JPS63201539A - Spectrochemical analyzer - Google Patents

Spectrochemical analyzer

Info

Publication number
JPS63201539A
JPS63201539A JP3408587A JP3408587A JPS63201539A JP S63201539 A JPS63201539 A JP S63201539A JP 3408587 A JP3408587 A JP 3408587A JP 3408587 A JP3408587 A JP 3408587A JP S63201539 A JPS63201539 A JP S63201539A
Authority
JP
Japan
Prior art keywords
diffraction grating
array detector
light
angle
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3408587A
Other languages
Japanese (ja)
Other versions
JPH07113582B2 (en
Inventor
Masahito Koike
雅人 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP62034085A priority Critical patent/JPH07113582B2/en
Publication of JPS63201539A publication Critical patent/JPS63201539A/en
Publication of JPH07113582B2 publication Critical patent/JPH07113582B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Spectrometry And Color Measurement (AREA)

Abstract

PURPOSE:To permit elimination of influence of second order diffracted light and to reduce the length of an array detector to about half by rotating a diffraction grating by a rotary shaft so that the incident angle of light to the diffraction grating can be changed over in two steps. CONSTITUTION:Incident light L from an inlet slot 1 is diffracted by the diffraction grating 2 and enters the array detector 3, where the spectral distribution of the diffracted light is detected. The diffraction grating 2 is fixed on the front end of the rotary shaft 5 driven by a low-speed motor or the like and is so constituted that the grating can be freely inverted 180 deg.. A filter 6 for cutting short wavelength provided on the incident side of the inlet slit 1 is so constituted that said filter is rotated by a gear system 7 cooperatively with the diffraction grating 2.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はアレイ検出器を用いた所謂ポリクロメータ式の
回折格子分光分析装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a so-called polychromator type diffraction grating spectrometer using an array detector.

(従来技術) この種の分光分析装置は、回折格子分光器の出口スリッ
トを移動させる代わりに、複数のセルで構成されたアレ
イ検出器を用いて広い波長域を同時に測定するものであ
るが、カバーする波長域を広くすればするほどアレイ検
出器の素子数が多くなりコストが高くなる。また例えば
測定波長域200〜700nmの1個のアレイ検出器を
用いて測定を行う場合、400nm以上の波長域で20
0〜350 nmの2次回折光が1次回折光と重なり合
うために正確な測定ができないことがあり、。
(Prior Art) This type of spectrometer uses an array detector composed of multiple cells instead of moving the exit slit of a diffraction grating spectrometer to simultaneously measure a wide wavelength range. The wider the wavelength range covered, the greater the number of elements in the array detector and the higher the cost. For example, when measuring using one array detector in the measurement wavelength range of 200 to 700 nm, in the wavelength range of 400 nm or more, 20 nm
Accurate measurements may not be possible because the second-order diffracted light of 0 to 350 nm overlaps with the first-order diffracted light.

その対策として従来は、まずフィルタなしで200〜4
00nmの波長域の測定を行い、次に例えば350 n
m以下の光が遮断されるシャープカットフィルタを入口
スリットの入射側に挿入して400〜700nmの測定
を行っていた。この場合それぞれの測定において、アレ
イ検出器内の約半分のセルの測定値は利用されないので
、その有効利用率は50%となり極めて不経済であった
As a countermeasure, the conventional method was to first use 20 to 4
00nm wavelength range, then for example 350nm wavelength range.
A sharp cut filter that blocks light of wavelengths below m was inserted on the incident side of the entrance slit to measure wavelengths of 400 to 700 nm. In this case, in each measurement, the measured values of about half of the cells in the array detector are not used, so the effective utilization rate is 50%, which is extremely uneconomical.

そこで測定波長域の約半分をカバーするような1個のア
レイ検出器によって全波長城を測定できるように、2回
の測定をアレイ検出器の位置を移動させて行う方法、あ
るいは回折格子を光軸を含む面内で微小角だけ回転させ
て行う方法が考えられるが、実際にはアレイ検出器をス
ライドさせる機構あるいは回折格子を微小角回転させる
機構の精度に問題があり、再現性の良いものが得られな
かった。
Therefore, in order to be able to measure the entire wavelength range with a single array detector that covers about half of the measurement wavelength range, there is a method in which measurements are performed twice by moving the position of the array detector, or a method in which the diffraction grating is One possible method is to rotate the array detector by a small angle in a plane that includes the axis, but in reality there is a problem with the accuracy of the mechanism that slides the array detector or the mechanism that rotates the diffraction grating by a small angle, so it is difficult to achieve good reproducibility. was not obtained.

(発明が解決しようとする問題点) 本発明は上記の点に鑑み、全波長域の約半分をカバーす
るアレイ検出器を用いて測定波長域を2゜段に切り換え
ることができる分光分析装置を、極めて簡単でしかも再
現性の高い構造で提供することを目的とするものである
(Problems to be Solved by the Invention) In view of the above points, the present invention provides a spectroscopic analyzer that can switch the measurement wavelength range in 2° steps using an array detector that covers about half of the total wavelength range. The purpose is to provide an extremely simple structure with high reproducibility.

