JPS63213830A - Ultraviolet-ray irradiating device - Google Patents

Ultraviolet-ray irradiating device

Info

Publication number
JPS63213830A
JPS63213830A JP4791387A JP4791387A JPS63213830A JP S63213830 A JPS63213830 A JP S63213830A JP 4791387 A JP4791387 A JP 4791387A JP 4791387 A JP4791387 A JP 4791387A JP S63213830 A JPS63213830 A JP S63213830A
Authority
JP
Japan
Prior art keywords
lamp
reflector
ultraviolet
exhaust port
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4791387A
Other languages
Japanese (ja)
Inventor
Yoshinori Sunazaka
砂坂 義則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Electric Equipment Corp
Original Assignee
Toshiba Electric Equipment Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Electric Equipment Corp filed Critical Toshiba Electric Equipment Corp
Priority to JP4791387A priority Critical patent/JPS63213830A/en
Publication of JPS63213830A publication Critical patent/JPS63213830A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To moderately cool a high pressure discharge lamp and a reflector without adjusting an exhausting means which forcibly discharges air through an exhaust port whether a transmissive member exists or not, by providing a transmissive member attaching part which attaches the ultraviolet ray-transmissive member to close a light projection aperture part by an object to be irradiated and specifying the distance between the top part of a lamp tube body and the exhaust port. CONSTITUTION:A transmissive member 10 is arranged to close a light projection aperture 6 of a reflector 5 and consists of a light-transmissive plate 10, which intercepts inflow of gas and permits ultraviolet rays to pass through, and a frame member 10b which is engaged with the transmissive member attaching part, which is provided in the end part of a lower face aperture 2 of an enclosure 1 and consists of a U-shaped rail, and fixes the light-transmissive plate 10a. In this case, since a length L between the top part of the tube body and an exhaust port 7 is set to 0.7-1.1-fold tube body diameter D, the tube wall temperature of the tube body of a lamp 4 is kept within an allowable temperature range whether the transmissive member 10 exists or not, and a required ultraviolet output is obtained, and the reduction of the life of the lamp due to a failure in transmission of the lamp tube body is prevented.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は高圧放電ランプを内包する赤外線透過。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention includes a high pressure discharge lamp that transmits infrared light.

紫外線反射性の多層干渉膜を被着した反射体を用いた紫
外線照射装置に関する。
The present invention relates to an ultraviolet irradiation device using a reflector coated with an ultraviolet-reflective multilayer interference film.

(従来の技術) プリント合板、プリント配線基板あるいは新聞印刷など
の印刷工程において、紫外線硬化性の塗料、インク等を
塗布した基体に紫外線を照射して塗料、インクなどを硬
化させる方法が知られている。
(Prior Art) In the printing process of printed plywood, printed wiring boards, newspaper printing, etc., there is a known method of curing the paint, ink, etc. by irradiating ultraviolet rays onto a substrate coated with ultraviolet-curable paint, ink, etc. There is.

そして、このような方法において、紫外線を照射するた
とえば高圧水銀ランプ、メタルハライド電ランプを収納
する反射体など装置自体および塗料、インク等や基体に
熱を加えて装置を破損させたり紫外線硬化の光化学反応
を阻害したりすることから、一般に高圧放電ランプの周
囲の空気を排出し冷風を吸引して装置内の熱を除去する
構造が採られている。しかし、このような構造によると
、高圧放電ランプの管体表面に冷風が当る管体底部の冷
却効果は高いが、管体頂部側には渦流が生じて冷却効果
が低くなり、高圧放電ランプの管体表面の温度分布が不
均一となり、特に管体頂部側に局部的な高熱が発生する
問題がある。この種紫外線照射装置に用いる高圧放電ラ
ンプは、石英ガラスで形成されるが、上記局部的な高熱
の発生による管体の失透を防止するためには、管体の管
壁温度はほぼ800℃を越えないことが好ましい。また
、ランプからの紫外線を安定して出力させるために、管
体の管壁温度をほぼ600℃以上に保ち、ランプ管体内
の蒸気圧を所定のレベルまで高め、保持させることが必
要である。これらのことは、第7図。
In such a method, for example, a reflector housing a high-pressure mercury lamp or a metal halide electric lamp is irradiated with ultraviolet rays, and heat is applied to the apparatus itself, paint, ink, etc., and the substrate, damaging the apparatus or causing the photochemical reaction of ultraviolet curing. Generally, a structure is adopted in which the air around the high-pressure discharge lamp is exhausted and cool air is sucked in to remove the heat inside the device. However, with this structure, although the cooling effect at the bottom of the tube where cold air hits the surface of the tube is high, eddy currents are generated at the top of the tube, reducing the cooling effect. There is a problem in that the temperature distribution on the surface of the tube becomes non-uniform, and localized high heat occurs particularly on the top side of the tube. The high-pressure discharge lamp used in this type of ultraviolet irradiation device is made of quartz glass, but in order to prevent devitrification of the tube due to the above-mentioned localized generation of high heat, the tube wall temperature of the tube must be approximately 800°C. It is preferable not to exceed. Furthermore, in order to stably output ultraviolet rays from the lamp, it is necessary to maintain the tube wall temperature of the tube at approximately 600° C. or higher, and to increase and maintain the vapor pressure within the lamp tube to a predetermined level. These things are shown in Figure 7.

