JPS63204049A - Clean room - Google Patents

Clean room

Info

Publication number
JPS63204049A
JPS63204049A JP3642387A JP3642387A JPS63204049A JP S63204049 A JPS63204049 A JP S63204049A JP 3642387 A JP3642387 A JP 3642387A JP 3642387 A JP3642387 A JP 3642387A JP S63204049 A JPS63204049 A JP S63204049A
Authority
JP
Japan
Prior art keywords
air
air conditioning
shutter
airflow
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3642387A
Other languages
Japanese (ja)
Inventor
Hideji Yoshida
秀治 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP3642387A priority Critical patent/JPS63204049A/en
Publication of JPS63204049A publication Critical patent/JPS63204049A/en
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

PURPOSE:To enable simple regulation of an airflow of air to a value necessary to a necessary area in a room, by s method wherein an airflow regulating shutter is mounted to all or a part of air conditioning filters in a clean room. CONSTITUTION:Air conditioning filters 11, 12, and 13, with which an air conditioning filter 1 is formed, are capable of airflow regulation. The air-conditioning filters 11 and 13 positioned on 8 production line are regulated so that the airflow thereof is increased over that of the air-conditioning filter 12 positioned in a passage. A stationary shutter 2 is located above the air conditioning filters, with an airflow regulating screw 4 rotated, a gear 6 connected to the screw through a shaft 5 is rotated, a rack 7 is moved laterally, and a moving shutter 3 coupled with the rack is also moved lateral to change the numerical aperture of the shutter. In which case, a quantity of air in the direction of an arrow mark A passing a filter member is regulated, and produces air in the direction of an arrow mark B on the downstream side.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、全面フィルタ方式のクリーンルームに関する
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a clean room with a full-surface filter system.

〔従来の技術〕[Conventional technology]

全面フィルタ方式のクリーンルーム内、ルーム天井全面
に空調フィルタを設けて、空気をフィルタを介してルー
ムに尋き、床面から流出させている。従来、この種の空
調フィルタは、特別に風量を自在に調整できる機構を有
していなかった。
Inside the clean room, which uses a full-filter system, an air-conditioning filter is installed on the entire ceiling of the room, allowing air to enter the room through the filter and flow out from the floor. Conventionally, this type of air conditioning filter did not have a special mechanism for freely adjusting the air volume.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

通常、クリーンルームは、生産上の考慮からルームの全
面を一様な風量とせず、例えば生産ラインと通路とを区
別し、前者に大風量型の空調フィルタ、後者に小風量型
の空調フィルタとを使いわけて、設置することで風量の
調整をしていた。そのため、生産レイアラトラ変化する
場合には、空調フィルタを交換する必要が生じ、工期が
長くなり工数も多いという欠点がある。
Normally, a clean room does not have a uniform air volume over the entire surface of the room due to production considerations. For example, the production line and aisles are differentiated, and a large air volume type air conditioning filter is installed in the former, and a small air volume type air conditioning filter is installed in the latter. The air volume was adjusted by using and installing them differently. Therefore, when the production layout changes, it becomes necessary to replace the air conditioning filter, which has the disadvantage that the construction period is long and the number of man-hours is large.

また交換の際は、空調停止を行なわなければならず、そ
の間生産ラインを停止するという欠点もある。
Another disadvantage is that during replacement, the air conditioning must be stopped, and the production line must be stopped during this time.

本発明の目的は、上記の欠点を除去し、クリーンルーム
内のレイアウト変更の際に、任意に特定個所のm、量を
調整できるクリーンルームを提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and to provide a clean room in which the m and amount of specific parts can be arbitrarily adjusted when changing the layout within the clean room.

〔問題点を解決するための手段〕[Means for solving problems]

本発明によるクリーンルームは、ルームに全面的に設け
た空調フィルタの少なくとも一部分が風量調整可能なシ
ャッタを有するようにしたものである。
In the clean room according to the present invention, at least a portion of the air conditioning filter provided throughout the room has a shutter that can adjust the air volume.

こ〜で、前記シャッタを空調フィルタ全面に設ければ、
レイアウトの自由度は最大になるが、レイアウトの変更
が将来考えられる範囲内にかぎってシャッタを設けるよ
うにしてもよい。
Now, if the shutter is installed on the entire surface of the air conditioning filter,
Although the degree of freedom in layout is maximized, the shutter may be provided only to the extent that changes in the layout can be considered in the future.

〔実施例〕〔Example〕

以下、本発明の一実施例について図面を参照して説明す
る。第1図は全面フィルタ方式のクリーンルームの空調
フィルタ設置断面図である。
An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view of an air conditioning filter installed in a clean room with a full-surface filter system.