(問題点を解決するための手段) 上記の目的を達成するために本発明による分光分析装置
は、人口スリット1と回折格子2とアレイ検出器3を備
えた分光器において、回折格子2の裏面に分光器光軸を
含む面内で回折格子面の法線Nと一定の角θをなす如く
設けられた回転軸5により、回折格子2を180度反転
自在として、回折格子2への光の入射角を2段に切り換
え自在としたものである。
(Means for Solving the Problems) In order to achieve the above object, a spectroscopic analyzer according to the present invention includes an artificial slit 1, a diffraction grating 2, and an array detector 3. The diffraction grating 2 can be rotated 180 degrees by the rotation axis 5, which is provided at a constant angle θ with the normal N of the diffraction grating surface in a plane that includes the optical axis of the spectrometer. The incident angle can be freely switched in two stages.

(作用) 上記の構成によれば、回折格子が光軸と直角な面内で1
80度回転するので、停止位置の変動が入射角に及ぼす
影響を殆ど無視することができるものである。
(Function) According to the above configuration, the diffraction grating has 1 in the plane perpendicular to the optical axis.
Since it rotates by 80 degrees, the influence of variation in the stopping position on the angle of incidence can be almost ignored.

(実施例) 第1図は本発明の一実施例を示したもので、入口スリッ
トlから入射した光りは、矢印で示したように、回折格
子2で回折されてアレイ検出器3に入射し、ここで回折
光のスペクトル分布が検出される。回折格子2は低速モ
ータ4などで回転駆動される回転軸5の先端に固着され
て180度反転自在に構成されている。この回転軸5は
、第2図に示ずように、回折格子2のほぼ中心部の裏側
に、かつ分光器光軸を含む面内で、即ち回折格子の入射
光束及び出射光束の各中心線を含む面内において、回折
格子面の法線Nと一定の角θをなすように設けられてお
り、同図(a)及び(b)に示すように、互いに180
度反転した2位置で停止するように構成されている。ま
た入口スリット10入射側に設けられた短波長カット用
フィルタ6が、ギア系7を介して回折格子2と連動回転
するようになっている。
(Embodiment) FIG. 1 shows an embodiment of the present invention, in which light incident from the entrance slit l is diffracted by the diffraction grating 2 and enters the array detector 3, as shown by the arrow. , where the spectral distribution of the diffracted light is detected. The diffraction grating 2 is fixed to the tip of a rotating shaft 5 that is rotationally driven by a low-speed motor 4 or the like, and is configured to be able to rotate 180 degrees. As shown in FIG. 2, the rotation axis 5 is located on the back side of the approximate center of the diffraction grating 2 and within a plane that includes the optical axis of the spectrometer, that is, the center line of each of the incident and output beams of the diffraction grating. They are provided so as to form a constant angle θ with the normal N of the diffraction grating surface in a plane including
It is configured to stop at two positions that are reversed. Further, a short wavelength cutting filter 6 provided on the entrance side of the entrance slit 10 is configured to rotate in conjunction with the diffraction grating 2 via a gear system 7.

第2図(a)の例は、格子定数soo本/ m m 。In the example of FIG. 2(a), the lattice constant is soo/m.

回折格子2の法線Nに対する回転軸5の傾斜角θを1.
25度、長波長域測定位置における入口スリット1から
の光の入射角α、を一10度、アレイ検出器3の方角す
なわち主回折角β1を一20度に設定したもので、この
場合β、の方角には約645nmの光が出射する。また
この状態では、第1図に示すように、短波長カット用フ
ィルタ6が入口スリット1の入射側に挿入される。次に
この状態から回折格子2を反転させて、同図(b)に示
すように、短波長域測定位置に切り換えると、ローラン
ド円は破線位置から実線位置に移動し、入射角α*=1
2.5度、上回折角β、=2.5度となって、約325
nmの光がアレイ検出器3の中央で検出されることにな
る。
The inclination angle θ of the rotation axis 5 with respect to the normal N of the diffraction grating 2 is set to 1.
25 degrees, the incident angle α of the light from the entrance slit 1 at the long wavelength region measurement position is set to 110 degrees, and the direction of the array detector 3, that is, the main diffraction angle β1 is set to 120 degrees. Light of approximately 645 nm is emitted in the direction of . Further, in this state, as shown in FIG. 1, the short wavelength cutting filter 6 is inserted on the entrance side of the entrance slit 1. Next, when the diffraction grating 2 is reversed from this state and switched to the short wavelength range measurement position as shown in the same figure (b), the Rowland circle moves from the broken line position to the solid line position, and the incident angle
2.5 degrees, the upper fold angle β is 2.5 degrees, which is about 325 degrees.
nm light will be detected at the center of the array detector 3.

なお上記の例においては、等間隔溝の回折格子2を用い
ており、アレイ検出器3はローランド円に沿った検出面
から若干逸れることになるが、検出感度に及ぼす影響は
僅少であり、また回転軸5の延長位置を回折格子の中心
点からずらすことにより、この誤差を小さくすることも
可能である。
In the above example, the diffraction grating 2 with equally spaced grooves is used, and although the array detector 3 will be slightly deviated from the detection surface along the Rowland circle, the effect on detection sensitivity is small, and It is also possible to reduce this error by shifting the extended position of the rotating shaft 5 from the center point of the diffraction grating.