第8図に示す120W/CI!!、  8.4kWのメ
タルハライドランプを用いてランプ温度とランプ寿命お
よびランプ温度と紫外線出力との関係から明らかである
。すなわち第7図からランプ温度600℃以下では、紫
外線出力が極端に減少することと、第8図から800℃
以上では極端にランプ寿命が短くなることがわかる。以
下、600℃ないし800’Cの温度範囲を許容温度と
する。
120W/CI shown in Figure 8! ! , using an 8.4 kW metal halide lamp, is clear from the relationship between lamp temperature and lamp life, and between lamp temperature and ultraviolet output. In other words, from Fig. 7, when the lamp temperature is below 600°C, the ultraviolet output is extremely reduced, and from Fig. 8, when the lamp temperature is 800°C or less,
It can be seen that the lamp life becomes extremely short in the above case. Hereinafter, a temperature range of 600°C to 800'C will be defined as an allowable temperature.

さて、近時、電気入力の大きい高圧放電ランプ、特に上
記第7図、第8図の実験で用いたアーク長1 cm当り
90W以上の放電ランプを用いられることは産業上−膜
化されており、この種ランプの許容温度を保持すること
は根本的な課題となっている。
Nowadays, it has become industrially accepted to use high-pressure discharge lamps with large electrical inputs, especially discharge lamps with a power output of 90 W or more per 1 cm of arc length, as used in the experiments shown in Figures 7 and 8 above. , maintaining the permissible temperature of this type of lamp is a fundamental challenge.

このような課題に対して、すなわちアーク長が1 cm
当り90W以上の高圧放電ランプを用いる紫外線照射装
置において、高圧放電ランプの管体管壁温度を均一に保
つようにしたものとして、たとえば特公昭55−162
81号公報に記載されたものが提案された。
For such a task, i.e. when the arc length is 1 cm
In an ultraviolet irradiation device using a high-pressure discharge lamp of 90 W or more per unit, for example, Japanese Patent Publication No. 55-162 is designed to keep the temperature of the tube wall of the high-pressure discharge lamp uniform.
The one described in Publication No. 81 was proposed.

この特公昭55−16281号公報に記載されたものは
、ランプ表面の頂部側と凹面反射鏡の最深部に設けた冷
却風吸込部との距離をランプの管体直径の273以下に
することにより、渦流の発生を防止するようにしている
。また、このものは反射鏡の投光開口面が開放され、冷
却風が反射鏡の開口全面から吸引され、冷却風が管体の
管壁に沿って流れるものである。
The method described in Japanese Patent Publication No. 55-16281 is designed to reduce the distance between the top side of the lamp surface and the cooling air suction part provided at the deepest part of the concave reflector to be less than 273 times the tube diameter of the lamp. , to prevent the generation of vortices. Further, in this device, the light emitting opening surface of the reflecting mirror is opened, cooling air is sucked from the entire opening of the reflecting mirror, and the cooling air flows along the tube wall of the tube body.

(発明が解決しようとする問題点) しかしながら、ランプに関して、赤外線透過および紫外
線反射の性質の多層干渉膜を被着した反射鏡を使用した
場合には、ミラーからの輻射熱は極端に減少し管体頂部
付近の温度が低くなるため、ランプと反射鏡の位置関係
を上記公報記載の範囲に設定するとランプが600℃以
下となり、紫外線出力が低下するおそれがある。
(Problem to be Solved by the Invention) However, when a reflector coated with a multilayer interference film that transmits infrared rays and reflects ultraviolet rays is used for a lamp, the radiant heat from the mirror is extremely reduced. Since the temperature near the top is low, if the positional relationship between the lamp and the reflector is set within the range described in the above-mentioned publication, the temperature of the lamp will be below 600° C., which may reduce the ultraviolet output.

また、反射鏡に関して、ランプを反射鏡の最深部に極端
に近接させた場合は、反射鏡の最深部近傍の温度が34
0℃よりも遥かに上昇して熱歪みによる局所的破損が生
じるおそれがある。
Regarding the reflector, if the lamp is placed extremely close to the deepest part of the reflector, the temperature near the deepest part of the reflector will be 34°C.
If the temperature rises far above 0°C, there is a risk that local damage may occur due to thermal strain.

上記紫外線照射装置を実際に使用する場合には、たとえ
ば別途コンベアなどの搬送手段を投光開口下に設け、コ
ンベア上に被照射物をのせて投光開口下を通過させ、イ
ンクの硬化などを行う訳であるが、上記装置においてラ
ンプから直接下方に放出される赤外線は除去されないた
め、被照射物はある程度熱に強いものあるいは、コンベ
ア速度を高速にしても、すなわち短時間の紫外線照射で
も硬化するものに限られる。
When actually using the above-mentioned ultraviolet irradiation device, for example, a separate conveyor or other transport means is installed under the light projection opening, and the object to be irradiated is placed on the conveyor and passed under the light projection opening to cure the ink. However, in the above equipment, the infrared rays emitted directly downward from the lamp are not removed, so even if the irradiated object is somewhat resistant to heat, or the conveyor speed is increased, that is, even a short period of ultraviolet irradiation will not cure the object. limited to those who do.

従って、上記の条件を満たさない被照射物を硬化させる
場合には、若干の紫外線の吸収は有り得るが上記装置の
投光開口下に紫外線以外のエネルギー波長を除去する紫
外線透過部材が必要゛となる。
Therefore, when curing an object to be irradiated that does not meet the above conditions, a UV transmitting member that removes energy wavelengths other than UV rays is required under the light projection aperture of the above device, although some UV rays may be absorbed. .

