JPS63201921U - - Google Patents
Info
- Publication number
- JPS63201921U JPS63201921U JP9381687U JP9381687U JPS63201921U JP S63201921 U JPS63201921 U JP S63201921U JP 9381687 U JP9381687 U JP 9381687U JP 9381687 U JP9381687 U JP 9381687U JP S63201921 U JPS63201921 U JP S63201921U
- Authority
- JP
- Japan
- Prior art keywords
- intake passage
- water tank
- air outlet
- super
- insulating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims 1
- 238000004781 supercooling Methods 0.000 claims 1
- 239000012774 insulation material Substances 0.000 description 1
Landscapes
- Air Humidification (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093816U JPH0429313Y2 (https=) | 1987-06-18 | 1987-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093816U JPH0429313Y2 (https=) | 1987-06-18 | 1987-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63201921U true JPS63201921U (https=) | 1988-12-27 |
| JPH0429313Y2 JPH0429313Y2 (https=) | 1992-07-16 |
Family
ID=30956718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987093816U Expired JPH0429313Y2 (https=) | 1987-06-18 | 1987-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429313Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007178121A (ja) * | 2007-03-30 | 2007-07-12 | Matsushita Ecology Systems Co Ltd | 気化式加湿機 |
| CN103836740A (zh) * | 2013-09-02 | 2014-06-04 | 张伦青 | 空调制冷方法及设备 |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
| US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
| US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
| US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| CN112309843B (zh) | 2019-07-29 | 2026-01-23 | Asmip私人控股有限公司 | 实现高掺杂剂掺入的选择性沉积方法 |
| KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
| USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
| KR102868968B1 (ko) | 2019-09-03 | 2025-10-10 | 에이에스엠 아이피 홀딩 비.브이. | 칼코지나이드 막 및 상기 막을 포함한 구조체를 증착하기 위한 방법 및 장치 |
| US12469693B2 (en) | 2019-09-17 | 2025-11-11 | Asm Ip Holding B.V. | Method of forming a carbon-containing layer and structure including the layer |
| KR102890638B1 (ko) | 2019-11-05 | 2025-11-25 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
| KR20220020210A (ko) | 2020-08-11 | 2022-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 티타늄 알루미늄 카바이드 막 구조체 및 관련 반도체 구조체를 증착하는 방법 |
| US12040177B2 (en) | 2020-08-18 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a laminate film by cyclical plasma-enhanced deposition processes |
| TW202229612A (zh) | 2020-10-06 | 2022-08-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 在部件的側壁上形成氮化矽的方法及系統 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5033537U (https=) * | 1973-07-19 | 1975-04-11 | ||
| JPS60117039A (ja) * | 1983-11-30 | 1985-06-24 | Toshiba Corp | 超音波加湿器 |
-
1987
- 1987-06-18 JP JP1987093816U patent/JPH0429313Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5033537U (https=) * | 1973-07-19 | 1975-04-11 | ||
| JPS60117039A (ja) * | 1983-11-30 | 1985-06-24 | Toshiba Corp | 超音波加湿器 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007178121A (ja) * | 2007-03-30 | 2007-07-12 | Matsushita Ecology Systems Co Ltd | 気化式加湿機 |
| CN103836740A (zh) * | 2013-09-02 | 2014-06-04 | 张伦青 | 空调制冷方法及设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0429313Y2 (https=) | 1992-07-16 |