また例えばホログラフィにより製作された不等間隔溝の
回折格子2を用いれば、アレイ検出器3の位置を常に検
出面に一致させることもできる。
Furthermore, if a diffraction grating 2 with unevenly spaced grooves manufactured by holography is used, the position of the array detector 3 can always be made to coincide with the detection surface.

(発明の効果) 上述のように本発明による分光分析装置は、回折格子を
格子面の法線と一定の角をなす如く設けられた回転軸に
より180度回転させて、回折格子への光の入射角を2
段に切り換えるようにしたものであるから、全波長域を
一度に測定する場合に比し二次回折光の影響を除去でき
る上に、アレイ検出器の長さが約半分になるために、素
子数を約半分で済ませるか、あるいは同じ素子数で分解
能を約2倍に上げることができるという利点があり、し
かも回折格子を光軸と直角な面内で回転させるので、波
長誤差は回折格子の回転に伴う角度設定誤差の二乗に比
例することになって、停止位置の変動が入射角に及ぼす
影響が極めて小さく再現性の高い測定ができるという利
点がある。
(Effects of the Invention) As described above, the spectroscopic analyzer according to the present invention rotates the diffraction grating by 180 degrees with the rotation axis that is provided to form a constant angle with the normal to the grating surface, so that light is transmitted to the diffraction grating. The angle of incidence is 2
Since it is designed to switch in stages, it is possible to eliminate the influence of second-order diffracted light compared to when measuring the entire wavelength range at once, and since the length of the array detector is about half, the number of elements can be reduced. The advantage is that the resolution can be reduced by about half, or the resolution can be doubled with the same number of elements.Moreover, since the diffraction grating is rotated in a plane perpendicular to the optical axis, the wavelength error is reduced by the rotation of the diffraction grating. Since the angle setting error is proportional to the square of the angle setting error caused by the angle setting error, there is an advantage that the influence of fluctuations in the stopping position on the incident angle is extremely small and measurement can be performed with high reproducibility.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す斜視図、第2図(a)
及び(b)は同上の動作説明図である。 l・・・人口スリット、2・・・回折格子、3・・・ア
レイ検出器、4・・・低速モータ、5・・・回転軸、6
・・・短波長カット用フィルタ、7・・・ギア系。
Fig. 1 is a perspective view showing an embodiment of the present invention, Fig. 2(a)
and (b) is an explanatory diagram of the same operation. l...Artificial slit, 2...Diffraction grating, 3...Array detector, 4...Low speed motor, 5...Rotating shaft, 6
... Filter for short wavelength cut, 7... Gear system.

Claims (1)

【特許請求の範囲】[Claims] (1)入口スリットと回折格子とアレイ検出器を備えた
分光器において、回折格子の裏面に分光器光軸を含む面
内で回折格子面の法線と一定の角をなす如く設けられた
回転軸により、回折格子を180度反転自在として、回
折格子への光の入射角を2段に切り換え自在として成る
分光分析装置。
(1) In a spectrometer equipped with an entrance slit, a diffraction grating, and an array detector, a rotation is provided on the back surface of the diffraction grating so as to form a constant angle with the normal to the diffraction grating surface in a plane that includes the spectrometer optical axis. A spectroscopic analysis device in which the diffraction grating can be rotated 180 degrees around the shaft, and the angle of incidence of light on the diffraction grating can be switched in two stages.
JP62034085A 1987-02-17 1987-02-17 Spectroscopic analyzer Expired - Lifetime JPH07113582B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62034085A JPH07113582B2 (en) 1987-02-17 1987-02-17 Spectroscopic analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62034085A JPH07113582B2 (en) 1987-02-17 1987-02-17 Spectroscopic analyzer

Publications (2)

Publication Number Publication Date
JPS63201539A true JPS63201539A (en) 1988-08-19
JPH07113582B2 JPH07113582B2 (en) 1995-12-06

Family

ID=12404424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62034085A Expired - Lifetime JPH07113582B2 (en) 1987-02-17 1987-02-17 Spectroscopic analyzer

Country Status (1)

Country Link
JP (1) JPH07113582B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160186A (en) * 1991-11-01 1994-06-07 Agency Of Ind Science & Technol High-sensitivity spectrophotometric system
AU2004284319B2 (en) * 2003-10-29 2009-11-05 Saika Technological Institute Foundation Spectrophotometer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112229U (en) * 1979-01-30 1980-08-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112229U (en) * 1979-01-30 1980-08-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160186A (en) * 1991-11-01 1994-06-07 Agency Of Ind Science & Technol High-sensitivity spectrophotometric system
AU2004284319B2 (en) * 2003-10-29 2009-11-05 Saika Technological Institute Foundation Spectrophotometer

Also Published As

Publication number Publication date
JPH07113582B2 (en) 1995-12-06

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