JPS63204049A - Clean room - Google Patents
Clean roomInfo
- Publication number
- JPS63204049A JPS63204049A JP3642387A JP3642387A JPS63204049A JP S63204049 A JPS63204049 A JP S63204049A JP 3642387 A JP3642387 A JP 3642387A JP 3642387 A JP3642387 A JP 3642387A JP S63204049 A JPS63204049 A JP S63204049A
- Authority
- JP
- Japan
- Prior art keywords
- air
- air conditioning
- shutter
- airflow
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004378 air conditioning Methods 0.000 claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000001105 regulatory effect Effects 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 1
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、全面フィルタ方式のクリーンルームに関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a clean room with a full-surface filter system.
全面フィルタ方式のクリーンルーム内、ルーム天井全面
に空調フィルタを設けて、空気をフィルタを介してルー
ムに尋き、床面から流出させている。従来、この種の空
調フィルタは、特別に風量を自在に調整できる機構を有
していなかった。Inside the clean room, which uses a full-filter system, an air-conditioning filter is installed on the entire ceiling of the room, allowing air to enter the room through the filter and flow out from the floor. Conventionally, this type of air conditioning filter did not have a special mechanism for freely adjusting the air volume.
通常、クリーンルームは、生産上の考慮からルームの全
面を一様な風量とせず、例えば生産ラインと通路とを区
別し、前者に大風量型の空調フィルタ、後者に小風量型
の空調フィルタとを使いわけて、設置することで風量の
調整をしていた。そのため、生産レイアラトラ変化する
場合には、空調フィルタを交換する必要が生じ、工期が
長くなり工数も多いという欠点がある。Normally, a clean room does not have a uniform air volume over the entire surface of the room due to production considerations. For example, the production line and aisles are differentiated, and a large air volume type air conditioning filter is installed in the former, and a small air volume type air conditioning filter is installed in the latter. The air volume was adjusted by using and installing them differently. Therefore, when the production layout changes, it becomes necessary to replace the air conditioning filter, which has the disadvantage that the construction period is long and the number of man-hours is large.
また交換の際は、空調停止を行なわなければならず、そ
の間生産ラインを停止するという欠点もある。Another disadvantage is that during replacement, the air conditioning must be stopped, and the production line must be stopped during this time.
本発明の目的は、上記の欠点を除去し、クリーンルーム
内のレイアウト変更の際に、任意に特定個所のm、量を
調整できるクリーンルームを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and to provide a clean room in which the m and amount of specific parts can be arbitrarily adjusted when changing the layout within the clean room.
本発明によるクリーンルームは、ルームに全面的に設け
た空調フィルタの少なくとも一部分が風量調整可能なシ
ャッタを有するようにしたものである。In the clean room according to the present invention, at least a portion of the air conditioning filter provided throughout the room has a shutter that can adjust the air volume.
こ〜で、前記シャッタを空調フィルタ全面に設ければ、
レイアウトの自由度は最大になるが、レイアウトの変更
が将来考えられる範囲内にかぎってシャッタを設けるよ
うにしてもよい。Now, if the shutter is installed on the entire surface of the air conditioning filter,
Although the degree of freedom in layout is maximized, the shutter may be provided only to the extent that changes in the layout can be considered in the future.
以下、本発明の一実施例について図面を参照して説明す
る。第1図は全面フィルタ方式のクリーンルームの空調
フィルタ設置断面図である。An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of an air conditioning filter installed in a clean room with a full-surface filter system.
空調フィルタ1を構成する空調フィルタ11 、12゜
13は、風量調査可能なものであって、図に示すように
生産ラインに位置する空調フィルタ11゜13i−11
:、通路に位置する空調フィルタ12より風量音大きく
するように調整しである。The air conditioning filters 11 and 12゜13 constituting the air conditioning filter 1 are those that can be used for air flow investigation, and as shown in the figure, the air conditioning filters 11゜13i-11 located on the production line
: The airflow volume is adjusted to be louder than the air conditioning filter 12 located in the passage.
