JPS63208208A - Slider material for magnetic disc - Google Patents
Slider material for magnetic discInfo
- Publication number
- JPS63208208A JPS63208208A JP62040314A JP4031487A JPS63208208A JP S63208208 A JPS63208208 A JP S63208208A JP 62040314 A JP62040314 A JP 62040314A JP 4031487 A JP4031487 A JP 4031487A JP S63208208 A JPS63208208 A JP S63208208A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- sliding properties
- disk
- magnetic
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 37
- 239000000843 powder Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 6
- 239000002131 composite material Substances 0.000 abstract description 5
- 239000000314 lubricant Substances 0.000 abstract description 5
- 239000007787 solid Substances 0.000 abstract description 5
- 229910007948 ZrB2 Inorganic materials 0.000 abstract description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 abstract description 2
- 150000004767 nitrides Chemical class 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- 229910020968 MoSi2 Inorganic materials 0.000 abstract 1
- 229910034327 TiC Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910003465 moissanite Inorganic materials 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 4
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000009863 impact test Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000012254 powdered material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Thin Magnetic Films (AREA)
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気ヘッドの構造部品に用いる非磁性材料に係
り、特に、フェライト磁気ヘッドの構成に不可欠のスラ
イダを提供することにある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to nonmagnetic materials used for structural parts of magnetic heads, and in particular, to provide a slider that is essential to the construction of ferrite magnetic heads.
磁気ディスク記憶装置において、スライダ部、すなわち
、薄膜磁気ヘッドはディスクよりわずかに浮上させた状
態で使用する方式が大部分である。In most magnetic disk storage devices, a slider section, that is, a thin film magnetic head, is used in a state slightly floating above the disk.
そのため、磁気へラドスライダは急速で回転するディス
クとの接触も避けられない。すなわち、磁気記録密度の
増大化に伴い、スライダ材の浮上量をより一層近づける
必要が生じてきたためである。Therefore, the magnetic herad slider cannot avoid contact with the rapidly rotating disk. That is, with the increase in magnetic recording density, it has become necessary to make the flying height of the slider material even closer.
浮上量の減少によりディスクとスライダの接触の機会が
多くなってくる。とくに、ディスクの回転初期、及び、
停止時には両者の接触力が大きくなる。この結果、読み
とり不能の事故、いわゆる、クラッシュが生じてしまう
。従って薄膜磁気ヘッドのスライダ材料に要求される特
性の一つはディスクに対して摺動性の良い材料であるこ
とである。As the flying height decreases, the chances of contact between the disk and the slider increase. Especially at the beginning of the rotation of the disk and
When stopped, the contact force between the two increases. As a result, unreadable accidents, so-called crashes, occur. Therefore, one of the characteristics required of the slider material of a thin film magnetic head is that the material has good sliding properties against the disk.
従来のスライダ材は浮上量が大きいためにこの考慮がさ
れていないものが多い。従来のもの、例えば、硬い材料
ではディスク側を、また軟かい場合はスライダ自身の摩
耗が大きく寿命が短い、同等の硬さをもったものでもな
じみ等が問題であり、ディスク、スライダ共に摩耗して
しまうため長寿命化は図れない欠点がある。スライダは
非磁性でなければならないため、各種の酸化物、炭化物
等が提供されている。これらはいずれも粉末状のものを
成形、焼結することにより作製される。この場合、焼結
体の密度が上がらず、気孔等があると強度が弱く、また
、洗條液等の吸収、排出をくり返すので好ましくない。Many conventional slider materials do not take this into account because of their large flying height. Conventional products, for example, have hard materials that cause wear on the disk side, and soft materials that cause wear and tear on the slider itself, shortening its lifespan.Even with materials of the same hardness, there are problems with conformation, and both the disk and slider wear out. This has the disadvantage that it is not possible to achieve a long life. Since the slider must be non-magnetic, various oxides, carbides, etc. are provided. All of these are produced by molding and sintering powdered materials. In this case, the density of the sintered body does not increase, and if there are pores, the strength becomes weak, and cleaning liquid etc. are absorbed and discharged repeatedly, which is not preferable.
