JPS63207615A - インゴツト切断装置 - Google Patents

インゴツト切断装置

Info

Publication number
JPS63207615A
JPS63207615A JP62040765A JP4076587A JPS63207615A JP S63207615 A JPS63207615 A JP S63207615A JP 62040765 A JP62040765 A JP 62040765A JP 4076587 A JP4076587 A JP 4076587A JP S63207615 A JPS63207615 A JP S63207615A
Authority
JP
Japan
Prior art keywords
ingot
cutting
wafer
vacuum
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62040765A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0469529B2 (enrdf_load_stackoverflow
Inventor
本田　勝男
修一 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP62040765A priority Critical patent/JPS63207615A/ja
Priority to US07/156,748 priority patent/US4903681A/en
Priority to EP19880102589 priority patent/EP0280245B1/en
Priority to DE88102589T priority patent/DE3883804T2/de
Priority to KR1019880001932A priority patent/KR930005466B1/ko
Publication of JPS63207615A publication Critical patent/JPS63207615A/ja
Publication of JPH0469529B2 publication Critical patent/JPH0469529B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Jigs For Machine Tools (AREA)
JP62040765A 1987-02-24 1987-02-24 インゴツト切断装置 Granted JPS63207615A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62040765A JPS63207615A (ja) 1987-02-24 1987-02-24 インゴツト切断装置
US07/156,748 US4903681A (en) 1987-02-24 1988-02-18 Method and apparatus for cutting a cylindrical material
EP19880102589 EP0280245B1 (en) 1987-02-24 1988-02-22 Method and apparatus for cutting a cylindrical material
DE88102589T DE3883804T2 (de) 1987-02-24 1988-02-22 Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials.
KR1019880001932A KR930005466B1 (ko) 1987-02-24 1988-02-24 원통형재료의 절단방법 및 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62040765A JPS63207615A (ja) 1987-02-24 1987-02-24 インゴツト切断装置

Publications (2)

Publication Number Publication Date
JPS63207615A true JPS63207615A (ja) 1988-08-29
JPH0469529B2 JPH0469529B2 (enrdf_load_stackoverflow) 1992-11-06

Family

ID=12589720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62040765A Granted JPS63207615A (ja) 1987-02-24 1987-02-24 インゴツト切断装置

Country Status (1)

Country Link
JP (1) JPS63207615A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005028172A1 (ja) * 2003-09-24 2005-03-31 Mitsuboshi Diamond Industrial Co., Ltd. 基板分断システム、基板製造装置および基板分断方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005028172A1 (ja) * 2003-09-24 2005-03-31 Mitsuboshi Diamond Industrial Co., Ltd. 基板分断システム、基板製造装置および基板分断方法

Also Published As

Publication number Publication date
JPH0469529B2 (enrdf_load_stackoverflow) 1992-11-06

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