.

(Function) According to the present invention, the low measurement area on the object to be measured 1, that is, the area at the center of the focused composite pattern, for example, the first
This is done in advance by projecting two unique optical patterns As and At onto the area on the slope of the optical axis, including the part indicated by A' in Figure 5, and creating a regular composite pattern A of them. From the calibration values of each axis regarding the orientation of the object to be measured, the spatial coordinates of the center of the measurement point area whose origin is the axis center point on the reference surface of the reference stand 2 where the object is installed are determined, and the honest state is determined. Information about the object's dimensions can be changed from data about the attitude of the object from then to that state. In this method, various forms related to the normal composite pattern A and the original optical pattern A, A, can be obtained from the distance relationship between the measurement point and a specific point on the optical pattern projector 5. , typically three different types of patterns are changed on the frame of the TV camera that views these, and in order to create a regular composite pattern on the workpiece from the combination of signals on the scanning lines on each frame, the reference stand 2 is used. A signal for moving the optical pattern projector in the Y-axis direction or in the Y-axis direction is changed, thereby automatically creating a composite pattern.

In this way, with the measurement method according to the present invention, depth information of the workpiece can be detected as image processing information in a plane perpendicular to the optical axis. The clearest signal is returned when the area occupied by the composite pattern is on the slope of the optical axis of the TV camera, so depending on the shape of the object to be measured, it can be used in combination with a contact sensor to suit different shapes of objects to be measured. Optimal measurements can be made.

According to the present invention, the two patterns At and At are projected onto the object surface to be measured and imaged as one focused composite pattern A, so that the measurement surface is aligned perpendicular to the optical axis of the TV camera. By setting it as a slope surface, it is possible to know the correct shape and dimensions of each measurement slope of the article. In other words, depending on the combination and defocus state of the focused point synthesis pattern A, the measurement surface can be a flat, spherical, cylindrical, or conical surface. You can know whether

FIG. 12(a) shows the image formed on the measuring surface by two patterns A1 and A2 when the measuring surface is adjusted by the fine displacement device to the focal position perpendicular to the optical axis of the TV camera. FIG. 12(b) shows the focus synthesis pattern A, and the pulse waveform input to the information processing device 6 by vertical scanning in this case.

FIG. 13(a) shows two patterns At that occur on the measurement surface when the measurement surface is perpendicular to the optical axis of the TV camera but located at a position farther than the focal point.

A2, and in this case, the pulse waveform input to the information processing device 6 by vertical scanning is shown in FIG. 13(b).

FIGS. 14(a) and 14(b) show patterns As, AZ, and incoming cavities when the measurement plane is perpendicular to the optical axis of the TV camera but closer than the focal position.

FIG. 15(a) shows the measurement point area A' of the apricot focus composite pattern generated on the spherical surface, and FIG. 15(1)) shows the measurement point area A'' of the focused focus composite pattern generated on the cylindrical surface. The blurred parts of the image are indicated by dashed lines.

Even when the measurement surface is flat and is not perpendicular to the optical axis of the TV camera but is inclined left and right, the focused point synthesis pattern A- on the vertical cylindrical surface as shown in FIG. A similar pattern is generated, but in this case, the composite pattern changes as the reference base is rotated around two axes, and the final composite pattern A on the slope shown in Figure 12 is generated, which allows for discrimination. can do.

The allowable measurement time for each workpiece, which is the object to be measured, is also related to the complexity of the workpiece shape, but in order to assume this, we assumed the usage method at the post. During the time that the workpieces are arranged and stored on the pallet attached to the NC machine tool (assuming 5 to 15 minutes per piece), the actual measurement drawings, that is, the mounting of the workpiece will be on 5 sides (maximum) excluding the bottom view, which is the surface. and auxiliary projection drawings, and write a 3-digit display symbol using a 3-digit enumeration symbol of alphabets (25 characters excluding O), numbers (10 characters), and numbers (10 characters) in the required places for dimension entry, and each The dimensional relationship corresponding to a location can be expressed using a description method in which the actual dimensions and dimensions with tolerances written in the CAD drawing or design drawing are aligned and displayed together as maximum and minimum dimensions. By comparing only the numerical expression portions according to a predetermined procedure, it is possible to quickly determine whether the processing dimensions are acceptable or not.