また、スライダは２〜３聞と非常に小さいため加工性も
問題となる。酸化物、炭化物は一般的に硬い材料であり
、また、加工性も劣る。そのため特公昭５８−５４７０
号公報ではＡ Ｑ ｚ○５−ＴｉＣで加工性のすぐれた
材料を提供している。しかし、この材料は耐摩耗性、加
工性はすぐれているが摺動性が問題であり、完全なもの
とはなっていない。ディスクの摩耗が大きく。In addition, since the slider is very small with only 2 to 3 holes, workability is also a problem. Oxides and carbides are generally hard materials and have poor workability. For this reason, the special public official 58-5470
The publication provides AQz○5-TiC, a material with excellent workability. However, although this material has excellent wear resistance and workability, sliding properties are a problem, and it is not perfect. Disc wear is significant.
また、与えるダメージも大きい。It also deals a lot of damage.
前述のように磁気ヘッドが開発された当初はスライダ材
も従来のもので十分であった。しかし。As mentioned above, when magnetic heads were first developed, conventional slider materials were sufficient. but.
高性能化してきた現在は種々の問題が生じてきた。Now that performance has improved, various problems have arisen.
とくに、ディスクとスライダの摺動性が寿命を大きく左
右する因子となっている。そこで、本発明者らは従来か
ら提供されている。スライダ材の摺動性を良くすること
を検討した。In particular, the sliding properties of the disk and slider are a factor that greatly influences the lifespan. Therefore, the present inventors have conventionally provided a method. We considered improving the sliding properties of the slider material.
本発明者らは前述の問題点につき検討を加えた結果、本
発明に至った。その骨子は従来より知られているスライ
ダ材に固体潤滑剤であるＢＮ。The present inventors have studied the above-mentioned problems and have arrived at the present invention. The basic idea is to use BN, a solid lubricant, in the conventionally known slider material.
８４Ｃを少量添加含有させることにある。The purpose is to add and contain a small amount of 84C.
本発明の目的を達するために、スライダ材料の母材には
非磁性の酸化物、炭化物、窒化物および硼化物の焼結体
を使用する。また上記２〜３の複合焼結体でもその効果
は変らない。とくにＡＱ２０ｓ＋Ａ Ｑ ２０ａ−Ｔｉ
Ｃ，Ｚｒ０ｚ 、Ｔｉ０ｚ 、ＳｉＣ。To achieve the object of the present invention, sintered bodies of non-magnetic oxides, carbides, nitrides and borides are used as the base material of the slider material. Further, the above-mentioned composite sintered bodies 2 and 3 have the same effect. Especially AQ20s+AQ20a-Ti
C, Zr0z, Ti0z, SiC.
Ｍ ｏ Ｓ ｉ ｚおよびＺｒＢ２母材の場合にすぐれ
た性能を発揮する。この母材に摺動性を持たせるために
複合化する固体潤滑剤としてはＢ４Ｃ、ＢＮおよびＣを
５〜３０％が適当である。なお、８４Ｃ単独ではち密な
焼結体を得ることはむづかしい。It exhibits excellent performance in the case of M o S i z and ZrB2 matrix. A suitable solid lubricant to be combined to impart sliding properties to this base material is 5 to 30% of B4C, BN and C. Note that it is difficult to obtain a dense sintered body using 84C alone.
また、ＢＮおよびＣはち密化できないばかりでなく、軟
いため摩耗がはげしくディスクをよごしてしまう欠点が
あるため、単独では使用することができない。複合化す
ることによりスライダ材料としてすぐれた性能を発揮す
ることができる。In addition, BN and C cannot be used alone because they cannot be densified and are too soft to wear and stain the disk. By combining them, they can exhibit excellent performance as a slider material.
以下本発明の実施例について述べる。 Examples of the present invention will be described below.
〈実施例１〉
平均粒径１．０ ｐｍのＴ ｉ Ｃ３０ｖ ｏ Ｑ
／ Ｏと平均粒径１．０μｍのＢａＣと残部平均粒径０
．５μｍのＡｕｚＯａ粉末をらいかい機で十分に混合し
た。Ｂ４Ｃの添加量４：！０，２．５ ．５，１０゜２
０．３０，３５および４０ ｖ ｏ Ｉｔ ／ Ｏとし
た。<Example 1> T i C30v o Q with an average particle size of 1.0 pm
/ O and BaC with an average particle size of 1.0 μm and the remainder with an average particle size of 0
．． 5 μm AuzOa powder was thoroughly mixed using a sieve machine. B4C addition amount 4:! 0.2.5. 5,10゜2
0.30, 35 and 40 v o It/O.