また、被照゛対物の硬化性質あるいは熱変形性質を考え
なくても、被照射物によって、たとえば紙状のものであ
ると、透過部材がない場合、排気手段によって被照射物
が舞い上がる問題があるので、透過部材としてたとえば
石英板を用いることが考えられる。
Furthermore, even without considering the hardening properties or thermal deformation properties of the irradiated object, if the irradiated object is paper-like, for example, and there is no transparent member, there is a problem that the irradiated object may be lifted up by the exhaust means. Therefore, it is conceivable to use, for example, a quartz plate as the transparent member.

しかしながら、反射鏡の開口端に間隙が生じるように、
且つ投光開口を閉塞するように紫外線透過部材を設けた
場合、気体の流れは透過部材がない状態での気体の流れ
とは異なる。例えばランプ位置、いいかえれば管体頂部
と排気口との距離をランプ管体直径の1.2になるよう
に設定したときに最適な紫外線出力を得ることができ、
ランプ管体直径よりもかなり小さく設定すると、ランプ
が過冷却となり、ランプ電圧が低下し紫外線出力が極端
に減少する。従って、このような紫外線照射装置は、ラ
ンプの位置によって透過部材を取付けた場合にはランプ
はは適度に冷却され、紫外線出力は良好となるが透過部
材を取りはずした場合には、ランプが昇熱してしまいラ
ンプ寿命が極端に短くなる。おるいは、透過部材がない
場合には、ランプは適度に冷却され紫外線出力は良好と
なるが、透過部材を取付けた場合には、ランプが過冷却
してしまい紫外線出力が極端に減少し、実用に供さなく
なることが多く、その都度排風量を調整し直す必要があ
り、多くの場合には、排風量を調整してもランプ寿命が
短くなる。おるいは実用に値する紫外線出力が得られな
いことがめった。
However, so that there is a gap at the open end of the reflector,
In addition, when an ultraviolet transmitting member is provided to close the light projection opening, the gas flow differs from the gas flow in a state where there is no transmitting member. For example, optimal ultraviolet output can be obtained by setting the lamp position, in other words, the distance between the top of the tube and the exhaust port to be 1.2 of the diameter of the lamp tube.
If it is set much smaller than the lamp tube diameter, the lamp will be overcooled, the lamp voltage will drop, and the ultraviolet output will be drastically reduced. Therefore, depending on the position of the lamp, when the transmitting member is attached to such an ultraviolet irradiation device, the lamp is cooled appropriately and the UV output is good, but when the transmitting member is removed, the lamp heats up. This will dramatically shorten the lamp life. Or, if there is no transparent member, the lamp will be cooled appropriately and the UV output will be good, but if the transparent member is attached, the lamp will become overcooled and the UV output will be extremely reduced. In many cases, the lamp cannot be put to practical use, and the exhaust air volume must be readjusted each time, and in many cases, even if the exhaust air volume is adjusted, the lamp life will be shortened. However, it is rare that a practical UV output cannot be obtained.

上記排風量の調整を行うことは可能ではあるが、調整ミ
スによるランプ破壊の危険性は高く、また、−日に何度
も透過部材を@脱する使用者にとっては、相当の労力を
要する。
Although it is possible to adjust the amount of air discharged, there is a high risk of the lamp being destroyed due to an adjustment error, and it requires considerable effort for the user who removes the transparent member many times a day.

従って、たとえばこの種類の被照射物を硬化さぜる場合
、透過部材がおる装置とない装置が、それぞれ必要とさ
れる場合も考えられるが、設計コスト、製造コストなど
が割高となる問題がおる。
Therefore, for example, when curing this type of irradiated object, it is conceivable that a device with a transparent member and a device without it may be required, but there is a problem that the design cost, manufacturing cost, etc. are relatively high. .

本発明は上述の事情を考慮してなされたもので、アーク
長が1 cm当り90W以上の高圧放電ランプを内包す
る赤外線透過、紫外線反射性の多層干渉膜を被着した反
射体を用いて紫外□線を照射するものにおいて、投光開
口を閉塞する透過部材の有無にかかわらず、しかも排気
手段を調整することなくランプ管体の管壁温度を適正範
囲に保持でき、ランプ管体の失透あるいは極端な紫外線
出力の低下を良好に防止し、反射体の変形を防止できる
紫外線照射装置を提供することを目的とする。
The present invention has been made in consideration of the above-mentioned circumstances, and uses a reflector coated with a multilayer interference film that transmits infrared rays and reflects ultraviolet rays, which includes a high-pressure discharge lamp with an arc length of 90 W or more per 1 cm. □In devices that emit light, the temperature of the tube wall of the lamp body can be maintained within an appropriate range regardless of the presence or absence of a transparent member that blocks the light emitting opening, and without adjusting the exhaust means, and the devitrification of the lamp body can be maintained. Another object of the present invention is to provide an ultraviolet irradiation device that can effectively prevent an extreme drop in ultraviolet output and prevent deformation of a reflector.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段) 本発明の紫外線照射装置は、高圧放電ランプと、前面に
方形状の投光開口を有するとともに、上記ランプの背方
側に位置して排気口を設け、上記ランプに対向して配設
された断面凹面状の赤外線透過、紫外線反射性の多層干
渉膜を被着した反射体と、上記投光開口の側部近傍に設
けられ、上記投光開口下に投光開口を通過する紫外線を
透過する投光部材を取付は得る透過部材取付部と、これ
ら透過部材取付部の近傍に透過部材を取付けたときに投
光開口の側部近傍から反射体内へ気体を流入する気体流
入口と、上記ランプ周囲の気体を上記排気口から強制排
気させる排気手段とからなる。
(Means for Solving the Problems) The ultraviolet irradiation device of the present invention has a high-pressure discharge lamp, a rectangular light projection opening on the front side, and an exhaust port located on the back side of the lamp, A reflector having a concave cross-section and coated with an infrared-transmissive and ultraviolet-reflective multilayer interference film is disposed facing the lamp, and a reflector is provided near the side of the light emitting aperture and is located below the light emitting aperture. There is a transmitting member mounting part for attaching a light transmitting member that transmits ultraviolet light passing through the light transmitting aperture, and when a transmitting member is attached near these transmitting member attaching parts, gas is removed from near the side of the light transmitting aperture into the reflector. and an exhaust means for forcibly exhausting the gas around the lamp from the exhaust port.

