JPS63200363U - - Google Patents

Info

Publication number

JPS63200363U

JPS63200363U JP9159287U JP9159287U JPS63200363U JP S63200363 U JPS63200363 U JP S63200363U JP 9159287 U JP9159287 U JP 9159287U JP 9159287 U JP9159287 U JP 9159287U JP S63200363 U JPS63200363 U JP S63200363U

Authority

JP

Japan

Prior art keywords

transparent conductive

glass substrate

layer formed

tin oxide

transparent

Prior art date

1987-06-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
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• 239000000758 substrate Substances 0.000 claims description 7
• 239000011521 glass Substances 0.000 claims description 4
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
• XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 2
• AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 1
• 238000005240 physical vapour deposition Methods 0.000 claims 1
• XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 1
• 229910001887 tin oxide Inorganic materials 0.000 claims 1
• 239000011787 zinc oxide Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 230000000052 comparative effect Effects 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1