この混合粉末をプレスで１ｔｏｎ／ａ＃加圧して厚さ６
ｍｍ、直径７０ａｅ＋のグリンボデを作製した。これを
黒鉛ダイスを用いたホットプレスにセットして真空中で
３００ｋｇ／ａＪの加圧をしながら最高加熱温度１６０
０℃で焼結した。得られた焼結体より磁気へラドスライ
ダを作製し、摺動試験を行った。摺動試験は金属アルミ
製円板に磁気記録媒体粉（ｒ−ＦｅｚＯａ）とアルミナ
フィラを樹脂で混合した物質を塗布した磁気記録ディス
クを用いて行った。方法は振動打撃試験法と呼ばれるも
ので、磁気特性の摺動時間に対する出力残存率を測定し
た。試験条件は周速２４．５ｍ／ｓ、振動打撃周波数５
４Ｈｚ、打撃時の最大加速度７００Ｇである６結果を第
１図に示す。基体組成は後述するがＡＱｚＯｓ−３０ｖ
ｏ Ｑ１０にＢ４Ｃ無添加と２．５〜４０ ｖ ｏ Ｑ
／ Ｏ添加したスライダ材について行った。無添加及
び２，５ｖｏＱ１０ 添加ではその効果が認められない
が、５ ｖ ｏ Ｑ ／ ０以上添加ではすぐれた効果
を示した０表１は第１図に示したスライダ材の相対密度
を示す。Press this mixed powder with a press to a thickness of 6 ton/a#.
A green body with a diameter of 70 ae+ was prepared. This was set in a hot press using a graphite die, and the maximum heating temperature was 160 while applying pressure of 300 kg/aJ in a vacuum.
Sintered at 0°C. A magnetic RAD slider was made from the obtained sintered body, and a sliding test was conducted. The sliding test was conducted using a magnetic recording disk in which a mixture of magnetic recording medium powder (r-FezOa) and alumina filler with a resin was coated on a metal aluminum disk. The method used was called the vibration impact test method, and the output residual rate against the sliding time of the magnetic properties was measured. The test conditions were a peripheral speed of 24.5 m/s and a vibration impact frequency of 5.
FIG. 1 shows six results with a maximum acceleration of 700 G at 4 Hz and impact. The substrate composition will be described later, but it is AQzOs-30v.
o Q10 with no B4C added and 2.5 to 40 v o Q
/ O was added to the slider material. No such effect was observed with no additives or with the addition of 2,5voQ10, but an excellent effect was observed with the addition of 5voQ/0 or more.Table 1 shows the relative densities of the slider materials shown in FIG.
［
８４Ｃ添加により摺動性はすぐれるが３５ｖｏｍ八以上
添加すると密度の低下を招き好ましくない。[Addition of 84C improves sliding properties, but addition of 35vom or more leads to a decrease in density, which is not preferable.
すなわち、強度の低下、また、多孔質であるため液体状
の異物の混入等の問題が生じるためである６そのためＢ
４Ｃの適量は５〜３０ ｖ ｏ Ｑ ／ Ｏの範囲でな
ければならず、とくに２０ ｖ ｏ Ｑ ／ Ｏが良い
。In other words, problems such as a decrease in strength and the contamination of liquid foreign matter due to the porous nature of B.
The appropriate amount of 4C should be in the range of 5-30 vo Q/O, especially 20 vo Q/O.
〈実施例２〉
実施例１と同様にしてＡｆｉｚＯｓ−２０ｖｏｆ１１０
Ｂ４ＣにＴｉＣを０，５，１０，３０，４０及び５
０ ｖ ｏ Ｑ ／ Ｏ添加した複合焼結体を作製し加
工性試験を行った。加工性評価は研削抵抗とチッピング
の合計長さを求めた。表２にその結果を示す。<Example 2> In the same manner as in Example 1, AfizOs-20vof110
TiC in B4C 0, 5, 10, 30, 40 and 5
A composite sintered body containing 0 v o Q/O was prepared and a workability test was conducted. For workability evaluation, the total length of grinding resistance and chipping was determined. Table 2 shows the results.