上記高圧放電ランプは、アーク長1 cm当り90W以
上の直管形のもので、上記排気口と管体頂部との距離が
、管体直径のO,7以上、1.1以下の範囲内になるよ
うに設けられていることを特徴とするものである。
The above-mentioned high-pressure discharge lamp is a straight tube type with a power of 90 W or more per 1 cm of arc length, and the distance between the above-mentioned exhaust port and the top of the tube is within the range of O.7 or more and 1.1 or less of the tube diameter. It is characterized in that it is provided so that

上記透過部材取付部は、投光開口下において着脱可能で
あればよく、上記投光開口端の両側部に設けられたレー
ル状のものの他、単に投光開口端の両側部の下方に透過
部材の両端を支えるブロックを設けたものも含む。また
、上記紫外線照射装置すなわち透過部材がない状態にお
いては、排気口から排気する気体のほとんどは投光開口
から取入れられる。
The above-mentioned transmitting member attachment part may be attached and detached under the light emitting aperture, and may be a rail-shaped one provided on both sides of the light emitting aperture end, or simply a transmitting member attached below both sides of the light emitting aperture end. This includes those with blocks that support both ends. Furthermore, in the absence of the ultraviolet irradiation device, that is, the transmitting member, most of the gas exhausted from the exhaust port is taken in from the light projection opening.

上記気体流入口は、あらかじめ上記反射体の透過部材取
付部近傍に設けられても、透過部材の両側部に設けられ
ていてもよい。上記反射体にあらかじめ設けられた気体
流入口は、透過部材がない場合、補助的に気体を反射体
内へ流入させるためのものである。
The gas inlet may be provided in advance near the transmitting member mounting portion of the reflector, or may be provided on both sides of the transmitting member. The gas inlet port provided in advance in the reflector is for supplementary gas inflow into the reflector when there is no transmitting member.

(作 用) 本発明の紫外線照射装置は、被照射物によって、紫外線
透過部材を投光開口部を閉塞するように取り付けること
ができる透過部材取付部を有し、ランプ管体頂部と排気
口との距離をランプ管体直径の0.7ないし1.1の範
囲に設けることによって、上記透過部材の有無にかかわ
らず、しかも排気口から強制排気する排気手段を調整す
ることなく高圧放電ランプおよび反射体を適度に冷却す
るものである。
(Function) The ultraviolet ray irradiation device of the present invention has a transmitting member attachment part that allows the ultraviolet transmitting member to be attached so as to close the light emitting opening depending on the object to be irradiated, and the UV transmitting member has a transmitting member attachment part that can be attached to the lamp body top and the exhaust port. By providing a distance between 0.7 and 1.1 of the lamp tube diameter, high-pressure discharge lamps and reflective It cools the body appropriately.

これらのことを第3図〜第5図によって説明する。These matters will be explained with reference to FIGS. 3 to 5.

高圧放電ランプ4として、ランプ管体の直径27m。As the high-pressure discharge lamp 4, the lamp tube has a diameter of 27 m.

全長840履、ランプ電力8.4kW、アーク長が1 
cm当り120Wの鉄系成分を封入したメタルハライド
ランプを用い、ランプ位置を変化させた場合のランプ管
壁の高温部、低温部および反射体の温度と排風量との関
係を第3図に示す。また、上記装置において、透過部材
を取りはずした場合の各部温度と排風量との関係を第4
図に示す。ざらに、反射体温度と、反射体寿命の関係を
第5図に示す。
Total length 840 shoes, lamp power 8.4kW, arc length 1
FIG. 3 shows the relationship between the temperature of the high-temperature part, the low-temperature part, and the reflector of the lamp tube wall and the exhaust air volume when the lamp position is changed using a metal halide lamp filled with iron-based components of 120 W per cm. In addition, in the above device, the relationship between the temperature of each part and the exhaust air volume when the transparent member is removed is
As shown in the figure. Figure 5 briefly shows the relationship between reflector temperature and reflector life.