(Example) Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows an overview of the system configuration and information flow of the present invention. In FIG. 1, TV video is an analog image projected on a TV display, and diagrammatic representation is Dimensions (including tolerances) are written on the trigonometric projection drawing, and the dimensions are marked with 3-digit display symbols, i.e. 25 types of alphabets (capital letters) excluding 0 (O) and 10 types of numbers. , 3-digit display symbols that can cover 2,500 locations with enumeration symbols of 10 types of numbers, and a series of descriptions arranged in the order of 3-digit display symbols, actual dimensions, maximum dimensions, and minimum dimensions in the diagram. It means an expression in a drawing format that also includes a formula dimension expression. Also, the actual measurement drawing is the processing drawing (drawing in pixel units) and the calculated dimensions (in pixel units) obtained from the workpiece posture control information.
This refers to the drawing obtained by converting the pixel unit dimension to the height, and as a general rule, the calculated dimension is the measurement slope surface that is measured sequentially from the time when the object to be measured is mounted on the horizontal reference stand. is determined, and the dimensions related to the shape and dimensions are determined in units of digits or pixels from the posture control information of the workpiece that changes at that time. Each line segment is a dimension expressed by the dimensional unit that it has on the computer display, and the processing drawing refers to a pixel unit drawing that is the basis of the drawing expression description method.

Figures 2-4 show the measurement system mechanism. In the illustrated example, a horizontally elevating support frame 22 is mounted on a surface plate 21, and two vertically supporting threaded rods 23 are driven by a DC servo motor with a rotary engorder of a biaxial fine displacement device 9 via a speed reduction device. It is supported so that it can be raised and lowered. On the support frame 22 is a feed screw 24 of the X-axis direction fine displacement device 7.
and the feed screw 25 of the X-axis direction fine displacement device 8 are arranged orthogonally to each other and are configured to be driven by DC servo motors via reduction gears, and these feed screws 24 and 25 move the reference base 2 The lower mechanism 26 is configured to be able to move slightly in the X-axis and Y-axis directions.

The upper mechanism 27 of the reference stand 2 is supported so as to be tiltable horizontally by a horizontal pivot shaft 28 in the X-axis direction on the lower mechanism 26, and is moved around the X-axis by a DC servo motor of a fine displacement device 9 via a speed reduction device. It is configured so that it can be tilted. Further, the upper mechanism 27 of the reference stand 2 is configured to be rotated around the z-axis by a DC servo motor of the two-axis fine displacement device 11 via a worm gear speed reduction device.

In order to detect the displacement amount by each of these fine displacement devices, a fine displacement amount measuring device,
That is, a displacement meter is provided for each. These fine displacement measuring devices are, for example, connected to the rotational output shaft of the fine displacement device 11, as shown by the fine displacement amount measuring device 16 provided in connection with the fine displacement device 11 around two axes in FIG. It is composed of two rotary potentiometers 32 coupled in opposite phases and rotated by a fixed toothed belt gear 29 via a toothed belt 30 and a gear 31.

In this dual rotary potentiometer, as shown in Figure 5, the terminal terminals of both resistors are coupled in reverse phase using a method similar to bridge coupling, using the midpoint of each (wire-wound) resistor 33 and 34 as a reference point. , and is configured to obtain a differential output between the intermediate terminals. By adopting such an anti-phase coupling structure, compared to the case of using a single rotary potentiometer, it is possible to expand the measurement range, eliminate bias voltage, improve linearity,
Sensitivity and resolution can be improved.