第2図は、上記空調フィルタ11 、12 、13の断
面図である。上部に固定シャッタ2を設けて、風量調整
ネジ4を回すとシャフト5で連結するギヤ6が回り、ラ
ック7が左右に動き、これと連結する可動シャッタ3も
左右に動いてシャッタの開口率が変化するので、上流の
矢印Aの風がフィルタ部材を通過する量を調整されて、
下流の矢印Bの風となる。なお、Oリング8は、上流の
風がシャフト5のすき間からリークしないように設けた
ものである。FIG. 2 is a sectional view of the air conditioning filters 11, 12, and 13. A fixed shutter 2 is provided at the top, and when the air volume adjustment screw 4 is turned, a gear 6 connected by a shaft 5 turns, the rack 7 moves left and right, and the movable shutter 3 connected to it also moves left and right, so that the aperture ratio of the shutter is adjusted. Since the amount of wind passing through the filter member as indicated by the upstream arrow A is adjusted,
It becomes the wind of arrow B downstream. Note that the O-ring 8 is provided to prevent upstream wind from leaking through the gap in the shaft 5.
以上、説明したように、本発明の全面フィルタ方式のク
リーンルームは、その全部あるいは一部の空調フィルタ
に風量調整シャッタを取付けることによって、クリーン
ルーム内で必要なエリアに必要な風景だけの風を送る調
整が簡単にできるようになっている。As explained above, the clean room with the full filter system of the present invention can be adjusted to send only the necessary scenery to the necessary areas in the clean room by attaching air volume adjustment shutters to all or part of the air conditioning filters. can be done easily.
このため、レイアウト変更に伴なう空調停止。As a result, air conditioning was stopped due to layout changes.
生産ラインの停止が必要でないから、生産効率の向上に
効果が大きい。Since there is no need to stop the production line, it is highly effective in improving production efficiency.
図面は実施例に係り、第1図はクリーンルームの断面図
、第2図は風量調整可能なシャッタを有する空調フィル
タの断面図である。
1 、11 、12 、13・・・空調フィルタ、2・
・・固定シャッタ、 3・・・可動シャッタ、4・・
・風量調整ネジ、 5・・・シャフト、6・・・ギヤ
、 7・・・ラック、8・・・0リング。
第1図
1産フィシ i五 ξ& 生皮ライシーーーーー
ーーー−−−−−−一一−一一床面第2図The drawings relate to embodiments, and FIG. 1 is a sectional view of a clean room, and FIG. 2 is a sectional view of an air conditioning filter having a shutter capable of adjusting air volume. 1, 11, 12, 13...Air conditioning filter, 2.
・・Fixed shutter, 3・・Movable shutter, 4・・
・Air volume adjustment screw, 5...shaft, 6...gear, 7...rack, 8...0 ring. Fig. 1 1-product fish i5 ξ & rawhide rice ------- 11-11 floor surface Fig. 2
Claims (1)
フィルタの少なくとも一部分が風量調整可能なシャッタ
を有することを特徴とするクリーンルーム。1. A clean room of full-surface filter type, characterized in that at least a portion of the air conditioning filter has a shutter whose air volume can be adjusted.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3642387A JPS63204049A (en) | 1987-02-18 | 1987-02-18 | Clean room |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3642387A JPS63204049A (en) | 1987-02-18 | 1987-02-18 | Clean room |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63204049A true JPS63204049A (en) | 1988-08-23 |
Family
ID=12469415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3642387A Pending JPS63204049A (en) | 1987-02-18 | 1987-02-18 | Clean room |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63204049A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5984775A (en) * | 1996-10-28 | 1999-11-16 | Samsung Electronics Co., Ltd. | Grating and shutter apparatus for controlling air flow |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5183277A (en) * | 1974-12-05 | 1976-07-21 | Flanders Filters | Ea fuirutano ryuryoseigyosochi |
JPS635324B2 (en) * | 1982-09-10 | 1988-02-03 | Central Glass Co Ltd |
-
1987
- 1987-02-18 JP JP3642387A patent/JPS63204049A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5183277A (en) * | 1974-12-05 | 1976-07-21 | Flanders Filters | Ea fuirutano ryuryoseigyosochi |
JPS635324B2 (en) * | 1982-09-10 | 1988-02-03 | Central Glass Co Ltd |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5984775A (en) * | 1996-10-28 | 1999-11-16 | Samsung Electronics Co., Ltd. | Grating and shutter apparatus for controlling air flow |
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