空調フィルタ1を構成する空調フィルタ11 、12゜
13は、風量調査可能なものであって、図に示すように
生産ラインに位置する空調フィルタ11゜13i−11
:、通路に位置する空調フィルタ12より風量音大きく
するように調整しである。
The air conditioning filters 11 and 12゜13 constituting the air conditioning filter 1 are those that can be used for air flow investigation, and as shown in the figure, the air conditioning filters 11゜13i-11 located on the production line
: The airflow volume is adjusted to be louder than the air conditioning filter 12 located in the passage.

第2図は、上記空調フィルタ11 、12 、13の断
面図である。上部に固定シャッタ2を設けて、風量調整
ネジ4を回すとシャフト5で連結するギヤ6が回り、ラ
ック7が左右に動き、これと連結する可動シャッタ3も
左右に動いてシャッタの開口率が変化するので、上流の
矢印Aの風がフィルタ部材を通過する量を調整されて、
下流の矢印Bの風となる。なお、Oリング8は、上流の
風がシャフト5のすき間からリークしないように設けた
ものである。
FIG. 2 is a sectional view of the air conditioning filters 11, 12, and 13. A fixed shutter 2 is provided at the top, and when the air volume adjustment screw 4 is turned, a gear 6 connected by a shaft 5 turns, the rack 7 moves left and right, and the movable shutter 3 connected to it also moves left and right, so that the aperture ratio of the shutter is adjusted. Since the amount of wind passing through the filter member as indicated by the upstream arrow A is adjusted,
It becomes the wind of arrow B downstream. Note that the O-ring 8 is provided to prevent upstream wind from leaking through the gap in the shaft 5.

〔発明の効果〕〔Effect of the invention〕

以上、説明したように、本発明の全面フィルタ方式のク
リーンルームは、その全部あるいは一部の空調フィルタ
に風量調整シャッタを取付けることによって、クリーン
ルーム内で必要なエリアに必要な風景だけの風を送る調
整が簡単にできるようになっている。
As explained above, the clean room with the full filter system of the present invention can be adjusted to send only the necessary scenery to the necessary areas in the clean room by attaching air volume adjustment shutters to all or part of the air conditioning filters. can be done easily.

このため、レイアウト変更に伴なう空調停止。As a result, air conditioning was stopped due to layout changes.

生産ラインの停止が必要でないから、生産効率の向上に
効果が大きい。
Since there is no need to stop the production line, it is highly effective in improving production efficiency.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は実施例に係り、第1図はクリーンルームの断面図
、第2図は風量調整可能なシャッタを有する空調フィル
タの断面図である。 1 、11 、12 、13・・・空調フィルタ、2・
・・固定シャッタ、  3・・・可動シャッタ、4・・
・風量調整ネジ、  5・・・シャフト、6・・・ギヤ
、      7・・・ラック、8・・・0リング。 第1図 1産フィシ   i五 ξ&  生皮ライシーーーーー
ーーー−−−−−−一一−一一床面第2図
The drawings relate to embodiments, and FIG. 1 is a sectional view of a clean room, and FIG. 2 is a sectional view of an air conditioning filter having a shutter capable of adjusting air volume. 1, 11, 12, 13...Air conditioning filter, 2.
・・Fixed shutter, 3・・Movable shutter, 4・・
・Air volume adjustment screw, 5...shaft, 6...gear, 7...rack, 8...0 ring. Fig. 1 1-product fish i5 ξ & rawhide rice ------- 11-11 floor surface Fig. 2

Claims (1)

【特許請求の範囲】[Claims] 全面フィルタ方式のクリーンルームにおいて、前記空調
フィルタの少なくとも一部分が風量調整可能なシャッタ
を有することを特徴とするクリーンルーム。
1. A clean room of full-surface filter type, characterized in that at least a portion of the air conditioning filter has a shutter whose air volume can be adjusted.
JP3642387A 1987-02-18 1987-02-18 Clean room Pending JPS63204049A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3642387A JPS63204049A (en) 1987-02-18 1987-02-18 Clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3642387A JPS63204049A (en) 1987-02-18 1987-02-18 Clean room

Publications (1)

Publication Number Publication Date
JPS63204049A true JPS63204049A (en) 1988-08-23

Family

ID=12469415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3642387A Pending JPS63204049A (en) 1987-02-18 1987-02-18 Clean room

Country Status (1)

Country Link
JP (1) JPS63204049A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5984775A (en) * 1996-10-28 1999-11-16 Samsung Electronics Co., Ltd. Grating and shutter apparatus for controlling air flow

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183277A (en) * 1974-12-05 1976-07-21 Flanders Filters Ea fuirutano ryuryoseigyosochi
JPS635324B2 (en) * 1982-09-10 1988-02-03 Central Glass Co Ltd

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183277A (en) * 1974-12-05 1976-07-21 Flanders Filters Ea fuirutano ryuryoseigyosochi
JPS635324B2 (en) * 1982-09-10 1988-02-03 Central Glass Co Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5984775A (en) * 1996-10-28 1999-11-16 Samsung Electronics Co., Ltd. Grating and shutter apparatus for controlling air flow

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