第3図において、ランプの位置を反射体の排気口に近接
、すなわち、ランプの頂部と排気口との距離りを273
以下の0.6にし、排気口から図示しない。排気手段に
よって排気している状態ではランプの低温部が7.5r
rt3/分以上であると紫外線を安定して出力させるた
めの適正温度であるほぼ600℃が保持できなくなる。
In Figure 3, the lamp is positioned close to the exhaust port of the reflector, that is, the distance between the top of the lamp and the exhaust port is 273 mm.
It is set to 0.6 below, and the exhaust port is not shown. When the lamp is exhausted by the exhaust means, the low temperature part of the lamp is 7.5r.
If the temperature exceeds rt3/min, it becomes impossible to maintain approximately 600° C., which is the appropriate temperature for stably outputting ultraviolet rays.

しかしながら、紫外線を安定して出力させるための温度
約600℃に保つために、排風量を低減させると第4図
から透過部材がない場合、反射体の温度が340℃以上
となる。赤外線透過、紫外線反射性の反射体は、340
℃よりも高い温度では熱的影響により極端に寿命が短く
なるため340℃以上にさせてはならない(第5図)。
However, if the exhaust air volume is reduced in order to maintain the temperature at about 600° C. for stable output of ultraviolet rays, the temperature of the reflector becomes 340° C. or higher in the absence of the transmitting member as shown in FIG. 4. The reflector that transmits infrared rays and reflects ultraviolet rays is 340
If the temperature is higher than 340°C, the lifespan will be extremely shortened due to thermal effects, so it should not be allowed to rise above 340°C (Figure 5).

すなわち、排風量は実用上8m各/分以下で使用するこ
とはない。従って、ランプ位置すなわち、L/Dは0.
7以上とする必要がある。
That is, in practice, the exhaust air volume is never used at less than 8 m/min. Therefore, the lamp position, ie, L/D, is 0.
Must be 7 or higher.

次に、第4図に示すように上記の装置において、上記透
過部材を取りはずして同様の実験を行うと距離りを30
mすなわちL/Dを1.1よりも大きくした場合、ラン
プ管壁の高温部が許容温度を越えてしまい、L/Dが1
.1までならばほぼ許容温度を保っていることがわかる
。従って、筐体の頂部と排気口との距離りを管体直径り
の0.7ないし1.1の範囲内に設定すれば、透過部材
の有無にかかわらずランプ管体の管壁温度を許容温度範
囲内に保持でき、所要の紫外線出力が得られ、ランプ管
体の失透などによるランプ寿命を短くすることがなく、
しかも反射体を変形させることがないことが実験によっ
て確められた。
Next, as shown in FIG. 4, in the above apparatus, when the above transparent member was removed and a similar experiment was carried out, the distance was reduced by 30
If m, that is, L/D, is made larger than 1.1, the high temperature part of the lamp tube wall will exceed the allowable temperature, and L/D will become 1.
.. It can be seen that if the temperature is up to 1, the permissible temperature is almost maintained. Therefore, if the distance between the top of the casing and the exhaust port is set within the range of 0.7 to 1.1 of the tube diameter, the tube wall temperature of the lamp tube can be maintained regardless of the presence or absence of a transparent member. It can be maintained within the temperature range, the required UV output can be obtained, and the lamp life will not be shortened due to devitrification of the lamp body.
Furthermore, it has been confirmed through experiments that the reflector is not deformed.

このような結果は、90W/cm以上の高圧放電ランプ
であれば同様であった。
These results were similar for high-pressure discharge lamps of 90 W/cm or more.

(実施例) 本発明の実施例を図面を参照して説明する。第1図およ
び第2図は本発明の第1の実施例を示す。
(Example) An example of the present invention will be described with reference to the drawings. 1 and 2 show a first embodiment of the invention.

1は筐体で、この筺体1は細長直方体形状に形成され、
下面に開口2を有するとともに上面に長手方向に沿って
細長の溝3が形成されている。4は管形の高圧放電ラン
プ、5は断面凹面状に形成された赤外線透過かつ紫外線
反射性の反射体で、この反射体5は前面に投光開口6を
有するとともに上面に高圧放電ランプ4の背方側に位置
して排気ロアを設は高圧放電ランプ4にその長手方向に
沿って対向配置されている。
1 is a housing, and this housing 1 is formed in the shape of an elongated rectangular parallelepiped,
It has an opening 2 on the lower surface and an elongated groove 3 along the longitudinal direction on the upper surface. 4 is a tube-shaped high-pressure discharge lamp; 5 is a reflector having a concave cross-section and transmitting infrared rays and reflecting ultraviolet rays; An exhaust lower is located on the rear side and is arranged opposite to the high pressure discharge lamp 4 along its longitudinal direction.

この反射体5は一対の反射部材8,8で形成され、上端
を筺体1の上面溝部3周縁に設けた支持部9aに固定さ
れているとともに下端を筺体1の下面開口2の周縁に設
けた支持部9bに支持固定され、排気ロアを溝部3に連
通させている。10は透過部材で、この透過部材10は
反射体5の投光開口6を閉塞するようにして配設されて
いる。この透過部材10は気体の流入を遮断し、かつ少
なくとも紫外線を透過する透光板10aと筺体1の下面
開口2端部に設けられた口字形のレールからなる透過部
材取付部に係合され、上記透光板10aを固定する枠体
10bとで構成されている。
This reflector 5 is formed by a pair of reflective members 8, 8, and has an upper end fixed to a support part 9a provided at the periphery of the upper surface groove 3 of the housing 1, and a lower end provided at the periphery of the lower surface opening 2 of the housing 1. It is supported and fixed to the support portion 9b, and communicates the exhaust lower with the groove portion 3. Reference numeral 10 denotes a transmitting member, and this transmitting member 10 is arranged so as to close the light projection opening 6 of the reflector 5. The transparent member 10 is engaged with a transparent plate 10a that blocks the inflow of gas and transmits at least ultraviolet rays, and a transparent member mounting portion consisting of a mouth-shaped rail provided at the end of the lower opening 2 of the housing 1, It is composed of a frame body 10b to which the transparent plate 10a is fixed.