ＴｉＣ添加量が増加するにつれて研削抵抗は大きくなる
が、チッピングは小さくなる。しかしＴｉＣが４０ ｖ
ｏ ｎ ／ Ｏを越えると研削抵抗が著しく大きくな
り実用上好ましくない。一方、ＴｉＣ添加量が少いとチ
ッピングが、若干、大きくなるが、実用上大きな妨げと
はならない。ＡＱｚＯｓ２０ｖｏｆｉ１０ ＢａＣに
加工性の改良のため１０〜４０ｖｏＥＩ１０ ＴｉＣ
添加することによりチッピングの量を少くすることがで
きる。As the amount of TiC added increases, the grinding resistance increases, but chipping decreases. But TiC is 40v
If it exceeds on/o, the grinding resistance becomes significantly large, which is not practical. On the other hand, if the amount of TiC added is small, chipping will increase slightly, but this will not be a major hindrance in practical use. AQzOs20vofi10 BaC with 10~40voEI10 TiC for improving processability
By adding it, the amount of chipping can be reduced.
〈実施例３〉
実施例１と同様にＡＱｚＯａ−３０ｖｏｆｉ１０ＴｉＣ
に２．５，５．０，１０，２０，３０．３５及び４０
ｖ ｏ Ｑ ／ ＯＢ Ｎを添加した複合焼結体を作製
した。実施例１と同様に磁気へラドスライダを作製し摺
動試験を行った。第１図とほぼ同じ傾向を示し、ＢａＣ
添加と同様の摺動性を示した。<Example 3> Similar to Example 1, AQzOa-30vofi10TiC
2.5, 5.0, 10, 20, 30.35 and 40
A composite sintered body to which v o Q / OBN was added was produced. A magnetic RAD slider was produced in the same manner as in Example 1, and a sliding test was conducted. It shows almost the same tendency as Fig. 1, and BaC
It showed the same sliding properties as the additive.
また、３５ ｖ ｏ ｆｌ ／ Ｏ以上ＢＮを添加する
と密度が著しく低下するため５〜３０ｖｏＱ１０ Ｂ
Ｎ添加がスライダ材としては適量である。In addition, if BN is added in excess of 35 v o fl / O, the density will drop significantly, so 5 to 30 vo Q10 B
The amount of N added is appropriate for a slider material.
同様にＣ粉末添加複合焼結体についても行ったが５〜３
０ｖｏｆｉ／ＱＣ添加がスライダ材料としてすぐれた摺
動性を示した。The same procedure was carried out for the C powder-added composite sintered body, but 5-3
Addition of 0 vofi/QC showed excellent sliding properties as a slider material.
〈実施例４〉
実施例１と同様に各種の焼結体を作製した。この焼結体
よりスライダを作製し塗布磁気ディスクを用いて振動打
撃試験を行った。表３にその結果を示す、比較材に比べ
本発明材はすぐれた性能を〈実施例５〉
実施例１と同様に添加する固体潤滑剤ＢａＣ及び母材の
ＡＱｚＯｓの粒径の異った焼結体を作製し。<Example 4> Various sintered bodies were produced in the same manner as in Example 1. A slider was made from this sintered body and subjected to a vibration impact test using a coated magnetic disk. The results are shown in Table 3. The material of the present invention has superior performance compared to the comparative material. Create a body.
加工性の検討を行った。表２に示すように５．０μｍま
では良好な結果が得られるが、７．５ μｍを越えると
チッピングが大きくなる。このため摺動性向上のため添
加するＢ４Ｃは５μｍ以下でなければならない。ＢＮ及
びＣについても同様な結果が得られた。Workability was investigated. As shown in Table 2, good results are obtained up to 5.0 μm, but chipping becomes large when the thickness exceeds 7.5 μm. Therefore, in order to improve sliding properties, the B4C added must have a thickness of 5 μm or less. Similar results were obtained for BN and C.