Fig. 6(a) shows the input/output relationship when the input of two rotary potentiometers coupled in anti-phase is randomly displaced, and Fig. 6(b) shows the input/output relationship of the two rotary potentiometers coupled in anti-phase. The distribution and average value of the first-order difference ratio are shown.

As shown in FIG. 3, on the horizontal lifting support frame 22, a contact sensor displacement device 36 is provided on the upper support frame 35.
The feed screw 37 allows the soft-touch contact sensor 3 with a buffering function to come into contact with the upper end of the object to be measured 1 on the reference stand 2 placed on it from above and measure its height with the displacement meter 38. It is set up like this. An electroluminescent plate (EL) 39 is vertically supported on the support frame 22 at a position behind the object 1 to be measured, and a fluorescent lighting panel (FLP) 4 is provided from the upper support frame 35.
0 is provided horizontally suspended above and in front of the object to be measured 1.

The TV camera 4 is placed at a position spaced apart from the X-axis of the reference stand 2 in the y-axis direction, and is slid onto the rail 41 on the surface plate 21 in the optical axis Y direction, with its optical axis Y pointing in the direction of the X-axis. It is installed on a movable sliding table 42 so as to be slidable in the X-axis direction, and during measurement, the front end 4a of the TV camera 4 is separated from the X-axis of the reference table 2 in the Y-axis direction by a predetermined distance of, for example, 1350 mm. The pattern is set so that the patterns reflected from the two pattern projectors 5 by the reflecting mirrors 43.44 and 45.46 of the respective optical systems 17.18 can be imaged onto the object to be measured. . Two pattern projectors 5 provided on both sides of the TV camera 40 in the same plane as the optical axis Y of the TV camera 4 are supported by an annular support frame 47, and a reprojector 5
48 is a light source, and 49 is a light transmission through an optical fiber. A cable 50 indicates a pattern plate having a T-shaped pattern provided in the lens barrel of the pattern projector 5.

Next, examples will be described in which works of various shapes are measured by the method of the present invention using the above-mentioned apparatus.

The work of creating a drawing based on the TV camera image of the object to be measured, which has a smooth surface set on the reference surface of the horizontally adjusted reference stand 2 using a fixing pin and a mounting screw, is to create a drawing of the workpiece. In order to obtain all the information necessary for the creation, each pattern image after image processing was measured pixel by pixel on a slope relative to the optical axis of the TV camera, and the information related to each attitude change from the normal position was measured. organize information,
If you hold the workpiece in the normal position or a known posture again, measure the representative dimensions of the workpiece in units of cabinets using a highly reliable contact sensor, and convert it with the pixel value at that point. All actual dimensions and data necessary for drawing drawings are obtained, and all measurements according to the present invention are thus completed.

Figure 7(a) and Figures 8(a) and (b) show drawings of the workpiece to be measured.The workpiece shown in Figure 7(a) is an axially symmetrical product, so its height is approximately The TV image shown in FIG. 7(b) was obtained by placing incandescent ground glass lamps (two pieces) on the back side of the central part and using them as a backlight. In addition, since the work shown in the front and side views of Figures 8(a) and 8(b) is a flat product, in consideration of uniformity of in-plane brightness, the back of the work should be placed parallel to the slope. We were able to obtain a distinctive TV image using the electroluminescent panels EL and front-light fluorescent lighting panel FLP. These are shown in FIGS. 9-11 (a). Figure 9(a) shows the silhouette of the TV when only the EL is lit.
The image, Figure 1O (a) is T when FLP is added to this.
It is a V image. Due to the composite illumination effect of two plane light sources whose brightness can be controlled by voltage control or the like, surfaces C and D shown in FIG. 8(a) could be expressed with significantly different brightness. FIG. 11(a) shows a TV image when only PLF is used. These three figures show that this phenomenon does not change even if the distance changes by adjusting each measurement slope to the measurement reference distance, so if the threshold value of the TV image at the measurement reference distance is appropriately selected, the addition of computer-processed images can be reduced. This means that it is possible. Based on the above experiment, the etching processed images for creating a measured drawing from the above-mentioned computer processed images are shown in FIG. 7(C) and FIGS. 9 to 11(b). These figures are pixel-by-pixel figures, so for example, Figure 7 (a
), and the maximum dimensions of 100 mm+ and 82.4 inches of the object to be measured in the drawings shown in Figures 8(a) and (b) are measured using a contact sensor, and if the pixel unit dimension → mm conversion is performed, it can be added to the actual measurement drawing. When the actual dimensions of each part are obtained, the dimension measurement work for each workpiece is completed. In addition to the above example, even when attitude control related to other axes is involved, the necessary calculated dimensions can be obtained based on the incremental displacement information leading to each attitude of each axis.