上記透過部材10は、ランプ4管軸方向に動かすことに
よって容易に装置から着脱できる。上記枠体10bの透
光板10aと接する部分は先端がランプ上部を向くよう
な突起10e状となっている。なお、この突起10eは
必ずしも要しない。12.12は反射体5の排気ロアに
連通して設けられた気体流入口で、この気体流入口12
.12は反射体5の投光開口6を挟む両側部に設けられ
ている。本実施例では透光板10aを固定する枠体10
bの側面に離間して設けられた複数個の円孔で形成され
ている。上記気体流入口から流入した気体は、上記枠体
10bの突起10eによって上方向に制御される。
The transmitting member 10 can be easily attached and detached from the device by moving it in the axial direction of the lamp 4 tube. The portion of the frame 10b that contacts the light-transmitting plate 10a has a protrusion 10e shape whose tip faces toward the top of the lamp. Note that this protrusion 10e is not necessarily required. 12.12 is a gas inlet provided in communication with the exhaust lower of the reflector 5;
.. 12 are provided on both sides of the reflector 5 with the light projection opening 6 interposed therebetween. In this embodiment, a frame body 10 for fixing a transparent plate 10a is used.
It is formed of a plurality of circular holes spaced apart from each other on the side surface of b. The gas flowing in from the gas inlet is controlled upward by the protrusion 10e of the frame 10b.

上記高圧放電ランプ4はたとえば鉄系成分を封入したメ
タルハライドランプで、紫外線とともに可視光線および
赤外線をも放射するものを可とする。
The high-pressure discharge lamp 4 is, for example, a metal halide lamp containing an iron-based component, and can emit not only ultraviolet rays but also visible light and infrared rays.

また、上記反射体5は紫外線を反射し、赤外線を透過す
るものでおればよく、たとえば硼珪酸ガラスにて二次曲
面に形成された基体5a内面(高圧放電ランプ4に対向
する側)たとえば酸化チタン(Tie)、酸化ジルコニ
ウム(ZrO2)などからなる高屈折率層と、シリカ(
Si02)、フン化マグネシウム(MgF2 )などか
らなる低屈折率層とを交互に10層〜60数層重層した
多層干渉薄膜5bを蒸着して形成されている。この多層
干渉薄膜5bを形成した反射体5は高圧放電ランプ4か
ら放射される波長的200〜400nmの紫外線を効果
的に投光開口6方向に反射し、波長約700nm以上の
赤外線域を透過させるとともに、一部の可視光線域も透
過させるものでおる。
Further, the reflector 5 may be any material as long as it reflects ultraviolet rays and transmits infrared rays, for example, the inner surface of the base 5a (the side facing the high pressure discharge lamp 4) formed into a quadratic curved surface of borosilicate glass, for example, oxidized A high refractive index layer made of titanium (Tie), zirconium oxide (ZrO2), etc., and silica (
It is formed by depositing a multilayer interference thin film 5b in which 10 to 60 layers of low refractive index layers made of Si02), magnesium fluoride (MgF2), etc. are alternately laminated. The reflector 5 formed with this multilayer interference thin film 5b effectively reflects ultraviolet rays with a wavelength of 200 to 400 nm emitted from the high-pressure discharge lamp 4 in the direction of the projection aperture 6, and transmits infrared rays with a wavelength of about 700 nm or more. At the same time, it also allows some visible light to pass through.

また、透光板10aはたとえば紫外線を透過する石英ガ
ラスからなる基体10cの内面(高圧放電ランプ4に対
向する側)たとえば酸化ジルコニウム(Zr02 )、
、 m化ハフニウム(HfO2)などからなる高屈折率
層と、シリカ(Si02)、フッ化マグネシウム(Mg
F2)などからなる低屈折率層とを交互に10層〜60
数層重層した多層干渉膜10dを蒸着して形成している
。この多層干渉薄膜10(lを形成した透光板10aは
高圧放電ランプ4から放射される波長的200〜400
0mの紫外線域を透過して可視光線を反射するとともに
、一部の赤外線も反射するものである。
The light-transmitting plate 10a includes, for example, an inner surface (the side facing the high-pressure discharge lamp 4) of a base body 10c made of quartz glass that transmits ultraviolet rays, such as zirconium oxide (Zr02),
, a high refractive index layer made of hafnium mide (HfO2), silica (Si02), magnesium fluoride (Mg
10 to 60 layers of low refractive index layers consisting of F2) etc.
A multilayer interference film 10d consisting of several layers is formed by vapor deposition. The light transmitting plate 10a on which the multilayer interference thin film 10 (l) is formed has a wavelength of 200 to 400 emitted from the high pressure discharge lamp 4.
It transmits ultraviolet light at 0 m and reflects visible light, and also reflects some infrared light.

