JPS63202097U - - Google Patents
Info
- Publication number
- JPS63202097U JPS63202097U JP9248787U JP9248787U JPS63202097U JP S63202097 U JPS63202097 U JP S63202097U JP 9248787 U JP9248787 U JP 9248787U JP 9248787 U JP9248787 U JP 9248787U JP S63202097 U JPS63202097 U JP S63202097U
- Authority
- JP
- Japan
- Prior art keywords
- heater coil
- heater
- insulating material
- covered
- heat insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9248787U JPS63202097U (zh) | 1987-06-15 | 1987-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9248787U JPS63202097U (zh) | 1987-06-15 | 1987-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63202097U true JPS63202097U (zh) | 1988-12-27 |
Family
ID=30954240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9248787U Pending JPS63202097U (zh) | 1987-06-15 | 1987-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63202097U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007502549A (ja) * | 2003-05-23 | 2007-02-08 | エムアールエル インダストリーズ | 高温拡散炉の加熱コイルの保持メカニズム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615514U (zh) * | 1979-07-17 | 1981-02-10 | ||
| JPS5623675U (zh) * | 1979-07-30 | 1981-03-03 |
-
1987
- 1987-06-15 JP JP9248787U patent/JPS63202097U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615514U (zh) * | 1979-07-17 | 1981-02-10 | ||
| JPS5623675U (zh) * | 1979-07-30 | 1981-03-03 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007502549A (ja) * | 2003-05-23 | 2007-02-08 | エムアールエル インダストリーズ | 高温拡散炉の加熱コイルの保持メカニズム |