〈実施例６〉
第２図に示す磁気へラドスライダを各種材料を用いて作
製した。これを磁気ディスク（ＦｅｚＯａとＡＱｚＯａ
フィラーを用いた塗布ディスク）を用いて摺動特性の評
価を行った。評価はディスクの回転の起動及び停止時に
ヘッドとディスクが過渡的に摺動する。いわゆる、コン
タクト・スタート・ストップ（ＣＳＳ）によって行った
。Ｃ８Ｓは周速５０ｍ／ｓで行い、クラッシュまでの回
数、すなわち、ＳＣＣ寿命を求めた。その結果を表４に
示す。<Example 6> A magnetic herad slider shown in FIG. 2 was manufactured using various materials. This is connected to magnetic disks (FezOa and AQzOa
The sliding characteristics were evaluated using a coated disk using a filler. The evaluation involves transient sliding between the head and the disk when the disk starts and stops rotating. This was done by so-called contact start-stop (CSS). C8S was performed at a circumferential speed of 50 m/s, and the number of times until a crash, that is, the SCC life was determined. The results are shown in Table 4.
本発明材を用いたスライダはいずれも比較材に比ベニ倍
以上の寿命を示した。All sliders using the material of the present invention had a lifespan more than twice that of the comparative material.
本発明のよれば固体潤滑剤ＢａＣ，ＢＮ及びＣ添加のス
ライダはすぐれた摺動性を示し、ＳＣＣ寿令が長い。従
って磁気ディスクが長期にわたつて性能低下のない安定
した製品を生産することができる。According to the present invention, a slider containing solid lubricants BaC, BN, and C exhibits excellent sliding properties and has a long SCC life. Therefore, it is possible to produce products whose magnetic disks are stable over a long period of time without deterioration in performance.
Claims (1)
＿２、ＴｉＯ＿２、ＳｉＣ、ＭｏＳｉ＿２およびＺｒＢ
＿２にＢ＿４Ｃ、ＢＮおよびＣを添加することを特徴と
する磁気ディスク用スライダ材。 ２、特許請求の範囲第１項において、 添加するＢ＿４Ｃ、ＢＮ及びＣは５〜３０体積％である
ことを特徴とする磁気ディスク用スライダー材。 ３、特許請求の範囲第１項または第２項において、出発
原料粉径はいずれも５μｍ以下であることを特徴とする
磁気ディスク用スライダー材。[Claims] 1. Al_2O_3, Al_2O_3-TiC, ZrO
_2, TiO_2, SiC, MoSi_2 and ZrB
A slider material for a magnetic disk characterized by adding B_4C, BN and C to_2. 2. The slider material for a magnetic disk according to claim 1, wherein the amount of B_4C, BN, and C added is 5 to 30% by volume. 3. A slider material for a magnetic disk according to claim 1 or 2, characterized in that each of the starting raw material powders has a diameter of 5 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62040314A JPS63208208A (en) | 1987-02-25 | 1987-02-25 | Slider material for magnetic disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62040314A JPS63208208A (en) | 1987-02-25 | 1987-02-25 | Slider material for magnetic disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63208208A true JPS63208208A (en) | 1988-08-29 |
Family
ID=12577154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62040314A Pending JPS63208208A (en) | 1987-02-25 | 1987-02-25 | Slider material for magnetic disc |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63208208A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01320254A (en) * | 1988-06-22 | 1989-12-26 | Kao Corp | Ceramic-carbon based composite material and its production |
| US5061576A (en) * | 1988-12-27 | 1991-10-29 | Fuji Photo Film Co., Ltd. | Thin film magnetic head |
| US5323283A (en) * | 1991-03-29 | 1994-06-21 | Minebea Co., Ltd. | Floating magnetic head slider |
| US7345849B2 (en) | 2004-06-30 | 2008-03-18 | Tdk Corporation | Magnetic head slider material, magnetic head slider, and method of manufacturing magnetic head slider material |
-
1987
- 1987-02-25 JP JP62040314A patent/JPS63208208A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01320254A (en) * | 1988-06-22 | 1989-12-26 | Kao Corp | Ceramic-carbon based composite material and its production |
| US5061576A (en) * | 1988-12-27 | 1991-10-29 | Fuji Photo Film Co., Ltd. | Thin film magnetic head |
| US5323283A (en) * | 1991-03-29 | 1994-06-21 | Minebea Co., Ltd. | Floating magnetic head slider |
| US7345849B2 (en) | 2004-06-30 | 2008-03-18 | Tdk Corporation | Magnetic head slider material, magnetic head slider, and method of manufacturing magnetic head slider material |
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