また、筺体1の側面1aおよび上面1bには反射体5の
背面側に位置して気体流通口13a、13bが形成され
ている。そして、反射体5の排気ロアおよび筺体1の上
面1bの気体流通口13bは図示しない排気手段に連通
している。
Furthermore, gas flow ports 13a and 13b are formed on the side surface 1a and the top surface 1b of the housing 1 so as to be located on the back side of the reflector 5. The exhaust lower of the reflector 5 and the gas flow port 13b on the upper surface 1b of the housing 1 communicate with an exhaust means (not shown).

そうして、上記高圧放電ランプ4はアーク長が1 cm
当り90W以上、たとえば120Wで形成され、反射体
5内に没入させた位置で、かつランプ4の管体頂部と反
射体5の排気ロアとの距離りがランプ4の管体の直径り
の0.9である。
Then, the high pressure discharge lamp 4 has an arc length of 1 cm.
The power output is 90W or more, for example 120W, and the distance between the top of the tube of the lamp 4 and the exhaust lower of the reflector 5 is 0. It is .9.

本実施例の作用を説明する。透光部材10を取りはずし
たときは、気体は投光開口6から取入れられる。また透
光部材10を取り着けたときは気体は気体流入口12か
ら取入れられる。
The operation of this embodiment will be explained. When the light transmitting member 10 is removed, gas is taken in through the light projection opening 6. Further, when the transparent member 10 is attached, gas is taken in from the gas inlet 12.

ランプ4の位置すなわち、ランプ管体4の頂部と反射体
5の排気ロアとの距離りがランプ4の管体の直径りの0
.9であるので透光部材10の有無にかかわらず、紫外
線を良好に照射でき、且つ反射体寿命を短くすることが
ない。
The position of the lamp 4, that is, the distance between the top of the lamp tube 4 and the exhaust lower part of the reflector 5 is 0, which is the diameter of the lamp tube 4.
.. 9, regardless of the presence or absence of the light-transmitting member 10, ultraviolet rays can be irradiated well and the life of the reflector will not be shortened.

また、本実施例において、透過部材を取付けた状態で排
itを定めた後、透過部材を取りはずしても排風量は、
0.50m3/分の変化にとどまる。
In addition, in this example, even after the exhaust air is determined with the transparent member attached, the exhaust air volume remains unchanged even if the transparent member is removed.
The change remains at 0.50 m3/min.

すなわち例えば8cm3/分の排ff1iに排気手段を
設定し、透過部材を取付けて使用して、被照射物に応じ
て透過部材を取り去っても排風量は、8,50m3/分
になる程度で、紫外線出力の差も5%程度にとどまるだ
けであり、装置の使用に別設支障はない。逆に排風量を
設定し直す手間をなくすことができる。
That is, for example, even if an exhaust means is set to the exhaust ff1i of 8 cm3/min, a transparent member is attached and used, and the transparent member is removed depending on the object to be irradiated, the exhaust air volume will be about 8.50 m3/min. The difference in ultraviolet light output is only about 5%, so there is no problem with using the device separately. Conversely, it is possible to eliminate the trouble of resetting the exhaust air volume.

第6図に示すものは、本発明の第2の実施例を示し、第
1の実施例と同一部分には同一符号を付して説明は省略
する。
What is shown in FIG. 6 shows a second embodiment of the present invention, and the same parts as in the first embodiment are denoted by the same reference numerals, and the explanation thereof will be omitted.

すなわち、この第2の実施例のものは、流入口22、2
2を透光板10aの面とほぼ同一面に形成したものであ
る。
That is, in this second embodiment, the inflow ports 22, 2
2 is formed on substantially the same surface as the surface of the transparent plate 10a.

そして、このものにおいて、第1の実施例と同様のラン
プを用い、同様の条件で実験を行なったところ、第1の
実施例とほぼ同様の結果が得られた。なお、反射体5を
放物面で形成しランプを焦点に位置させることにより、
広がりがある配光が得られ、また、反則体5をだ円面に
形成しランプを一方の焦点に位置させることにより焦光
形とすることができる。
In this case, an experiment was conducted using the same lamp as in the first example under the same conditions, and almost the same results as in the first example were obtained. In addition, by forming the reflector 5 as a paraboloid and positioning the lamp at the focal point,
A wide light distribution can be obtained, and by forming the refractor 5 in an elliptical shape and positioning the lamp at one focal point, a focal light type can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上詳述したように、本発明によれば、赤外線付部を設
け、ランプの管体風下側と排気口との距離が管体直径の
0.7ないし1.1の範囲内になるように設定したので
、透過部材の有無にかかわらず、しかも排気手段の調整
をしなくてもランプ管体の管壁温度を適正範囲に保持で
き、ランプ管体の失透あるいは極端な紫外線出力の低下
を良好に防止し、反射体の変形を防止できる。すなわち
、本発明の紫外線照射装置を用いれば、紫外線透過部材
を@脱するだけで、様々な被照射物に合った、所望の紫
外線照射を良好に行うことができる。
As detailed above, according to the present invention, the infrared attachment portion is provided so that the distance between the leeward side of the lamp tube and the exhaust port is within the range of 0.7 to 1.1 of the tube diameter. With this setting, the temperature of the tube wall of the lamp tube can be maintained within the appropriate range regardless of the presence or absence of a transparent member and without adjusting the exhaust means, preventing devitrification of the lamp tube or extreme drop in ultraviolet output. This can be effectively prevented and the deformation of the reflector can be prevented. That is, by using the ultraviolet irradiation device of the present invention, desired ultraviolet irradiation suitable for various objects to be irradiated can be performed satisfactorily by simply removing the ultraviolet transmitting member.