Next, the creation of a wire frame of a tetrahedral object to be measured and the processing of this wire frame diagram will be explained with reference to FIG.

When creating the tetrahedral wire frame shown in Figure 16(a), first, the control device of the TV camera is used to target only the relatively bright surface E, and a threshold (temporarily set to 1) ) for slicing. At this time, as shown in FIG. 16(c), the outside of the triangle E on the TV display is black and the inside is white, and its edge line becomes clear.

In this state, etching processing is performed and edges are detected to obtain a two-dimensional wire pattern, which is recorded in memory.

Next, either with the F plane in that state or by changing the illumination condition and making the F plane brighter relative to the E plane, slicing is performed using threshold value 2, and the same processing is performed as shown in Figure 16. (C
) is obtained. Figure 16 (b)
In both figures, the direction and length of sides ac are the same, so if these sides are overlapped and connected, a wire frame having the outline shown in FIG. 16(a) can be created. As shown in FIG. 16(d), a hidden line (dotted line) is drawn between b and d, and the coordinates of each vertex are read and recorded in memory.

To process the wire frame diagram obtained as described above, the fine displacement devices 7 to 11 are operated to obtain the various actual lengths of the tetrahedron in pixel units. You can freely perform operations such as rotation, translation, proportional reduction, and enlargement around specified points on the bottom surface and around various other areas. Displacement signals related to this driving operation are input from each sensor to the personal computer.

Next, it is rotated around the two axes and the X axis using a reference stand, and it is confirmed by a non-contact measurement method that the TV optical axis passes approximately at the center of gravity of the triangle abc and that it is perpendicular. At this time, the three sides ab, bc, and ca are determined as converted dimensions in pixel units, and the angle of inclination of the surface E with respect to the reference plane is also determined. Also, by making the reference plane perpendicular, sides cd and ab can be found, and from the lengths of the three sides of triangle E, the height of a from side bc is determined, and from this height and angle of inclination, the height of a from the reference plane. can be determined by calculation. Finally, the reference plane is returned to the horizontal position, and the contact sensor 3 measures the actual height (in units of I) of the apex a.

By converting the calculated height of vertex a (in pixels) based on this actual size, the length of each side of the tetrahedron can be obtained, making it possible to create a drawing. Alternatively, dimensions can be written on the input drawing from the image scanner that is registered and displayed on the computer.

(Effects of the Invention) According to the present invention, the main shape and dimensions of the object to be measured can be accurately and automatically measured during the waiting time of each machining step starting from the raw material, and the obtained The actual dimensions will be written in the space around the drawing in accordance with the alphanumeric symbols written in the corresponding dimension entry position, so at this point refer to the design drawing (completed drawing) of the workpiece created by CAD or image scanner. be able to. If the dimensioning in the reference drawing is a critical dimension representation, a series of 3 including the measured values.
By comparing numbers according to certain rules,
It is possible to repair defective parts by checking the suitability of the processing method and changing the processing dimensions of the mating workpiece, which reduces the defective rate and processing costs.
This has the effect of contributing to quality improvement in a comprehensive sense.

