JPS63201921U - - Google Patents
Info
- Publication number
- JPS63201921U JPS63201921U JP9381687U JP9381687U JPS63201921U JP S63201921 U JPS63201921 U JP S63201921U JP 9381687 U JP9381687 U JP 9381687U JP 9381687 U JP9381687 U JP 9381687U JP S63201921 U JPS63201921 U JP S63201921U
- Authority
- JP
- Japan
- Prior art keywords
- intake passage
- water tank
- air outlet
- super
- insulating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims 1
- 238000004781 supercooling Methods 0.000 claims 1
- 239000012774 insulation material Substances 0.000 description 1
Landscapes
- Air Humidification (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093816U JPH0429313Y2 (tr) | 1987-06-18 | 1987-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093816U JPH0429313Y2 (tr) | 1987-06-18 | 1987-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63201921U true JPS63201921U (tr) | 1988-12-27 |
| JPH0429313Y2 JPH0429313Y2 (tr) | 1992-07-16 |
Family
ID=30956718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987093816U Expired JPH0429313Y2 (tr) | 1987-06-18 | 1987-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429313Y2 (tr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007178121A (ja) * | 2007-03-30 | 2007-07-12 | Matsushita Ecology Systems Co Ltd | 気化式加湿機 |
| CN103836740A (zh) * | 2013-09-02 | 2014-06-04 | 张伦青 | 空调制冷方法及设备 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
| US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| CN112309843A (zh) | 2019-07-29 | 2021-02-02 | Asm Ip私人控股有限公司 | 实现高掺杂剂掺入的选择性沉积方法 |
| USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
| KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
| KR20210042810A (ko) | 2019-10-08 | 2021-04-20 | 에이에스엠 아이피 홀딩 비.브이. | 활성 종을 이용하기 위한 가스 분배 어셈블리를 포함한 반응기 시스템 및 이를 사용하는 방법 |
| US12009241B2 (en) | 2019-10-14 | 2024-06-11 | Asm Ip Holding B.V. | Vertical batch furnace assembly with detector to detect cassette |
| KR20210054983A (ko) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
| TW202202649A (zh) | 2020-07-08 | 2022-01-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 基板處理方法 |
| US12009224B2 (en) | 2020-09-29 | 2024-06-11 | Asm Ip Holding B.V. | Apparatus and method for etching metal nitrides |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5033537U (tr) * | 1973-07-19 | 1975-04-11 | ||
| JPS60117039A (ja) * | 1983-11-30 | 1985-06-24 | Toshiba Corp | 超音波加湿器 |
-
1987
- 1987-06-18 JP JP1987093816U patent/JPH0429313Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5033537U (tr) * | 1973-07-19 | 1975-04-11 | ||
| JPS60117039A (ja) * | 1983-11-30 | 1985-06-24 | Toshiba Corp | 超音波加湿器 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007178121A (ja) * | 2007-03-30 | 2007-07-12 | Matsushita Ecology Systems Co Ltd | 気化式加湿機 |
| JP4545773B2 (ja) * | 2007-03-30 | 2010-09-15 | パナソニックエコシステムズ株式会社 | 気化式加湿機 |
| CN103836740A (zh) * | 2013-09-02 | 2014-06-04 | 张伦青 | 空调制冷方法及设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0429313Y2 (tr) | 1992-07-16 |