JPS63201863U - - Google Patents

Info

Publication number
JPS63201863U
JPS63201863U JP1987093953U JP9395387U JPS63201863U JP S63201863 U JPS63201863 U JP S63201863U JP 1987093953 U JP1987093953 U JP 1987093953U JP 9395387 U JP9395387 U JP 9395387U JP S63201863 U JPS63201863 U JP S63201863U
Authority
JP
Japan
Prior art keywords
gas
mist
perforated plate
ejected
porous layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987093953U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987093953U priority Critical patent/JPS63201863U/ja
Publication of JPS63201863U publication Critical patent/JPS63201863U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Air Bags (AREA)
  • Industrial Gases (AREA)
JP1987093953U 1987-06-18 1987-06-18 Pending JPS63201863U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987093953U JPS63201863U (enrdf_load_stackoverflow) 1987-06-18 1987-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987093953U JPS63201863U (enrdf_load_stackoverflow) 1987-06-18 1987-06-18

Publications (1)

Publication Number Publication Date
JPS63201863U true JPS63201863U (enrdf_load_stackoverflow) 1988-12-26

Family

ID=30956972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987093953U Pending JPS63201863U (enrdf_load_stackoverflow) 1987-06-18 1987-06-18

Country Status (1)

Country Link
JP (1) JPS63201863U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5852851A (ja) * 1981-09-24 1983-03-29 Nec Corp 半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5852851A (ja) * 1981-09-24 1983-03-29 Nec Corp 半導体装置の製造方法

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