[Brief Description of the Drawings] Fig. 1 is a block diagram showing an overview of the system configuration of the present invention and the flow of information; Fig. 2 is a plan view showing the entire mechanical section of the device according to the present invention; Fig. 2 is a side view of the mechanical part shown in Fig. 4, an enlarged detailed view showing a portion of the TV camera and optical pattern projection layer as a cross section, and Fig. 5 is a schematic diagram of two rotary potentiometers coupled in antiphase. Figure 6 is a graph showing the performance of the anti-phase coupled dual rotary potentiometer shown in Figure 5, Figures 7 to 11
The figure is an explanatory diagram of the method of processing slope image information according to the present invention. Figures 12 to 15 are explanatory diagrams of the synthesis of focused points of optical patterns. Figure 16 is an explanatory diagram of the method of processing a tetrahedral object to be measured. It is a diagram. l...Object to be measured 2...Reference stand 3...
Contact sensor 4...TV camera 5...Optical pattern projector 6...Information processing device 7-11...
Fine displacement devices 12 to 16...Fine displacement measurement device Patent applicant Nao Mori Figure 4 Figure 7 (a) (b) (c> Figure 8 (a) (b) Figure 9 (a) (b) Figure 10 (a) (b) Figure 11 (a) (1); (a> (b) Figure 13 (a) (b) Figure 14 (b) Ca) (b) ( a) (C)

Claims (1)

[Claims] 1. A reference that can be slightly displaced in the mutually orthogonal horizontal x-axis and y-axis directions and in the vertical z-axis direction, as well as at angles α and γ around the x-axis and z-axis. An object to be measured is fixed on a table, a representative actual dimension of the object to be measured in at least one direction is measured by a contact sensor, and the object is placed at a position a predetermined distance away from the object to be measured in the y-axis direction of the reference table. The object to be measured is projected by two optical pattern projectors installed on both sides of the TV camera, the optical axes of which are positioned in the same plane as the optical axis of the TV camera. by projecting one optical pattern on each, and adjusting the position and orientation of the object to be measured by at least one of displacements of the reference stand in the x-, y-, and z-axes directions and around the x- and z-axes. After forming an image of the two optical patterns as one focused composite pattern on the measurement surface of the object to be measured and making the measurement surface of the object to be measured perpendicular to the optical axis of the TV camera, this measurement method The surface is imaged by a TV camera, and the obtained slope image information of the object to be measured is input into an information processing system.
The reference table is displaced in accordance with the slope image information of the object to be measured, and the focused composite pattern is imaged on various surfaces of the object to be measured, and the object to be measured at each time of image formation is A method for measuring a three-dimensional object using slope image information, characterized in that posture and displacement information are input to the information processing device to create a pixel-by-pixel drawing of the object to be measured, and at the same time measure pixel-by-pixel dimensions. 2. A reference stand that fixedly supports the object to be measured, and a reference stand that can be slightly displaced in the horizontal x-axis and y-axis directions and the vertical z-axis direction that are orthogonal to each other;
a fine displacement device capable of finely displacing each one around the axis;
a device for measuring each minute displacement of the reference stand; a representative contact sensor for actual dimension measurement that is installed above the object to be measured fixed on the reference stand and can move up and down only in the vertical direction; a TV camera installed with its optical axis aligned in the y-axis direction at a position spaced apart from the reference stand at a predetermined distance in the y-axis direction;
Two optical pattern projectors are provided on both sides of the TV camera, the optical axes of which are located in the same plane as the optical axis of the TV camera, and two optical pattern projectors that exit from these optical pattern projectors.
an optical system that images two patterns on the object to be measured on the reference stand as one focused composite pattern; and electronic information connected to the fine movement displacement device, the fine movement displacement measurement device, and the TV camera. 1. A three-dimensional object measuring device using slope image information, comprising: a processing device.