は同実施例の縦断面図、第3図および第4図は透過部材
を取付けた場合並びに取りはずした場合の紫外線照射装
置それぞれにおいてランプと反射体との距離を変化させ
た際のランプ管体の温度および反射体温度と排風量との
関係を示す図、第5図は、反射体温度と反射体寿命との
関係を示す図。
is a longitudinal sectional view of the same example, and Figures 3 and 4 are diagrams of the lamp tube body when the distance between the lamp and the reflector is changed in the ultraviolet irradiation device with and without the transmitting member attached and removed, respectively. FIG. 5 is a diagram showing the relationship between temperature and reflector temperature and exhaust air volume; FIG. 5 is a diagram showing the relationship between reflector temperature and reflector life.

第6図は本発明の紫外線照射装置の第2の実施例を示す
縦断面図、第7図は、ランプ管体温度と紫外線出力の関
係を示す図、第8図は、ランプ管体温度とランプ寿命と
の関係を示す図である。
FIG. 6 is a longitudinal sectional view showing the second embodiment of the ultraviolet irradiation device of the present invention, FIG. 7 is a diagram showing the relationship between the lamp body temperature and the ultraviolet output, and FIG. 8 is a diagram showing the relationship between the lamp body temperature and the ultraviolet output. FIG. 3 is a diagram showing the relationship with lamp life.

4・・・高圧放電ランプ、5・・・反射体。4...High pressure discharge lamp, 5...Reflector.

6・・・投光開口、    7・・・排気口。6...Light emission aperture, 7...Exhaust port.

11・・・透過部材取付部 12.12・・・気体流入
口特許出願人   東芝電材株式会社 代理人 弁理士   小野1)芳 弘 第1F’XI 第2図 第3図 う/プ:  8.4KW  (+20W/m)排気f 
                  (mン′分)第
 1 図 340  反射体温度 XIO’(mW肩) う/プ低温部匁度      (℃) 第7図 ランプ高11部温度          (’C)第8
11...Transmission member attachment part 12.12...Gas inlet Patent applicant Toshiba Electric Materials Corporation Agent Patent attorney Ono 1) Yoshihiro 1F'XI Figure 2 Figure 3 U/P: 8.4KW (+20W/m) Exhaust f
(m'min) 1st Fig. 340 Reflector temperature
figure

Claims (1)

【特許請求の範囲】[Claims] (1)下面に方形状の投光開口および最深部近傍に排気
口を有し、赤外線を透過し紫外線を反射する多層干渉膜
を被着した断面凹面状の反射体と;上記反射体に内包さ
れ、上記排気口の下方に、この排気口と管体頂部との距
離が管体直径の0.7ないし1.1の範囲内になるよう
に設けられるアーク長1cm当り90W以上の直管形高
圧放電ランプと;上記投光開口の側部近傍に設けられ、
上記投光開口下に投光開口を通過する紫外線を透過させ
る透過部材を着脱可能に取付ける透過部材取付部と;こ
の透過部材取付部に上記透過部材を取付けたとき、上記
投光開口の側部近傍から上記反射体内に気体を流入する
気体流入口と; 上記ランプ周囲の気体を上記排気口から強制排気させる
排気手段と; を具備することを特徴とする紫外線照射装置。
(1) A reflector with a concave cross section, which has a rectangular light projection opening on the lower surface and an exhaust port near the deepest part, and is coated with a multilayer interference film that transmits infrared rays and reflects ultraviolet rays; A straight pipe type with a power of 90 W or more per 1 cm of arc length, which is installed below the exhaust port so that the distance between the exhaust port and the top of the pipe body is within the range of 0.7 to 1.1 of the pipe diameter. a high-pressure discharge lamp; provided near the side of the light projection opening;
a transmitting member mounting portion for removably attaching a transmitting member that transmits ultraviolet light passing through the light transmitting aperture under the light transmitting aperture; when the transmitting member is attached to the transmitting member mounting portion; An ultraviolet irradiation device characterized by comprising: a gas inlet for flowing gas into the reflector from the vicinity; and exhaust means for forcibly exhausting gas around the lamp from the exhaust port.
JP4791387A 1987-03-03 1987-03-03 Ultraviolet-ray irradiating device Pending JPS63213830A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4791387A JPS63213830A (en) 1987-03-03 1987-03-03 Ultraviolet-ray irradiating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4791387A JPS63213830A (en) 1987-03-03 1987-03-03 Ultraviolet-ray irradiating device

Publications (1)

Publication Number Publication Date
JPS63213830A true JPS63213830A (en) 1988-09-06

Family

ID=12788606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4791387A Pending JPS63213830A (en) 1987-03-03 1987-03-03 Ultraviolet-ray irradiating device

Country Status (1)

Country Link
JP (1) JPS63213830A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186829A (en) * 1984-03-06 1985-09-24 Nippon Kogaku Kk <Nikon> Light source device
JPS6133026B2 (en) * 1976-12-20 1986-07-31 Monsanto Co

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6133026B2 (en) * 1976-12-20 1986-07-31 Monsanto Co
JPS60186829A (en) * 1984-03-06 1985-09-24 Nippon Kogaku Kk <Nikon> Light source device

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